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Ultralow-loss, high-density SOI optical waveguide routing for macrochip interconnectsGuoliang Li, Jin Yao, Hiren Thacker, Attila Mekis, Xuezhe Zheng, Ivan Shubin, Ying Luo, Jin-hyoung Lee, Kannan Raj, John E. Cunningham, and Ashok V. Krishnamoorthy »View Author Affiliations
Guoliang Li,1,*
Jin Yao,1
Hiren Thacker,1
Attila Mekis,2
Xuezhe Zheng,1
Ivan Shubin,1
Ying Luo,1
Jin-hyoung Lee,1
Kannan Raj,1
John E. Cunningham,1
and Ashok V. Krishnamoorthy1
1Oracle Labs, Oracle, San Diego, California 92121, USA 2Luxtera Inc., Carlsbad, CA 92011, USA *Corresponding author: glenn.li@oracle.com |
Optics Express, Vol. 20, Issue 11, pp. 12035-12039 (2012)
http://dx.doi.org/10.1364/OE.20.012035
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Abstract
We report optical waveguides up to one meter long with 0.026 dB/cm loss fabricated in a 300nm thick SOI CMOS process. Combined with tight bends and compact interlayer grating couplers, we demonstrate a complete toolbox for ultralow-loss, high-density waveguide routing for macrochip interconnects.
© 2012 OSA
OCIS Codes
(200.4650) Optics in computing : Optical interconnects
(230.7370) Optical devices : Waveguides
(250.5300) Optoelectronics : Photonic integrated circuits
ToC Category:
Optics in Computing
History
Original Manuscript: March 12, 2012
Revised Manuscript: April 30, 2012
Manuscript Accepted: May 1, 2012
Published: May 11, 2012
Citation
Guoliang Li, Jin Yao, Hiren Thacker, Attila Mekis, Xuezhe Zheng, Ivan Shubin, Ying Luo, Jin-hyoung Lee, Kannan Raj, John E. Cunningham, and Ashok V. Krishnamoorthy, "Ultralow-loss, high-density SOI optical waveguide routing for macrochip interconnects," Opt. Express 20, 12035-12039 (2012)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-20-11-12035
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References
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Asanovic, K.
Asghari, M.
Baets, R.
Barton, J. S.
Batten, C.
Bauters, J. F.
Bergman, K.
Blumenthal, D. J.
Bogaerts, W.
Bondarenko, O.
Bowers, J. E.
Bruinink, C. M.
Cardenas, J.
Carloni, L. P.
Cassan, E.
Chen, L.
Cohen, D.
Cunningham, J. E.
Dong, P.
Dumon, P.
Fainman, Y.
Feng, D.
Feng, N.-N.
Fischer, U.
Fong, J.
Grillot, F.
Heck, M. J. R.
Heideman, R. G.
Ho, R.
Holzwarth, C. W.
Hoyt, J. L.
John, D. D.
Joshi, A.
Kartner, F. X.
Khajavikhan, M.
Khilo, A.
Kimerling, L. C.
Koka, P.
Krishnamoorthy, A. V.
Kropp, J.-R.
Kung, C. C.
Kung, C.-C.
Laval, S.
Lee, B. G.
Lei, H.
Leinse, A.
Lexau, J.
Li, G.
Li, H.
Liang, H.
Liao, S.
Lipson, M.
Luff, J.
Luo, Y.
Mekis, A.
Moss, B.
Nezhad, M. P.
Orcutt, J.
Pascal, D.
Petermann, K.
Petracca, M.
Pinguet, T.
Poitras, C. B.
Popovic, M. A.
Preston, K.
Qian, W.
Raj, K.
Ram, R. J.
Robinson, J. T.
Schwetman, H.
Shafiiha, R.
Shubin, I.
Simic, A.
Simons, J.
Smith, H. I.
Sparacin, D. K.
Spector, S. J.
Stojanovic, V.
Sze, T.
Thacker, H.
Thourhout, D. V.
Vivien, L.
Yao, J.
Zheng, D.
Zheng, X.
Zinke, T.
