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High extinction ratio 10 Gbit/s silicon optical modulatorGilles Rasigade, Melissa Ziebell, Delphine Marris-Morini, Jean-Marc Fédéli, Frédéric Milesi, Philippe Grosse, David Bouville, Eric Cassan, and Laurent Vivien »View Author Affiliations
Gilles Rasigade,1
Melissa Ziebell,1
Delphine Marris-Morini,1,*
Jean-Marc Fédéli,2
Frédéric Milesi,2
Philippe Grosse,2
David Bouville,1
Eric Cassan,1
and Laurent Vivien1
1Institut d’Electronique Fondamentale, Univ. Paris-Sud, CNRS, Bât. 220, F-91405 ORSAY cedex – France. 2CEA,LETI, Minatec Campus 17 rue des Martyrs, F-38054 GRENOBLE cedex 9, France *Corresponding author: delphine.morini@u-psud.fr |
Optics Express, Vol. 19, Issue 7, pp. 5827-5832 (2011)
http://dx.doi.org/10.1364/OE.19.005827
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Abstract
High speed and high extinction ratio silicon optical modulator using carrier depletion is experimentally demonstrated. The phase-shifter is a 1.8 mm-long PIPIN diode which is integrated in a Mach Zehnder interferometer. 8.1 dB Extinction Ratio at 10 Gbit/s is obtained simultaneously with optical loss as low as 6 dB.
© 2011 OSA
OCIS Codes
(130.0250) Integrated optics : Optoelectronics
(130.4110) Integrated optics : Modulators
ToC Category:
Integrated Optics
History
Original Manuscript: January 19, 2011
Revised Manuscript: February 22, 2011
Manuscript Accepted: March 2, 2011
Published: March 14, 2011
Citation
Gilles Rasigade, Melissa Ziebell, Delphine Marris-Morini, Jean-Marc Fédéli, Frédéric Milesi, Philippe Grosse, David Bouville, Eric Cassan, and Laurent Vivien, "High extinction ratio 10 Gbit/s silicon optical modulator," Opt. Express 19, 5827-5832 (2011)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-19-7-5827
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References
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- A. W. Fang, B. R. Koch, R. Jones, E. Lively, D. Liang, Y.-H. Kuo, and J. E. Bowers, “A distributed Bragg Reflector Silicon evanescent laser,” IEEE Photon. Technol. Lett. 20(20), 1667–1669 (2008). [CrossRef]
- L. Vivien, J. Osmond, J. M. Fédéli, D. Marris-Morini, P. Crozat, J. F. Damlencourt, E. Cassan, Y. Lecunff, and S. Laval, “42 GHz p.i.n Germanium photodetector integrated in a silicon-on-insulator waveguide,” Opt. Express 17(8), 6252–6257 (2009). [CrossRef] [PubMed]
- A. Soref and B. R. Bennett, “Electrooptical effects in silicon,” IEEE J. Quant. Electron. 23(1), 123–129 (1987). [CrossRef]
- L. Liao, D. Samara-Rubio, M. Morse, A. Liu, D. Hodge, D. Rubin, U. D. Keil, and T. Franck, “High speed silicon Mach-Zehnder modulator,” Opt. Express 13(8), 3129–3135 (2005). [CrossRef] [PubMed]
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- G. Rasigade, X. Le Roux, D. Marris-Morini, E. Cassan, and L. Vivien, “Compact wavelength-insensitive fabrication-tolerant silicon-on-insulator beam splitter,” Opt. Lett. 35(21), 3700–3702 (2010). [CrossRef] [PubMed]
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Ang, K.-W.
Asghari, M.
Augendre, E.
Bakir, B. B.
Basak, J.
Bennett, B. R.
Bordel, D.
Bowers, J. E.
Brimont, A.
Brision, S.
Cassan, E.
Chetrit, Y.
Cohen, R.
Crozat, P.
Cunningham, J. E.
Damlencourt, J. F.
Dong, F.
Dong, P.
Dumon, P.
Fang, A. W.
Fang, Q.
Fédéli, J. M.
Fédéli, J.-M.
Fédéli, J-M
Feng, D.
Feng, N.-N.
Franck, T.
Gardes, F. Y.
Gilbert, K.
Grosse, P.
Halbwax, M.
Harduin, J.
Hodge, D.
Izhaky, N.
Jones, R.
Keil, U. D.
Kim, G.
Kim, I. G.
Koch, B. R.
Krauss, T. F.
Krishnamoorthy, A. V.
Kuo, Y.-H.
Kwong, D.-L.
Laval, S.
Le Roux, X.
Lecunff, Y.
Lentine, A. L.
Li, G.
Liang, D.
Liang, H.
Liao, L.
Liao, S.
Liow, T.-Y.
Liu, A.
Lively, E.
Lo, G.-Q.
Lupu, A.
Maine, S.
Marris-Morini, D.
Martí, J.
Messaoudène, S.
Milesi, F.
Morse, M.
Nguyen, H.
O’Faolain, L.
Olivier, N.
Osmond, J.
Paniccia, M.
Park, J. W.
Philippe, P.
Rasigade, G.
Reed, G. T.
Rubin, D.
Samara-Rubio, D.
Sanchis, P.
Shafiiha, R.
Song, J.-F.
Soref, A.
Thomson, D. J.
Trotter, D. C.
Vivien, L.
Watts, M. R.
Xiong, Y.-Z.
You, J.-B.
Young, R. W.
Yu, M.-B.
Zheng, D.
Zortman, W. A.
