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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 19, Iss. 24 — Nov. 21, 2011
  • pp: 23664–23670

Nanosphere natural lithography surface texturing as anti-reflective layer on SiC photodiodes

Qiugui Zhou, Dion C. McIntosh, Yaojia Chen, Wenlu Sun, Zhi Li, and Joe C. Campbell  »View Author Affiliations


Optics Express, Vol. 19, Issue 24, pp. 23664-23670 (2011)
http://dx.doi.org/10.1364/OE.19.023664


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Abstract

Natural lithography with 100-nm-diameter SiO2 spheres followed by inductively coupled plasma etching was used to texture the surface of 4H-SiC for a wide-spectrum large-acceptance-angle anti-reflective layer. The surface showed low normal-incidence reflectance of < 5% over a wide spectrum from 250 nm to 550 nm. Photodiodes fabricated from the surface-textured SiC showed broader spectral and angular responsivity than SiC photodiodes with SiO2 antireflective coating. The textured SiC photodiodes showed peak responsivity of 116 mA/W, large angle of acceptance angle (< 2% decrease in responsivity at 50 o incident angle) and low dark current at 10V.

© 2011 OSA

OCIS Codes
(040.5160) Detectors : Photodetectors
(040.7190) Detectors : Ultraviolet
(230.5170) Optical devices : Photodiodes
(240.6700) Optics at surfaces : Surfaces
(220.4241) Optical design and fabrication : Nanostructure fabrication

ToC Category:
Detectors

History
Original Manuscript: August 16, 2011
Revised Manuscript: October 17, 2011
Manuscript Accepted: October 20, 2011
Published: November 7, 2011

Citation
Qiugui Zhou, Dion C. McIntosh, Yaojia Chen, Wenlu Sun, Zhi Li, and Joe C. Campbell, "Nanosphere natural lithography surface texturing as anti-reflective layer on SiC photodiodes," Opt. Express 19, 23664-23670 (2011)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-19-24-23664


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References

  1. X. G. Bai, H. D. Liu, D. C. McIntosh, and J. C. Campbell, “High-detectivity and high-single-photon-detection-efficiency 4H-SiC avalanche photodiodes,” IEEE J. Quantum Electron.45(3), 300–303 (2009). [CrossRef]
  2. Q. G. Zhou, D. McIntosh, H. D. Liu, and J. C. Campbell, “Proton-implantation-isolated separate absorption charge and multiplication 4H-SiC avalanche photodiodes,” IEEE Photon. Technol. Lett.23(5), 299–301 (2011). [CrossRef]
  3. F. P. Neele and R. M. Schleijpen, “Electro-optical missile plume detection,” Proc. SPIE5075, 270 (2003).
  4. G. A. Shaw, M. L. Nischan, M. A. Iyengar, S Kaushik, and M. K Griffin, “NLOS UV communication for distributed sensor systems,” Proc. SPIE4126, (2000).
  5. H. A. Macleod, in Thin-Film Optical Filters, 4th ed. (Taylor & Francis Group, 2010).
  6. J. H. Zhao, A. H. Wang, M. A. Green, and F. Ferrazza, “19.8% efficient “honeycomb” textured multicrystalline and 24.4% monocrystalline silicon solar cells,” Appl. Phys. Lett.73(14), 1991–1993 (1998). [CrossRef]
  7. R. Windisch, C. Rooman, S. Meinlschmidt, P. Kiesel, D. Zipperer, G. H. Dohler, B. Dutta, M. Kuijk, G. Borghs, and P. Heremans, “Impact of texture-enhanced transmission on high-efficiency surface-textured light-emitting diodes,” Appl. Phys. Lett.79(15), 2315–2317 (2001). [CrossRef]
  8. Z. Li, B. K. Nayak, V. V. Iyengar, D. McIntosh, Q. G. Zhou, M. C. Gupta, and J. C. Campbell, “Laser-textured silicon photodiode with broadband spectral response,” Appl. Opt.50(17), 2508–2511 (2011). [CrossRef] [PubMed]
  9. Z. H. Huang, J. E. Carey, M. G. Liu, X. Y. Guo, E. Mazur, and J. C. Campbell, “Microstructured silicon photodetector,” Appl. Phys. Lett.89(3), 033506 (2006). [CrossRef]
  10. H. W. Deckman and J. H. Dunsmuir, “Natural lithography,” Appl. Phys. Lett.41(4), 377–379 (1982). [CrossRef]
  11. J. C. Hulteen and R. P. Vanduyne, “Nanosphere lithography - a materials general fabrication process for periodic particle array surfaces,” J. Vac. Sci. Technol. A13(3), 1553–1558 (1995). [CrossRef]
  12. H. E. Bennett and J. O. Porteus, “Relation between surface roughness and specular reflectance at normal incidence,” J. Opt. Soc. Am.51(2), 123 (1961). [CrossRef]
  13. C. P. Chen, P. H. Lin, L. Y. Chen, M. Y. Ke, Y. W. Cheng, and J. J. Huang, “Nanoparticle-coated n-ZnO/p-Si photodiodes with improved photoresponsivities and acceptance angles for potential solar cell applications,” Nanotechnology20(24), 245204 (2009). [CrossRef] [PubMed]

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