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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 19, Iss. 24 — Nov. 21, 2011
  • pp: 24122–24128

Three dimensional laser microfabrication in diamond using a dual adaptive optics system

Richard D. Simmonds, Patrick S. Salter, Alexander Jesacher, and Martin J. Booth  »View Author Affiliations


Optics Express, Vol. 19, Issue 24, pp. 24122-24128 (2011)
http://dx.doi.org/10.1364/OE.19.024122


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Abstract

Femtosecond laser fabrication of controlled three dimensional structures deep in the bulk of diamond is facilitated by a dual adaptive optics system. A deformable mirror is used in parallel with a liquid crystal spatial light modulator to compensate the extreme aberrations caused by the refractive index mismatch between the diamond and the objective immersion medium. It is shown that aberration compensation is essential for the generation of controlled micron-scale features at depths greater than 200 μm, and the dual adaptive optics approach demonstrates increased fabrication efficiency relative to experiments using a single adaptive element.

© 2011 OSA

OCIS Codes
(090.1000) Holography : Aberration compensation
(140.3390) Lasers and laser optics : Laser materials processing
(220.1920) Optical design and fabrication : Diamond machining
(220.4000) Optical design and fabrication : Microstructure fabrication

ToC Category:
Laser Microfabrication

History
Original Manuscript: September 22, 2011
Revised Manuscript: October 17, 2011
Manuscript Accepted: October 17, 2011
Published: November 10, 2011

Citation
Richard D. Simmonds, Patrick S. Salter, Alexander Jesacher, and Martin J. Booth, "Three dimensional laser microfabrication in diamond using a dual adaptive optics system," Opt. Express 19, 24122-24128 (2011)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-19-24-24122


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