Photothermal optical modulation of ultra-compact hybrid Si-VO<sub>2</sub> ring resonators

doi:10.1364/OE.20.013215

Photothermal optical modulation of ultra-compact hybrid Si-VO₂ ring resonators

Judson D. Ryckman, V. Diez-Blanco, Joyeeta Nag, Robert E. Marvel, B. K. Choi, Richard F. Haglund, and Sharon M. Weiss »View Author Affiliations

Optics Express, Vol. 20, Issue 12, pp. 13215-13225 (2012)
http://dx.doi.org/10.1364/OE.20.013215

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Abstract

We demonstrate photothermally induced optical switching of ultra-compact hybrid Si-VO₂ ring resonators. The devices consist of a sub-micron length ~70nm thick patch of phase-changing VO₂ integrated onto silicon ring resonators as small as 1.5μm in radius. The semiconductor-to-metal transition (SMT) of VO₂ is triggered using a 532nm pump laser, while optical transmission is probed using a tunable cw laser near 1550nm. We observe optical modulation greater than 10dB from modest quality-factor (~10³) resonances, as well as a large –1.26nm change in resonant wavelength Δλ, resulting from the large change in the dielectric function of VO₂ in the insulator-to-metal transition achieved by optical pumping.

OCIS Codes
(160.6840) Materials : Thermo-optical materials
(230.3120) Optical devices : Integrated optics devices
(230.4110) Optical devices : Modulators
(230.5750) Optical devices : Resonators
(130.4815) Integrated optics : Optical switching devices

ToC Category:
Integrated Optics

History
Original Manuscript: February 27, 2012
Revised Manuscript: May 19, 2012
Manuscript Accepted: May 24, 2012
Published: May 29, 2012

Citation
Judson D. Ryckman, V. Diez-Blanco, Joyeeta Nag, Robert E. Marvel, B. K. Choi, Richard F. Haglund, and Sharon M. Weiss, "Photothermal optical modulation of ultra-compact hybrid Si-VO₂ ring resonators," Opt. Express 20, 13215-13225 (2012)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-20-12-13215

