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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 19, Iss. 22 — Oct. 24, 2011
  • pp: 21333–21344

Characterization of high-resolution diffractive X-ray optics by ptychographic coherent diffractive imaging

Joan Vila-Comamala, Ana Diaz, Manuel Guizar-Sicairos, Alexandre Mantion, Cameron M. Kewish, Andreas Menzel, Oliver Bunk, and Christian David  »View Author Affiliations


Optics Express, Vol. 19, Issue 22, pp. 21333-21344 (2011)
http://dx.doi.org/10.1364/OE.19.021333


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Abstract

We have employed ptychographic coherent diffractive imaging to completely characterize the focal spot wavefield and wavefront aberrations of a high-resolution diffractive X-ray lens. The ptychographic data from a strongly scattering object was acquired using the radiation cone emanating from a coherently illuminated Fresnel zone plate at a photon energy of 6.2 keV. Reconstructed images of the object were retrieved with a spatial resolution of 8 nm by combining the difference-map phase retrieval algorithm with a non-linear optimization refinement. By numerically propagating the reconstructed illumination function, we have obtained the X-ray wavefield profile of the 23 nm round focus of the Fresnel zone plate (outermost zone width, Δr = 20 nm) as well as the X-ray wavefront at the exit pupil of the lens. The measurements of the wavefront aberrations were repeatable to within a root mean square error of 0.006 waves, and we demonstrate that they can be related to manufacturing aspects of the diffractive optical element and to errors on the incident X-ray wavefront introduced by the upstream beamline optics.

© 2011 OSA

OCIS Codes
(100.5070) Image processing : Phase retrieval
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(340.0340) X-ray optics : X-ray optics
(340.6720) X-ray optics : Synchrotron radiation
(340.7460) X-ray optics : X-ray microscopy
(050.1965) Diffraction and gratings : Diffractive lenses

ToC Category:
X-ray Optics

History
Original Manuscript: August 9, 2011
Revised Manuscript: September 9, 2011
Manuscript Accepted: September 12, 2011
Published: October 12, 2011

Citation
Joan Vila-Comamala, Ana Diaz, Manuel Guizar-Sicairos, Alexandre Mantion, Cameron M. Kewish, Andreas Menzel, Oliver Bunk, and Christian David, "Characterization of high-resolution diffractive X-ray optics by ptychographic coherent diffractive imaging," Opt. Express 19, 21333-21344 (2011)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-19-22-21333


