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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 19, Iss. 22 — Oct. 24, 2011
  • pp: 21849–21854

Thermal stability of Mg/Co multilayer with B4C, Mo or Zr diffusion barrier layers

Jingtao Zhu, Sika Zhou, Haochuan Li, Zhanshan Wang, Philippe Jonnard, Karine Le Guen, Min-Hui Hu, Jean-Michel André, Hongjun Zhou, and Tonglin Huo  »View Author Affiliations


Optics Express, Vol. 19, Issue 22, pp. 21849-21854 (2011)
http://dx.doi.org/10.1364/OE.19.021849


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Abstract

The efficiency of B4C, Mo and Zr barrier layers to improve thermal stability of Mg/Co multilayer up to 400 °C is investigated. Multilayers were deposited by direct current magnetron sputtering and characterized using X-ray and extreme ultraviolet reflection. The results suggest that B4C barrier layer is not effective due to drastic diffusion at Mg-B4C interface. Although introducing Mo barriers improves the thermal stability from 200 to 300 °C, it increases the interface roughness and thus degrades the optical performances. On the contrary, Zr barriers can significantly increase the thermal stability of Mg/Co up to 400 °C without optical performance degradation. Thus, Mg/Zr/Co/Zr is suitable for EUV applications requiring both optimal optical performances and heat resistance.

© 2011 OSA

OCIS Codes
(230.4170) Optical devices : Multilayers
(340.6720) X-ray optics : Synchrotron radiation
(340.7480) X-ray optics : X-rays, soft x-rays, extreme ultraviolet (EUV)

ToC Category:
X-ray Optics

History
Original Manuscript: August 30, 2011
Revised Manuscript: September 29, 2011
Manuscript Accepted: October 6, 2011
Published: October 20, 2011

Citation
Jingtao Zhu, Sika Zhou, Haochuan Li, Zhanshan Wang, Philippe Jonnard, Karine Le Guen, Min-Hui Hu, Jean-Michel André, Hongjun Zhou, and Tonglin Huo, "Thermal stability of Mg/Co multilayer with B4C, Mo or Zr diffusion barrier layers," Opt. Express 19, 21849-21854 (2011)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-19-22-21849


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