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- C. Batten, A. Joshi, J. Orcutt, A. Khilo, B. Moss, C. W. Holzwarth, M. A. Popovic, H. Li, H. I. Smith, J. L. Hoyt, F. X. Kartner, R. J. Ram, V. Stojanovic, and K. Asanovic, “Building many-core processor-to-DRAM networks with monolithic CMOS silicon photonics,” IEEE Micro29(4), 8–21 (2009). [CrossRef]
- P. Dong, W. Qian, S. Liao, H. Liang, C.-C. Kung, N.-N. Feng, R. Shafiiha, J. Fong, D. Feng, A. V. Krishnamoorthy, and M. Asghari, “Low loss shallow-ridge silicon waveguides,” Opt. Express18(14), 14474–14479 (2010). [CrossRef] [PubMed]
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- C. Batten, A. Joshi, J. Orcutt, A. Khilo, B. Moss, C. W. Holzwarth, M. A. Popovic, H. Li, H. I. Smith, J. L. Hoyt, F. X. Kartner, R. J. Ram, V. Stojanovic, and K. Asanovic, “Building many-core processor-to-DRAM networks with monolithic CMOS silicon photonics,” IEEE Micro29(4), 8–21 (2009). [CrossRef]
- M. Petracca, B. G. Lee, K. Bergman, and L. P. Carloni, “Photonic NoCs: System-level design exploration,” IEEE Micro29(4), 74–85 (2009). [CrossRef]
- M. Petracca, B. G. Lee, K. Bergman, and L. P. Carloni, “Photonic NoCs: System-level design exploration,” IEEE Micro29(4), 74–85 (2009). [CrossRef]
- F. Grillot, L. Vivien, S. Laval, D. Pascal, and E. Cassan, “Size influence on the propagation loss induced by sidewall roughness in ultrasmall SOI waveguides,” IEEE Photon. Technol. Lett.16(7), 1661–1663 (2004). [CrossRef]
- G. Li, X. Zheng, J. Yao, H. Thacker, I. Shubin, Y. Luo, K. Raj, J. E. Cunningham, and A. V. Krishnamoorthy, “25Gb/s 1V-driving CMOS ring modulator with integrated thermal tuning,” Opt. Express19(21), 20435–20443 (2011). [CrossRef] [PubMed]
- A. V. Krishnamoorthy, X. Zheng, G. Li, J. Yao, T. Pinguet, A. Mekis, H. Thacker, I. Shubin, Y. Luo, K. Raj, and J. E. Cunningham, “Exploiting CMOS manufacturing to reduce tuning requirements for resonant optical devices,” IEEE Photon. J.3, 567–579 (2011).
- A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, and J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE97(7), 1337–1361 (2009). [CrossRef]
- X. Zheng, J. E. Cunningham, I. Shubin, J. Simons, M. Asghari, D. Feng, H. Lei, D. Zheng, H. Liang, C. C. Kung, J. Luff, T. Sze, D. Cohen, and A. V. Krishnamoorthy, “Optical proximity communication using reflective mirrors,” Opt. Express16(19), 15052–15058 (2008). [CrossRef] [PubMed]
- P. Dong, W. Qian, S. Liao, H. Liang, C.-C. Kung, N.-N. Feng, R. Shafiiha, J. Fong, D. Feng, A. V. Krishnamoorthy, and M. Asghari, “Low loss shallow-ridge silicon waveguides,” Opt. Express18(14), 14474–14479 (2010). [CrossRef] [PubMed]
- X. Zheng, J. E. Cunningham, I. Shubin, J. Simons, M. Asghari, D. Feng, H. Lei, D. Zheng, H. Liang, C. C. Kung, J. Luff, T. Sze, D. Cohen, and A. V. Krishnamoorthy, “Optical proximity communication using reflective mirrors,” Opt. Express16(19), 15052–15058 (2008). [CrossRef] [PubMed]
- U. Fischer, T. Zinke, J.-R. Kropp, F. Arndt, and K. Petermann, “0.1 dB/cm waveguide losses in single-mode SOI rib waveguides,” IEEE Photon. Technol. Lett.8(5), 647–648 (1996). [CrossRef]
- F. Grillot, L. Vivien, S. Laval, D. Pascal, and E. Cassan, “Size influence on the propagation loss induced by sidewall roughness in ultrasmall SOI waveguides,” IEEE Photon. Technol. Lett.16(7), 1661–1663 (2004). [CrossRef]
- A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, and J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE97(7), 1337–1361 (2009). [CrossRef]
- C. Batten, A. Joshi, J. Orcutt, A. Khilo, B. Moss, C. W. Holzwarth, M. A. Popovic, H. Li, H. I. Smith, J. L. Hoyt, F. X. Kartner, R. J. Ram, V. Stojanovic, and K. Asanovic, “Building many-core processor-to-DRAM networks with monolithic CMOS silicon photonics,” IEEE Micro29(4), 8–21 (2009). [CrossRef]