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References

G. T. Reed, G. Mashanovich, F. Y. Gardes, and D. J. Thomson, “Silicon optical modulators,” Nat. Photonics4(8), 518–526 (2010). [CrossRef]
Q. F. Xu, B. Schmidt, S. Pradhan, and M. Lipson, “Micrometre-scale silicon electro-optic modulator,” Nature435(7040), 325–327 (2005). [CrossRef] [PubMed]
V. R. Almeida, C. A. Barrios, R. R. Panepucci, and M. Lipson, “All-optical control of light on a silicon chip,” Nature431(7012), 1081–1084 (2004). [CrossRef] [PubMed]
Q. F. Xu and M. Lipson, “All-optical logic based on silicon micro-ring resonators,” Opt. Express15(3), 924–929 (2007). [CrossRef] [PubMed]
Q. F. Xu, B. Schmidt, J. Shakya, and M. Lipson, “Cascaded silicon micro-ring modulators for WDM optical interconnection,” Opt. Express14(20), 9431–9435 (2006). [CrossRef] [PubMed]
A. S. Liu, R. Jones, L. Liao, D. Samara-Rubio, D. Rubin, O. Cohen, R. Nicolaescu, and M. Paniccia, “A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor,” Nature427(6975), 615–618 (2004). [CrossRef] [PubMed]
J. Teng, P. Dumon, W. Bogaerts, H. B. Zhang, X. G. Jian, X. Y. Han, M. S. Zhao, G. Morthier, and R. Baets, “Athermal Silicon-on-insulator ring resonators by overlaying a polymer cladding on narrowed waveguides,” Opt. Express17(17), 14627–14633 (2009). [CrossRef] [PubMed]
W. N. Ye, J. Michel, and L. C. Kimerling, “Athermal high-index-contrast waveguide design,” IEEE Photon. Technol. Lett.20(11), 885–887 (2008). [CrossRef]
S. Manipatruni, R. K. Dokania, B. Schmidt, N. Sherwood-Droz, C. B. Poitras, A. B. Apsel, and M. Lipson, “Wide temperature range operation of micrometer-scale silicon electro-optic modulators,” Opt. Lett.33(19), 2185–2187 (2008). [CrossRef] [PubMed]
F. Y. Gardes, G. T. Reed, N. G. Emerson, and C. E. Png, “A sub-micron depletion-type photonic modulator in Silicon On Insulator,” Opt. Express13(22), 8845–8854 (2005). [CrossRef] [PubMed]
Y. H. Kuo, Y. K. Lee, Y. S. Ge, S. Ren, J. E. Roth, T. I. Kamins, D. A. B. Miller, and J. S. Harris, “Strong quantum-confined Stark effect in germanium quantum-well structures on silicon,” Nature437(7063), 1334–1336 (2005). [CrossRef] [PubMed]
L. Liu, J. Van Campenhout, G. Roelkens, R. A. Soref, D. Van Thourhout, P. Rojo-Romeo, P. Regreny, C. Seassal, J. M. Fédéli, and R. Baets, “Carrier-injection-based electro-optic modulator on silicon-on-insulator with a heterogeneously integrated III-V microdisk cavity,” Opt. Lett.33(21), 2518–2520 (2008). [CrossRef] [PubMed]
H. W. Chen, Y. H. Kuo, and J. E. Bowers, “25Gb/s hybrid silicon switch using a capacitively loaded traveling wave electrode,” Opt. Express18(2), 1070–1075 (2010). [CrossRef] [PubMed]
M. Hochberg, T. Baehr-Jones, G. X. Wang, M. Shearn, K. Harvard, J. D. Luo, B. Q. Chen, Z. W. Shi, R. Lawson, P. Sullivan, A. K. Y. Jen, L. Dalton, and A. Scherer, “Terahertz all-optical modulation in a silicon-polymer hybrid system,” Nat. Mater.5(9), 703–709 (2006). [CrossRef] [PubMed]
M. Liu, X. B. Yin, E. Ulin-Avila, B. S. Geng, T. Zentgraf, L. Ju, F. Wang, and X. Zhang, “A graphene-based broadband optical modulator,” Nature474(7349), 64–67 (2011). [CrossRef] [PubMed]
R. M. Briggs, I. M. Pryce, and H. A. Atwater, “Compact silicon photonic waveguide modulator based on the vanadium dioxide metal-insulator phase transition,” Opt. Express18(11), 11192–11201 (2010). [CrossRef] [PubMed]
V. Eyert, “The metal-insulator transitions of VO2: a band theoretical approach,” Ann. Phys. (Leipzig)9, 650–704 (2002).
F. J. Morin, “Oxides which show a metal-to-insulator transition at the Neel temperature,” Phys. Rev. Lett.3(1), 34–36 (1959). [CrossRef]
J. Cao, E. Ertekin, V. Srinivasan, W. Fan, S. Huang, H. Zheng, J. W. L. Yim, D. R. Khanal, D. F. Ogletree, J. C. Grossman, and J. Wu, “Strain engineering and one-dimensional organization of metal-insulator domains in single-crystal vanadium dioxide beams,” Nat. Nanotechnol.4(11), 732–737 (2009). [CrossRef] [PubMed]
G. Stefanovich, A. Pergament, and D. Stefanovich, “Electrical switching and Mott transition in VO2,” J. Phys. Condens. Matter12(41), 8837–8845 (2000). [CrossRef]
D. Ruzmetov, G. Gopalakrishnan, J. D. Deng, V. Narayanamurti, and S. Ramanathan, “Electrical triggering of metal-insulator transition in nanoscale vanadium oxide junctions,” J. Appl. Phys.106(8), 083702 (2009). [CrossRef]
A. Cavalleri, C. Tóth, C. W. Siders, J. A. Squier, F. Ráksi, P. Forget, and J. C. Kieffer, “Femtosecond structural dynamics in VO2 during an ultrafast solid-solid phase transition,” Phys. Rev. Lett.87(23), 237401 (2001). [CrossRef] [PubMed]
R. Lopez, R. F. Haglund, L. C. Feldman, L. A. Boatner, and T. E. Haynes, “Optical nonlinearities in VO2 nanoparticles and thin films,” Appl. Phys. Lett.85(22), 5191–5193 (2004). [CrossRef]
A. Pashkin, C. Kubler, H. Ehrke, R. Lopez, A. Halabica, R. F. Haglund, R. Huber, and A. Leitenstorfer, “Ultrafast insulator-metal phase transition in VO(2) studied by multiterahertz spectroscopy,” Phys. Rev. B83(19), 195120 (2011). [CrossRef]
Q. F. Xu, D. Fattal, and R. G. Beausoleil, “Silicon microring resonators with 1.5-microm radius,” Opt. Express16(6), 4309–4315 (2008). [CrossRef] [PubMed]
J. Nag, E. A. Payzant, K. L. More, and R. F. Haglund, “Enhanced performance of room-temperature-grown epitaxial thin films of vanadium dioxide,” Appl. Phys. Lett.98(25), 251916 (2011). [CrossRef]
J. Y. Suh, R. Lopez, L. C. Feldman, and J. R. F. Haglund, “Semiconductor to metal phase transition in the nucleation and growth of VO[sub 2] nanoparticles and thin films,” J. Appl. Phys.96(2), 1209–1213 (2004). [CrossRef]
M. S. Nawrocka, T. Liu, X. Wang, and R. R. Panepucci, “Tunable silicon microring resonator with wide free spectral range,” Appl. Phys. Lett.89(7), 071110 (2006). [CrossRef]
T. Ben-Messaoud, G. Landry, J. P. Gariepy, B. Ramamoorthy, P. V. Ashrit, and A. Hache, “High contrast optical switching in vanadium dioxide thin films,” Opt. Commun.281(24), 6024–6027 (2008). [CrossRef]
G. Cocorullo, F. G. Della Corte, I. Rendina, and P. M. Sarro, “Thermo-optic effect exploitation in silicon microstructures,” Sens. Actuators A Phys.71(1-2), 19–26 (1998). [CrossRef]
J. T. Robinson, L. Chen, and M. Lipson, “On-chip gas detection in silicon optical microcavities,” Opt. Express16(6), 4296–4301 (2008). [CrossRef] [PubMed]
J. D. Ryckman and S. M. Weiss, “Localized field enhancements in guided and defect modes of a periodic slot waveguide,” IEEE Photon. J3(6), 986–995 (2011). [CrossRef]
M. Rini, A. Cavalleri, R. W. Schoenlein, R. López, L. C. Feldman, R. F. Haglund, L. A. Boatner, and T. E. Haynes, “Photoinduced phase transition in VO2 nanocrystals: ultrafast control of surface-plasmon resonance,” Opt. Lett.30(5), 558–560 (2005). [CrossRef] [PubMed]
S. Manipatruni, K. Preston, L. Chen, and M. Lipson, “Ultra-low voltage, ultra-small mode volume silicon microring modulator,” Opt. Express18(17), 18235–18242 (2010). [CrossRef] [PubMed]
C. Batten, A. Joshi, J. Orcutt, A. Khilo, B. Moss, C. Holzwarth, M. Popovic, L. Hanqing, H. Smith, J. Hoyt, F. Kartner, R. Ram, V. Stojanovic, and K. Asanovic, “Building manycore processor-to-DRAM networks with monolithic silicon photonics,” in 16th IEEE Symposium on High Performance Interconnects,2008. HOTI ‘08., 2008), pp. 21–30.

