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Ultrahigh 22 nm resolution coherent diffractive imaging using a desktop 13 nm high harmonic sourceMatthew D. Seaberg, Daniel E. Adams, Ethan L. Townsend, Daisy A. Raymondson, William F. Schlotter, Yanwei Liu, Carmen S. Menoni, Lu Rong, Chien-Chun Chen, Jianwei Miao, Henry C. Kapteyn, and Margaret M. Murnane »View Author Affiliations
Matthew D. Seaberg,1,*
Daniel E. Adams,1
Ethan L. Townsend,1
Daisy A. Raymondson,1
William F. Schlotter,2
Yanwei Liu,3
Carmen S. Menoni,4
Lu Rong,5
Chien-Chun Chen,5
Jianwei Miao,5
Henry C. Kapteyn,1
and Margaret M. Murnane1
1JILA, University of Colorado, Boulder, Colorado 80309-0440, USA 2SLAC National Accelerator Laboratory, Menlo Park, California 94025, USA 3College of Engineering, University of California at Berkeley, California 94720, USA 4Department of ECE, Colorado State University, Fort Collins, Colorado 80523, USA 5Department of Physics and Astronomy and California NanoSystems Institute, University of California, Los Angeles, California 90095, USA *Corresponding author: matthew.seaberg@colorado.edu |
Optics Express, Vol. 19, Issue 23, pp. 22470-22479 (2011)
http://dx.doi.org/10.1364/OE.19.022470
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Abstract
New diffractive imaging techniques using coherent x-ray beams have made possible nanometer-scale resolution imaging by replacing the optics in a microscope with an iterative phase retrieval algorithm. However, to date very high resolution imaging (< 40nm) was limited to large-scale synchrotron facilities. Here, we present a significant advance in image resolution and capabilities for desktop soft x-ray microscopes that will enable widespread applications in nanoscience and nanotechnology. Using 13nm high harmonic beams, we demonstrate a record 22nm spatial resolution for any tabletop x-ray microscope. Finally, we show that unique information about the sample can be obtained by extracting 3-D information at very high numerical apertures.
© 2011 OSA
OCIS Codes
(100.5070) Image processing : Phase retrieval
(190.2620) Nonlinear optics : Harmonic generation and mixing
(340.7460) X-ray optics : X-ray microscopy
(340.7480) X-ray optics : X-rays, soft x-rays, extreme ultraviolet (EUV)
ToC Category:
Frequency Conversion, Combs and Nonlinear Waveguides
History
Original Manuscript: August 5, 2011
Revised Manuscript: August 27, 2011
Manuscript Accepted: August 28, 2011
Published: October 25, 2011
Virtual Issues
Nonlinear Optics (2011) Optical Materials Express
Vol. 7, Iss. 1 Virtual Journal for Biomedical Optics
Citation
Matthew D. Seaberg, Daniel E. Adams, Ethan L. Townsend, Daisy A. Raymondson, William F. Schlotter, Yanwei Liu, Carmen S. Menoni, Lu Rong, Chien-Chun Chen, Jianwei Miao, Henry C. Kapteyn, and Margaret M. Murnane, "Ultrahigh 22 nm resolution coherent diffractive imaging using a desktop 13 nm high harmonic source," Opt. Express 19, 22470-22479 (2011)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-19-23-22470
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Chang, Z.
Chao, W.
Chapman, H.
Chapman, H. N.
Charalambous, P.
Chen, B.
Chen, M.-C.
Cheng, J.-X.
Christov, I. P.
Clark, J. N.
Cui, C.
de Jonge, M.
Dilanian, R.
Du, J.
Duesterer, S.
Durfee, C. G.
Düsterer, S.
Dyba, M.
Egner, A.
Ekeberg, T.
Elser, V.
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Jiang, H.
Kapteyn, H. C.
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Klar, T. A.
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La-O-Vorakiat, C.
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