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Low-voltage high-performance silicon photonic devices and photonic integrated circuits operating up to 30 Gb/sGyungock Kim, Jeong Woo Park, In Gyoo Kim, Sanghoon Kim, Sanggi Kim, Jong Moo Lee, Gun Sik Park, Jiho Joo, Ki-Seok Jang, Jin Hyuk Oh, Sun Ae Kim, Jong Hoon Kim, Jun Young Lee, Jong Moon Park, Do-Won Kim, Deog-Kyoon Jeong, Moon-Sang Hwang, Jeong-Kyoum Kim, Kyu-Sang Park, Han-Kyu Chi, Hyun-Chang Kim, Dong-Wook Kim, and Mu Hee Cho »View Author Affiliations
Gyungock Kim,1,*
Jeong Woo Park,1
In Gyoo Kim,1
Sanghoon Kim,1
Sanggi Kim,1
Jong Moo Lee,1
Gun Sik Park,1
Jiho Joo,1
Ki-Seok Jang,1
Jin Hyuk Oh,1
Sun Ae Kim,1
Jong Hoon Kim,1
Jun Young Lee,1
Jong Moon Park,1
Do-Won Kim,1
Deog-Kyoon Jeong,2
Moon-Sang Hwang,2
Jeong-Kyoum Kim,2
Kyu-Sang Park,2
Han-Kyu Chi,2
Hyun-Chang Kim,2
Dong-Wook Kim,2
and Mu Hee Cho3
1Electronics & Telecommunications Research Institute, 138 Gajeongno, Yuseong-gu, Daejeon, 305-700, Korea 2Seoul National University, 1 Gwanak-ro, Gwanak-gu, Seoul, 151-742, Korea 3Korea Advanced Institute of Science & Technology, 291 Daehak-ro, Yuseong-gu, Daejeon, 305-701, Korea *Corresponding author: gokim@etri.re.kr |
Optics Express, Vol. 19, Issue 27, pp. 26936-26947 (2011)
http://dx.doi.org/10.1364/OE.19.026936
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Abstract
We present high performance silicon photonic circuits (PICs) defined for off-chip or on-chip photonic interconnects, where PN depletion Mach-Zehnder modulators and evanescent-coupled waveguide Ge-on-Si photodetectors were monolithically integrated on an SOI wafer with CMOS-compatible process. The fabricated silicon PICoff-chip for off-chip optical interconnects showed operation up to 30 Gb/s. Under differential drive of low-voltage 1.2 Vpp, the integrated 1 mm-phase-shifter modulator in the PICoff-chip demonstrated an extinction ratio (ER) of 10.5dB for 12.5 Gb/s, an ER of 9.1dB for 20 Gb/s, and an ER of 7.2 dB for 30 Gb/s operation, without adoption of travelling-wave electrodes. The device showed the modulation efficiency of VπLπ ~1.59 Vcm, and the phase-shifter loss of 3.2 dB/mm for maximum optical transmission. The Ge photodetector, which allows simpler integration process based on reduced pressure chemical vapor deposition exhibited operation over 30 Gb/s with a low dark current of 700 nA at −1V. The fabricated silicon PICintra-chip for on-chip (intra-chip) photonic interconnects, where the monolithically integrated modulator and Ge photodetector were connected by a silicon waveguide on the same chip, showed on-chip data transmissions up to 20 Gb/s, indicating potential application in future silicon on-chip optical network. We also report the performance of the hybrid silicon electronic-photonic IC (EPIC), where a PICintra-chip chip and 0.13μm CMOS interface IC chips were hybrid-integrated.