- T.-Y. Liow, K.-W. Ang, Q. Fang, J.-F. Song, Y.-Z. Xiong, M.-B. Yu, G.-Q. Lo, and D.-L. Kwong, “Silicon modulators an germanium photodetectors on SOI: monolithic integration, compatibility and performance optimization,” IEEE J. Sel. Top. Quant. Electron. 16(1), 307–315 (2010) [CrossRef]
- N.-N. Feng, S. Liao, D. Feng, P. Dong, D. Zheng, H. Liang, R. Shafiiha, G. Li, J. E. Cunningham, A. V. Krishnamoorthy, and M. Asghari, “High speed carrier-depletion modulators with 1.4V-cm V(π)L integrated on 0.25microm silicon-on-insulator waveguides,” Opt. Express 18(8), 7994–7999 (2010). [CrossRef] [PubMed]
- B. B. Bakir, N. Olivier, P. Grosse, S. Messaoudène, S. Brision, E. Augendre, P. Philippe, K. Gilbert, D. Bordel, J. Harduin, and J-M Fédéli, “Electrically driven hybrid Si/III-V lasers based on adiabatic mode transformers,” SPIE 7719 (2010).
- B. B. Bakir, N. Olivier, P. Grosse, S. Messaoudène, S. Brision, E. Augendre, P. Philippe, K. Gilbert, D. Bordel, J. Harduin, and J-M Fédéli, “Electrically driven hybrid Si/III-V lasers based on adiabatic mode transformers,” SPIE 7719 (2010).
- L. Liao, A. Liu, D. Rubin, J. Basak, Y. Chetrit, H. Nguyen, R. Cohen, N. Izhaky, and M. Paniccia, “40 Gbit/s silicon optical modulator for high speed applications,” Electron. Lett. 43(22), 1196–1197 (2007). [CrossRef]
- A. Soref and B. R. Bennett, “Electrooptical effects in silicon,” IEEE J. Quant. Electron. 23(1), 123–129 (1987). [CrossRef]
- B. B. Bakir, N. Olivier, P. Grosse, S. Messaoudène, S. Brision, E. Augendre, P. Philippe, K. Gilbert, D. Bordel, J. Harduin, and J-M Fédéli, “Electrically driven hybrid Si/III-V lasers based on adiabatic mode transformers,” SPIE 7719 (2010).
- A. W. Fang, B. R. Koch, R. Jones, E. Lively, D. Liang, Y.-H. Kuo, and J. E. Bowers, “A distributed Bragg Reflector Silicon evanescent laser,” IEEE Photon. Technol. Lett. 20(20), 1667–1669 (2008). [CrossRef]
- F. Y. Gardes, A. Brimont, P. Sanchis, G. Rasigade, D. Marris-Morini, L. O’Faolain, F. Dong, J. M. Fédéli, P. Dumon, L. Vivien, T. F. Krauss, G. T. Reed, and J. Martí, “High-speed modulation of a compact silicon ring resonator based on a reverse-biased pn diode,” Opt. Express 17(24), 21986–21991 (2009). [CrossRef] [PubMed]
- B. B. Bakir, N. Olivier, P. Grosse, S. Messaoudène, S. Brision, E. Augendre, P. Philippe, K. Gilbert, D. Bordel, J. Harduin, and J-M Fédéli, “Electrically driven hybrid Si/III-V lasers based on adiabatic mode transformers,” SPIE 7719 (2010).
- G. Rasigade, D. Marris-Morini, L. Vivien, and E. Cassan, “Performance evolutions of carrier depletion silicon optical modulators: from PN to PIPIN diodes,” IEEE J. Quant. Electron. 16(1), 179–184 (2010). [CrossRef]
- G. Rasigade, X. Le Roux, D. Marris-Morini, E. Cassan, and L. Vivien, “Compact wavelength-insensitive fabrication-tolerant silicon-on-insulator beam splitter,” Opt. Lett. 35(21), 3700–3702 (2010). [CrossRef] [PubMed]
- D. Marris-Morini, L. Vivien, G. Rasigade, E. Cassan, J. M. Fédéli, X. Le Roux, P. Crozat, S. Maine, A. Lupu, M. Halbwax, and S. Laval, “Recent progress in high speed silicon-based optical modulators,” Proc. IEEE 97(7), 1199–1215 (2009). [CrossRef]
- L. Vivien, J. Osmond, J. M. Fédéli, D. Marris-Morini, P. Crozat, J. F. Damlencourt, E. Cassan, Y. Lecunff, and S. Laval, “42 GHz p.i.n Germanium photodetector integrated in a silicon-on-insulator waveguide,” Opt. Express 17(8), 6252–6257 (2009). [CrossRef] [PubMed]
- L. Liao, A. Liu, D. Rubin, J. Basak, Y. Chetrit, H. Nguyen, R. Cohen, N. Izhaky, and M. Paniccia, “40 Gbit/s silicon optical modulator for high speed applications,” Electron. Lett. 43(22), 1196–1197 (2007). [CrossRef]
- L. Liao, A. Liu, D. Rubin, J. Basak, Y. Chetrit, H. Nguyen, R. Cohen, N. Izhaky, and M. Paniccia, “40 Gbit/s silicon optical modulator for high speed applications,” Electron. Lett. 43(22), 1196–1197 (2007). [CrossRef]
- L. Vivien, J. Osmond, J. M. Fédéli, D. Marris-Morini, P. Crozat, J. F. Damlencourt, E. Cassan, Y. Lecunff, and S. Laval, “42 GHz p.i.n Germanium photodetector integrated in a silicon-on-insulator waveguide,” Opt. Express 17(8), 6252–6257 (2009). [CrossRef] [PubMed]
- D. Marris-Morini, L. Vivien, G. Rasigade, E. Cassan, J. M. Fédéli, X. Le Roux, P. Crozat, S. Maine, A. Lupu, M. Halbwax, and S. Laval, “Recent progress in high speed silicon-based optical modulators,” Proc. IEEE 97(7), 1199–1215 (2009). [CrossRef]
