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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 19, Iss. 27 — Dec. 19, 2011
  • pp: 26275–26282

Low-loss silicon slot waveguides and couplers fabricated with optical lithography and atomic layer deposition

A. Säynätjoki, L. Karvonen, T. Alasaarela, X. Tu, T. Y. Liow, M. Hiltunen, A. Tervonen, G. Q. Lo, and S. Honkanen  »View Author Affiliations


Optics Express, Vol. 19, Issue 27, pp. 26275-26282 (2011)
http://dx.doi.org/10.1364/OE.19.026275


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Abstract

We demonstrate low-loss silicon slot waveguides patterned with 248 nm deep-UV lithography and filled with atomic layer deposited aluminum oxide. Propagation losses less than 5 dB/cm are achieved with the waveguides. The devices are fabricated using low-temperature CMOS compatible processes. We also demonstrate simple, compact and efficient strip-to-slot waveguide couplers. With a coupler as short as 10 µm, coupling loss is less than 0.15 dB. The low-index and low-nonlinearity filling material allows nonlinearities nearly two orders of magnitude smaller than in silicon waveguides. Therefore, these waveguides are a good candidate for linear photonic devices on the silicon platform, and for distortion-free signal transmission channels between different parts of a silicon all-optical chip. The low-nonlinearity slot waveguides and robust couplers also facilitate a 50-fold local change of the waveguide nonlinearity within the chip by a simple mask design.

© 2011 OSA

OCIS Codes
(130.3130) Integrated optics : Integrated optics materials
(130.4310) Integrated optics : Nonlinear
(230.7370) Optical devices : Waveguides
(310.2785) Thin films : Guided wave applications
(220.4241) Optical design and fabrication : Nanostructure fabrication

ToC Category:
Integrated Optics

History
Original Manuscript: October 20, 2011
Revised Manuscript: November 25, 2011
Manuscript Accepted: November 26, 2011
Published: December 8, 2011

Citation
A. Säynätjoki, L. Karvonen, T. Alasaarela, X. Tu, T. Y. Liow, M. Hiltunen, A. Tervonen, G. Q. Lo, and S. Honkanen, "Low-loss silicon slot waveguides and couplers fabricated with optical lithography and atomic layer deposition," Opt. Express 19, 26275-26282 (2011)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-19-27-26275


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