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Femtosecond pulse damage thresholds of dielectric coatings in vacuumDuy N. Nguyen, Luke A. Emmert, Paul Schwoebel, Dinesh Patel, Carmen S. Menoni, Michelle Shinn, and Wolfgang Rudolph »View Author Affiliations
Duy N. Nguyen,1
Luke A. Emmert,1
Paul Schwoebel,1
Dinesh Patel,2
Carmen S. Menoni,2
Michelle Shinn,3
and Wolfgang Rudolph1,*
1Department of Physics and Astronomy, University of New Mexico, Albuquerque, NM 87131, USA 2Department of Electrical and Computer Engineering, Colorado State University, Fort Collins, CO 80523, USA 3Free Electron Laser Division, Jefferson National Accelerator Lab, Newport News, VA 23606, USA *Corresponding author: wrudolph@unm.edu |
Optics Express, Vol. 19, Issue 6, pp. 5690-5697 (2011)
http://dx.doi.org/10.1364/OE.19.005690
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Abstract
The dielectric breakdown behavior of dielectric coatings in studied for different ambient gas pressures with femtosecond laser pulses. At 10−7 Torr, the multiple femtosecond pulse damage threshold, Fm, is about 10% of the single pulse damage fluence F(1) for hafnia and silica films compared to about 65% and 50%, respectively, at 630 Torr. In contrast, the single-pulse damage threshold is pressure independent. The decrease of Fm with decreasing air pressure correlates with the water vapor and oxygen content of the ambient gas with the former having the greater effect. The decrease in Fm is likely associated with an accumulation of defects derived from oxygen deficiency, for example vacancies. From atmospheric air pressure to pressures of ~3x10−6 Torr, the damage “crater” starts deterministically at the center of the beam and grows in diameter as the fluence increases. At pressure below 3x10−6 Torr, damage is initiated at random “sites” within the exposed area in hafnia films, while the damage morphology remains deterministic in silica films. A possible explanation is that absorbing centers are created at predisposed sample sites in hafnia, for example at boundaries between crystallites, or crystalline and amorphous phases.
© 2011 OSA
OCIS Codes
(140.3330) Lasers and laser optics : Laser damage
(140.7090) Lasers and laser optics : Ultrafast lasers
(310.6870) Thin films : Thin films, other properties
ToC Category:
Lasers and Laser Optics
History
Original Manuscript: February 9, 2011
Revised Manuscript: March 2, 2011
Manuscript Accepted: March 3, 2011
Published: March 11, 2011
Citation
Duy N. Nguyen, Luke A. Emmert, Paul Schwoebel, Dinesh Patel, Carmen S. Menoni, Michelle Shinn, and Wolfgang Rudolph, "Femtosecond pulse damage thresholds of dielectric coatings in vacuum," Opt. Express 19, 5690-5697 (2011)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-19-6-5690
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- F. E. Hovis, B. Shepherd, C. Radcliffe, and H. Maliborski, “Mechanisms of contamination induced optical damage in lasers,” Proc. SPIE 2428, 72–83 (1994). [CrossRef]
- G. M. Harry, M. R. Abernathy, A. E. Becerra-Toledo, H. Armandula, E. Black, K. Dooley, M. Eichenfield, C. Nwabugwu, A. Villar, D. R. M. Crooks, G. Cagnoli, J. Hough, C. R. How, I. MacLaren, P. Murray, S. Reid, S. Rowan, P. H. Sneddon, M. M. Fejer, R. Route, S. D. Penn, P. Ganau, J.-M. Mackowski, C. Michel, L. Pinard, and A. Remillieux, “Titania-doped tantala/silica coatings for gravitational-wave detection,” Class. Quantum Gravity 24(2), 405–415 (2007). [CrossRef]