- N.-N. Feng, S. Liao, D. Feng, P. Dong, D. Zheng, H. Liang, R. Shafiiha, G. Li, J. E. Cunningham, A. V. Krishnamoorthy, and M. Asghari, “High speed carrier-depletion modulators with 1.4V-cm V(π)L integrated on 0.25microm silicon-on-insulator waveguides,” Opt. Express 18(8), 7994–7999 (2010). [CrossRef] [PubMed]
- F. Y. Gardes, A. Brimont, P. Sanchis, G. Rasigade, D. Marris-Morini, L. O’Faolain, F. Dong, J. M. Fédéli, P. Dumon, L. Vivien, T. F. Krauss, G. T. Reed, and J. Martí, “High-speed modulation of a compact silicon ring resonator based on a reverse-biased pn diode,” Opt. Express 17(24), 21986–21991 (2009). [CrossRef] [PubMed]
- N.-N. Feng, S. Liao, D. Feng, P. Dong, D. Zheng, H. Liang, R. Shafiiha, G. Li, J. E. Cunningham, A. V. Krishnamoorthy, and M. Asghari, “High speed carrier-depletion modulators with 1.4V-cm V(π)L integrated on 0.25microm silicon-on-insulator waveguides,” Opt. Express 18(8), 7994–7999 (2010). [CrossRef] [PubMed]
- F. Y. Gardes, A. Brimont, P. Sanchis, G. Rasigade, D. Marris-Morini, L. O’Faolain, F. Dong, J. M. Fédéli, P. Dumon, L. Vivien, T. F. Krauss, G. T. Reed, and J. Martí, “High-speed modulation of a compact silicon ring resonator based on a reverse-biased pn diode,” Opt. Express 17(24), 21986–21991 (2009). [CrossRef] [PubMed]
- A. W. Fang, B. R. Koch, R. Jones, E. Lively, D. Liang, Y.-H. Kuo, and J. E. Bowers, “A distributed Bragg Reflector Silicon evanescent laser,” IEEE Photon. Technol. Lett. 20(20), 1667–1669 (2008). [CrossRef]
- T.-Y. Liow, K.-W. Ang, Q. Fang, J.-F. Song, Y.-Z. Xiong, M.-B. Yu, G.-Q. Lo, and D.-L. Kwong, “Silicon modulators an germanium photodetectors on SOI: monolithic integration, compatibility and performance optimization,” IEEE J. Sel. Top. Quant. Electron. 16(1), 307–315 (2010) [CrossRef]
- F. Y. Gardes, A. Brimont, P. Sanchis, G. Rasigade, D. Marris-Morini, L. O’Faolain, F. Dong, J. M. Fédéli, P. Dumon, L. Vivien, T. F. Krauss, G. T. Reed, and J. Martí, “High-speed modulation of a compact silicon ring resonator based on a reverse-biased pn diode,” Opt. Express 17(24), 21986–21991 (2009). [CrossRef] [PubMed]
- L. Vivien, J. Osmond, J. M. Fédéli, D. Marris-Morini, P. Crozat, J. F. Damlencourt, E. Cassan, Y. Lecunff, and S. Laval, “42 GHz p.i.n Germanium photodetector integrated in a silicon-on-insulator waveguide,” Opt. Express 17(8), 6252–6257 (2009). [CrossRef] [PubMed]
- D. Marris-Morini, L. Vivien, G. Rasigade, E. Cassan, J. M. Fédéli, X. Le Roux, P. Crozat, S. Maine, A. Lupu, M. Halbwax, and S. Laval, “Recent progress in high speed silicon-based optical modulators,” Proc. IEEE 97(7), 1199–1215 (2009). [CrossRef]
- B. B. Bakir, N. Olivier, P. Grosse, S. Messaoudène, S. Brision, E. Augendre, P. Philippe, K. Gilbert, D. Bordel, J. Harduin, and J-M Fédéli, “Electrically driven hybrid Si/III-V lasers based on adiabatic mode transformers,” SPIE 7719 (2010).
- N.-N. Feng, S. Liao, D. Feng, P. Dong, D. Zheng, H. Liang, R. Shafiiha, G. Li, J. E. Cunningham, A. V. Krishnamoorthy, and M. Asghari, “High speed carrier-depletion modulators with 1.4V-cm V(π)L integrated on 0.25microm silicon-on-insulator waveguides,” Opt. Express 18(8), 7994–7999 (2010). [CrossRef] [PubMed]
- N.-N. Feng, S. Liao, D. Feng, P. Dong, D. Zheng, H. Liang, R. Shafiiha, G. Li, J. E. Cunningham, A. V. Krishnamoorthy, and M. Asghari, “High speed carrier-depletion modulators with 1.4V-cm V(π)L integrated on 0.25microm silicon-on-insulator waveguides,” Opt. Express 18(8), 7994–7999 (2010). [CrossRef] [PubMed]
- D. J. Thomson, F. Y. Gardes, G. T. Reed, F. Milesi, and J.-M. Fédéli, “High speed silicon optical modulator with self aligned fabrication process,” Opt. Express 18(18), 19064–19069 (2010). [CrossRef] [PubMed]
- F. Y. Gardes, A. Brimont, P. Sanchis, G. Rasigade, D. Marris-Morini, L. O’Faolain, F. Dong, J. M. Fédéli, P. Dumon, L. Vivien, T. F. Krauss, G. T. Reed, and J. Martí, “High-speed modulation of a compact silicon ring resonator based on a reverse-biased pn diode,” Opt. Express 17(24), 21986–21991 (2009). [CrossRef] [PubMed]
- B. B. Bakir, N. Olivier, P. Grosse, S. Messaoudène, S. Brision, E. Augendre, P. Philippe, K. Gilbert, D. Bordel, J. Harduin, and J-M Fédéli, “Electrically driven hybrid Si/III-V lasers based on adiabatic mode transformers,” SPIE 7719 (2010).
- B. B. Bakir, N. Olivier, P. Grosse, S. Messaoudène, S. Brision, E. Augendre, P. Philippe, K. Gilbert, D. Bordel, J. Harduin, and J-M Fédéli, “Electrically driven hybrid Si/III-V lasers based on adiabatic mode transformers,” SPIE 7719 (2010).
