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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 19, Iss. 27 — Dec. 19, 2011
  • pp: 26684–26695

Remotely measuring a thin dielectric coating on a metallic cylinder

Nicholas George and Paul Zavattero  »View Author Affiliations


Optics Express, Vol. 19, Issue 27, pp. 26684-26695 (2011)
http://dx.doi.org/10.1364/OE.19.026684


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Abstract

A laser optical metrology system is described that remotely measures at high rate the presence and thickness of a thin-film lubricant on metallic cylinders with diameters on the order of 0.5 mm. Applications include remote measurement of hypodermic needle dielectric coating thickness in a clean room environment. High accuracy computer simulation of the electric field scattered from a coated cylinder by an incident laser beam is demonstrated using the condition numbers of the matrices defined by the boundary value matching equations derived from the eigenfunction expansion of the exact solution to Maxwell’s equations. Dielectric coatings from 1 μmto 50 μm are seen to be readily observed and accurately measured using a remotely placed CMOS array. Distinctive signatures are shown for film thicknesses in the range from 0 to 10 μm, and an appropriate location for CMOS detector placement is determined from the scattering patterns.

© 2011 OSA

OCIS Codes
(070.5010) Fourier optics and signal processing : Pattern recognition
(120.4630) Instrumentation, measurement, and metrology : Optical inspection
(240.0310) Optics at surfaces : Thin films
(260.1960) Physical optics : Diffraction theory
(260.2110) Physical optics : Electromagnetic optics
(290.5820) Scattering : Scattering measurements
(050.1755) Diffraction and gratings : Computational electromagnetic methods
(290.5825) Scattering : Scattering theory

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: September 15, 2011
Revised Manuscript: October 26, 2011
Manuscript Accepted: November 25, 2011
Published: December 14, 2011

Citation
Nicholas George and Paul Zavattero, "Remotely measuring a thin dielectric coating on a metallic cylinder," Opt. Express 19, 26684-26695 (2011)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-19-27-26684


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References

  1. C. A. Balanis, Advanced Engineering Electromagnetics (J. Wiley & Sons, 1989).
  2. J. A. Kong, Electromagnetic Wave Theory (EMW Publishing, 2008).
  3. J. J. Bowmann, T. B. A. Senior, and P. L. E. Uslenghi, Electromagnetic and Acoustic Scattering by Simple Shapes (North Holland, 1969).
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