- A. P. Joglekar, H. Liu, G. J. Spooner, E. Meyhofer, G. Mourou, and A. J. Hunt, “A study of deterministic character of optical damage by femtosecond laser pulses and applications to nanomachining,” Appl. Phys. B 77, 25–30 (2003). [CrossRef]
- M. Mero, B. Clapp, J. C. Jasapara, W. Rudolph, D. Ristau, K. Starke, J. Krüger, S. Martin, and W. Kautek, “On the damage behavior of dielectric films when illuminated with multiple femtosecond laser pulses,” Opt. Eng. 44(5), 051107 (2005). [CrossRef]
- L. Jensen, M. Jupe, H. Madebach, H. Ehlers, K. Starke, D. Ristau, W. Riede, P. Allenspacher, and H. Schroeder, “Damage threshold investigations of high power laser optics under atmospheric and vacuum conditions,” Proc. SPIE 6403, 64030U, 64030U-10 (2006). [CrossRef]
- A. P. Joglekar, H. Liu, G. J. Spooner, E. Meyhofer, G. Mourou, and A. J. Hunt, “A study of deterministic character of optical damage by femtosecond laser pulses and applications to nanomachining,” Appl. Phys. B 77, 25–30 (2003). [CrossRef]
- L. Jensen, M. Jupe, H. Madebach, H. Ehlers, K. Starke, D. Ristau, W. Riede, P. Allenspacher, and H. Schroeder, “Damage threshold investigations of high power laser optics under atmospheric and vacuum conditions,” Proc. SPIE 6403, 64030U, 64030U-10 (2006). [CrossRef]
- M. Mero, B. Clapp, J. C. Jasapara, W. Rudolph, D. Ristau, K. Starke, J. Krüger, S. Martin, and W. Kautek, “On the damage behavior of dielectric films when illuminated with multiple femtosecond laser pulses,” Opt. Eng. 44(5), 051107 (2005). [CrossRef]
- K. Yamada, T. Yamazaki, N. Sei, T. Shimizu, R. Suzuki, T. Ohdaira, M. Kawai, M. Yokoyama, S. Hamada, K. Saeki, E. Nishimura, T. Mikado, T. Noguchi, S. Sugiyama, M. Chiwaki, H. Ohgaki, and T. Tomimasu, “Degradation and restoration of dielectric-coated cavity mirrors in the NIJI-IV FEL,” Nucl. Instrum. Meth. A 358(1-3), 392–395 (1995). [CrossRef]
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- A. S. Foster, F. Lopez Gejo, A. L. Shluger, and R. M. Nieminen, “Vacancy and interstitial defects in hafnia,” Phys. Rev. B 65(17), 174117 (2002). [CrossRef]
- B. C. Stuart, M. D. Feit, S. Herman, A. M. Rubenchik, B. W. Shore, and M. D. Perry, “Nanosecond-to-femtosecond laser-induced breakdown in dielectrics,” Phys. Rev. B Condens. Matter 53(4), 1749–1761 (1996). [CrossRef] [PubMed]
- G. M. Harry, M. R. Abernathy, A. E. Becerra-Toledo, H. Armandula, E. Black, K. Dooley, M. Eichenfield, C. Nwabugwu, A. Villar, D. R. M. Crooks, G. Cagnoli, J. Hough, C. R. How, I. MacLaren, P. Murray, S. Reid, S. Rowan, P. H. Sneddon, M. M. Fejer, R. Route, S. D. Penn, P. Ganau, J.-M. Mackowski, C. Michel, L. Pinard, and A. Remillieux, “Titania-doped tantala/silica coatings for gravitational-wave detection,” Class. Quantum Gravity 24(2), 405–415 (2007). [CrossRef]
- A. P. Joglekar, H. Liu, G. J. Spooner, E. Meyhofer, G. Mourou, and A. J. Hunt, “A study of deterministic character of optical damage by femtosecond laser pulses and applications to nanomachining,” Appl. Phys. B 77, 25–30 (2003). [CrossRef]
- L. Jensen, M. Jupe, H. Madebach, H. Ehlers, K. Starke, D. Ristau, W. Riede, P. Allenspacher, and H. Schroeder, “Damage threshold investigations of high power laser optics under atmospheric and vacuum conditions,” Proc. SPIE 6403, 64030U, 64030U-10 (2006). [CrossRef]