- D. Marris-Morini, L. Vivien, G. Rasigade, E. Cassan, J. M. Fédéli, X. Le Roux, P. Crozat, S. Maine, A. Lupu, M. Halbwax, and S. Laval, “Recent progress in high speed silicon-based optical modulators,” Proc. IEEE 97(7), 1199–1215 (2009). [CrossRef]
- B. B. Bakir, N. Olivier, P. Grosse, S. Messaoudène, S. Brision, E. Augendre, P. Philippe, K. Gilbert, D. Bordel, J. Harduin, and J-M Fédéli, “Electrically driven hybrid Si/III-V lasers based on adiabatic mode transformers,” SPIE 7719 (2010).
- L. Liao, A. Liu, D. Rubin, J. Basak, Y. Chetrit, H. Nguyen, R. Cohen, N. Izhaky, and M. Paniccia, “40 Gbit/s silicon optical modulator for high speed applications,” Electron. Lett. 43(22), 1196–1197 (2007). [CrossRef]
- A. W. Fang, B. R. Koch, R. Jones, E. Lively, D. Liang, Y.-H. Kuo, and J. E. Bowers, “A distributed Bragg Reflector Silicon evanescent laser,” IEEE Photon. Technol. Lett. 20(20), 1667–1669 (2008). [CrossRef]
- A. W. Fang, B. R. Koch, R. Jones, E. Lively, D. Liang, Y.-H. Kuo, and J. E. Bowers, “A distributed Bragg Reflector Silicon evanescent laser,” IEEE Photon. Technol. Lett. 20(20), 1667–1669 (2008). [CrossRef]
- F. Y. Gardes, A. Brimont, P. Sanchis, G. Rasigade, D. Marris-Morini, L. O’Faolain, F. Dong, J. M. Fédéli, P. Dumon, L. Vivien, T. F. Krauss, G. T. Reed, and J. Martí, “High-speed modulation of a compact silicon ring resonator based on a reverse-biased pn diode,” Opt. Express 17(24), 21986–21991 (2009). [CrossRef] [PubMed]
- N.-N. Feng, S. Liao, D. Feng, P. Dong, D. Zheng, H. Liang, R. Shafiiha, G. Li, J. E. Cunningham, A. V. Krishnamoorthy, and M. Asghari, “High speed carrier-depletion modulators with 1.4V-cm V(π)L integrated on 0.25microm silicon-on-insulator waveguides,” Opt. Express 18(8), 7994–7999 (2010). [CrossRef] [PubMed]
- A. W. Fang, B. R. Koch, R. Jones, E. Lively, D. Liang, Y.-H. Kuo, and J. E. Bowers, “A distributed Bragg Reflector Silicon evanescent laser,” IEEE Photon. Technol. Lett. 20(20), 1667–1669 (2008). [CrossRef]
- T.-Y. Liow, K.-W. Ang, Q. Fang, J.-F. Song, Y.-Z. Xiong, M.-B. Yu, G.-Q. Lo, and D.-L. Kwong, “Silicon modulators an germanium photodetectors on SOI: monolithic integration, compatibility and performance optimization,” IEEE J. Sel. Top. Quant. Electron. 16(1), 307–315 (2010) [CrossRef]
- D. Marris-Morini, L. Vivien, G. Rasigade, E. Cassan, J. M. Fédéli, X. Le Roux, P. Crozat, S. Maine, A. Lupu, M. Halbwax, and S. Laval, “Recent progress in high speed silicon-based optical modulators,” Proc. IEEE 97(7), 1199–1215 (2009). [CrossRef]
- L. Vivien, J. Osmond, J. M. Fédéli, D. Marris-Morini, P. Crozat, J. F. Damlencourt, E. Cassan, Y. Lecunff, and S. Laval, “42 GHz p.i.n Germanium photodetector integrated in a silicon-on-insulator waveguide,” Opt. Express 17(8), 6252–6257 (2009). [CrossRef] [PubMed]
- G. Rasigade, X. Le Roux, D. Marris-Morini, E. Cassan, and L. Vivien, “Compact wavelength-insensitive fabrication-tolerant silicon-on-insulator beam splitter,” Opt. Lett. 35(21), 3700–3702 (2010). [CrossRef] [PubMed]
- D. Marris-Morini, L. Vivien, G. Rasigade, E. Cassan, J. M. Fédéli, X. Le Roux, P. Crozat, S. Maine, A. Lupu, M. Halbwax, and S. Laval, “Recent progress in high speed silicon-based optical modulators,” Proc. IEEE 97(7), 1199–1215 (2009). [CrossRef]
- M. R. Watts, W. A. Zortman, D. C. Trotter, R. W. Young, and A. L. Lentine, “Low-voltage, compact, depletion-mode, silicon Mach Zehnder modulator,” IEEE J. Sel. Top. Quant. Electron. 16(1), 159–164 (2010). [CrossRef]
- N.-N. Feng, S. Liao, D. Feng, P. Dong, D. Zheng, H. Liang, R. Shafiiha, G. Li, J. E. Cunningham, A. V. Krishnamoorthy, and M. Asghari, “High speed carrier-depletion modulators with 1.4V-cm V(π)L integrated on 0.25microm silicon-on-insulator waveguides,” Opt. Express 18(8), 7994–7999 (2010). [CrossRef] [PubMed]
- A. W. Fang, B. R. Koch, R. Jones, E. Lively, D. Liang, Y.-H. Kuo, and J. E. Bowers, “A distributed Bragg Reflector Silicon evanescent laser,” IEEE Photon. Technol. Lett. 20(20), 1667–1669 (2008). [CrossRef]
- N.-N. Feng, S. Liao, D. Feng, P. Dong, D. Zheng, H. Liang, R. Shafiiha, G. Li, J. E. Cunningham, A. V. Krishnamoorthy, and M. Asghari, “High speed carrier-depletion modulators with 1.4V-cm V(π)L integrated on 0.25microm silicon-on-insulator waveguides,” Opt. Express 18(8), 7994–7999 (2010). [CrossRef] [PubMed]
