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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 19, Iss. 8 — Apr. 11, 2011
  • pp: 6990–6998

Broadband multi-layer terahertz metamaterials fabrication and characterization on flexible substrates

N. R. Han, Z. C. Chen, C. S. Lim, B. Ng, and M. H. Hong  »View Author Affiliations

Optics Express, Vol. 19, Issue 8, pp. 6990-6998 (2011)

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Microscopic split-ring-resonator (SRR) arrays are fabricated on 100 μm thick polyethylene naphthalate (PEN) films by femtosecond laser micro-lens array (MLA) lithography. The transmission properties of these metamaterials are characterized by THz Time Domain Spectroscopy (THz-TDS). Tunable resonance responses can be achieved by changing SRR structural design parameters. By stacking 2D PEN metamaterial films with different frequency responses together, a broadband THz filter with full width at half maximum (FWHM) of 0.38 THz is constructed. The bandwidth of the resonance response increases up to 4.2 times as compared to the bandwidths of single layer metamaterials. Numerical simulation reveals that SRR layers inside the multi-layer metamaterials are selectively excited towards specific frequencies within the broadband response. Meanwhile, more than one SRR layers respond to the chosen frequencies, resulting in the enhancement of the resonance properties. The multi-layer metamaterials provide a promising way to extend SRR based metamaterial operating region from narrowband to broadband with a tunable feature.

© 2011 OSA

OCIS Codes
(160.3918) Materials : Metamaterials
(300.6495) Spectroscopy : Spectroscopy, teraherz
(230.7408) Optical devices : Wavelength filtering devices

ToC Category:

Original Manuscript: December 7, 2010
Revised Manuscript: February 21, 2011
Manuscript Accepted: February 21, 2011
Published: March 28, 2011

N. R. Han, Z. C. Chen, C. S. Lim, B. Ng, and M. H. Hong, "Broadband multi-layer terahertz metamaterials fabrication and characterization on flexible substrates," Opt. Express 19, 6990-6998 (2011)