- M. Mero, B. Clapp, J. C. Jasapara, W. Rudolph, D. Ristau, K. Starke, J. Krüger, S. Martin, and W. Kautek, “On the damage behavior of dielectric films when illuminated with multiple femtosecond laser pulses,” Opt. Eng. 44(5), 051107 (2005). [CrossRef]
- M. Mero, J. Liu, W. Rudolph, D. Ristau, and K. Starke, “Scaling laws of femtosecond laser pulse induced breakdown in oxide films,” Phys. Rev. B 71(11), 115109 (2005). [CrossRef]
- K. Starke and D. Ristau, “S., Martin, A. Hertwig, J. Krueger, P. Allenspacher, W. Riede, S. Meister, C. Theiss, A. J. Sabbah, W. Rudolph, V. Raab, R. Grigonis, T. Rikickas, V. Sirutkaitis, “Results of a round-robin experiment in multiple-pulse LIDT measurement with ultrashort pulses,” Proc. SPIE 5273, 388–395 (1994). [CrossRef]
- A. Rosenfeld, M. Lorenz, R. Stoian, and D. Ashkenasi, “Ultrashort-laser-pulse damage threshold of transparent materials and the role of incubation,” Appl. Phys., A Mater. Sci. Process. 69(7), S373–S376 (1999). [CrossRef]
- B. C. Stuart, M. D. Feit, S. Herman, A. M. Rubenchik, B. W. Shore, and M. D. Perry, “Nanosecond-to-femtosecond laser-induced breakdown in dielectrics,” Phys. Rev. B Condens. Matter 53(4), 1749–1761 (1996). [CrossRef] [PubMed]
- K. Yamada, T. Yamazaki, N. Sei, T. Shimizu, R. Suzuki, T. Ohdaira, M. Kawai, M. Yokoyama, S. Hamada, K. Saeki, E. Nishimura, T. Mikado, T. Noguchi, S. Sugiyama, M. Chiwaki, H. Ohgaki, and T. Tomimasu, “Degradation and restoration of dielectric-coated cavity mirrors in the NIJI-IV FEL,” Nucl. Instrum. Meth. A 358(1-3), 392–395 (1995). [CrossRef]
- K. Yamada, T. Yamazaki, N. Sei, T. Shimizu, R. Suzuki, T. Ohdaira, M. Kawai, M. Yokoyama, S. Hamada, K. Saeki, E. Nishimura, T. Mikado, T. Noguchi, S. Sugiyama, M. Chiwaki, H. Ohgaki, and T. Tomimasu, “Degradation and restoration of dielectric-coated cavity mirrors in the NIJI-IV FEL,” Nucl. Instrum. Meth. A 358(1-3), 392–395 (1995). [CrossRef]
- H. Takeuchi, D. Ha, and T. J. King, “Observation of Bulk HfO2 defects by spectroscopic ellipsometry,” J. Vac. Sci. Technol. A 22(4), 1337–1341 (2004). [CrossRef]
- B. Langdon, D. Patel, E. Krous, J. J. Rocca, C. S. Menoni, F. Tomasel, S. Kholi, P. R. McCurdy, P. Langston, and A. Ogloza, “Influence of process conditions on the optical properties HfO2/SiO2 thin films for high power laser coatings,” Proc. SPIE 6720, 67200X, 67200X-8 (2007). [CrossRef]
- K. Yamada, T. Yamazaki, N. Sei, T. Shimizu, R. Suzuki, T. Ohdaira, M. Kawai, M. Yokoyama, S. Hamada, K. Saeki, E. Nishimura, T. Mikado, T. Noguchi, S. Sugiyama, M. Chiwaki, H. Ohgaki, and T. Tomimasu, “Degradation and restoration of dielectric-coated cavity mirrors in the NIJI-IV FEL,” Nucl. Instrum. Meth. A 358(1-3), 392–395 (1995). [CrossRef]
- D. Ugolini, R. McKinney, and G. M. Harry, “Developing an optical chopper-modulated capacitive probe for measuring surface charge,” Rev. Sci. Instrum. 78(4), 046102 (2007). [CrossRef] [PubMed]
- G. M. Harry, M. R. Abernathy, A. E. Becerra-Toledo, H. Armandula, E. Black, K. Dooley, M. Eichenfield, C. Nwabugwu, A. Villar, D. R. M. Crooks, G. Cagnoli, J. Hough, C. R. How, I. MacLaren, P. Murray, S. Reid, S. Rowan, P. H. Sneddon, M. M. Fejer, R. Route, S. D. Penn, P. Ganau, J.-M. Mackowski, C. Michel, L. Pinard, and A. Remillieux, “Titania-doped tantala/silica coatings for gravitational-wave detection,” Class. Quantum Gravity 24(2), 405–415 (2007). [CrossRef]
