OSA's Digital Library

Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 19, Iss. 8 — Apr. 11, 2011
  • pp: 7112–7119

Low loss silicon waveguides for the mid-infrared

Goran Z. Mashanovich, Milan M. Milošević, Milos Nedeljkovic, Nathan Owens, Boqian Xiong, Ee Jin Teo, and Youfang Hu  »View Author Affiliations

Optics Express, Vol. 19, Issue 8, pp. 7112-7119 (2011)

View Full Text Article

Enhanced HTML    Acrobat PDF (1209 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



Silicon-on-insulator (SOI) has been used as a platform for near-infrared photonic devices for more than twenty years. Longer wavelengths, however, may be problematic for SOI due to higher absorption loss in silicon dioxide. In this paper we report propagation loss measurements for the longest wavelength used so far on SOI platform. We show that propagation losses of 0.6-0.7 dB/cm can be achieved at a wavelength of 3.39 µm. We also report propagation loss measurements for silicon on porous silicon (SiPSi) waveguides at the same wavelength.

© 2011 OSA

OCIS Codes
(130.3060) Integrated optics : Infrared
(130.3120) Integrated optics : Integrated optics devices

ToC Category:
Integrated Optics

Original Manuscript: February 17, 2011
Revised Manuscript: March 17, 2011
Manuscript Accepted: March 21, 2011
Published: March 30, 2011

Goran Z. Mashanovich, Milan M. Milošević, Milos Nedeljkovic, Nathan Owens, Boqian Xiong, Ee Jin Teo, and Youfang Hu, "Low loss silicon waveguides for the mid-infrared," Opt. Express 19, 7112-7119 (2011)

