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Enhancement of laser-induced rear surface spallation by pyramid textured structures on silicon wafer solar cells

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Abstract

Pulsed laser ablation is increasingly being applied to locally open the rear dielectric layer of advanced silicon wafer solar cell structures, such as aluminum local back surface field solar cells. We report that the laser ablation process on the rear surface of the solar cell at a relatively low laser fluence can cause undesirable spallation at the front surface which is textured with random upright pyramids. This phenomenon is attributed to the enhancement of the surface spallation effect by up to 3 times due to the confinement of the pressure waves at the tips of these random pyramids. Laser ablation at different laser focus positions and laser fluences is carried out to achieve optimized laser processing of the solar cells.

©2012 Optical Society of America

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Figures (3)

Fig. 1
Fig. 1 (a) Schematic drawing of the pyramid-enhanced laser induced “rear surface spallation effect” at the front surface of the solar cell; (b) SEM image (tilted view) of the pyramid-textured front surface of the solar cell wafer, clearly revealing damaged pyramid tips due to the laser treatment of the rear surface.
Fig. 2
Fig. 2 (a) Planar-view SEM image of the front surface of a solar cell sample after dielectric ablation at the rear surface with the laser focused at the rear surface; (b)-(d) SEM images of the front surface of samples that were rear surface ablated with the laser beam (b) focused at the rear surface, (c) focused at 3 mm above the rear surface, and (d) focused at 3 mm below the rear surface. Image (a) was taken in the SE mode, while images (b)-(d) were taken in the BSE mode of the SEM system. To show the effect more clearly, the rear surfaces were ablated three times.
Fig. 3
Fig. 3 Relative spallation area as a function of the laser fluence. The ps laser beam operated at a wavelength of 532 nm and a pulse duration of ~10 ps was focused at the sample surface.

Tables (1)

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Table 1 One-sun I-V parameters of the solar cells fabricated below and above the rear surface spallation threshold.

Equations (2)

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max{ τ p , τ eph } τ s L C / C S ,
P max = Z E 0 / 3 τ p ,
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