- C. Batten, A. Joshi, J. Orcutt, A. Khilo, B. Moss, C. W. Holzwarth, M. A. Popovic, H. Li, H. I. Smith, J. L. Hoyt, F. X. Kartner, R. J. Ram, V. Stojanovic, and K. Asanovic, “Building many-core processor-to-DRAM networks with monolithic CMOS silicon photonics,” IEEE Micro29(4), 8–21 (2009). [CrossRef]
- C. Batten, A. Joshi, J. Orcutt, A. Khilo, B. Moss, C. W. Holzwarth, M. A. Popovic, H. Li, H. I. Smith, J. L. Hoyt, F. X. Kartner, R. J. Ram, V. Stojanovic, and K. Asanovic, “Building many-core processor-to-DRAM networks with monolithic CMOS silicon photonics,” IEEE Micro29(4), 8–21 (2009). [CrossRef]
- C. Batten, A. Joshi, J. Orcutt, A. Khilo, B. Moss, C. W. Holzwarth, M. A. Popovic, H. Li, H. I. Smith, J. L. Hoyt, F. X. Kartner, R. J. Ram, V. Stojanovic, and K. Asanovic, “Building many-core processor-to-DRAM networks with monolithic CMOS silicon photonics,” IEEE Micro29(4), 8–21 (2009). [CrossRef]
- C. Batten, A. Joshi, J. Orcutt, A. Khilo, B. Moss, C. W. Holzwarth, M. A. Popovic, H. Li, H. I. Smith, J. L. Hoyt, F. X. Kartner, R. J. Ram, V. Stojanovic, and K. Asanovic, “Building many-core processor-to-DRAM networks with monolithic CMOS silicon photonics,” IEEE Micro29(4), 8–21 (2009). [CrossRef]
- A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, and J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE97(7), 1337–1361 (2009). [CrossRef]
- G. Li, X. Zheng, J. Yao, H. Thacker, I. Shubin, Y. Luo, K. Raj, J. E. Cunningham, and A. V. Krishnamoorthy, “25Gb/s 1V-driving CMOS ring modulator with integrated thermal tuning,” Opt. Express19(21), 20435–20443 (2011). [CrossRef] [PubMed]
- A. V. Krishnamoorthy, X. Zheng, G. Li, J. Yao, T. Pinguet, A. Mekis, H. Thacker, I. Shubin, Y. Luo, K. Raj, and J. E. Cunningham, “Exploiting CMOS manufacturing to reduce tuning requirements for resonant optical devices,” IEEE Photon. J.3, 567–579 (2011).
- P. Dong, W. Qian, S. Liao, H. Liang, C.-C. Kung, N.-N. Feng, R. Shafiiha, J. Fong, D. Feng, A. V. Krishnamoorthy, and M. Asghari, “Low loss shallow-ridge silicon waveguides,” Opt. Express18(14), 14474–14479 (2010). [CrossRef] [PubMed]
- A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, and J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE97(7), 1337–1361 (2009). [CrossRef]
- X. Zheng, J. E. Cunningham, I. Shubin, J. Simons, M. Asghari, D. Feng, H. Lei, D. Zheng, H. Liang, C. C. Kung, J. Luff, T. Sze, D. Cohen, and A. V. Krishnamoorthy, “Optical proximity communication using reflective mirrors,” Opt. Express16(19), 15052–15058 (2008). [CrossRef] [PubMed]
- U. Fischer, T. Zinke, J.-R. Kropp, F. Arndt, and K. Petermann, “0.1 dB/cm waveguide losses in single-mode SOI rib waveguides,” IEEE Photon. Technol. Lett.8(5), 647–648 (1996). [CrossRef]
- F. Grillot, L. Vivien, S. Laval, D. Pascal, and E. Cassan, “Size influence on the propagation loss induced by sidewall roughness in ultrasmall SOI waveguides,” IEEE Photon. Technol. Lett.16(7), 1661–1663 (2004). [CrossRef]
- M. Petracca, B. G. Lee, K. Bergman, and L. P. Carloni, “Photonic NoCs: System-level design exploration,” IEEE Micro29(4), 74–85 (2009). [CrossRef]
- A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, and J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE97(7), 1337–1361 (2009). [CrossRef]
- G. Li, X. Zheng, J. Yao, H. Thacker, I. Shubin, Y. Luo, K. Raj, J. E. Cunningham, and A. V. Krishnamoorthy, “25Gb/s 1V-driving CMOS ring modulator with integrated thermal tuning,” Opt. Express19(21), 20435–20443 (2011). [CrossRef] [PubMed]
- A. V. Krishnamoorthy, X. Zheng, G. Li, J. Yao, T. Pinguet, A. Mekis, H. Thacker, I. Shubin, Y. Luo, K. Raj, and J. E. Cunningham, “Exploiting CMOS manufacturing to reduce tuning requirements for resonant optical devices,” IEEE Photon. J.3, 567–579 (2011).