Sort:  Author  |  Year  |  Journal  |  Reset  


  1. G. T. Reed, G. Mashanovich, F. Y. Gardes, and D. J. Thomson, “Silicon optical modulators,” Nat. Photonics 4(8), 518–526 (2010). [CrossRef]
  2. D.-X. Xu, M. Vachon, A. Densmore, R. Ma, S. Janz, A. Delâge, J. Lapointe, P. Cheben, J. H. Schmid, E. Post, S. Messaoudène, and J.-M. Fédéli, “Real-time cancellation of temperature induced resonance shifts in SOI wire waveguide ring resonator label-free biosensor arrays,” Opt. Express 18(22), 22867–22879 (2010). [CrossRef] [PubMed]
  3. A. L. Washburn, L. C. Gunn, and R. C. Bailey, “Label-free quantitation of a cancer biomarker in complex media using silicon photonic microring resonators,” Anal. Chem. 81(22), 9499–9506 (2009). [CrossRef] [PubMed]
  4. D. Vermeulen, T. Spuesens, P. De Heyn, P. Mechet, R. Notzel, S. Verstuyft, D. Van Thourhout, and G. Roelkens, “III-V/SOI photonic integrated circuit for FTTH central office transceivers in a PTP network configuration,” in Proceedings of 36th European Conference on Optical Communications, Vol. II (Torino, 2010), paper Tu.5.C.2.
  5. R. Soref, “Towards silicon-based longwave integrated optoelectronics (LIO),” Proc. SPIE 6898, 689809, 689809-13 (2008). [CrossRef]
  6. R. Soref, “Mid-infrared photonics in silicon and germanium,” Nat. Photonics 4(8), 495–497 (2010). [CrossRef]
  7. R. A. Soref, S. J. Emelett, and W. R. Buchwald, “Silicon waveguided components for the long-wave infrared region,” J. Opt. A 8, 840–848 (2006). [CrossRef]
  8. X. Liu, J. B. Driscoll, J. I. Dadap, R. M. Osgood, Y. A. Vlasov, and M. J. Green, “Mid-infrared pulse dynamics in Si nanophotonic wires near the two-photon absorption edge”, in Conference on Lasers and Electro-Optic, Technical Digest (CD) (Optical Society of America, 2009), paper CFR5. http://www.opticsinfobase.org/abstract.cfm?URI=CLEO-2009-CFR5
  9. http://www.irphotonics.com
  10. G. T. Reed, Silicon Photonics: The State of the Art (Wiley, 2008).
  11. V. Raghunathan, D. Borlaug, R. R. Rice, and B. Jalali, “Demonstration of a Mid-infrared silicon Raman amplifier,” Opt. Express 15(22), 14355–14362 (2007). [CrossRef] [PubMed]
  12. S. Zlatanovic, J. S. Park, S. Moro, J. M. C. Boggio, I. B. Divliansky, N. Alic, S. Mookherjea, and S. Radic, “Mid-infrared wavelength conversion in silicon waveguides using ultracompact telecom-band-derived pump source,” Nat. Photonics 4(8), 561–564 (2010). [CrossRef]
  13. X. Liu, R. M. Osgood, Y. A. Vlasov, and W. M. J. Green, “Mid-infrared optical parametric amplifier using silicon nanophotonic waveguides,” Nat. Photonics 4(8), 557–560 (2010). [CrossRef]
  14. T. Baehr-Jones, A. Spott, R. Ilic, A. Spott, B. Penkov, W. Asher, and M. Hochberg, “Silicon-on-sapphire integrated waveguides for the mid-infrared,” Opt. Express 18(12), 12127–12135 (2010). [CrossRef] [PubMed]
  15. A. Spott, Y. Liu, T. Baehr-Jones, R. Ilic, and M. Hochberg, “Silicon waveguides and ring resonators at 5.5 μm,” Appl. Phys. Lett. 97(21), 213501 (2010). [CrossRef]
  16. M. M. Milošević, P. S. Matavulj, P. Y. Yang, A. Bagolini, and G. Z. Mashanovich, “Rib waveguides for mid-infrared silicon photonics,” J. Opt. Soc. Am. B 26(9), 1760–1766 (2009). [CrossRef]
  17. P. Y. Yang, G. Z. Mashanovich, I. Gomez-Morilla, W. R. Headley, G. T. Reed, E. J. Teo, D. J. Blackwood, M. B. H. Breese, and A. A. Bettiol, “Free standing waveguides in silicon,” Appl. Phys. Lett. 90(24), 241109 (2007). [CrossRef]
  18. E. J. Teo, A. A. Bettiol, M. B. H. Breese, P. Y. Yang, G. Z. Mashanovich, W. R. Headley, G. T. Reed, and D. J. Blackwood, “Three-dimensional control of optical waveguide fabrication in silicon,” Opt. Express 16(2), 573–578 (2008). [CrossRef] [PubMed]
  19. E. J. Teo, A. A. Bettiol, P. Yang, M. B. H. Breese, B. Q. Xiong, G. Z. Mashanovich, W. R. Headley, and G. T. Reed, “Fabrication of low-loss silicon-on-oxidized-porous-silicon strip waveguide using focused proton-beam irradiation,” Opt. Lett. 34(5), 659–661 (2009). [CrossRef] [PubMed]
  20. P. Y. Yang, S. Stankovic, J. Crnjanski, E. J. Teo, D. Thomson, A. A. Bettiol, M. B. H. Breese, W. Headley, C. Giusca, G. T. Reed, and G. Z. Mashanovich, “Silicon photonic waveguides for mid- and long-wave infrared regions,” J. Mater. Sci. Mater. Electron. 20(S1), 159–163 (2009). [CrossRef]
  21. E. D. Palik, Handbook of Optical Constants of Solids, Vol. 1 (Academic, 1985).
  22. D. E. Aspnes, “Optical properties of thin films,” Thin Solid Films 89(3), 249–262 (1982). [CrossRef]
  23. G. Z. Mashanovich, W. R. Headley, M. M. Milošević, N. Owens, E. J. Teo, B. Q. Xiong, P. Y. Yang, M. Nedeljkovic, J. Anguita, I. Marko, and Y. Hu, “Waveguides for mid-infrared group IV photonics,” in Proceedings of IEEE Conference on Group IV Photonics, (Institute of Electrical and Electronics Engineers, 2010), pp. 374–376.
  24. G. T. Reed and A. P. Knights, Silicon Photonics: An Introduction (Wiley, 2004).
  25. http://www.photond.com
  26. F. Y. Gardes, G. T. Reed, A. P. Knights, G. Mashanovich, P. E. Jessop, L. Rowe, S. McFaul, D. Bruce, and N. G. Tarr, “Sub-micron optical waveguides for silicon photonics formed via the local oxidation of silicon (LOCOS),” Proc. SPIE 6898, 68980R, 68980R-4 (2008). [CrossRef]
  27. C. Tsay, E. Mujagić, C. K. Madsen, C. F. Gmachl, and C. B. Arnold, “Mid-infrared characterization of solution-processed As2S3 chalcogenide glass waveguides,” Opt. Express 18(15), 15523–15530 (2010). [CrossRef] [PubMed]
  28. C. Vigreux-Bercovici, E. Bonhomme, A. Pradel, J.-E. Broquin, L. Labadie, and P. Kern, “Transmission measurements at 10.6 µm of Te2As3Se5 rib waveguides on As2S3 substrate,” Appl. Phys. Lett. 90(1), 011110 (2007). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited