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Fabrication of semiconductor-polymer compound nonlinear photonic crystal slab with highly uniform infiltration based on nano-imprint lithography techniqueFei Qin, Zi-Ming Meng, Xiao-Lan Zhong, Ye Liu, and Zhi-Yuan Li »View Author Affiliations
Fei Qin,
Zi-Ming Meng,
Xiao-Lan Zhong,
Ye Liu,
and Zhi-Yuan Li*
Laboratory of Optical Physics, Institute of Physics, Chinese Academy of Sciences, P.O. Box 603, Beijing 100190, China *Corresponding author: lizy@aphy.iphy.ac.cn |
Optics Express, Vol. 20, Issue 12, pp. 13091-13099 (2012)
http://dx.doi.org/10.1364/OE.20.013091
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Abstract
We present a versatile technique based on nano-imprint lithography to fabricate high-quality semiconductor-polymer compound nonlinear photonic crystal (NPC) slabs. The approach allows one to infiltrate uniformly polystyrene materials that possess large Kerr nonlinearity and ultrafast nonlinear response into the cylindrical air holes with diameter of hundred nanometers that are perforated in silicon membranes. Both the structural characterization via the cross-sectional scanning electron microscopy images and the optical characterization via the transmission spectrum measurement undoubtedly show that the fabricated compound NPC samples have uniform and dense polymer infiltration and are of high quality in optical properties. The compound NPC samples exhibit sharp transmission band edges and nondegraded high quality factor of microcavities compared with those in the bare silicon PC. The versatile method can be expanded to make general semiconductor-polymer hybrid optical nanostructures, and thus it may pave the way for reliable and efficient fabrication of ultrafast and ultralow power all-optical tunable integrated photonic devices and circuits
© 2012 OSA
OCIS Codes
(190.4390) Nonlinear optics : Nonlinear optics, integrated optics
(230.1150) Optical devices : All-optical devices
(110.4235) Imaging systems : Nanolithography
(230.5298) Optical devices : Photonic crystals
ToC Category:
Photonic Crystals
History
Original Manuscript: February 27, 2012
Revised Manuscript: April 21, 2012
Manuscript Accepted: April 23, 2012
Published: May 25, 2012
Citation
Fei Qin, Zi-Ming Meng, Xiao-Lan Zhong, Ye Liu, and Zhi-Yuan Li, "Fabrication of semiconductor-polymer compound nonlinear photonic crystal slab with highly uniform infiltration based on nano-imprint lithography technique," Opt. Express 20, 13091-13099 (2012)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-20-12-13091
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References
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Akahane, Y.
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Asano, T.
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- S. Y. Chou, P. R. Krauss, and P. J. Renstrom, “Imprint of sub-25nm vias and trenches in polymers,” Appl. Phys. Lett.67(21), 3114–3116 (1995). [CrossRef]
- H. S. Rong, S. B. Xu, Y. H. Kuo, V. Sih, O. Cohen, O. Raday, and M. Paniccia, “Low-threshold continuous-wave Raman silicon laser,” Nat. Photonics1(4), 232–237 (2007). [CrossRef]
- B. Esembeson, M. L. Scimeca, T. Michinobu, F. Diederich, and I. Biaggio, Adv. Mater.20(23), 4584–4587 (2008). [CrossRef]
- X. Y. Hu, P. Jiang, C. Y. Ding, H. Yang, and Q. H. Gong, “Picosecond and low-power all-optical switching based on an organic photonic-bandgap microcavity,” Nat. Photonics2(3), 185–189 (2008). [CrossRef]
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- J. Martz, R. Ferrini, F. Nüesch, L. Zuppiroli, B. Wild, L. A. Dunbar, R. Houdré, M. Mulot, and S. Anand, “Liquid crystal infiltration of InP-based planar photonic crystals,” J. Appl. Phys.99(10), 103105 (2006). [CrossRef]
- B. Esembeson, M. L. Scimeca, T. Michinobu, F. Diederich, and I. Biaggio, Adv. Mater.20(23), 4584–4587 (2008). [CrossRef]
- Y. Z. Liu, R. J. Liu, S. Feng, C. Ren, H. F. Yang, D. Z. Zhang, and Z. Y. Li, “Multichannel filters via Γ-M and Γ-K waveguide coupling in two-dimensional triangular-lattice photonic crystal slabs,” Appl. Phys. Lett.93(24), 241107 (2008). [CrossRef]
- P. El-Kallassi, S. Balog, R. Houdré, L. Balet, L. H. Li, M. Francardi, A. Gerardino, A. Fiore, R. Ferrini, and L. Zuppiroli, “Local infiltration of planar photonic crystals with UV-curable polymers,” J. Opt. Soc. Am. B25(10), 1562–1567 (2008). [CrossRef]
- J. Martz, R. Ferrini, F. Nüesch, L. Zuppiroli, B. Wild, L. A. Dunbar, R. Houdré, M. Mulot, and S. Anand, “Liquid crystal infiltration of InP-based planar photonic crystals,” J. Appl. Phys.99(10), 103105 (2006). [CrossRef]
- T. Tanabe, K. Nishiguchi, A. Shinya, E. Kuramochi, H. Inokawa, M. Notomi, K. Yamada, T. Tsuchizawa, T. Watanabe, H. Fukuda, H. Shinojima, and S. Itabashi, “Fast all-optical switching using ion-implanted silicon photonic crystal nanocavities,” Appl. Phys. Lett.90(3), 031115 (2007). [CrossRef]
- L. Gan, C. Z. Zhou, C. Wang, R. J. Liu, D. Z. Zhang, and Z. Y. Li, “Two-dimensional air-bridged silicon photonic crystal slab devices,” Phys. Status Solidi A207(12), 2715–2725 (2010). [CrossRef]
- L. Gan, Y. Z. Liu, J. Y. Li, Z. B. Zhang, D. Z. Zhang, and Z. Y. Li, “Ray trace visualization of negative refraction of light in two-dimensional air-bridged silicon photonic crystal slabs at 1.55 microm,” Opt. Express17(12), 9962–9970 (2009). [CrossRef] [PubMed]
- X. Y. Hu, Z. Q. Li, J. X. Zhang, H. Yang, Q. H. Gong, and X. P. Zhang, “Low-power and high-contrast nanoscale all-optical diodes via nanocomposite photonic crystal microcavities,” Adv. Funct. Mater.21(10), 1803–1809 (2011). [CrossRef]
- X. Y. Hu, P. Jiang, C. Y. Ding, H. Yang, and Q. H. Gong, “Picosecond and low-power all-optical switching based on an organic photonic-bandgap microcavity,” Nat. Photonics2(3), 185–189 (2008). [CrossRef]
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