- L. Liao, A. Liu, D. Rubin, J. Basak, Y. Chetrit, H. Nguyen, R. Cohen, N. Izhaky, and M. Paniccia, “40 Gbit/s silicon optical modulator for high speed applications,” Electron. Lett. 43(22), 1196–1197 (2007). [CrossRef]
- L. Liao, D. Samara-Rubio, M. Morse, A. Liu, D. Hodge, D. Rubin, U. D. Keil, and T. Franck, “High speed silicon Mach-Zehnder modulator,” Opt. Express 13(8), 3129–3135 (2005). [CrossRef] [PubMed]
- N.-N. Feng, S. Liao, D. Feng, P. Dong, D. Zheng, H. Liang, R. Shafiiha, G. Li, J. E. Cunningham, A. V. Krishnamoorthy, and M. Asghari, “High speed carrier-depletion modulators with 1.4V-cm V(π)L integrated on 0.25microm silicon-on-insulator waveguides,” Opt. Express 18(8), 7994–7999 (2010). [CrossRef] [PubMed]
- T.-Y. Liow, K.-W. Ang, Q. Fang, J.-F. Song, Y.-Z. Xiong, M.-B. Yu, G.-Q. Lo, and D.-L. Kwong, “Silicon modulators an germanium photodetectors on SOI: monolithic integration, compatibility and performance optimization,” IEEE J. Sel. Top. Quant. Electron. 16(1), 307–315 (2010) [CrossRef]
- L. Liao, A. Liu, D. Rubin, J. Basak, Y. Chetrit, H. Nguyen, R. Cohen, N. Izhaky, and M. Paniccia, “40 Gbit/s silicon optical modulator for high speed applications,” Electron. Lett. 43(22), 1196–1197 (2007). [CrossRef]
- L. Liao, D. Samara-Rubio, M. Morse, A. Liu, D. Hodge, D. Rubin, U. D. Keil, and T. Franck, “High speed silicon Mach-Zehnder modulator,” Opt. Express 13(8), 3129–3135 (2005). [CrossRef] [PubMed]
- A. W. Fang, B. R. Koch, R. Jones, E. Lively, D. Liang, Y.-H. Kuo, and J. E. Bowers, “A distributed Bragg Reflector Silicon evanescent laser,” IEEE Photon. Technol. Lett. 20(20), 1667–1669 (2008). [CrossRef]
- T.-Y. Liow, K.-W. Ang, Q. Fang, J.-F. Song, Y.-Z. Xiong, M.-B. Yu, G.-Q. Lo, and D.-L. Kwong, “Silicon modulators an germanium photodetectors on SOI: monolithic integration, compatibility and performance optimization,” IEEE J. Sel. Top. Quant. Electron. 16(1), 307–315 (2010) [CrossRef]
- D. Marris-Morini, L. Vivien, G. Rasigade, E. Cassan, J. M. Fédéli, X. Le Roux, P. Crozat, S. Maine, A. Lupu, M. Halbwax, and S. Laval, “Recent progress in high speed silicon-based optical modulators,” Proc. IEEE 97(7), 1199–1215 (2009). [CrossRef]
- D. Marris-Morini, L. Vivien, G. Rasigade, E. Cassan, J. M. Fédéli, X. Le Roux, P. Crozat, S. Maine, A. Lupu, M. Halbwax, and S. Laval, “Recent progress in high speed silicon-based optical modulators,” Proc. IEEE 97(7), 1199–1215 (2009). [CrossRef]
- G. Rasigade, D. Marris-Morini, L. Vivien, and E. Cassan, “Performance evolutions of carrier depletion silicon optical modulators: from PN to PIPIN diodes,” IEEE J. Quant. Electron. 16(1), 179–184 (2010). [CrossRef]
- G. Rasigade, X. Le Roux, D. Marris-Morini, E. Cassan, and L. Vivien, “Compact wavelength-insensitive fabrication-tolerant silicon-on-insulator beam splitter,” Opt. Lett. 35(21), 3700–3702 (2010). [CrossRef] [PubMed]
- D. Marris-Morini, L. Vivien, G. Rasigade, E. Cassan, J. M. Fédéli, X. Le Roux, P. Crozat, S. Maine, A. Lupu, M. Halbwax, and S. Laval, “Recent progress in high speed silicon-based optical modulators,” Proc. IEEE 97(7), 1199–1215 (2009). [CrossRef]
- L. Vivien, J. Osmond, J. M. Fédéli, D. Marris-Morini, P. Crozat, J. F. Damlencourt, E. Cassan, Y. Lecunff, and S. Laval, “42 GHz p.i.n Germanium photodetector integrated in a silicon-on-insulator waveguide,” Opt. Express 17(8), 6252–6257 (2009). [CrossRef] [PubMed]
- F. Y. Gardes, A. Brimont, P. Sanchis, G. Rasigade, D. Marris-Morini, L. O’Faolain, F. Dong, J. M. Fédéli, P. Dumon, L. Vivien, T. F. Krauss, G. T. Reed, and J. Martí, “High-speed modulation of a compact silicon ring resonator based on a reverse-biased pn diode,” Opt. Express 17(24), 21986–21991 (2009). [CrossRef] [PubMed]
- F. Y. Gardes, A. Brimont, P. Sanchis, G. Rasigade, D. Marris-Morini, L. O’Faolain, F. Dong, J. M. Fédéli, P. Dumon, L. Vivien, T. F. Krauss, G. T. Reed, and J. Martí, “High-speed modulation of a compact silicon ring resonator based on a reverse-biased pn diode,” Opt. Express 17(24), 21986–21991 (2009). [CrossRef] [PubMed]
- B. B. Bakir, N. Olivier, P. Grosse, S. Messaoudène, S. Brision, E. Augendre, P. Philippe, K. Gilbert, D. Bordel, J. Harduin, and J-M Fédéli, “Electrically driven hybrid Si/III-V lasers based on adiabatic mode transformers,” SPIE 7719 (2010).