- W. Riede, P. Allenspacher, H. Schroeder, D. Wernham, and Y. Lien, “Laser-induced hydrocarbon contamination in vacuum,” Proc. SPIE 5991, 59910H, 59910H-13 (2005). [CrossRef]
- K. Yamada, T. Yamazaki, N. Sei, T. Shimizu, R. Suzuki, T. Ohdaira, M. Kawai, M. Yokoyama, S. Hamada, K. Saeki, E. Nishimura, T. Mikado, T. Noguchi, S. Sugiyama, M. Chiwaki, H. Ohgaki, and T. Tomimasu, “Degradation and restoration of dielectric-coated cavity mirrors in the NIJI-IV FEL,” Nucl. Instrum. Meth. A 358(1-3), 392–395 (1995). [CrossRef]
- K. Yamada, T. Yamazaki, N. Sei, T. Shimizu, R. Suzuki, T. Ohdaira, M. Kawai, M. Yokoyama, S. Hamada, K. Saeki, E. Nishimura, T. Mikado, T. Noguchi, S. Sugiyama, M. Chiwaki, H. Ohgaki, and T. Tomimasu, “Degradation and restoration of dielectric-coated cavity mirrors in the NIJI-IV FEL,” Nucl. Instrum. Meth. A 358(1-3), 392–395 (1995). [CrossRef]
- K. Yamada, T. Yamazaki, N. Sei, T. Shimizu, R. Suzuki, T. Ohdaira, M. Kawai, M. Yokoyama, S. Hamada, K. Saeki, E. Nishimura, T. Mikado, T. Noguchi, S. Sugiyama, M. Chiwaki, H. Ohgaki, and T. Tomimasu, “Degradation and restoration of dielectric-coated cavity mirrors in the NIJI-IV FEL,” Nucl. Instrum. Meth. A 358(1-3), 392–395 (1995). [CrossRef]
Appl. Opt.
- A. Ansmann, U. Wandinger, O. Le Rille, D. Lajas, and A. G. Straume, “Particle backscatter and extinction profiling with the spaceborne high-spectral-resolution Doppler lidar ALADIN: methodology and simulations,” Appl. Opt. 46(26), 6606–6622 (2007). [CrossRef] [PubMed]
- F. E. Domann, M. F. Becker, A. H. Guenther, and A. F. Stewart, “Charged particle emission related to laser damage,” Appl. Opt. 25(9), 1371–1373 (1986). [CrossRef] [PubMed]
Appl. Phys. B
- A. P. Joglekar, H. Liu, G. J. Spooner, E. Meyhofer, G. Mourou, and A. J. Hunt, “A study of deterministic character of optical damage by femtosecond laser pulses and applications to nanomachining,” Appl. Phys. B 77, 25–30 (2003). [CrossRef]
Appl. Phys., A Mater. Sci. Process.
- A. Rosenfeld, M. Lorenz, R. Stoian, and D. Ashkenasi, “Ultrashort-laser-pulse damage threshold of transparent materials and the role of incubation,” Appl. Phys., A Mater. Sci. Process. 69(7), S373–S376 (1999). [CrossRef]
Class. Quantum Gravity
- G. M. Harry, M. R. Abernathy, A. E. Becerra-Toledo, H. Armandula, E. Black, K. Dooley, M. Eichenfield, C. Nwabugwu, A. Villar, D. R. M. Crooks, G. Cagnoli, J. Hough, C. R. How, I. MacLaren, P. Murray, S. Reid, S. Rowan, P. H. Sneddon, M. M. Fejer, R. Route, S. D. Penn, P. Ganau, J.-M. Mackowski, C. Michel, L. Pinard, and A. Remillieux, “Titania-doped tantala/silica coatings for gravitational-wave detection,” Class. Quantum Gravity 24(2), 405–415 (2007). [CrossRef]
J. Appl. Phys.
- L. A. Emmert, M. Mero, and W. Rudolph, “Modeling the effect of native and laser-induced states on the dielectric breakdown of wide band gap optical materials by multiple subpicosecond laser pulses,” J. Appl. Phys. 108(4), 043523 (2010). [CrossRef]
- S. R. George, J. A. Leraas, S. C. Langford, and J. T. Dickinson, “Interaction of vacuum ultraviolet excimer laser radiation with fused silica, I. Positive ion emission,” J. Appl. Phys. 107(3), 033107 (2010). [CrossRef]
J. Environ. Sci. (China)
- J. C. Livas and B. C. Moore, “LIGO vacuum system study,” J. Environ. Sci. (China) 32(6), 28–32 (1989).