- A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, and J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE97(7), 1337–1361 (2009). [CrossRef]
- C. Batten, A. Joshi, J. Orcutt, A. Khilo, B. Moss, C. W. Holzwarth, M. A. Popovic, H. Li, H. I. Smith, J. L. Hoyt, F. X. Kartner, R. J. Ram, V. Stojanovic, and K. Asanovic, “Building many-core processor-to-DRAM networks with monolithic CMOS silicon photonics,” IEEE Micro29(4), 8–21 (2009). [CrossRef]
- P. Dong, W. Qian, S. Liao, H. Liang, C.-C. Kung, N.-N. Feng, R. Shafiiha, J. Fong, D. Feng, A. V. Krishnamoorthy, and M. Asghari, “Low loss shallow-ridge silicon waveguides,” Opt. Express18(14), 14474–14479 (2010). [CrossRef] [PubMed]
- X. Zheng, J. E. Cunningham, I. Shubin, J. Simons, M. Asghari, D. Feng, H. Lei, D. Zheng, H. Liang, C. C. Kung, J. Luff, T. Sze, D. Cohen, and A. V. Krishnamoorthy, “Optical proximity communication using reflective mirrors,” Opt. Express16(19), 15052–15058 (2008). [CrossRef] [PubMed]
- A. V. Krishnamoorthy, X. Zheng, G. Li, J. Yao, T. Pinguet, A. Mekis, H. Thacker, I. Shubin, Y. Luo, K. Raj, and J. E. Cunningham, “Exploiting CMOS manufacturing to reduce tuning requirements for resonant optical devices,” IEEE Photon. J.3, 567–579 (2011).
- G. Li, X. Zheng, J. Yao, H. Thacker, I. Shubin, Y. Luo, K. Raj, J. E. Cunningham, and A. V. Krishnamoorthy, “25Gb/s 1V-driving CMOS ring modulator with integrated thermal tuning,” Opt. Express19(21), 20435–20443 (2011). [CrossRef] [PubMed]
- A. V. Krishnamoorthy, X. Zheng, G. Li, J. Yao, T. Pinguet, A. Mekis, H. Thacker, I. Shubin, Y. Luo, K. Raj, and J. E. Cunningham, “Exploiting CMOS manufacturing to reduce tuning requirements for resonant optical devices,” IEEE Photon. J.3, 567–579 (2011).
- C. Batten, A. Joshi, J. Orcutt, A. Khilo, B. Moss, C. W. Holzwarth, M. A. Popovic, H. Li, H. I. Smith, J. L. Hoyt, F. X. Kartner, R. J. Ram, V. Stojanovic, and K. Asanovic, “Building many-core processor-to-DRAM networks with monolithic CMOS silicon photonics,” IEEE Micro29(4), 8–21 (2009). [CrossRef]
- C. Batten, A. Joshi, J. Orcutt, A. Khilo, B. Moss, C. W. Holzwarth, M. A. Popovic, H. Li, H. I. Smith, J. L. Hoyt, F. X. Kartner, R. J. Ram, V. Stojanovic, and K. Asanovic, “Building many-core processor-to-DRAM networks with monolithic CMOS silicon photonics,” IEEE Micro29(4), 8–21 (2009). [CrossRef]
- F. Grillot, L. Vivien, S. Laval, D. Pascal, and E. Cassan, “Size influence on the propagation loss induced by sidewall roughness in ultrasmall SOI waveguides,” IEEE Photon. Technol. Lett.16(7), 1661–1663 (2004). [CrossRef]
- U. Fischer, T. Zinke, J.-R. Kropp, F. Arndt, and K. Petermann, “0.1 dB/cm waveguide losses in single-mode SOI rib waveguides,” IEEE Photon. Technol. Lett.8(5), 647–648 (1996). [CrossRef]
- M. Petracca, B. G. Lee, K. Bergman, and L. P. Carloni, “Photonic NoCs: System-level design exploration,” IEEE Micro29(4), 74–85 (2009). [CrossRef]
- A. V. Krishnamoorthy, X. Zheng, G. Li, J. Yao, T. Pinguet, A. Mekis, H. Thacker, I. Shubin, Y. Luo, K. Raj, and J. E. Cunningham, “Exploiting CMOS manufacturing to reduce tuning requirements for resonant optical devices,” IEEE Photon. J.3, 567–579 (2011).
