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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 20, Iss. 11 — May. 21, 2012
  • pp: 12393–12406

Non-null full field X-ray mirror metrology using SCOTS: a reflection deflectometry approach

Peng Su, Yuhao Wang, James H. Burge, Konstantine Kaznatcheev, and Mourad Idir  »View Author Affiliations

Optics Express, Vol. 20, Issue 11, pp. 12393-12406 (2012)

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In a previous paper, the University of Arizona (UA) has developed a measurement technique called: Software Configurable Optical Test System (SCOTS) based on the principle of reflection deflectometry. In this paper, we present results of this very efficient optical metrology method applied to the metrology of X-ray mirrors. We used this technique to measure surface slope errors with precision and accuracy better than 100 nrad (rms) and ~200 nrad (rms), respectively, with a lateral resolution of few mm or less. We present results of the calibration of the metrology systems, discuss their accuracy and address the precision in measuring a spherical mirror.

© 2012 OSA

OCIS Codes
(120.3940) Instrumentation, measurement, and metrology : Metrology
(340.0340) X-ray optics : X-ray optics
(340.6720) X-ray optics : Synchrotron radiation
(340.7470) X-ray optics : X-ray mirrors

ToC Category:
X-ray Optics

Original Manuscript: March 9, 2012
Revised Manuscript: April 27, 2012
Manuscript Accepted: April 30, 2012
Published: May 16, 2012

Peng Su, Yuhao Wang, James H. Burge, Konstantine Kaznatcheev, and Mourad Idir, "Non-null full field X-ray mirror metrology using SCOTS: a reflection deflectometry approach," Opt. Express 20, 12393-12406 (2012)

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