© 2011 OSA
OCIS Codes
(040.5160) Detectors : Photodetectors
(040.6040) Detectors : Silicon
(060.4510) Fiber optics and optical communications : Optical communications
(130.0250) Integrated optics : Optoelectronics
(130.3120) Integrated optics : Integrated optics devices
(200.4650) Optics in computing : Optical interconnects
(250.5300) Optoelectronics : Photonic integrated circuits
(250.7360) Optoelectronics : Waveguide modulators
(130.4110) Integrated optics : Modulators
ToC Category:
Integrated Optics
History
Original Manuscript: October 19, 2011
Revised Manuscript: November 30, 2011
Manuscript Accepted: December 8, 2011
Published: December 16, 2011
Citation
Gyungock Kim, Jeong Woo Park, In Gyoo Kim, Sanghoon Kim, Sanggi Kim, Jong Moo Lee, Gun Sik Park, Jiho Joo, Ki-Seok Jang, Jin Hyuk Oh, Sun Ae Kim, Jong Hoon Kim, Jun Young Lee, Jong Moon Park, Do-Won Kim, Deog-Kyoon Jeong, Moon-Sang Hwang, Jeong-Kyoum Kim, Kyu-Sang Park, Han-Kyu Chi, Hyun-Chang Kim, Dong-Wook Kim, and Mu Hee Cho, "Low-voltage high-performance silicon photonic devices and photonic integrated circuits operating up to 30 Gb/s," Opt. Express 19, 26936-26947 (2011)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-19-27-26936
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- M. Rasras, D. Gill, M. Earnshaw, C. Doerr, J. Weiner, C. Bolle, and Y. Chen, “CMOS silicon receiver integrated with Ge detector and reconfigurable optical filter,” IEEE Photon. Technol. Lett.22(2), 112–114 (2010). [CrossRef]
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- L. Liao, A. Liu, D. Rubin, J. Basak, Y. Chetrit, H. Nguyen, R. Cohen, N. Izhaky, M. Paniccia, N. Izhaky, and M. Paniccia, “40Gbit/s silicon optical modulator high-speed applications,” Electron. Lett.43(22), 1196–1197 (2007). [CrossRef]
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- L. Vivien, J. Osmond, J. M. Fédéli, D. Marris-Morini, P. Crozat, J. F. Damlencourt, E. Cassan, Y. Lecunff, and S. Laval, “42 GHz p.i.n Germanium photodetector integrated in a silicon-on-insulator waveguide,” Opt. Express17(8), 6252–6257 (2009). [CrossRef] [PubMed]
- S. Assefa, F. Xia, and Y. A. Vlasov, “Reinventing germanium avalanche photodetector for nanophotonic on-chip optical interconnects,” Nature464(7285), 80–84 (2010). [CrossRef] [PubMed]
- W. M. Green, M. J. Rooks, L. Sekaric, and Y. A. Vlasov, “Ultra-compact, low RF power, 10 Gb/s silicon Mach-Zehnder modulator,” Opt. Express15(25), 17106–17113 (2007). [CrossRef] [PubMed]
- M. Watts, W. Zortman, D. Trotter, R. Young, and A. Lentine, “Low-voltage, compact, depletion-mode, silicon Mach–Zehnder modulator,” IEEE J. Sel. Top. Quantum Electron.16(1), 159–164 (2010). [CrossRef]
- M. Rasras, D. Gill, M. Earnshaw, C. Doerr, J. Weiner, C. Bolle, and Y. Chen, “CMOS silicon receiver integrated with Ge detector and reconfigurable optical filter,” IEEE Photon. Technol. Lett.22(2), 112–114 (2010). [CrossRef]
- M. Jutzi, M. Berroth, G. Wöhl, M. Oehme, and E. Kasper, “Ge-on-Si vertical incidence photodiodes with 39-GHz bandwidth,” IEEE Photon. Technol. Lett.17(7), 1510–1512 (2005). [CrossRef]
- S. Assefa, F. Xia, and Y. A. Vlasov, “Reinventing germanium avalanche photodetector for nanophotonic on-chip optical interconnects,” Nature464(7285), 80–84 (2010). [CrossRef] [PubMed]
- T. Y. Liow, K. W. Ang, Q. Fang, J. F. Song, Y. Z. Xiong, M. B. Yu, G. Q. Lo, and D. L. Kwong, “Silicon modulators and germanium photodetectors on SOI: Monolithic integration, compatibility, and performance optimization,” IEEE Sel. Top. Quantum Electron.16(1), 307–315 (2010). [CrossRef]
- X. Zheng, D. Patil, J. Lexau, F. Liu, G. Li, H. Thacker, Y. Luo, I. Shubin, J. Li, J. Yao, P. Dong, D. Feng, M. Asghari, T. Pinguet, A. Mekis, P. Amberg, M. Dayringer, J. Gainsley, H. F. Moghadam, E. Alon, K. Raj, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “Ultra-efficient 10 Gb/s hybrid integrated silicon photonic transmitter and receiver,” Opt. Express19(6), 5172–5186 (2011). [CrossRef] [PubMed]
- X. Zheng, F. Liu, D. Patil, H. Thacker, Y. Luo, T. Pinguet, A. Mekis, J. Yao, G. Li, J. Shi, K. Raj, J. Lexau, E. Alon, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “A sub-picojoule-per-bit CMOS photonic receiver for densely integrated systems,” Opt. Express18(1), 204–211 (2010). [CrossRef] [PubMed]
- M. Morse, O. Dosunmu, T. Yin, Y. Kang, H. D. Liu, G. Sarid, E. Ginsburg, R. Cohen, S. Litski, and M. Zadka, “Performance of Ge/Si receivers at 1310 nm,” Physica E41(6), 1076–1081 (2009). [CrossRef]
- J. W. Park, J.-B. You, I. G. Kim, and G. Kim, “High-modulation efficiency silicon Mach-Zehnder optical modulator based on carrier depletion in a PN Diode,” Opt. Express17(18), 15520–15524 (2009). [CrossRef] [PubMed]
- J.-B. You, M. Park, J.-W. Park, and G. Kim, “12.5 Gbps optical modulation of silicon racetrack resonator based on carrier-depletion in asymmetric p-n diode,” Opt. Express16(22), 18340–18344 (2008). [CrossRef] [PubMed]
- M. Watts, W. Zortman, D. Trotter, R. Young, and A. Lentine, “Low-voltage, compact, depletion-mode, silicon Mach–Zehnder modulator,” IEEE J. Sel. Top. Quantum Electron.16(1), 159–164 (2010). [CrossRef]
- H. Yu, S. Ren, W. Jung, A. Okyay, D. Miller, and K. Saraswat, “High-efficiency p-i-n photodetectors on selective-area-grown Ge for monolithic integration,” IEEE Electron Device Lett.30(11), 1161–1163 (2009). [CrossRef]
- T. Y. Liow, K. W. Ang, Q. Fang, J. F. Song, Y. Z. Xiong, M. B. Yu, G. Q. Lo, and D. L. Kwong, “Silicon modulators and germanium photodetectors on SOI: Monolithic integration, compatibility, and performance optimization,” IEEE Sel. Top. Quantum Electron.16(1), 307–315 (2010). [CrossRef]
- Y. Kang, H.-D. Liu, M. Morse, M. J. Paniccia, M. Zadka, S. Litski, G. Sarid, A. Pauchard, Y.-H. Kuo, H.-W. Chen, W. S. Zaoui, J. E. Bowers, A. Beling, D. C. McIntosh, X. Zheng, and J. C. Campbell, “Monolithic germanium/silicon avalanche photodiodes with 340 GHz gain–bandwidth product,” Nature Photon.3, 59–63 (2009).
- M. Morse, O. Dosunmu, T. Yin, Y. Kang, H. D. Liu, G. Sarid, E. Ginsburg, R. Cohen, S. Litski, and M. Zadka, “Performance of Ge/Si receivers at 1310 nm,” Physica E41(6), 1076–1081 (2009). [CrossRef]
- Y. Kang, H.-D. Liu, M. Morse, M. J. Paniccia, M. Zadka, S. Litski, G. Sarid, A. Pauchard, Y.-H. Kuo, H.-W. Chen, W. S. Zaoui, J. E. Bowers, A. Beling, D. C. McIntosh, X. Zheng, and J. C. Campbell, “Monolithic germanium/silicon avalanche photodiodes with 340 GHz gain–bandwidth product,” Nature Photon.3, 59–63 (2009).
- M. Haurylau, G. Chen, H. Chen, J. Zhang, N. A. Nelson, D. H. Albonesi, E. G. Friedman, and P. M. Fauchet, “On-chip optical interconnect roadmap: challenges and critical directions,” IEEE J. Sel. Top. Quantum Electron.12(6), 1699–1705 (2006). [CrossRef]
- N. N. Feng, S. Liao, D. Feng, P. Dong, D. Zheng, H. Liang, R. Shafiiha, G. Li, J. E. Cunningham, A. V. Krishnamoorthy, and M. Asghari, “High speed carrier-depletion modulators with 1.4V-cm V(π)L integrated on 0.25microm silicon-on-insulator waveguides,” Opt. Express18(8), 7994–7999 (2010). [CrossRef] [PubMed]
- P. Dong, S. Liao, D. Feng, H. Liang, D. Zheng, R. Shafiiha, C.-C. Kung, W. Qian, G. Li, X. Zheng, A. V. Krishnamoorthy, and M. Asghari, “Low Vpp, ultralow-energy, compact, high-speed silicon electro-optic modulator,” Opt. Express17(25), 22484–22490 (2009). [CrossRef] [PubMed]
- D. Feng, S. Liao, P. Dong, N. Feng, H. Liang, D. Zheng, C. Kung, J. Fong, R. Shafiiha, J. Cunningham, A. V. Krishnamoorthy, and M. Asghari, “High-speed Ge photodetector monolithically integrated with large cross-section silicon-on-insulator waveguide,” Appl. Phys. Lett.95(26), 261105 (2009). [CrossRef]
- X. Zheng, D. Patil, J. Lexau, F. Liu, G. Li, H. Thacker, Y. Luo, I. Shubin, J. Li, J. Yao, P. Dong, D. Feng, M. Asghari, T. Pinguet, A. Mekis, P. Amberg, M. Dayringer, J. Gainsley, H. F. Moghadam, E. Alon, K. Raj, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “Ultra-efficient 10 Gb/s hybrid integrated silicon photonic transmitter and receiver,” Opt. Express19(6), 5172–5186 (2011). [CrossRef] [PubMed]
- X. Zheng, F. Liu, D. Patil, H. Thacker, Y. Luo, T. Pinguet, A. Mekis, J. Yao, G. Li, J. Shi, K. Raj, J. Lexau, E. Alon, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “A sub-picojoule-per-bit CMOS photonic receiver for densely integrated systems,” Opt. Express18(1), 204–211 (2010). [CrossRef] [PubMed]
- Y. Kang, H.-D. Liu, M. Morse, M. J. Paniccia, M. Zadka, S. Litski, G. Sarid, A. Pauchard, Y.-H. Kuo, H.-W. Chen, W. S. Zaoui, J. E. Bowers, A. Beling, D. C. McIntosh, X. Zheng, and J. C. Campbell, “Monolithic germanium/silicon avalanche photodiodes with 340 GHz gain–bandwidth product,” Nature Photon.3, 59–63 (2009).
- P. Dong, S. Liao, D. Feng, H. Liang, D. Zheng, R. Shafiiha, C.-C. Kung, W. Qian, G. Li, X. Zheng, A. V. Krishnamoorthy, and M. Asghari, “Low Vpp, ultralow-energy, compact, high-speed silicon electro-optic modulator,” Opt. Express17(25), 22484–22490 (2009). [CrossRef] [PubMed]
- M. Watts, W. Zortman, D. Trotter, R. Young, and A. Lentine, “Low-voltage, compact, depletion-mode, silicon Mach–Zehnder modulator,” IEEE J. Sel. Top. Quantum Electron.16(1), 159–164 (2010). [CrossRef]
Appl. Phys. Lett.
- D. Feng, S. Liao, P. Dong, N. Feng, H. Liang, D. Zheng, C. Kung, J. Fong, R. Shafiiha, J. Cunningham, A. V. Krishnamoorthy, and M. Asghari, “High-speed Ge photodetector monolithically integrated with large cross-section silicon-on-insulator waveguide,” Appl. Phys. Lett.95(26), 261105 (2009). [CrossRef]
Electron. Lett.
- L. Liao, A. Liu, D. Rubin, J. Basak, Y. Chetrit, H. Nguyen, R. Cohen, N. Izhaky, M. Paniccia, N. Izhaky, and M. Paniccia, “40Gbit/s silicon optical modulator high-speed applications,” Electron. Lett.43(22), 1196–1197 (2007). [CrossRef]
IEEE Electron Device Lett.
- H. Yu, S. Ren, W. Jung, A. Okyay, D. Miller, and K. Saraswat, “High-efficiency p-i-n photodetectors on selective-area-grown Ge for monolithic integration,” IEEE Electron Device Lett.30(11), 1161–1163 (2009). [CrossRef]
IEEE J. Quantum Electron.
- R. Soref and B. Bennett, “Electrooptical effects in silicon,” IEEE J. Quantum Electron.23(1), 123–129 (1987). [CrossRef]
IEEE J. Sel. Top. Quantum Electron.
- M. Haurylau, G. Chen, H. Chen, J. Zhang, N. A. Nelson, D. H. Albonesi, E. G. Friedman, and P. M. Fauchet, “On-chip optical interconnect roadmap: challenges and critical directions,” IEEE J. Sel. Top. Quantum Electron.12(6), 1699–1705 (2006). [CrossRef]
- M. Watts, W. Zortman, D. Trotter, R. Young, and A. Lentine, “Low-voltage, compact, depletion-mode, silicon Mach–Zehnder modulator,” IEEE J. Sel. Top. Quantum Electron.16(1), 159–164 (2010). [CrossRef]
IEEE Photon. Technol. Lett.
- M. Rasras, D. Gill, M. Earnshaw, C. Doerr, J. Weiner, C. Bolle, and Y. Chen, “CMOS silicon receiver integrated with Ge detector and reconfigurable optical filter,” IEEE Photon. Technol. Lett.22(2), 112–114 (2010). [CrossRef]
- M. Jutzi, M. Berroth, G. Wöhl, M. Oehme, and E. Kasper, “Ge-on-Si vertical incidence photodiodes with 39-GHz bandwidth,” IEEE Photon. Technol. Lett.17(7), 1510–1512 (2005). [CrossRef]
- D. Suh, S. Kim, J. Joo, and G. Kim, “36-GHz high-responsivity Ge photodetectors grown by RPCVD,” IEEE Photon. Technol. Lett.21(10), 672–674 (2009). [CrossRef]
IEEE Sel. Top. Quantum Electron.
- T. Y. Liow, K. W. Ang, Q. Fang, J. F. Song, Y. Z. Xiong, M. B. Yu, G. Q. Lo, and D. L. Kwong, “Silicon modulators and germanium photodetectors on SOI: Monolithic integration, compatibility, and performance optimization,” IEEE Sel. Top. Quantum Electron.16(1), 307–315 (2010). [CrossRef]
IEEE Trans. Comput.
- A. Shacham, K. Bergman, and L. P. Carloni, “Photonic networks-on-chip for future generations of chip multiprocessors,” IEEE Trans. Comput.57(9), 1246–1260 (2008). [CrossRef]
IEEE. Micro.
- C. Gunn, “CMOS photonics for high-speed interconnects,” IEEE. Micro.26(2), 58–66 (2006). [CrossRef]
Nature
- S. Assefa, F. Xia, and Y. A. Vlasov, “Reinventing germanium avalanche photodetector for nanophotonic on-chip optical interconnects,” Nature464(7285), 80–84 (2010). [CrossRef] [PubMed]
Nature Photon.
- Y. Kang, H.-D. Liu, M. Morse, M. J. Paniccia, M. Zadka, S. Litski, G. Sarid, A. Pauchard, Y.-H. Kuo, H.-W. Chen, W. S. Zaoui, J. E. Bowers, A. Beling, D. C. McIntosh, X. Zheng, and J. C. Campbell, “Monolithic germanium/silicon avalanche photodiodes with 340 GHz gain–bandwidth product,” Nature Photon.3, 59–63 (2009).
Opt. Express
- X. Zheng, F. Liu, D. Patil, H. Thacker, Y. Luo, T. Pinguet, A. Mekis, J. Yao, G. Li, J. Shi, K. Raj, J. Lexau, E. Alon, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “A sub-picojoule-per-bit CMOS photonic receiver for densely integrated systems,” Opt. Express18(1), 204–211 (2010). [CrossRef] [PubMed]
- X. Zheng, D. Patil, J. Lexau, F. Liu, G. Li, H. Thacker, Y. Luo, I. Shubin, J. Li, J. Yao, P. Dong, D. Feng, M. Asghari, T. Pinguet, A. Mekis, P. Amberg, M. Dayringer, J. Gainsley, H. F. Moghadam, E. Alon, K. Raj, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “Ultra-efficient 10 Gb/s hybrid integrated silicon photonic transmitter and receiver,” Opt. Express19(6), 5172–5186 (2011). [CrossRef] [PubMed]
- S. Liao, N. N. Feng, D. Feng, P. Dong, R. Shafiiha, C. C. Kung, H. Liang, W. Qian, Y. Liu, J. Fong, J. E. Cunningham, Y. Luo, and M. Asghari, “36 GHz submicron silicon waveguide germanium photodetector,” Opt. Express19(11), 10967–10972 (2011). [CrossRef] [PubMed]
- J. Joo, S. Kim, I. Kim, K. Jang, and G. Kim, “High- sensitivity 10 Gbps Ge-on- Si photoreceiver operating at λ ~ 1.55 µm ,” Opt. Express18, 16474–16479 (2010). [CrossRef] [PubMed]
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- L. Vivien, J. Osmond, J. M. Fédéli, D. Marris-Morini, P. Crozat, J. F. Damlencourt, E. Cassan, Y. Lecunff, and S. Laval, “42 GHz p.i.n Germanium photodetector integrated in a silicon-on-insulator waveguide,” Opt. Express17(8), 6252–6257 (2009). [CrossRef] [PubMed]
- A. Liu, L. Liao, D. Rubin, H. Nguyen, B. Ciftcioglu, Y. Chetrit, N. Izhaky, and M. Paniccia, “High-speed optical modulation based on carrier depletion in a silicon waveguide,” Opt. Express15(2), 660–668 (2007). [CrossRef] [PubMed]
- W. M. Green, M. J. Rooks, L. Sekaric, and Y. A. Vlasov, “Ultra-compact, low RF power, 10 Gb/s silicon Mach-Zehnder modulator,” Opt. Express15(25), 17106–17113 (2007). [CrossRef] [PubMed]
- J. W. Park, J.-B. You, I. G. Kim, and G. Kim, “High-modulation efficiency silicon Mach-Zehnder optical modulator based on carrier depletion in a PN Diode,” Opt. Express17(18), 15520–15524 (2009). [CrossRef] [PubMed]
- J.-B. You, M. Park, J.-W. Park, and G. Kim, “12.5 Gbps optical modulation of silicon racetrack resonator based on carrier-depletion in asymmetric p-n diode,” Opt. Express16(22), 18340–18344 (2008). [CrossRef] [PubMed]
- P. Dong, S. Liao, D. Feng, H. Liang, D. Zheng, R. Shafiiha, C.-C. Kung, W. Qian, G. Li, X. Zheng, A. V. Krishnamoorthy, and M. Asghari, “Low Vpp, ultralow-energy, compact, high-speed silicon electro-optic modulator,” Opt. Express17(25), 22484–22490 (2009). [CrossRef] [PubMed]
- N. N. Feng, S. Liao, D. Feng, P. Dong, D. Zheng, H. Liang, R. Shafiiha, G. Li, J. E. Cunningham, A. V. Krishnamoorthy, and M. Asghari, “High speed carrier-depletion modulators with 1.4V-cm V(π)L integrated on 0.25microm silicon-on-insulator waveguides,” Opt. Express18(8), 7994–7999 (2010). [CrossRef] [PubMed]
- F. Y. Gardes, D. J. Thomson, N. G. Emerson, and G. T. Reed, “40 Gb/s silicon photonics modulator for TE and TM polarizations,” Opt. Express19(12), 11804–11814 (2011). [CrossRef]
- D. J. Thomson, F. Y. Gardes, Y. Hu, G. Mashanovich, M. Fournier, P. Grosse, J.-M. Fedeli, and G. T. Reed, “High contrast 40Gbit/s optical modulation in silicon,” Opt. Express19(12), 11507–11516 (2011). [CrossRef] [PubMed]
- G. Rasigade, M. Ziebell, D. Marris-Morini, J.-M. Fédéli, F. Milesi, P. Grosse, D. Bouville, E. Cassan, and L. Vivien, “High extinction ratio 10 Gbit/s silicon optical modulator,” Opt. Express19(7), 5827–5832 (2011). [CrossRef] [PubMed]
Physica E