J. Vac. Sci. Technol. A
- H. Takeuchi, D. Ha, and T. J. King, “Observation of Bulk HfO2 defects by spectroscopic ellipsometry,” J. Vac. Sci. Technol. A 22(4), 1337–1341 (2004). [CrossRef]
J. Vac. Sci. Technol. B
- R. R. Kunz, V. Liberman, and D. K. Downs, “Experimentation and modeling of organic photocontamination on lithographic optics,” J. Vac. Sci. Technol. B 18(3), 1306–1313 (2000). [CrossRef]
Nucl. Instrum. Meth. A
- K. Yamada, T. Yamazaki, N. Sei, T. Shimizu, R. Suzuki, T. Ohdaira, M. Kawai, M. Yokoyama, S. Hamada, K. Saeki, E. Nishimura, T. Mikado, T. Noguchi, S. Sugiyama, M. Chiwaki, H. Ohgaki, and T. Tomimasu, “Degradation and restoration of dielectric-coated cavity mirrors in the NIJI-IV FEL,” Nucl. Instrum. Meth. A 358(1-3), 392–395 (1995). [CrossRef]
Opt. Eng.
- M. Mero, B. Clapp, J. C. Jasapara, W. Rudolph, D. Ristau, K. Starke, J. Krüger, S. Martin, and W. Kautek, “On the damage behavior of dielectric films when illuminated with multiple femtosecond laser pulses,” Opt. Eng. 44(5), 051107 (2005). [CrossRef]
Phys. Rev. B
- M. Mero, J. Liu, W. Rudolph, D. Ristau, and K. Starke, “Scaling laws of femtosecond laser pulse induced breakdown in oxide films,” Phys. Rev. B 71(11), 115109 (2005). [CrossRef]
- A. S. Foster, F. Lopez Gejo, A. L. Shluger, and R. M. Nieminen, “Vacancy and interstitial defects in hafnia,” Phys. Rev. B 65(17), 174117 (2002). [CrossRef]
Phys. Rev. B Condens. Matter
- B. C. Stuart, M. D. Feit, S. Herman, A. M. Rubenchik, B. W. Shore, and M. D. Perry, “Nanosecond-to-femtosecond laser-induced breakdown in dielectrics,” Phys. Rev. B Condens. Matter 53(4), 1749–1761 (1996). [CrossRef] [PubMed]
Proc. SPIE
- K. Starke and D. Ristau, “S., Martin, A. Hertwig, J. Krueger, P. Allenspacher, W. Riede, S. Meister, C. Theiss, A. J. Sabbah, W. Rudolph, V. Raab, R. Grigonis, T. Rikickas, V. Sirutkaitis, “Results of a round-robin experiment in multiple-pulse LIDT measurement with ultrashort pulses,” Proc. SPIE 5273, 388–395 (1994). [CrossRef]
- B. Langdon, D. Patel, E. Krous, J. J. Rocca, C. S. Menoni, F. Tomasel, S. Kholi, P. R. McCurdy, P. Langston, and A. Ogloza, “Influence of process conditions on the optical properties HfO2/SiO2 thin films for high power laser coatings,” Proc. SPIE 6720, 67200X, 67200X-8 (2007). [CrossRef]
- D. N. Nguyen, L. A. Emmert, W. Rudolph, D. Patel, E. Krous, C. S. Menoni, and M. Shinn, “Studies of femtosecond laser induced damage of HfO2 thin film in atmospheric and vacuum environment,” Proc. SPIE 7504, 750403, 750403-8 (2009). [CrossRef]
- C. T. Scurlock, “A phenomenological study of the effect of trace contamination on lifetime reduction and laser-induced damage for optics,” Proc. SPIE 5647, 86–94 (2005). [CrossRef]
- S. Becker, A. Pereira, P. Bouchut, F. Geffraye, and C. Anglade, “Laser-induced contamination of silica coatings in vacuum,” Proc. SPIE 6403, 64030J, 64030J-12 (2006). [CrossRef]
- L. Jensen, M. Jupe, H. Madebach, H. Ehlers, K. Starke, D. Ristau, W. Riede, P. Allenspacher, and H. Schroeder, “Damage threshold investigations of high power laser optics under atmospheric and vacuum conditions,” Proc. SPIE 6403, 64030U, 64030U-10 (2006). [CrossRef]
- F. E. Hovis, B. Shepherd, C. Radcliffe, and H. Maliborski, “Mechanisms of contamination induced optical damage in lasers,” Proc. SPIE 2428, 72–83 (1994). [CrossRef]
- W. Riede, P. Allenspacher, H. Schroeder, D. Wernham, and Y. Lien, “Laser-induced hydrocarbon contamination in vacuum,” Proc. SPIE 5991, 59910H, 59910H-13 (2005). [CrossRef]
Rev. Sci. Instrum.