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[1] G. T. Reed, G. Mashanovich, F. Y. Gardes, and D. J. Thomson, “Silicon optical modulators,” Nat. Photonics4(8), 518–526 (2010). [CrossRef]

[2] Q. F. Xu, B. Schmidt, S. Pradhan, and M. Lipson, “Micrometre-scale silicon electro-optic modulator,” Nature435(7040), 325–327 (2005). [CrossRef] [PubMed]

[3] V. R. Almeida, C. A. Barrios, R. R. Panepucci, and M. Lipson, “All-optical control of light on a silicon chip,” Nature431(7012), 1081–1084 (2004). [CrossRef] [PubMed]

[4] Q. F. Xu and M. Lipson, “All-optical logic based on silicon micro-ring resonators,” Opt. Express15(3), 924–929 (2007). [CrossRef] [PubMed]

[5] Q. F. Xu, B. Schmidt, J. Shakya, and M. Lipson, “Cascaded silicon micro-ring modulators for WDM optical interconnection,” Opt. Express14(20), 9431–9435 (2006). [CrossRef] [PubMed]

[6] A. S. Liu, R. Jones, L. Liao, D. Samara-Rubio, D. Rubin, O. Cohen, R. Nicolaescu, and M. Paniccia, “A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor,” Nature427(6975), 615–618 (2004). [CrossRef] [PubMed]

