OSA's Digital Library

Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 19, Iss. 26 — Dec. 12, 2011
  • pp: B26–B31

Silicon Mach-Zehnder modulator of extinction ratio beyond 10 dB at 10.0-12.5 Gbps

Kensuke Ogawa, Kazuhiro Goi, Yong Tsong Tan, Tsung-Yang Liow, Xiaoguang Tu, Qing Fang, Guo-Qiang Lo, and Dim-Lee Kwong  »View Author Affiliations

Optics Express, Vol. 19, Issue 26, pp. B26-B31 (2011)

View Full Text Article

Enhanced HTML    Acrobat PDF (3008 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



Silicon Mach-Zehnder modulators with reduced series resistance in lateral PN junction rib-waveguide phase shifters for enhanced high-speed response are fabricated and characterized. Extinction ratio higher than 10dB is obtained at 10.3-11.7 Gbps with mask margins of 27% (10.3-Gbps 10GBE), 16% (10.7-Gbps STM-64/OC-192) and 10% (11.3-Gbps STM-64/OC-192) in eye-diagram measurements incorporating mask tests using a RF cut-off filter. In unfiltered eye-diagram measurements without mask tests, extinction ratio higher than 13 dB is obtained at 10.0-12.5 Gbps. The silicon modulators reveal high-speed performance comparable with that of lithium-niobate modulators in high-speed optical fiber telecommunications.

© 2011 OSA

OCIS Codes
(230.3120) Optical devices : Integrated optics devices
(250.7360) Optoelectronics : Waveguide modulators
(130.4110) Integrated optics : Modulators

ToC Category:
Waveguide and Opto-Electronic Devices

Original Manuscript: September 21, 2011
Revised Manuscript: October 12, 2011
Manuscript Accepted: October 12, 2011
Published: November 16, 2011

Virtual Issues
European Conference on Optical Communication 2011 (2011) Optics Express

Kensuke Ogawa, Kazuhiro Goi, Yong Tsong Tan, Tsung-Yang Liow, Xiaoguang Tu, Qing Fang, Guo-Qiang Lo, and Dim-Lee Kwong, "Silicon Mach-Zehnder modulator of extinction ratio beyond 10 dB at 10.0-12.5 Gbps," Opt. Express 19, B26-B31 (2011)

Sort:  Author  |  Year  |  Journal  |  Reset  


  1. F. Koyama and K. Iga, “Frequency chirping in external modulators,” J. Lightwave Technol. 6(1), 87–93 (1988). [CrossRef]
  2. E. L. Wooten, K. M. Kissa, A. Yi-Yan, E. J. Murphy, D. A. Lafaw, P. F. Hallemeier, D. Maack, D. V. Attanasio, D. J. Fritz, G. J. McBrien, and D. E. Bossi, “A review of lithium niobate modulators for fiber-optic communications systems,” IEEE J. Sel. Top. Quantum Electron. 6(1), 69–82 (2000). [CrossRef]
  3. D. D’Andrea, presented in Market Watch Panel III, OFC/NFOEC2009 March 22–26, 2009.
  4. K. Shastri, presented in Workshop OMB, OFC/NFOEC2011 March 6–11, 2011.
  5. G. T. Reed, G. Mashanovich, F. Y. Gardes, and D. J. Thomson, “Silicon optical modulators,” Nat. Photonics 4(8), 518–526 (2010). [CrossRef]
  6. D. J. Thomson, F. Y. Gardes, Y. Hu, G. Mashanovich, M. Fournier, P. Grosse, J.-M. Fedeli, and G. T. Reed, “High contrast 40Gbit/s optical modulation in silicon,” Opt. Express 19(12), 11507–11516 (2011), http://www.opticsexpress.org/abstract.cfm?URI=OPEX-19-12-11507 . [CrossRef] [PubMed]
  7. R. Soref and B. R. Bennett, “Electrooptical effects in silicon,” IEEE J. Quantum Electron. 23(1), 123–129 (1987). [CrossRef]
  8. T.-Y. Liow, K.-W. Ang, Q. Fang, J.-F. Song, Y.-Z. Xiong, M.-B. Yu, G.-Q. Lo, and D.-L. Kwong, , “Silicon modulators and germanium photodetectors on SOI: monolithic integration, compatibility, and performance optimization,” IEEE J. Sel. Top. Quantum Electron. 16(1), 307–315 (2010). [CrossRef]
  9. K. Noguchi, O. Mitomi, H. Miyazawa, and S. Seki, “A broadband Ti:LiNbO3 optical modulator with a ridge structure,” J. Lightwave Technol. 13(6), 1164–1168 (1995). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited