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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 19, Iss. 4 — Feb. 14, 2011
  • pp: 2916–2921

Vertically-integrated multimode interferometer coupler for 3D photonic circuits in SOI

Chris J. Brooks, Andrew P. Knights, and Paul E. Jessop  »View Author Affiliations

Optics Express, Vol. 19, Issue 4, pp. 2916-2921 (2011)

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Vertical optical coupling is demonstrated in a multimode interferometer structure fabricated using silicon-on-insulator (SOI) material. These CMOS-compatible couplers are suitable to be used to transfer optical power between stacked waveguide layers of a three-dimensional photonic circuit. Coupling between these layers can be restricted to certain regions by selectively fabricating a silicon channel between them, resulting in an isolated multimode waveguide section. Standard photolithography and etching techniques were used to fabricate proof-of-concept devices consisting of a channel waveguide coupling into a silicon waveguide that is vertically multimode. An optical coupling ratio of 93±4% between the upper and lower waveguide regions of the device was achieved with a coupler length of 241 µm.

© 2011 OSA

OCIS Codes
(130.0130) Integrated optics : Integrated optics
(130.3120) Integrated optics : Integrated optics devices

ToC Category:
Integrated Optics

Original Manuscript: October 21, 2010
Revised Manuscript: January 15, 2011
Manuscript Accepted: January 24, 2011
Published: February 1, 2011

Chris J. Brooks, Andrew P. Knights, and Paul E. Jessop, "Vertically-integrated multimode interferometer coupler for 3D photonic circuits in SOI," Opt. Express 19, 2916-2921 (2011)

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