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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 20, Iss. 11 — May. 21, 2012
  • pp: 12521–12529

SPPs coupling induced interference in metal/dielectric multilayer waveguides and its application for plasmonic lithography

Peng Zhu, Haofei Shi, and L. Jay Guo  »View Author Affiliations

Optics Express, Vol. 20, Issue 11, pp. 12521-12529 (2012)

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We present the analyses of surface plasmon polaritons (SPPs) coupling induced interference in metal/dielectric (M/D) multilayer metamaterials and techniques to improve the performance of sub-wavelength plasmonic lithography. Expressions of beam spreading angles and interference patterns are derived from analyses of numerical simulations and the coupled mode theory. The new understandings provide useful guidelines and design criteria for plasmonic lithography. With proper layer structure design, sub-wavelength uniform periodic patterns with feature size of 1/12 of the mask's period can be realized. High pattern contrast of 0.8 and large field depth of 80 nm are also demonstrated numerically by considering the SPPs coupling in the photoresist. Both high contrast and large image depth are crucial for practical application of plasmonic lithography.

© 2012 OSA

OCIS Codes
(230.7370) Optical devices : Waveguides
(240.6690) Optics at surfaces : Surface waves
(260.3160) Physical optics : Interference
(110.4235) Imaging systems : Nanolithography

ToC Category:
Optics at Surfaces

Original Manuscript: April 11, 2012
Manuscript Accepted: April 30, 2012
Published: May 17, 2012

Peng Zhu, Haofei Shi, and L. Jay Guo, "SPPs coupling induced interference in metal/dielectric multilayer waveguides and its application for plasmonic lithography," Opt. Express 20, 12521-12529 (2012)

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