- L. Liao, A. Liu, D. Rubin, J. Basak, Y. Chetrit, H. Nguyen, R. Cohen, N. Izhaky, and M. Paniccia, “40 Gbit/s silicon optical modulator for high speed applications,” Electron. Lett. 43(22), 1196–1197 (2007). [CrossRef]
- F. Y. Gardes, A. Brimont, P. Sanchis, G. Rasigade, D. Marris-Morini, L. O’Faolain, F. Dong, J. M. Fédéli, P. Dumon, L. Vivien, T. F. Krauss, G. T. Reed, and J. Martí, “High-speed modulation of a compact silicon ring resonator based on a reverse-biased pn diode,” Opt. Express 17(24), 21986–21991 (2009). [CrossRef] [PubMed]
- B. B. Bakir, N. Olivier, P. Grosse, S. Messaoudène, S. Brision, E. Augendre, P. Philippe, K. Gilbert, D. Bordel, J. Harduin, and J-M Fédéli, “Electrically driven hybrid Si/III-V lasers based on adiabatic mode transformers,” SPIE 7719 (2010).
- L. Liao, A. Liu, D. Rubin, J. Basak, Y. Chetrit, H. Nguyen, R. Cohen, N. Izhaky, and M. Paniccia, “40 Gbit/s silicon optical modulator for high speed applications,” Electron. Lett. 43(22), 1196–1197 (2007). [CrossRef]
- B. B. Bakir, N. Olivier, P. Grosse, S. Messaoudène, S. Brision, E. Augendre, P. Philippe, K. Gilbert, D. Bordel, J. Harduin, and J-M Fédéli, “Electrically driven hybrid Si/III-V lasers based on adiabatic mode transformers,” SPIE 7719 (2010).
- G. Rasigade, D. Marris-Morini, L. Vivien, and E. Cassan, “Performance evolutions of carrier depletion silicon optical modulators: from PN to PIPIN diodes,” IEEE J. Quant. Electron. 16(1), 179–184 (2010). [CrossRef]
- G. Rasigade, X. Le Roux, D. Marris-Morini, E. Cassan, and L. Vivien, “Compact wavelength-insensitive fabrication-tolerant silicon-on-insulator beam splitter,” Opt. Lett. 35(21), 3700–3702 (2010). [CrossRef] [PubMed]
- D. Marris-Morini, L. Vivien, G. Rasigade, E. Cassan, J. M. Fédéli, X. Le Roux, P. Crozat, S. Maine, A. Lupu, M. Halbwax, and S. Laval, “Recent progress in high speed silicon-based optical modulators,” Proc. IEEE 97(7), 1199–1215 (2009). [CrossRef]
- F. Y. Gardes, A. Brimont, P. Sanchis, G. Rasigade, D. Marris-Morini, L. O’Faolain, F. Dong, J. M. Fédéli, P. Dumon, L. Vivien, T. F. Krauss, G. T. Reed, and J. Martí, “High-speed modulation of a compact silicon ring resonator based on a reverse-biased pn diode,” Opt. Express 17(24), 21986–21991 (2009). [CrossRef] [PubMed]
- D. J. Thomson, F. Y. Gardes, G. T. Reed, F. Milesi, and J.-M. Fédéli, “High speed silicon optical modulator with self aligned fabrication process,” Opt. Express 18(18), 19064–19069 (2010). [CrossRef] [PubMed]
- F. Y. Gardes, A. Brimont, P. Sanchis, G. Rasigade, D. Marris-Morini, L. O’Faolain, F. Dong, J. M. Fédéli, P. Dumon, L. Vivien, T. F. Krauss, G. T. Reed, and J. Martí, “High-speed modulation of a compact silicon ring resonator based on a reverse-biased pn diode,” Opt. Express 17(24), 21986–21991 (2009). [CrossRef] [PubMed]
- L. Liao, A. Liu, D. Rubin, J. Basak, Y. Chetrit, H. Nguyen, R. Cohen, N. Izhaky, and M. Paniccia, “40 Gbit/s silicon optical modulator for high speed applications,” Electron. Lett. 43(22), 1196–1197 (2007). [CrossRef]
- L. Liao, D. Samara-Rubio, M. Morse, A. Liu, D. Hodge, D. Rubin, U. D. Keil, and T. Franck, “High speed silicon Mach-Zehnder modulator,” Opt. Express 13(8), 3129–3135 (2005). [CrossRef] [PubMed]
- F. Y. Gardes, A. Brimont, P. Sanchis, G. Rasigade, D. Marris-Morini, L. O’Faolain, F. Dong, J. M. Fédéli, P. Dumon, L. Vivien, T. F. Krauss, G. T. Reed, and J. Martí, “High-speed modulation of a compact silicon ring resonator based on a reverse-biased pn diode,” Opt. Express 17(24), 21986–21991 (2009). [CrossRef] [PubMed]
- N.-N. Feng, S. Liao, D. Feng, P. Dong, D. Zheng, H. Liang, R. Shafiiha, G. Li, J. E. Cunningham, A. V. Krishnamoorthy, and M. Asghari, “High speed carrier-depletion modulators with 1.4V-cm V(π)L integrated on 0.25microm silicon-on-insulator waveguides,” Opt. Express 18(8), 7994–7999 (2010). [CrossRef] [PubMed]
- T.-Y. Liow, K.-W. Ang, Q. Fang, J.-F. Song, Y.-Z. Xiong, M.-B. Yu, G.-Q. Lo, and D.-L. Kwong, “Silicon modulators an germanium photodetectors on SOI: monolithic integration, compatibility and performance optimization,” IEEE J. Sel. Top. Quant. Electron. 16(1), 307–315 (2010) [CrossRef]