- D. Ugolini, R. McKinney, and G. M. Harry, “Developing an optical chopper-modulated capacitive probe for measuring surface charge,” Rev. Sci. Instrum. 78(4), 046102 (2007). [CrossRef] [PubMed]
Science
- M. D. Perry and G. Mourou, “Terawatt to petawatt subpicosecond lasers,” Science 264(5161), 917–924 (1994). [CrossRef] [PubMed]
Other
- D. R. Lide, “CRC: Handbook of chemistry and physics,” CRC Press, Inc. 73th ed., pp. 6–11 (1992).
- M.D. Shinn, “Irradiation of hafnia/silica multilayer coatings with a high average power FEL”, JLAB-TN-11–001.
- M. Mero, J. Zeller, and W. Rudolph, “Ultrafast processes in highly excited wide-gap dielectric thin films.” In: P. Hannaford (Ed.), in Femtosecond Laser Spectroscopy, (Springer, New York 2005).
2010, Emmert, J. Appl. Phys.
- L. A. Emmert, M. Mero, and W. Rudolph, “Modeling the effect of native and laser-induced states on the dielectric breakdown of wide band gap optical materials by multiple subpicosecond laser pulses,” J. Appl. Phys. 108(4), 043523 (2010). [CrossRef]
- S. R. George, J. A. Leraas, S. C. Langford, and J. T. Dickinson, “Interaction of vacuum ultraviolet excimer laser radiation with fused silica, I. Positive ion emission,” J. Appl. Phys. 107(3), 033107 (2010). [CrossRef]
- D. N. Nguyen, L. A. Emmert, W. Rudolph, D. Patel, E. Krous, C. S. Menoni, and M. Shinn, “Studies of femtosecond laser induced damage of HfO2 thin film in atmospheric and vacuum environment,” Proc. SPIE 7504, 750403, 750403-8 (2009). [CrossRef]
- G. M. Harry, M. R. Abernathy, A. E. Becerra-Toledo, H. Armandula, E. Black, K. Dooley, M. Eichenfield, C. Nwabugwu, A. Villar, D. R. M. Crooks, G. Cagnoli, J. Hough, C. R. How, I. MacLaren, P. Murray, S. Reid, S. Rowan, P. H. Sneddon, M. M. Fejer, R. Route, S. D. Penn, P. Ganau, J.-M. Mackowski, C. Michel, L. Pinard, and A. Remillieux, “Titania-doped tantala/silica coatings for gravitational-wave detection,” Class. Quantum Gravity 24(2), 405–415 (2007). [CrossRef]
- D. Ugolini, R. McKinney, and G. M. Harry, “Developing an optical chopper-modulated capacitive probe for measuring surface charge,” Rev. Sci. Instrum. 78(4), 046102 (2007). [CrossRef] [PubMed]
- B. Langdon, D. Patel, E. Krous, J. J. Rocca, C. S. Menoni, F. Tomasel, S. Kholi, P. R. McCurdy, P. Langston, and A. Ogloza, “Influence of process conditions on the optical properties HfO2/SiO2 thin films for high power laser coatings,” Proc. SPIE 6720, 67200X, 67200X-8 (2007). [CrossRef]
- S. Becker, A. Pereira, P. Bouchut, F. Geffraye, and C. Anglade, “Laser-induced contamination of silica coatings in vacuum,” Proc. SPIE 6403, 64030J, 64030J-12 (2006). [CrossRef]
- L. Jensen, M. Jupe, H. Madebach, H. Ehlers, K. Starke, D. Ristau, W. Riede, P. Allenspacher, and H. Schroeder, “Damage threshold investigations of high power laser optics under atmospheric and vacuum conditions,” Proc. SPIE 6403, 64030U, 64030U-10 (2006). [CrossRef]
- C. T. Scurlock, “A phenomenological study of the effect of trace contamination on lifetime reduction and laser-induced damage for optics,” Proc. SPIE 5647, 86–94 (2005). [CrossRef]
