OSA's Digital Library

Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 19, Iss. 25 — Dec. 5, 2011
  • pp: 25632–25642

Time dynamics of burst-train filamentation assisted femtosecond laser machining in glasses

Dagmar Esser, Saeid Rezaei, Jianzhao Li, Peter R. Herman, and Jens Gottmann  »View Author Affiliations


Optics Express, Vol. 19, Issue 25, pp. 25632-25642 (2011)
http://dx.doi.org/10.1364/OE.19.025632


View Full Text Article

Enhanced HTML    Acrobat PDF (1216 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

Bursts of femtosecond laser pulses with a repetition rate of f = 38.5MHz were created using a purpose-built optical resonator. Single Ti:Sapphire laser pulses, trapped inside a resonator and released into controllable burst profiles by computer generated trigger delays to a fast Pockels cell switch, drove filamentation-assisted laser machining of high aspect ratio holes deep into transparent glasses. The time dynamics of the hole formation and ablation plume physics on 2-ns to 400-ms time scales were examined in time-resolved side-view images recorded with an intensified-CCD camera during the laser machining process. Transient effects of photoluminescence and ablation plume emissions confirm the build-up of heat accumulation effects during the burst train, the formation of laser-generated filaments and plume-shielding effects inside the deeply etched vias. The small time interval between the pulses in the present burst train enabled a more gentle modification in the laser interaction volume that mitigated shock-induced microcracks compared with single pulses.

© 2011 OSA

OCIS Codes
(140.7090) Lasers and laser optics : Ultrafast lasers
(160.2750) Materials : Glass and other amorphous materials
(320.2250) Ultrafast optics : Femtosecond phenomena
(100.0118) Image processing : Imaging ultrafast phenomena
(110.6915) Imaging systems : Time imaging

ToC Category:
Laser Microfabrication

History
Original Manuscript: February 7, 2011
Revised Manuscript: March 4, 2011
Manuscript Accepted: March 4, 2011
Published: December 1, 2011

Citation
Dagmar Esser, Saeid Rezaei, Jianzhao Li, Peter R. Herman, and Jens Gottmann, "Time dynamics of burst-train filamentation assisted femtosecond laser machining in glasses," Opt. Express 19, 25632-25642 (2011)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-19-25-25632