- A. Soref and B. R. Bennett, “Electrooptical effects in silicon,” IEEE J. Quant. Electron. 23(1), 123–129 (1987). [CrossRef]
- M. R. Watts, W. A. Zortman, D. C. Trotter, R. W. Young, and A. L. Lentine, “Low-voltage, compact, depletion-mode, silicon Mach Zehnder modulator,” IEEE J. Sel. Top. Quant. Electron. 16(1), 159–164 (2010). [CrossRef]
- G. Rasigade, D. Marris-Morini, L. Vivien, and E. Cassan, “Performance evolutions of carrier depletion silicon optical modulators: from PN to PIPIN diodes,” IEEE J. Quant. Electron. 16(1), 179–184 (2010). [CrossRef]
- G. Rasigade, X. Le Roux, D. Marris-Morini, E. Cassan, and L. Vivien, “Compact wavelength-insensitive fabrication-tolerant silicon-on-insulator beam splitter,” Opt. Lett. 35(21), 3700–3702 (2010). [CrossRef] [PubMed]
- D. Marris-Morini, L. Vivien, G. Rasigade, E. Cassan, J. M. Fédéli, X. Le Roux, P. Crozat, S. Maine, A. Lupu, M. Halbwax, and S. Laval, “Recent progress in high speed silicon-based optical modulators,” Proc. IEEE 97(7), 1199–1215 (2009). [CrossRef]
- F. Y. Gardes, A. Brimont, P. Sanchis, G. Rasigade, D. Marris-Morini, L. O’Faolain, F. Dong, J. M. Fédéli, P. Dumon, L. Vivien, T. F. Krauss, G. T. Reed, and J. Martí, “High-speed modulation of a compact silicon ring resonator based on a reverse-biased pn diode,” Opt. Express 17(24), 21986–21991 (2009). [CrossRef] [PubMed]
- L. Vivien, J. Osmond, J. M. Fédéli, D. Marris-Morini, P. Crozat, J. F. Damlencourt, E. Cassan, Y. Lecunff, and S. Laval, “42 GHz p.i.n Germanium photodetector integrated in a silicon-on-insulator waveguide,” Opt. Express 17(8), 6252–6257 (2009). [CrossRef] [PubMed]
- M. R. Watts, W. A. Zortman, D. C. Trotter, R. W. Young, and A. L. Lentine, “Low-voltage, compact, depletion-mode, silicon Mach Zehnder modulator,” IEEE J. Sel. Top. Quant. Electron. 16(1), 159–164 (2010). [CrossRef]
- T.-Y. Liow, K.-W. Ang, Q. Fang, J.-F. Song, Y.-Z. Xiong, M.-B. Yu, G.-Q. Lo, and D.-L. Kwong, “Silicon modulators an germanium photodetectors on SOI: monolithic integration, compatibility and performance optimization,” IEEE J. Sel. Top. Quant. Electron. 16(1), 307–315 (2010) [CrossRef]
- M. R. Watts, W. A. Zortman, D. C. Trotter, R. W. Young, and A. L. Lentine, “Low-voltage, compact, depletion-mode, silicon Mach Zehnder modulator,” IEEE J. Sel. Top. Quant. Electron. 16(1), 159–164 (2010). [CrossRef]
- T.-Y. Liow, K.-W. Ang, Q. Fang, J.-F. Song, Y.-Z. Xiong, M.-B. Yu, G.-Q. Lo, and D.-L. Kwong, “Silicon modulators an germanium photodetectors on SOI: monolithic integration, compatibility and performance optimization,” IEEE J. Sel. Top. Quant. Electron. 16(1), 307–315 (2010) [CrossRef]
- N.-N. Feng, S. Liao, D. Feng, P. Dong, D. Zheng, H. Liang, R. Shafiiha, G. Li, J. E. Cunningham, A. V. Krishnamoorthy, and M. Asghari, “High speed carrier-depletion modulators with 1.4V-cm V(π)L integrated on 0.25microm silicon-on-insulator waveguides,” Opt. Express 18(8), 7994–7999 (2010). [CrossRef] [PubMed]
- M. R. Watts, W. A. Zortman, D. C. Trotter, R. W. Young, and A. L. Lentine, “Low-voltage, compact, depletion-mode, silicon Mach Zehnder modulator,” IEEE J. Sel. Top. Quant. Electron. 16(1), 159–164 (2010). [CrossRef]
Electron. Lett.
- L. Liao, A. Liu, D. Rubin, J. Basak, Y. Chetrit, H. Nguyen, R. Cohen, N. Izhaky, and M. Paniccia, “40 Gbit/s silicon optical modulator for high speed applications,” Electron. Lett. 43(22), 1196–1197 (2007). [CrossRef]
IEEE J. Quant. Electron.
- A. Soref and B. R. Bennett, “Electrooptical effects in silicon,” IEEE J. Quant. Electron. 23(1), 123–129 (1987). [CrossRef]
- G. Rasigade, D. Marris-Morini, L. Vivien, and E. Cassan, “Performance evolutions of carrier depletion silicon optical modulators: from PN to PIPIN diodes,” IEEE J. Quant. Electron. 16(1), 179–184 (2010). [CrossRef]
IEEE J. Sel. Top. Quant. Electron.
- M. R. Watts, W. A. Zortman, D. C. Trotter, R. W. Young, and A. L. Lentine, “Low-voltage, compact, depletion-mode, silicon Mach Zehnder modulator,” IEEE J. Sel. Top. Quant. Electron. 16(1), 159–164 (2010). [CrossRef]
IEEE Photon. Technol. Lett.