- W. Riede, P. Allenspacher, H. Schroeder, D. Wernham, and Y. Lien, “Laser-induced hydrocarbon contamination in vacuum,” Proc. SPIE 5991, 59910H, 59910H-13 (2005). [CrossRef]
- M. Mero, B. Clapp, J. C. Jasapara, W. Rudolph, D. Ristau, K. Starke, J. Krüger, S. Martin, and W. Kautek, “On the damage behavior of dielectric films when illuminated with multiple femtosecond laser pulses,” Opt. Eng. 44(5), 051107 (2005). [CrossRef]
- M. Mero, J. Liu, W. Rudolph, D. Ristau, and K. Starke, “Scaling laws of femtosecond laser pulse induced breakdown in oxide films,” Phys. Rev. B 71(11), 115109 (2005). [CrossRef]
- H. Takeuchi, D. Ha, and T. J. King, “Observation of Bulk HfO2 defects by spectroscopic ellipsometry,” J. Vac. Sci. Technol. A 22(4), 1337–1341 (2004). [CrossRef]
- A. P. Joglekar, H. Liu, G. J. Spooner, E. Meyhofer, G. Mourou, and A. J. Hunt, “A study of deterministic character of optical damage by femtosecond laser pulses and applications to nanomachining,” Appl. Phys. B 77, 25–30 (2003). [CrossRef]
- A. S. Foster, F. Lopez Gejo, A. L. Shluger, and R. M. Nieminen, “Vacancy and interstitial defects in hafnia,” Phys. Rev. B 65(17), 174117 (2002). [CrossRef]
- R. R. Kunz, V. Liberman, and D. K. Downs, “Experimentation and modeling of organic photocontamination on lithographic optics,” J. Vac. Sci. Technol. B 18(3), 1306–1313 (2000). [CrossRef]
- A. Rosenfeld, M. Lorenz, R. Stoian, and D. Ashkenasi, “Ultrashort-laser-pulse damage threshold of transparent materials and the role of incubation,” Appl. Phys., A Mater. Sci. Process. 69(7), S373–S376 (1999). [CrossRef]
- B. C. Stuart, M. D. Feit, S. Herman, A. M. Rubenchik, B. W. Shore, and M. D. Perry, “Nanosecond-to-femtosecond laser-induced breakdown in dielectrics,” Phys. Rev. B Condens. Matter 53(4), 1749–1761 (1996). [CrossRef] [PubMed]
- K. Yamada, T. Yamazaki, N. Sei, T. Shimizu, R. Suzuki, T. Ohdaira, M. Kawai, M. Yokoyama, S. Hamada, K. Saeki, E. Nishimura, T. Mikado, T. Noguchi, S. Sugiyama, M. Chiwaki, H. Ohgaki, and T. Tomimasu, “Degradation and restoration of dielectric-coated cavity mirrors in the NIJI-IV FEL,” Nucl. Instrum. Meth. A 358(1-3), 392–395 (1995). [CrossRef]
- M. D. Perry and G. Mourou, “Terawatt to petawatt subpicosecond lasers,” Science 264(5161), 917–924 (1994). [CrossRef] [PubMed]
- F. E. Hovis, B. Shepherd, C. Radcliffe, and H. Maliborski, “Mechanisms of contamination induced optical damage in lasers,” Proc. SPIE 2428, 72–83 (1994). [CrossRef]
- K. Starke and D. Ristau, “S., Martin, A. Hertwig, J. Krueger, P. Allenspacher, W. Riede, S. Meister, C. Theiss, A. J. Sabbah, W. Rudolph, V. Raab, R. Grigonis, T. Rikickas, V. Sirutkaitis, “Results of a round-robin experiment in multiple-pulse LIDT measurement with ultrashort pulses,” Proc. SPIE 5273, 388–395 (1994). [CrossRef]
- J. C. Livas and B. C. Moore, “LIGO vacuum system study,” J. Environ. Sci. (China) 32(6), 28–32 (1989).
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