[7] J. Teng, P. Dumon, W. Bogaerts, H. B. Zhang, X. G. Jian, X. Y. Han, M. S. Zhao, G. Morthier, and R. Baets, “Athermal Silicon-on-insulator ring resonators by overlaying a polymer cladding on narrowed waveguides,” Opt. Express17(17), 14627–14633 (2009). [CrossRef] [PubMed]

[8] W. N. Ye, J. Michel, and L. C. Kimerling, “Athermal high-index-contrast waveguide design,” IEEE Photon. Technol. Lett.20(11), 885–887 (2008). [CrossRef]

[9] S. Manipatruni, R. K. Dokania, B. Schmidt, N. Sherwood-Droz, C. B. Poitras, A. B. Apsel, and M. Lipson, “Wide temperature range operation of micrometer-scale silicon electro-optic modulators,” Opt. Lett.33(19), 2185–2187 (2008). [CrossRef] [PubMed]

[10] F. Y. Gardes, G. T. Reed, N. G. Emerson, and C. E. Png, “A sub-micron depletion-type photonic modulator in Silicon On Insulator,” Opt. Express13(22), 8845–8854 (2005). [CrossRef] [PubMed]

[11] Y. H. Kuo, Y. K. Lee, Y. S. Ge, S. Ren, J. E. Roth, T. I. Kamins, D. A. B. Miller, and J. S. Harris, “Strong quantum-confined Stark effect in germanium quantum-well structures on silicon,” Nature437(7063), 1334–1336 (2005). [CrossRef] [PubMed]

[12] L. Liu, J. Van Campenhout, G. Roelkens, R. A. Soref, D. Van Thourhout, P. Rojo-Romeo, P. Regreny, C. Seassal, J. M. Fédéli, and R. Baets, “Carrier-injection-based electro-optic modulator on silicon-on-insulator with a heterogeneously integrated III-V microdisk cavity,” Opt. Lett.33(21), 2518–2520 (2008). [CrossRef] [PubMed]

[13] H. W. Chen, Y. H. Kuo, and J. E. Bowers, “25Gb/s hybrid silicon switch using a capacitively loaded traveling wave electrode,” Opt. Express18(2), 1070–1075 (2010). [CrossRef] [PubMed]

[14] M. Hochberg, T. Baehr-Jones, G. X. Wang, M. Shearn, K. Harvard, J. D. Luo, B. Q. Chen, Z. W. Shi, R. Lawson, P. Sullivan, A. K. Y. Jen, L. Dalton, and A. Scherer, “Terahertz all-optical modulation in a silicon-polymer hybrid system,” Nat. Mater.5(9), 703–709 (2006). [CrossRef] [PubMed]

[15] M. Liu, X. B. Yin, E. Ulin-Avila, B. S. Geng, T. Zentgraf, L. Ju, F. Wang, and X. Zhang, “A graphene-based broadband optical modulator,” Nature474(7349), 64–67 (2011). [CrossRef] [PubMed]

[16] R. M. Briggs, I. M. Pryce, and H. A. Atwater, “Compact silicon photonic waveguide modulator based on the vanadium dioxide metal-insulator phase transition,” Opt. Express18(11), 11192–11201 (2010). [CrossRef] [PubMed]

[17] V. Eyert, “The metal-insulator transitions of VO2: a band theoretical approach,” Ann. Phys. (Leipzig)9, 650–704 (2002).

[18] F. J. Morin, “Oxides which show a metal-to-insulator transition at the Neel temperature,” Phys. Rev. Lett.3(1), 34–36 (1959). [CrossRef]

[19] J. Cao, E. Ertekin, V. Srinivasan, W. Fan, S. Huang, H. Zheng, J. W. L. Yim, D. R. Khanal, D. F. Ogletree, J. C. Grossman, and J. Wu, “Strain engineering and one-dimensional organization of metal-insulator domains in single-crystal vanadium dioxide beams,” Nat. Nanotechnol.4(11), 732–737 (2009). [CrossRef] [PubMed]

[20] G. Stefanovich, A. Pergament, and D. Stefanovich, “Electrical switching and Mott transition in VO2,” J. Phys. Condens. Matter12(41), 8837–8845 (2000). [CrossRef]