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References

  1. H. C. Kang, H. Yan, R. P. Winarski, M. V. Holt, J. Maser, C. Liu, R. Conley, S. Vogt, A. T. Macrander, and G. B. Stephenson, “Focusing of hard X-rays to 16 nanometers with a multilayer Laue lens,” Appl. Phys. Lett.92, 221114 (2008). [CrossRef]
  2. H. Mimura, S. Handa, T. Kimura, H. Yumoto, D. Yamakawa, H. Yokoyama, S. Matsuyama, K. Inagaki, K. Yamamura, Y. Sano, K. Tamasaku, Y. Nishino, M. Yabashi, T. Ishikawa, and K. Yamauchi, “Breaking the 10 nm barrier in hard-X-ray focusing,” Nat. Phys.6, 122–125 (2010). [CrossRef]
  3. J. Vila-Comamala, S. Gorelick, E. Färm, C. M. Kewish, A. Diaz, R. Barrett, V. A. Guzenko, M. Ritala, and C. David, “Ultra-high resolution zone-doubled diffractive X-ray optics for the multi-kev regime.”Opt. Express19, 175–184 (2011). [CrossRef] [PubMed]
  4. P. Thibault and V. Elser, “X-ray diffraction microscopy,” Annu. Rev. Condens. Matter Phys.1, 237–255 (2010). [CrossRef]
  5. K. A. Nugent, “Coherent methods in the X-ray sciences,” Adv. Phys.59, 1–99 (2010). [CrossRef]
  6. H. N. Chapman and K. A. Nugent, “Coherent lensless X-ray imaging,” Nat. Photonics4, 833–839 (2010). [CrossRef]
  7. J. R. Fienup, “Phase retrieval algorithms: a comparison,” Appl. Opt.21, 2758–2769 (1982). [CrossRef] [PubMed]
  8. J. Miao, P. Charalambous, J. Kirz, and D. Sayre, “Extending the methodology of X-ray crystallography to allow imaging of micrometre-sized non-crystalline specimens,” Nature400, 342–344 (1999). [CrossRef]
  9. H. M. Quiney, A. G. Peele, Z. Cai, D. Paterson, and K. A. Nugent, “Diffractive imaging of highly focused X-ray fields,” Nat. Phys.2, 101–104 (2006). [CrossRef]
  10. G. J. Williams, H. M. Quiney, B. B. Dhal, C. Q. Tran, K. A. Nugent, A. G. Peele, D. Paterson, and M. D. de Jonge, “Fresnel coherent diffractive imaging,” Phys. Rev. Lett.97, 025506 (2006). [CrossRef] [PubMed]
  11. J. M. Rodenburg, A. C. Hurst, A. G. Cullis, B. R. Dobson, F. Pfeiffer, O. Bunk, C. David, K. Jefimovs, and I. Johnson, “Hard X-ray lensless imaging of extended objects,” Phys. Rev. Lett.98, 034801 (2007). [CrossRef] [PubMed]
  12. P. Thibault, M. Dierolf, A. Menzel, O. Bunk, C. David, and F. Pfeiffer, “High-resolution scanning X-ray diffraction microscopy,” Science321, 379–382 (2008). [CrossRef] [PubMed]
  13. P. Thibault, M. Dierolf, O. Bunk, A. Menzel, and F. Pfeiffer, “Probe retrieval in ptychographic coherent diffractive imaging,” Ultramicroscopy109, 338–343 (2009). [CrossRef] [PubMed]
  14. C. M. Kewish, M. Guizar-Sicairos, C. Liu, J. Qian, B. Shi, C. Benson, A. M. Khounsary, J. Vila-Comamala, O. Bunk, J. R. Fienup, A. T. Macrander, and L. Assoufid, “Reconstruction of an astigmatic hard X-ray beam and alignment of K-B mirrors from ptychographic coherent diffraction data,” Opt. Express18, 23420–23427 (2010). [CrossRef] [PubMed]
  15. C. M. Kewish, P. Thibault, M. Dierolf, O. Bunk, A. Menzel, J. Vila-Comamala, K. Jefimovs, and F. Pfeiffer, “Ptychographic characterization of the wavefield in the focus of reflective hard X-ray optics,” Ultramicroscopy110, 325–329 (2010). [CrossRef] [PubMed]
  16. A. Schropp, P. Boye, J. M. Feldkamp, R. Hoppe, J. Patommel, D. Samberg, S. Stephan, K. Giewekemeyer, R. N. Wilke, T. Salditt, J. Gulden, A. P. Mancuso, I. A. Vartanyants, E. Weckert, S. Schöder, M. Burghammer, and C. G. Schroer, “Hard X-ray nanobeam characterization by coherent diffraction microscopy,” Appl. Phys. Lett.96, 091102 (2010). [CrossRef]
  17. M. Guizar-Sicairos, S. Narayanan, A. Stein, M. Metzler, A. R. Sandy, J. R. Fienup, and K. Evans-Lutterodt, “Measurement of hard X-ray lens wavefront aberrations using phase retrieval,” Appl. Phys. Lett.98, 111108 (2011). [CrossRef]
  18. S. Hönig, R. Hoppe, J. Patommel, A. Schropp, S. Stephan, S. Schöder, M. Burghammer, and C. G. Schroer, “Full optical characterization of coherent x-ray nanobeams by ptychographic imaging,” Opt. Express19, 16324–16329 (2011). [CrossRef] [PubMed]
  19. G. Ingold, M. Boege, W. Bulgheroni, A. Keller, J. Krempaski, C. Schulze-Briese, L. Schulz, T. Schmidt, D. Zimoch, T. Hara, T. Tanaka, and H. Kitamura, “Performance of small-gap undulators at the SLS intermediate energy storage ring,” AIP Conf. Proc.879, 388–391 (2007). [CrossRef]
