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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 19, Iss. 24 — Nov. 21, 2011
  • pp: 23658–23663

Ultra-small silicon waveguide coupler switch using gap-variable mechanism

Yuta Akihama, Yoshiaki Kanamori, and Kazuhiro Hane  »View Author Affiliations

Optics Express, Vol. 19, Issue 24, pp. 23658-23663 (2011)

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Submicron-wide silicon waveguide coupler with gap variable mechanism is proposed for a compact optical waveguide switch. Two freestanding silicon waveguides are placed parallel with a submicron gap. The gap is changed by electrostatic comb-drive micro-actuators to control the coupling coefficient of the coupler. The fabricated device consisted of the silicon waveguides of 400 nm in width and 260 nm in thickness. The total size of the switch was 100 μm wide and 150 μm long. Decreasing the gap between the waveguides to 110 nm, the output intensity at drop port became a maximum while the output intensity at through port became a minimum. The extension ratio of the switch output was 17 dB for the waveguide displacement of 300 nm.

© 2011 OSA

OCIS Codes
(060.1810) Fiber optics and optical communications : Buffers, couplers, routers, switches, and multiplexers
(250.5300) Optoelectronics : Photonic integrated circuits
(230.4685) Optical devices : Optical microelectromechanical devices

ToC Category:

Original Manuscript: August 4, 2011
Revised Manuscript: October 9, 2011
Manuscript Accepted: October 31, 2011
Published: November 7, 2011

Yuta Akihama, Yoshiaki Kanamori, and Kazuhiro Hane, "Ultra-small silicon waveguide coupler switch using gap-variable mechanism," Opt. Express 19, 23658-23663 (2011)

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