[21] D. Ruzmetov, G. Gopalakrishnan, J. D. Deng, V. Narayanamurti, and S. Ramanathan, “Electrical triggering of metal-insulator transition in nanoscale vanadium oxide junctions,” J. Appl. Phys.106(8), 083702 (2009). [CrossRef]

[22] A. Cavalleri, C. Tóth, C. W. Siders, J. A. Squier, F. Ráksi, P. Forget, and J. C. Kieffer, “Femtosecond structural dynamics in VO2 during an ultrafast solid-solid phase transition,” Phys. Rev. Lett.87(23), 237401 (2001). [CrossRef] [PubMed]

[23] R. Lopez, R. F. Haglund, L. C. Feldman, L. A. Boatner, and T. E. Haynes, “Optical nonlinearities in VO2 nanoparticles and thin films,” Appl. Phys. Lett.85(22), 5191–5193 (2004). [CrossRef]

[24] A. Pashkin, C. Kubler, H. Ehrke, R. Lopez, A. Halabica, R. F. Haglund, R. Huber, and A. Leitenstorfer, “Ultrafast insulator-metal phase transition in VO(2) studied by multiterahertz spectroscopy,” Phys. Rev. B83(19), 195120 (2011). [CrossRef]

[25] Q. F. Xu, D. Fattal, and R. G. Beausoleil, “Silicon microring resonators with 1.5-microm radius,” Opt. Express16(6), 4309–4315 (2008). [CrossRef] [PubMed]

[26] J. Nag, E. A. Payzant, K. L. More, and R. F. Haglund, “Enhanced performance of room-temperature-grown epitaxial thin films of vanadium dioxide,” Appl. Phys. Lett.98(25), 251916 (2011). [CrossRef]

[27] J. Y. Suh, R. Lopez, L. C. Feldman, and J. R. F. Haglund, “Semiconductor to metal phase transition in the nucleation and growth of VO[sub 2] nanoparticles and thin films,” J. Appl. Phys.96(2), 1209–1213 (2004). [CrossRef]

[28] M. S. Nawrocka, T. Liu, X. Wang, and R. R. Panepucci, “Tunable silicon microring resonator with wide free spectral range,” Appl. Phys. Lett.89(7), 071110 (2006). [CrossRef]

[29] T. Ben-Messaoud, G. Landry, J. P. Gariepy, B. Ramamoorthy, P. V. Ashrit, and A. Hache, “High contrast optical switching in vanadium dioxide thin films,” Opt. Commun.281(24), 6024–6027 (2008). [CrossRef]

[30] G. Cocorullo, F. G. Della Corte, I. Rendina, and P. M. Sarro, “Thermo-optic effect exploitation in silicon microstructures,” Sens. Actuators A Phys.71(1-2), 19–26 (1998). [CrossRef]

[31] J. T. Robinson, L. Chen, and M. Lipson, “On-chip gas detection in silicon optical microcavities,” Opt. Express16(6), 4296–4301 (2008). [CrossRef] [PubMed]

[32] J. D. Ryckman and S. M. Weiss, “Localized field enhancements in guided and defect modes of a periodic slot waveguide,” IEEE Photon. J3(6), 986–995 (2011). [CrossRef]

[33] M. Rini, A. Cavalleri, R. W. Schoenlein, R. López, L. C. Feldman, R. F. Haglund, L. A. Boatner, and T. E. Haynes, “Photoinduced phase transition in VO2 nanocrystals: ultrafast control of surface-plasmon resonance,” Opt. Lett.30(5), 558–560 (2005). [CrossRef] [PubMed]

[34] S. Manipatruni, K. Preston, L. Chen, and M. Lipson, “Ultra-low voltage, ultra-small mode volume silicon microring modulator,” Opt. Express18(17), 18235–18242 (2010). [CrossRef] [PubMed]

[35] C. Batten, A. Joshi, J. Orcutt, A. Khilo, B. Moss, C. Holzwarth, M. Popovic, L. Hanqing, H. Smith, J. Hoyt, F. Kartner, R. Ram, V. Stojanovic, and K. Asanovic, “Building manycore processor-to-DRAM networks with monolithic silicon photonics,” in 16th IEEE Symposium on High Performance Interconnects,2008. HOTI ‘08., 2008), pp. 21–30.

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Photothermal optical modulation of ultra-compact hybrid Si-VO₂ ring resonators