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Characterization of high-resolution diffractive X-ray optics by ptychographic coherent diffractive imagingJoan Vila-Comamala, Ana Diaz, Manuel Guizar-Sicairos, Alexandre Mantion, Cameron M. Kewish, Andreas Menzel, Oliver Bunk, and Christian David »View Author Affiliations
Joan Vila-Comamala,1,4,*
Ana Diaz,1
Manuel Guizar-Sicairos,1
Alexandre Mantion,2
Cameron M. Kewish,3
Andreas Menzel,1
Oliver Bunk,1
and Christian David1
1Paul Scherrer Institut, 5232 Villigen PSI, Switzerland 2BAM Bundesanstalt für Materialforschung und -prüfung, 12200 Berlin, Germany 3Synchrotron SOLEIL, Saint Aubin BP-48, 91192 Gif-sur-Yvette, France 4Current Address: X-ray Science Division, Advanced Photon Source, Argonne National Laboratory, Argonne, IL 60439, USA *Corresponding author: jvila@aps.anl.gov |
Optics Express, Vol. 19, Issue 22, pp. 21333-21344 (2011)
http://dx.doi.org/10.1364/OE.19.021333
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Abstract
We have employed ptychographic coherent diffractive imaging to completely characterize the focal spot wavefield and wavefront aberrations of a high-resolution diffractive X-ray lens. The ptychographic data from a strongly scattering object was acquired using the radiation cone emanating from a coherently illuminated Fresnel zone plate at a photon energy of 6.2 keV. Reconstructed images of the object were retrieved with a spatial resolution of 8 nm by combining the difference-map phase retrieval algorithm with a non-linear optimization refinement. By numerically propagating the reconstructed illumination function, we have obtained the X-ray wavefield profile of the 23 nm round focus of the Fresnel zone plate (outermost zone width, Δr = 20 nm) as well as the X-ray wavefront at the exit pupil of the lens. The measurements of the wavefront aberrations were repeatable to within a root mean square error of 0.006 waves, and we demonstrate that they can be related to manufacturing aspects of the diffractive optical element and to errors on the incident X-ray wavefront introduced by the upstream beamline optics.
© 2011 OSA
OCIS Codes
(100.5070) Image processing : Phase retrieval
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(340.0340) X-ray optics : X-ray optics
(340.6720) X-ray optics : Synchrotron radiation
(340.7460) X-ray optics : X-ray microscopy
(050.1965) Diffraction and gratings : Diffractive lenses
ToC Category:
X-ray Optics
History
Original Manuscript: August 9, 2011
Revised Manuscript: September 9, 2011
Manuscript Accepted: September 12, 2011
Published: October 12, 2011
Citation
Joan Vila-Comamala, Ana Diaz, Manuel Guizar-Sicairos, Alexandre Mantion, Cameron M. Kewish, Andreas Menzel, Oliver Bunk, and Christian David, "Characterization of high-resolution diffractive X-ray optics by ptychographic coherent diffractive imaging," Opt. Express 19, 21333-21344 (2011)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-19-22-21333
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- M. Guizar-Sicairos, A. Diaz, M. Holler, M. S. Lucas, A. Menzel, R. A. Wepf, and O. Bunk, “Phase tomography from X-ray coherent diffractive imaging projections,” Opt. Express (to be published). [PubMed]
- S. Hönig, R. Hoppe, J. Patommel, A. Schropp, S. Stephan, S. Schöder, M. Burghammer, and C. G. Schroer, “Full optical characterization of coherent x-ray nanobeams by ptychographic imaging,” Opt. Express19, 16324–16329 (2011). [CrossRef] [PubMed]
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Other
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