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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 19, Iss. 5 — Feb. 28, 2011
  • pp: 3925–3936

Three-dimensional cavity nanoantenna coupled plasmonic nanodots for ultrahigh and uniform surface-enhanced Raman scattering over large area

Wen-Di Li, Fei Ding, Jonathan Hu, and Stephen Y. Chou  »View Author Affiliations

Optics Express, Vol. 19, Issue 5, pp. 3925-3936 (2011)

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We propose and demonstrate a new SERS substrate architecture that couples a dense three-dimensional (3-D) cavity nanoantenna array, through nano-gaps, with dense plasmonic nanodots; and a new nanofabrication that combines nanoimprint, guided self-assembly and self-alignment and has fabricated the architecture precisely, simply, inexpensively and over large area (4-inch wafer). We experimentally achieved not only high area-average SERS enhancement (1.2 × 109) but also excellent uniformity (22.4% variation) at the same time over the entire large-area sample by measuring 90 points with a regular mapping distance. The best uniformity achieved is 15% variation over 1.6 mm by 1.6 mm area at slightly lower enhancement factor and is independent of the excitation laser probe size, which had an area varying from ~1 to 10,000 μm2.

© 2011 OSA

OCIS Codes
(220.4241) Optical design and fabrication : Nanostructure fabrication
(250.5403) Optoelectronics : Plasmonics
(240.6695) Optics at surfaces : Surface-enhanced Raman scattering

ToC Category:
Optics at Surfaces

Original Manuscript: December 20, 2010
Revised Manuscript: February 4, 2011
Manuscript Accepted: February 9, 2011
Published: February 14, 2011

Wen-Di Li, Fei Ding, Jonathan Hu, and Stephen Y. Chou, "Three-dimensional cavity nanoantenna coupled plasmonic nanodots for ultrahigh and uniform surface-enhanced Raman scattering over large area," Opt. Express 19, 3925-3936 (2011)

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