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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 20, Iss. 11 — May. 21, 2012
  • pp: 12261–12269

High Q micro-ring resonators fabricated from polycrystalline aluminum nitride films for near infrared and visible photonics

Wolfram H.P. Pernice, Chi Xiong, and Hong X. Tang  »View Author Affiliations

Optics Express, Vol. 20, Issue 11, pp. 12261-12269 (2012)

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We demonstrate wideband integrated photonic circuits in sputter-deposited aluminum nitride (AlN) thin films. At both near-infrared and visible wavelengths, we achieve low propagation loss in integrated waveguides and realize high-quality optical resonators. In the telecoms C-band (1520-1580 nm), we obtain the highest optical Q factor of 440,000. Critical coupled devices show extinction ratio above 30 dB. For visible wavelengths (around 770 nm), intrinsic quality factors in excess of 30,000 is demonstrated. Our work illustrates the potential of AlN as a low loss material for wideband optical applications.

© 2012 OSA

OCIS Codes
(130.3120) Integrated optics : Integrated optics devices
(160.1050) Materials : Acousto-optical materials
(230.5750) Optical devices : Resonators

ToC Category:
Integrated Optics

Original Manuscript: April 3, 2012
Revised Manuscript: May 4, 2012
Manuscript Accepted: May 4, 2012
Published: May 15, 2012

Wolfram H.P. Pernice, Chi Xiong, and Hong X. Tang, "High Q micro-ring resonators fabricated from polycrystalline aluminum nitride films for near infrared and visible photonics," Opt. Express 20, 12261-12269 (2012)

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