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. R. R. Gattass, L. R. Cerami, and E. Mazur, “Micromachining of bulk glass with bursts of femtosecond laser pulses at variable repetition rates,” Opt. Express14(12), 5279–5284 (2006). [CrossRef] [PubMed]
  2. J. Gottmann, M. Hörstmann-Jungemann, M. Hermans, and D. Beckmann, “High speed and high precision fs-laser writing using a scanner with large numerical aperture,” JLMN4(3), 192–196 (2009). [CrossRef]
  3. D. Ashkenasi, H. Varel, A. Rosenfeld, S. Henz, J. Herrmann, and E. E. B. Cambell, “Application of self-focusing of ps laser pulses for three-dimensional microstructuring of transparent materials,” Appl. Phys. Lett.72(12), 1442–1444 (1998). [CrossRef]
  4. C. Hnatovsky, R. S. Taylor, E. Simova, V. R. Bhardwaj, D. M. Rayner, and P. B. Corkum, “Polarization-selective etching in femtosecond laser-assisted microfluidic channel fabrication in fused silica,” Opt. Lett.30(14), 1867–1869 (2005). [CrossRef] [PubMed]
  5. V. Maselli, J. R. Grenier, S. Ho, and P. R. Herman, “Femtosecond laser written optofluidic sensor: Bragg Grating Waveguide evanescent probing of microfluidic channel,” Opt. Express17(14), 11719–11729 (2009). [CrossRef] [PubMed]
  6. D. Esser, D. Wortmann, and J. Gottmann, “In-volume waveguides by fs-laser direct writing in rare-earth-doped fluoride glass and phosphate glass,” Proc. SPIE7205, 720510, 720510-9 (2009). [CrossRef]
  7. J. W. Chan, T. R. Huser, S. H. Risbud, J. S. Hayden, and D. M. Krol, “Waveguide fabrication in phosphate glasses using femtosecond laser pulses,” Appl. Phys. Lett.82(15), 2371–2373 (2003). [CrossRef]
  8. M. Richardson, A. Zoubir, L. Shah, C. Rivero, C. Lopez, and K. Richardson, “Ablation and optical property modification of transparent materials with femtosecond lasers,” Proc. SPIE5273, 472–481 (2003). [CrossRef]
  9. D. J. Hwang, K. Hiromatsu, H. Hidai, and C. P. Grigoropoulos, “Self-guided glass drilling by femtosecond laser pulses,” Appl. Phys., A Mater. Sci. Process.94(3), 555–558 (2008). [CrossRef]
  10. Y. Li, K. Itoh, W. Watanabe, K. Yamada, D. Kuroda, J. Nishii, and Y. Jiang, “Three-dimensional hole drilling of silica glass from the rear surface with femtosecond laser pulses,” Opt. Lett.26(23), 1912–1914 (2001). [CrossRef] [PubMed]
  11. X. Ding, Y. Yasui, Y. Kawaguchi, H. Niino, and A. Yabe, “Laser-induced back-side wet etching of fused silica with an aqueous solution containing organic molecules,” Appl. Phys., A Mater. Sci. Process.75(3), 437–440 (2002). [CrossRef]
  12. Y. Matsuoka, “Trepanning of glass using the fourth harmonic of nanosecond pulse Nd:YAG laser,” Appl. Phys., A Mater. Sci. Process.88(2), 319–322 (2007). [CrossRef]
  13. J. Kaspar, A. Luft, S. Nolte, M. Will, and E. Beyer, “Laser helical drilling of silicon wafers with ns to fs pulses: Scanning electron microscopy and transmission electron microscopy characterization of drilled through-holes,” J. Laser Appl.18(2), 85–92 (2006). [CrossRef]
  14. J. Krüger, W. Kautek, M. Lenzner, S. Sartania, C. Spielmann, and F. Krausz, “„Laser micromachining of barium aluminium borosilicate glass with pulse durations between 20 fs and 3 ps,” Appl. Surf. Sci.127-129(1-2), 892–898 (1998). [CrossRef]
  15. P. R. Herman, A. Oettl, K. P. Chen, and R. S. Marjoribanks, “Laser micromachining of ‘transparent’ fused silica with 1-ps pulses and pulse trains,” Proc. SPIE3616, 148–155 (1999). [CrossRef]
  16. S. M. Eaton, H. Zhang, M. L. Ng, J. Li, W.-J. Chen, S. Ho, and P. R. Herman, “Transition from thermal diffusion to heat accumulation in high repetition rate femtosecond laser writing of buried optical waveguides,” Opt. Express16(13), 9443–9458 (2008). [CrossRef] [PubMed]
  17. S. M. Eaton, H. Zhang, P. R. Herman, F. Yoshino, L. Shah, J. Bovatsek, and A. Y. Arai, “Heat accumulation effects in femtosecond laser-written waveguides with variable repetition rate,” Opt. Express13(12), 4708–4716 (2005). [CrossRef] [PubMed]
  18. P. R. Herman, M. Lapczyna, D. Breitling, H. Schittenhelm, H. W. Tan, Y. Kerachian, and R. S. Marjoribanks, “Laser micromachining of transparent glasses and aluminium with ps-pulses bursts at 1054nm”, Proc. CLEO 39 (2000).
  19. J. König, S. Nolte, and A. Tünnermann, “Plasma evolution during metal ablation with ultrashort laser pulses,” Opt. Express13(26), 10597–10607 (2005). [CrossRef] [PubMed]
  20. L. Sudrie, M. Franco, B. Prade, and A. Mysyrowicz, “Study of damage in fused silica induced by ultra-short IR laser pulses,” Opt. Commun.191(3-6), 333–339 (2001). [CrossRef]
  21. S. L. Chin, S. A. Hosseini, W. Liu, Q. Luo, F. Théberge, N. Aközbek, A. Becker, V. P. Kandidov, O. G. Kosareva, and H. Schroeder, “The propagation of powerful femtosecond laser pulses in optical media: physics, applications, and new challenges,” Can. J. Phys.83(9), 863–905 (2005). [CrossRef]
  22. E. T. J. Nibbering, M. A. Franco, B. S. Prade, G. Grillon, C. Le Blanc, and A. Mysyrowicz, “Measurement of the nonlinear refractive index on transparent materials by spectral analysis after nonlinear propagation,” Opt. Commun.119(5-6), 479–484 (1995). [CrossRef]
  23. M. Rodriguez, R. Bourayou, G. Méjean, J. Kasparian, J. Yu, E. Salmon, A. Scholz, B. Stecklum, J. Eislöffel, U. Laux, A. P. Hatzes, R. Sauerbrey, L. Wöste, and J.-P. Wolf, “Kilometer-range nonlinear propagation of femtosecond laser pulses,” Phys. Rev. E Stat. Nonlin. Soft Matter Phys.69(3), 036607 (2004). [CrossRef] [PubMed]
  24. A. Brodeur, C. Y. Chien, F. A. Ilkov, S. L. Chin, O. G. Kosareva, and V. P. Kandidov, “Moving focus in the propagation of ultrashort laser pulses in air,” Opt. Lett.22(5), 304–306 (1997). [CrossRef] [PubMed]
  25. B. La Fontaine, F. Vidal, Z. Jiang, C. Y. Chien, A. Desparois, T. W. Johnston, J.-C. Kieffer, and H. Pépin, “Filamentation of ultrashort pulse laser beams resulting from their propagation over long distances in air,” Phys. Plasmas6(5), 1615–1621 (1999). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

Supplementary Material


» Media 1: AVI (1669 KB)     
» Media 2: AVI (2034 KB)     

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited