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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 19, Iss. 24 — Nov. 21, 2011
  • pp: 23790–23799

Snapshot phase sensitive scatterometry based on double-channel spectral carrier frequency concept

Daesuk Kim, Hyunsuk Kim, Robert Magnusson, Yong Jai Cho, Won Chegal, and Hyun Mo Cho  »View Author Affiliations


Optics Express, Vol. 19, Issue 24, pp. 23790-23799 (2011)
http://dx.doi.org/10.1364/OE.19.023790


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Abstract

Spectroscopic ellipsometry is one of the most important measurement schemes used in the optical nano-metrology for not only thin film measurement but also nano pattern 3D structure measurement. In this paper, we propose a novel snap shot phase sensitive normal incidence spectroscopic ellipsometic scheme based on a double-channel spectral carrier frequency concept. The proposed method can provide both Ψ(λ) and Δ(λ) only by using two spectra acquired simultaneously through the double spectroscopic channels. We show that the proposed scheme works well experimentally by measuring a binary grating with nano size 3D structure. We claim that the proposed scheme can provide a snapshot spectroscopic ellipsometric parameter measurement capability with moderate accuracy.

© 2011 OSA

OCIS Codes
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.5820) Instrumentation, measurement, and metrology : Scattering measurements

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: August 31, 2011
Manuscript Accepted: October 17, 2011
Published: November 8, 2011

Citation
Daesuk Kim, Hyunsuk Kim, Robert Magnusson, Yong Jai Cho, Won Chegal, and Hyun Mo Cho, "Snapshot phase sensitive scatterometry based on double-channel spectral carrier frequency concept," Opt. Express 19, 23790-23799 (2011)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-19-24-23790


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