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  1. V. G. Veselago, “The electrodynamics of substances with simultaneously negative values of ε and μ,” Sov. Phys. Usp. 10(4), 509–514 (1968). [CrossRef]
  2. D. R. Smith, W. J. Padilla, D. C. Vier, S. C. Nemat-Nasser, and S. Schultz, “Composite medium with simultaneously negative permeability and permittivity,” Phys. Rev. Lett. 84(18), 4184–4187 (2000). [CrossRef] [PubMed]
  3. R. A. Shelby, D. R. Smith, and S. Schultz, “Experimental verification of a negative index of refraction,” Science 292(5514), 77–79 (2001). [CrossRef] [PubMed]
  4. J. B. Pendry, “Negative refraction makes a perfect lens,” Phys. Rev. Lett. 85(18), 3966–3969 (2000). [CrossRef] [PubMed]
  5. J. B. Pendry, D. Schurig, and D. R. Smith, “Controlling electromagnetic fields,” Science 312(5781), 1780–1782 (2006). [CrossRef] [PubMed]
  6. D. Schurig, J. J. Mock, B. J. Justice, S. A. Cummer, J. B. Pendry, A. F. Starr, and D. R. Smith, “Metamaterial electromagnetic cloak at microwave frequencies,” Science 314(5801), 977–980 (2006). [CrossRef] [PubMed]
  7. J. B. Pendry, A. J. Holden, D. J. Robbins, and W. J. Stewart, “Magnetism from conductors and enhanced nonlinear phenomena,” IEEE Trans. Microw. Theory Tech. 47(11), 2075–2084 (1999). [CrossRef]
  8. D. Schurig, J. J. Mock, and D. R. Smith, “Electric-field-coupled resonators for negative permittivity metamaterials,” Appl. Phys. Lett. 88(4), 041109 (2006). [CrossRef]
  9. W. J. Padilla, A. J. Taylor, C. Highstrete, M. Lee, and R. D. Averitt, “Dynamical electric and magnetic metamaterial response at terahertz frequencies,” Phys. Rev. Lett. 96(10), 107401 (2006). [CrossRef] [PubMed]
  10. H.-T. Chen, W. J. Padilla, J. M. O. Zide, A. C. Gossard, A. J. Taylor, and R. D. Averitt, “Active terahertz metamaterial devices,” Nature 444(7119), 597–600 (2006). [CrossRef] [PubMed]
  11. H.-T. Chen, W. J. Padilla, M. J. Cich, A. K. Azad, R. D. Averitt, and A. J. Taylor, “A metamaterial solid-state terahertz phase modulator,” Nat. Photonics 3(3), 148–151 (2009). [CrossRef]
  12. H. Tao, A. C. Strikwerda, K. Fan, W. J. Padilla, X. Zhang, and R. D. Averitt, “Reconfigurable terahertz metamaterials,” Phys. Rev. Lett. 103(14), 147401 (2009). [CrossRef] [PubMed]
  13. H. Tao, N. I. Landy, C. M. Bingham, X. Zhang, R. D. Averitt, and W. J. Padilla, “A metamaterial absorber for the terahertz regime: design, fabrication and characterization,” Opt. Express 16(10), 7181–7188 (2008). [CrossRef] [PubMed]
  14. H.-T. Chen, J. F. O’Hara, A. J. Taylor, R. D. Averitt, C. Highstrete, M. Lee, and W. J. Padilla, “Complementary planar terahertz metamaterials,” Opt. Express 15(3), 1084–1095 (2007). [CrossRef] [PubMed]
  15. C. M. Bingham, H. Tao, X. L. Liu, R. D. Averitt, X. Zhang, and W. J. Padilla, “Planar wallpaper group metamaterials for novel terahertz applications,” Opt. Express 16(23), 18565–18575 (2008). [CrossRef]
  16. Y. Yuan, C. Bingham, T. Tyler, S. Palit, T. H. Hand, W. J. Padilla, D. R. Smith, N. M. Jokerst, and S. A. Cummer, “Dual-band planar electric metamaterial in the terahertz regime,” Opt. Express 16(13), 9746–9752 (2008). [CrossRef] [PubMed]
  17. F. Miyamaru, Y. Saito, M. W. Takeda, B. Hou, L. Liu, W. Wen, and P. Sheng, “Terahertz electric response of fractal metamaterial structures,” Phys. Rev. B 77(4), 045124 (2008). [CrossRef]
  18. W. Withayachumnankul and D. Abbott, “Metamaterials in the terahertz regime,” IEEE Photon. J. 1(2), 99–118 (2009). [CrossRef]
  19. M. V. Gorkunov, S. A. Gredeskul, I. V. Shadrivov, and Y. S. Kivshar, “Effect of microscopic disorder on magnetic properties of metamaterials,” Phys. Rev. E Stat. Nonlin. Soft Matter Phys. 73(5), 056605 (2006). [CrossRef] [PubMed]
  20. N. Katsarakis, G. Konstantinidis, A. Kostopoulos, R. S. Penciu, T. F. Gundogdu, M. Kafesaki, E. N. Economou, Th. Koschny, and C. M. Soukoulis, “Magnetic response of split-ring resonators in the far-infrared frequency regime,” Opt. Lett. 30(11), 1348–1350 (2005). [CrossRef] [PubMed]
  21. B. D. F. Casse, H. O. Moser, J. W. Lee, M. Bahou, S. Inglis, and L. K. Jian, “Towards three-dimensional and multilayer rod-split-ring metamaterial structures by means of deep x-ray lithography,” Appl. Phys. Lett. 90(25), 254106 (2007). [CrossRef]
  22. H. Tao, A. C. Strikwerda, K. Fan, C. M. Bingham, W. J. Padilla, X. Zhang, and R. D. Averitt, “Terahertz metamaterials on free-standing highly-flexible polyimide substrates,” J. Phys. D Appl. Phys. 41(23), 232004 (2008). [CrossRef]
  23. X. G. Peralta, M. C. Wanke, C. L. Arrington, J. D. Williams, I. Brener, A. Strikwerda, R. D. Averitt, W. J. Padilla, E. Smirnova, A. J. Taylor, and J. F. O’Hara, “Large-area metamaterials on thin membranes for multilayer and curved applications at terahertz and higher frequencies,” Appl. Phys. Lett. 94(16), 161113 (2009). [CrossRef]
  24. A. K. Azad, H.-T. Chen, X. Lu, J. Gu, N. R. Weisse-Bernstein, E. Akhadov, A. J. Taylor, W. Zhang, and J. F. O’Hara, “Flexible quasi-three-dimensional terahertz electric metamaterials,” Terahertz Sci. Technol. 2, 15–22 (2009).
  25. P. Gay-Balmaz and O. J. F. Martin, “Electromagnetic resonances in individual and coupled split-ring-resonators,” J. Appl. Phys. 92(5), 2929–2936 (2002). [CrossRef]
  26. C. S. Lim, M. H. Hong, Z. C. Chen, N. R. Han, B. Luk’yanchuk, and T. C. Chong, “Hybrid metamaterial design and fabrication for terahertz resonance response enhancement,” Opt. Express 18(12), 12421–12429 (2010). [CrossRef] [PubMed]
  27. Y. Lin, M. H. Hong, T. C. Chong, C. S. Lim, G. X. Chen, L. S. Tan, Z. B. Wang, and L. P. Shi, “Ultrafast laser induced parallel phase change nanolithography,” Appl. Phys. Lett. 89(4), 041108 (2006). [CrossRef]
  28. Z. C. Chen, M. H. Hong, C. S. Lim, N. R. Han, L. P. Shi, and T. C. Chong, “Parallel laser microfabrication of large-area asymmetric split ring resonator metamaterials and its structural tuning for terahertz resonance,” Appl. Phys. Lett. 96(18), 181101 (2010). [CrossRef]
  29. R. Marqués, F. Medina, and R. Rafii-El-Idrissi, “Role of bianisotropy in negative permeability and left-handed metamaterials,” Phys. Rev. B 65(14), 144440 (2002). [CrossRef]
  30. A. K. Azad, A. J. Taylor, E. Smirnova, and J. F. O’Hara, “Characterization and analysis of terahertz metamaterials based on rectangular split-ring resonators,” Appl. Phys. Lett. 92(1), 011119 (2008). [CrossRef]
  31. F. Miyamaru, M. W. Takeda, and K. Taima, “Characterization of terahertz metamaterials fabricated on flexible plastic films: toward fabrication of bulk metamaterials in terahertz region,” Appl. Phys. Express 2, 042001 (2009). [CrossRef]
  32. F. Miyamaru, S. Kuboda, K. Taima, K. Takano, M. Hangyo, and M. W. Takeda, “Three-dimensional bulk metamaterials operating in the terahertz range,” Appl. Phys. Lett. 96(8), 081105 (2010). [CrossRef]
  33. T. Driscoll, G. O. Andreev, D. N. Basov, S. Palit, S. Y. Cho, N. M. Jokerst, and D. R. Smith, “Tuned permeability in terahertz split-ring resonators for devices and sensors,” Appl. Phys. Lett. 91(6), 062511 (2007). [CrossRef]

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