  20. A. Menzel, C. M. Kewish, P. Kraft, B. Henrich, K. Jefimovs, J. Vila-Comamala, C. David, M. Dierolf, P. Thibault, F. Pfeiffer, and O. Bunk, “Scanning transmission X-ray microscopy with a fast framing pixel detector,” Ultramicroscopy110, 1143–1147 (2010). [CrossRef] [PubMed]
  21. B. Henrich, A. Bergamaschi, C. Brönnimann, R. Dinapoli, E. F. Eikenberry, I. Johnson, M. Kobas, P. Kraft, A. Mozzanica, and B. Schmitt, “PILATUS: A single photon counting pixel detector for X-ray applications,” Nucl. Instrum. Methods Phys. Res. A607, 247–249 (2009). [CrossRef]
  22. P. Kraft, A. Bergamaschi, C. Brönnimann, R. Dinapoli, E. F. Eikenberry, H. Graafsma, B. Henrich, I. Johnson, M. Kobas, A. Mozzanica, C. M. Schlepütz, and B. Schmitt, “Characterization and calibration of PILATUS detectors,” IEEE Trans. Nucl. Sci.56, 758–764 (2009). [CrossRef]
  23. K. Jefimovs, J. Vila-Comamala, T. Pilvi, J. Raabe, M. Ritala, and C. David, “Zone-doubling technique to produce ultrahigh-resolution X-ray optics,” Phys. Rev. Lett.99, 264801 (2007). [CrossRef]
  24. J. Vila-Comamala, S. Gorelick, V. A. Guzenko, E. Färm, M. Ritala, and C. David, “Dense high aspect ratio hydrogen silsesquioxane nanostructures by 100 kev electron beam lithography,” Nanotechnology21, 285305 (2010). [CrossRef] [PubMed]
  25. F. van der Veen and F. Pfeiffer, “Coherent X-ray scattering,” J. Phys.: Condens. Matter16, 5003–5030 (2004). [CrossRef]
  26. T. Aaltonen, M. Ritala, V. Sammelselg, and M. Leskelä, “Atomic layer deposition of iridium thin films,” J. Electrochem. Soc.151, G489–G492 (2004). [CrossRef]
  27. O. Bunk, M. Dierolf, S. Kynde, I. Jonhson, O. Marti, and F. Pfeiffer, “Influence of the overlap parameter on the convergence of the ptychographical iterative engine,” Ultramicroscopy108, 481–487 (2008). [CrossRef]
  28. M. Dierolf, P. Thibault, A. Menzel, C. M. Kewish, K. Jefimovs, I. Schlichting, K. von König, O. Bunk, and F. Pfeiffer, “Ptychographic coherent diffractive imaging of weakly scattering specimens,” New J. Phys.12, 035017 (2010). [CrossRef]
  29. M. Guizar-Sicairos and J. R. Fienup, “Phase retrieval with transverse translation diversity: a nonlinear optimization approach,” Opt. Express16, 7264–7278 (2008). [CrossRef] [PubMed]
  30. A. M. Maiden, M. J. Humphry, F. Zhang, and J. M. Rodenburg, “Superresolution imaging via ptychography,” J. Opt. Soc. Am. A28, 604–612 (2011). [CrossRef]
  31. P. Thibault, V. Elser, C. Jacobsen, D. Shapiro, and D. Sayre, “Reconstruction of a yeast cell from X-ray diffraction data,” Acta Crystallogr. A62, 248–261 (2006). [CrossRef]
  32. H. N. Chapman, A. Barty, S. Marchesini, A. Noy, S. P. Hau-Riege, C. Cui, M. R. Howells, R. Rosen, H. He, J. C. H. Spence, U. Weierstall, T. Beetz, C. Jacobsen, and D. Shapiro, “High-resolution ab initio three-dimensional X-ray diffraction microscopy,” J. Opt. Soc. Am. A23, 1179–1200 (2006). [CrossRef]
  33. K. Giewekemeyer, P. Thibault, S. Kalbfleisch, A. Beerlink, C. M. Kewish, M. Dierolf, F. Pfeiffer, and T. Salditt, “Quantitative biological imaging by ptychographic X-ray diffraction microscopy,” Proc. Natl. Acad. Sci. U.S.A.107, 529–534 (2010). [CrossRef]
  34. W. O. Saxton and W. Baumeister, “The correlation averaging of regularly arranged bacterial cell envelop protein,” J. Microsc.127, 127–138 (1982). [CrossRef] [PubMed]
  35. M. van Heel and M. Schatz, “Fourier shell correlation threshold criteria,” J. Struct. Biol.151, 250–262 (2005). [CrossRef] [PubMed]
  36. M. Guizar-Sicairos, S. T. Thurman, and J. R. Fienup, “Efficient subpixel image registration algorithms,” Opt. Lett.33, 156–158 (2008). [CrossRef] [PubMed]
  37. M. Guizar-Sicairos, A. Diaz, M. Holler, M. S. Lucas, A. Menzel, R. A. Wepf, and O. Bunk, “Phase tomography from X-ray coherent diffractive imaging projections,” Opt. Express (to be published). [PubMed]
  38. J. W. Goodman, Introduction to Fourier Optics, 2nd ed., (The McGraw-Hill Companies, Inc., New York, 1996) Chap. 3, Foundations of Scalar Diffraction Theory, pp. 55–62.

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