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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 19, Iss. 8 — Apr. 11, 2011
  • pp: 7559–7566

Defect detection and property evaluation of indium tin oxide conducting glass using optical coherence tomography

Meng-Tsan Tsai, Feng-Yu Chang, Ya-Ju Lee, Jiann-Der Lee, Hsiang-Chen Wang, and Cheng-Kuang Lee  »View Author Affiliations


Optics Express, Vol. 19, Issue 8, pp. 7559-7566 (2011)
http://dx.doi.org/10.1364/OE.19.007559


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Abstract

This study demonstrates a new approach for evaluating the properties of indium tin oxide (ITO) conducting glass and identifying defects using optical coherence tomography (OCT). A swept-source OCT system was implemented to scan the ITO conducting glass to enable two-dimensional or three-dimensional imaging. With OCT scanning, the defects can be clearly identified at various depths. Several parameters in addition to morphological information can be estimated simultaneously, including the thickness of the glass substrate, the refractive index, reflection coefficient, and transmission coefficient, all of which can be used to evaluate the quality of ITO conducting glass. This study developed a modified method for evaluating the refractive index of glass substrates without having to perform multiple scans as well as a segmentation algorithm to separate the interfaces. The results show the potential of OCT as an imaging tool for the inspection of defects in ITO conducting glass.

© 2011 OSA

OCIS Codes
(110.4500) Imaging systems : Optical coherence tomography
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.4630) Instrumentation, measurement, and metrology : Optical inspection

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: December 22, 2010
Revised Manuscript: March 4, 2011
Manuscript Accepted: March 28, 2011
Published: April 5, 2011

Citation
Meng-Tsan Tsai, Feng-Yu Chang, Ya-Ju Lee, Jiann-Der Lee, Hsiang-Chen Wang, and Cheng-Kuang Lee, "Defect detection and property evaluation of indium tin oxide conducting glass using optical coherence tomography," Opt. Express 19, 7559-7566 (2011)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-19-8-7559


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