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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 20, Iss. 12 — Jun. 4, 2012
  • pp: 12939–12948

Versatile route to gapless microlens arrays using laser-tunable wet-etched curved surfaces

Bian Hao, Hewei Liu, Feng Chen, Qing Yang, Pubo Qu, Guangqing Du, Jinhai Si, Xianhua Wang, and Xun Hou  »View Author Affiliations

Optics Express, Vol. 20, Issue 12, pp. 12939-12948 (2012)

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This work reveals a cost-efficient and flexible approach to various microlens arrays on polymers, which is essential to micro-optics elements. An 800-nm femtosecond laser is employed to control the hydrofluoric (HF) acid etching process on silica glasses, and concave microstructures with smooth curved surfaces are produced by this method. Then, the micro-structured glass templates can serve as molds for replicating microlenses on polymers. In this paper, a high-ordered microlens array with over 16,000 hexagonal-shaped lenses is fabricated on poly (dimethyl siloxane) [PDMS], and its perfect light-gathering ability and imaging performance are demonstrated. The flexibility of this method is demonstrated by successful preparation of several concave molds with different patterns which are difficult to be obtained by other methods. This technique provides a new route to small-scaled, smooth and curved surfaces which is widely used in micro-optics, biochemical analysis and superhydrophobic interface.

© 2012 OSA

OCIS Codes
(140.7090) Lasers and laser optics : Ultrafast lasers
(160.5470) Materials : Polymers
(220.0220) Optical design and fabrication : Optical design and fabrication
(230.3990) Optical devices : Micro-optical devices

ToC Category:
Laser Microfabrication

Original Manuscript: April 20, 2012
Revised Manuscript: May 9, 2012
Manuscript Accepted: May 10, 2012
Published: May 23, 2012

Bian Hao, Hewei Liu, Feng Chen, Qing Yang, Pubo Qu, Guangqing Du, Jinhai Si, Xianhua Wang, and Xun Hou, "Versatile route to gapless microlens arrays using laser-tunable wet-etched curved surfaces," Opt. Express 20, 12939-12948 (2012)

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