- C. Batten, A. Joshi, J. Orcutt, A. Khilo, B. Moss, C. W. Holzwarth, M. A. Popovic, H. Li, H. I. Smith, J. L. Hoyt, F. X. Kartner, R. J. Ram, V. Stojanovic, and K. Asanovic, “Building many-core processor-to-DRAM networks with monolithic CMOS silicon photonics,” IEEE Micro29(4), 8–21 (2009). [CrossRef]
- A. V. Krishnamoorthy, X. Zheng, G. Li, J. Yao, T. Pinguet, A. Mekis, H. Thacker, I. Shubin, Y. Luo, K. Raj, and J. E. Cunningham, “Exploiting CMOS manufacturing to reduce tuning requirements for resonant optical devices,” IEEE Photon. J.3, 567–579 (2011).
- G. Li, X. Zheng, J. Yao, H. Thacker, I. Shubin, Y. Luo, K. Raj, J. E. Cunningham, and A. V. Krishnamoorthy, “25Gb/s 1V-driving CMOS ring modulator with integrated thermal tuning,” Opt. Express19(21), 20435–20443 (2011). [CrossRef] [PubMed]
- C. Batten, A. Joshi, J. Orcutt, A. Khilo, B. Moss, C. W. Holzwarth, M. A. Popovic, H. Li, H. I. Smith, J. L. Hoyt, F. X. Kartner, R. J. Ram, V. Stojanovic, and K. Asanovic, “Building many-core processor-to-DRAM networks with monolithic CMOS silicon photonics,” IEEE Micro29(4), 8–21 (2009). [CrossRef]
- A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, and J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE97(7), 1337–1361 (2009). [CrossRef]
- G. Li, X. Zheng, J. Yao, H. Thacker, I. Shubin, Y. Luo, K. Raj, J. E. Cunningham, and A. V. Krishnamoorthy, “25Gb/s 1V-driving CMOS ring modulator with integrated thermal tuning,” Opt. Express19(21), 20435–20443 (2011). [CrossRef] [PubMed]
- A. V. Krishnamoorthy, X. Zheng, G. Li, J. Yao, T. Pinguet, A. Mekis, H. Thacker, I. Shubin, Y. Luo, K. Raj, and J. E. Cunningham, “Exploiting CMOS manufacturing to reduce tuning requirements for resonant optical devices,” IEEE Photon. J.3, 567–579 (2011).
- A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, and J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE97(7), 1337–1361 (2009). [CrossRef]
- X. Zheng, J. E. Cunningham, I. Shubin, J. Simons, M. Asghari, D. Feng, H. Lei, D. Zheng, H. Liang, C. C. Kung, J. Luff, T. Sze, D. Cohen, and A. V. Krishnamoorthy, “Optical proximity communication using reflective mirrors,” Opt. Express16(19), 15052–15058 (2008). [CrossRef] [PubMed]
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IEEE Photon. Technol. Lett.
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- M. Petracca, B. G. Lee, K. Bergman, and L. P. Carloni, “Photonic NoCs: System-level design exploration,” IEEE Micro29(4), 74–85 (2009). [CrossRef]
- F. Grillot, L. Vivien, S. Laval, D. Pascal, and E. Cassan, “Size influence on the propagation loss induced by sidewall roughness in ultrasmall SOI waveguides,” IEEE Photon. Technol. Lett.16(7), 1661–1663 (2004). [CrossRef]
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