- A. W. Fang, B. R. Koch, R. Jones, E. Lively, D. Liang, Y.-H. Kuo, and J. E. Bowers, “A distributed Bragg Reflector Silicon evanescent laser,” IEEE Photon. Technol. Lett. 20(20), 1667–1669 (2008). [CrossRef]
Opt. Express
- L. Vivien, J. Osmond, J. M. Fédéli, D. Marris-Morini, P. Crozat, J. F. Damlencourt, E. Cassan, Y. Lecunff, and S. Laval, “42 GHz p.i.n Germanium photodetector integrated in a silicon-on-insulator waveguide,” Opt. Express 17(8), 6252–6257 (2009). [CrossRef] [PubMed]
- L. Liao, D. Samara-Rubio, M. Morse, A. Liu, D. Hodge, D. Rubin, U. D. Keil, and T. Franck, “High speed silicon Mach-Zehnder modulator,” Opt. Express 13(8), 3129–3135 (2005). [CrossRef] [PubMed]
- F. Y. Gardes, A. Brimont, P. Sanchis, G. Rasigade, D. Marris-Morini, L. O’Faolain, F. Dong, J. M. Fédéli, P. Dumon, L. Vivien, T. F. Krauss, G. T. Reed, and J. Martí, “High-speed modulation of a compact silicon ring resonator based on a reverse-biased pn diode,” Opt. Express 17(24), 21986–21991 (2009). [CrossRef] [PubMed]
- D. J. Thomson, F. Y. Gardes, G. T. Reed, F. Milesi, and J.-M. Fédéli, “High speed silicon optical modulator with self aligned fabrication process,” Opt. Express 18(18), 19064–19069 (2010). [CrossRef] [PubMed]
- N.-N. Feng, S. Liao, D. Feng, P. Dong, D. Zheng, H. Liang, R. Shafiiha, G. Li, J. E. Cunningham, A. V. Krishnamoorthy, and M. Asghari, “High speed carrier-depletion modulators with 1.4V-cm V(π)L integrated on 0.25microm silicon-on-insulator waveguides,” Opt. Express 18(8), 7994–7999 (2010). [CrossRef] [PubMed]
- J. W. Park, J.-B. You, I. G. Kim, and G. Kim, “High-modulation efficiency silicon Mach-Zehnder optical modulator based on carrier depletion in a PN Diode,” Opt. Express 17(18), 15520–15524 (2009). [CrossRef] [PubMed]
Opt. Lett.
- G. Rasigade, X. Le Roux, D. Marris-Morini, E. Cassan, and L. Vivien, “Compact wavelength-insensitive fabrication-tolerant silicon-on-insulator beam splitter,” Opt. Lett. 35(21), 3700–3702 (2010). [CrossRef] [PubMed]
Proc. IEEE
- D. Marris-Morini, L. Vivien, G. Rasigade, E. Cassan, J. M. Fédéli, X. Le Roux, P. Crozat, S. Maine, A. Lupu, M. Halbwax, and S. Laval, “Recent progress in high speed silicon-based optical modulators,” Proc. IEEE 97(7), 1199–1215 (2009). [CrossRef]
SPIE
- B. B. Bakir, N. Olivier, P. Grosse, S. Messaoudène, S. Brision, E. Augendre, P. Philippe, K. Gilbert, D. Bordel, J. Harduin, and J-M Fédéli, “Electrically driven hybrid Si/III-V lasers based on adiabatic mode transformers,” SPIE 7719 (2010).
Other
- G. T. Reed, and A. P. Knights, Silicon Photonics, an Introduction (Wiley, 2004).
- T.-Y. Liow, K.-W. Ang, Q. Fang, J.-F. Song, Y.-Z. Xiong, M.-B. Yu, G.-Q. Lo, and D.-L. Kwong, “Silicon modulators an germanium photodetectors on SOI: monolithic integration, compatibility and performance optimization,” IEEE J. Sel. Top. Quant. Electron. 16(1), 307–315 (2010) [CrossRef]
2010, Bakir, SPIE
- B. B. Bakir, N. Olivier, P. Grosse, S. Messaoudène, S. Brision, E. Augendre, P. Philippe, K. Gilbert, D. Bordel, J. Harduin, and J-M Fédéli, “Electrically driven hybrid Si/III-V lasers based on adiabatic mode transformers,” SPIE 7719 (2010).
- M. R. Watts, W. A. Zortman, D. C. Trotter, R. W. Young, and A. L. Lentine, “Low-voltage, compact, depletion-mode, silicon Mach Zehnder modulator,” IEEE J. Sel. Top. Quant. Electron. 16(1), 159–164 (2010). [CrossRef]
- N.-N. Feng, S. Liao, D. Feng, P. Dong, D. Zheng, H. Liang, R. Shafiiha, G. Li, J. E. Cunningham, A. V. Krishnamoorthy, and M. Asghari, “High speed carrier-depletion modulators with 1.4V-cm V(π)L integrated on 0.25microm silicon-on-insulator waveguides,” Opt. Express 18(8), 7994–7999 (2010). [CrossRef] [PubMed]
- G. Rasigade, D. Marris-Morini, L. Vivien, and E. Cassan, “Performance evolutions of carrier depletion silicon optical modulators: from PN to PIPIN diodes,” IEEE J. Quant. Electron. 16(1), 179–184 (2010). [CrossRef]
- F. Y. Gardes, A. Brimont, P. Sanchis, G. Rasigade, D. Marris-Morini, L. O’Faolain, F. Dong, J. M. Fédéli, P. Dumon, L. Vivien, T. F. Krauss, G. T. Reed, and J. Martí, “High-speed modulation of a compact silicon ring resonator based on a reverse-biased pn diode,” Opt. Express 17(24), 21986–21991 (2009). [CrossRef] [PubMed]
- D. Marris-Morini, L. Vivien, G. Rasigade, E. Cassan, J. M. Fédéli, X. Le Roux, P. Crozat, S. Maine, A. Lupu, M. Halbwax, and S. Laval, “Recent progress in high speed silicon-based optical modulators,” Proc. IEEE 97(7), 1199–1215 (2009). [CrossRef]
- A. W. Fang, B. R. Koch, R. Jones, E. Lively, D. Liang, Y.-H. Kuo, and J. E. Bowers, “A distributed Bragg Reflector Silicon evanescent laser,” IEEE Photon. Technol. Lett. 20(20), 1667–1669 (2008). [CrossRef]
- L. Liao, A. Liu, D. Rubin, J. Basak, Y. Chetrit, H. Nguyen, R. Cohen, N. Izhaky, and M. Paniccia, “40 Gbit/s silicon optical modulator for high speed applications,” Electron. Lett. 43(22), 1196–1197 (2007). [CrossRef]
- A. Soref and B. R. Bennett, “Electrooptical effects in silicon,” IEEE J. Quant. Electron. 23(1), 123–129 (1987). [CrossRef]
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