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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 19, Iss. 5 — Feb. 28, 2011
  • pp: 4722–4727

Vertical chip-to-chip coupling between silicon photonic integrated circuits using cantilever couplers

Peng Sun and Ronald M. Reano  »View Author Affiliations

Optics Express, Vol. 19, Issue 5, pp. 4722-4727 (2011)

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We demonstrate vertical chip-to-chip light coupling using silicon strip waveguide cantilever couplers. The guided-wave couplers consist of silicon strip waveguides embedded within silicon dioxide cantilevers. The cantilevers deflect 90° out-of-plane via residual stress, allowing vertical light coupling between separate chips. A chip-to-chip coupling loss of 2.5 dB per connection is measured for TE polarization and 1.1 dB for TM polarization at 1550 nm wavelength. The coupling loss varies by less than ± 0.8 dB within the wavelength range from 1500 nm to 1565 nm for both polarizations. The couplers enable broadband and compact system architectures involving high speed vertical data transport between photonic integrated circuits.

© 2011 OSA

OCIS Codes
(130.3120) Integrated optics : Integrated optics devices
(200.4650) Optics in computing : Optical interconnects

ToC Category:
Integrated Optics

Original Manuscript: January 19, 2011
Revised Manuscript: February 17, 2011
Manuscript Accepted: February 18, 2011
Published: February 24, 2011

Peng Sun and Ronald M. Reano, "Vertical chip-to-chip coupling between silicon photonic integrated circuits using cantilever couplers," Opt. Express 19, 4722-4727 (2011)

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