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Proc. IEEE
- D. Miller, “Device requirements for optical interconnects to silicon chips,” Proc. IEEE97(7), 1166–1185 (2009). [CrossRef]
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2011, Gardes, Opt. Express
- X. Zheng, D. Patil, J. Lexau, F. Liu, G. Li, H. Thacker, Y. Luo, I. Shubin, J. Li, J. Yao, P. Dong, D. Feng, M. Asghari, T. Pinguet, A. Mekis, P. Amberg, M. Dayringer, J. Gainsley, H. F. Moghadam, E. Alon, K. Raj, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “Ultra-efficient 10 Gb/s hybrid integrated silicon photonic transmitter and receiver,” Opt. Express19(6), 5172–5186 (2011). [CrossRef] [PubMed]
- N. N. Feng, S. Liao, D. Feng, P. Dong, D. Zheng, H. Liang, R. Shafiiha, G. Li, J. E. Cunningham, A. V. Krishnamoorthy, and M. Asghari, “High speed carrier-depletion modulators with 1.4V-cm V(π)L integrated on 0.25microm silicon-on-insulator waveguides,” Opt. Express18(8), 7994–7999 (2010). [CrossRef] [PubMed]
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- M. Rasras, D. Gill, M. Earnshaw, C. Doerr, J. Weiner, C. Bolle, and Y. Chen, “CMOS silicon receiver integrated with Ge detector and reconfigurable optical filter,” IEEE Photon. Technol. Lett.22(2), 112–114 (2010). [CrossRef]
- M. Watts, W. Zortman, D. Trotter, R. Young, and A. Lentine, “Low-voltage, compact, depletion-mode, silicon Mach–Zehnder modulator,” IEEE J. Sel. Top. Quantum Electron.16(1), 159–164 (2010). [CrossRef]
- D. Feng, S. Liao, P. Dong, N. Feng, H. Liang, D. Zheng, C. Kung, J. Fong, R. Shafiiha, J. Cunningham, A. V. Krishnamoorthy, and M. Asghari, “High-speed Ge photodetector monolithically integrated with large cross-section silicon-on-insulator waveguide,” Appl. Phys. Lett.95(26), 261105 (2009). [CrossRef]
- H. Yu, S. Ren, W. Jung, A. Okyay, D. Miller, and K. Saraswat, “High-efficiency p-i-n photodetectors on selective-area-grown Ge for monolithic integration,” IEEE Electron Device Lett.30(11), 1161–1163 (2009). [CrossRef]
- D. Miller, “Device requirements for optical interconnects to silicon chips,” Proc. IEEE97(7), 1166–1185 (2009). [CrossRef]
- M. Morse, O. Dosunmu, T. Yin, Y. Kang, H. D. Liu, G. Sarid, E. Ginsburg, R. Cohen, S. Litski, and M. Zadka, “Performance of Ge/Si receivers at 1310 nm,” Physica E41(6), 1076–1081 (2009). [CrossRef]
- Y. Kang, H.-D. Liu, M. Morse, M. J. Paniccia, M. Zadka, S. Litski, G. Sarid, A. Pauchard, Y.-H. Kuo, H.-W. Chen, W. S. Zaoui, J. E. Bowers, A. Beling, D. C. McIntosh, X. Zheng, and J. C. Campbell, “Monolithic germanium/silicon avalanche photodiodes with 340 GHz gain–bandwidth product,” Nature Photon.3, 59–63 (2009).
- D. Suh, S. Kim, J. Joo, and G. Kim, “36-GHz high-responsivity Ge photodetectors grown by RPCVD,” IEEE Photon. Technol. Lett.21(10), 672–674 (2009). [CrossRef]
- A. Shacham, K. Bergman, and L. P. Carloni, “Photonic networks-on-chip for future generations of chip multiprocessors,” IEEE Trans. Comput.57(9), 1246–1260 (2008). [CrossRef]
- L. Liao, A. Liu, D. Rubin, J. Basak, Y. Chetrit, H. Nguyen, R. Cohen, N. Izhaky, M. Paniccia, N. Izhaky, and M. Paniccia, “40Gbit/s silicon optical modulator high-speed applications,” Electron. Lett.43(22), 1196–1197 (2007). [CrossRef]
- M. Haurylau, G. Chen, H. Chen, J. Zhang, N. A. Nelson, D. H. Albonesi, E. G. Friedman, and P. M. Fauchet, “On-chip optical interconnect roadmap: challenges and critical directions,” IEEE J. Sel. Top. Quantum Electron.12(6), 1699–1705 (2006). [CrossRef]
- C. Gunn, “CMOS photonics for high-speed interconnects,” IEEE. Micro.26(2), 58–66 (2006). [CrossRef]
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