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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 19, Iss. 22 — Oct. 24, 2011
  • pp: 21174–21179

Applying slope constrained Q-type aspheres to develop higher performance lenses

Bin Ma, Lin Li, Kevin P. Thompson, and Jannick P. Rolland  »View Author Affiliations


Optics Express, Vol. 19, Issue 22, pp. 21174-21179 (2011)
http://dx.doi.org/10.1364/OE.19.021174


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Abstract

It has recently been shown that the coefficients that specify the aspheric departure from a spherical surface in high NA lithographic lenses routinely require more significant digits than are available in even double precision computers when they are described as part of a power series in aperture-squared. The Q-type aspheric description has been introduced to solve this problem. An important by-product of this new surface description is that it allows the slope of a surface to be directly constrained during optimization. Results show that Q-type aspheric surfaces that are optimized with slope constraints are not only more testable, an original motivation, but, they can also lead to solutions that are less sensitive to assembly induced misalignments for lithographic quality lenses. Specifically, for a representative NA 0.75 lens, the sensitivity to tilt and decenter is reduced by more than 3X, resulting in significantly higher lens performance in-use.

© 2011 OSA

OCIS Codes
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.1250) Optical design and fabrication : Aspherics
(220.3740) Optical design and fabrication : Lithography
(220.4830) Optical design and fabrication : Systems design

ToC Category:
Optical Design and Fabrication

History
Original Manuscript: July 11, 2011
Revised Manuscript: August 18, 2011
Manuscript Accepted: September 21, 2011
Published: October 10, 2011

Citation
Bin Ma, Lin Li, Kevin P. Thompson, and Jannick P. Rolland, "Applying slope constrained Q-type aspheres to develop higher performance lenses," Opt. Express 19, 21174-21179 (2011)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-19-22-21174


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