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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 20, Iss. 11 — May. 21, 2012
  • pp: 11778–11786

Spectral properties of La/B - based multilayer mirrors near the boron K absorption edge

Igor A. Makhotkin, Erwin Zoethout, Eric Louis, Andrei M. Yakunin, Stephan Müllender, and Fred Bijkerk  »View Author Affiliations

Optics Express, Vol. 20, Issue 11, pp. 11778-11786 (2012)

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The spectral properties of La/B, La/B4C, and LaN/B, LaN/B4C multilayer mirrors have been investigated in the 6.5-6.9 nm wavelength range based on measured B and B4C optical constants. Experimentally it is verified to what extent measured and tabulated optical constants are applicable for simulations of the reflectivity of these short period multilayer mirrors. The measured maximum reflectance at various wavelength values around the boron-K absorption edge is compared to calculated values from model systems. The measured reflectance profiles of La/B and La/B4C show a maximum at a slightly larger wavelength than calculations would predict based on the measured B and B4C optical constants. This is explained by the influence of a formed boron-lanthanum compound on the wavelength where the multilayer shows maximum reflectance. The maximum reflectance profiles of LaN/B and LaN/B4C multilayers can be described accurately by using the same boron atomic scattering factors, indicating boron in the LaN/B4C multilayer to be in a similar chemical state as boron in the LaN/B multilayer. It also indicates that nitridation of the La layer in the multilayer prevents the formation of La-B compounds. We show that the optimal wavelength for boron based optics is about 6.65 nm and depends on the B chemical state. Finally, using the measured B optical constants we are able to calculate the spectral response of the multilayers, enabling the prediction of the optimal parameters for the above mentioned multilayers

© 2012 OSA

OCIS Codes
(340.7470) X-ray optics : X-ray mirrors
(340.7480) X-ray optics : X-rays, soft x-rays, extreme ultraviolet (EUV)

ToC Category:
X-ray Optics

Original Manuscript: March 23, 2012
Revised Manuscript: May 5, 2012
Manuscript Accepted: May 5, 2012
Published: May 9, 2012

Igor A. Makhotkin, Erwin Zoethout, Eric Louis, Andrei M. Yakunin, Stephan Müllender, and Fred Bijkerk, "Spectral properties of La/B - based multilayer mirrors near the boron K absorption edge," Opt. Express 20, 11778-11786 (2012)

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