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Photo-induced trimming of chalcogenide-assisted silicon waveguidesAntonio Canciamilla, Francesco Morichetti, Stefano Grillanda, Philippe Velha, Marc Sorel, Vivek Singh, Anu Agarwal, Lionel C. Kimerling, and Andrea Melloni »View Author Affiliations
Antonio Canciamilla,1,*
Francesco Morichetti,1
Stefano Grillanda,1
Philippe Velha,2
Marc Sorel,2
Vivek Singh,3
Anu Agarwal,3
Lionel C. Kimerling,3
and Andrea Melloni1
1Dipartimento di Elettronica e Informazione, Politecnico di Milano, Milano, Italy 2School of Engineering, University of Glasgow, Glasgow G12 8LT, UK 3Microphotonics Center, Massachusetts Institute of Technology, Cambridge, MA 02139, USA *Corresponding author: canciamilla@elet.polimi.it |
Optics Express, Vol. 20, Issue 14, pp. 15807-15817 (2012)
http://dx.doi.org/10.1364/OE.20.015807
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Abstract
A chalcogenide-assisted silicon waveguide is realized by depositing a thin layer of A2S3 glass onto a conventional silicon on insulator optical waveguide. The photosensitivity of the chalcogenide is exploited to locally change the optical properties of the waveguide through exposure to visible light radiation. Waveguide trimming is experimentally demonstrated by permanently shifting the resonant wavelength of a microring resonator by 6.7 nm, corresponding to an effective index increase of 1.6·10−2. Saturation effects, trimming range, velocity and temporal stability of the process are discussed in details. Results demonstrate that photo-induced treatments can be exploited for a post-fabrication compensation of fabrication tolerances, as well as to set and reconfigure the circuit response.
© 2012 OSA
OCIS Codes
(130.3120) Integrated optics : Integrated optics devices
(130.3130) Integrated optics : Integrated optics materials
(230.1150) Optical devices : All-optical devices
(250.5300) Optoelectronics : Photonic integrated circuits
(160.5335) Materials : Photosensitive materials
ToC Category:
Integrated Optics
History
Original Manuscript: April 18, 2012
Revised Manuscript: May 28, 2012
Manuscript Accepted: May 31, 2012
Published: June 27, 2012
Citation
Antonio Canciamilla, Francesco Morichetti, Stefano Grillanda, Philippe Velha, Marc Sorel, Vivek Singh, Anu Agarwal, Lionel C. Kimerling, and Andrea Melloni, "Photo-induced trimming of chalcogenide-assisted silicon waveguides," Opt. Express 20, 15807-15817 (2012)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-20-14-15807
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References
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- S. T. Chu, W. Pan, S. Sato, T. Kaneko, B. Little, and Y. Kokubun, “Wavelength trimming of a microring resonator filter by means of a UV sensitive polymer overlay,” IEEE Photon. Technol. Lett.11, 688–690 (1999). [CrossRef]
- H. Rong, R. Jones, A. Liu, O. Cohen, D. Hak, A. Fang, and M. Paniccia, “A continuous-wave Raman silicon laser,” Nature (London)433, 292–294 (2005). [CrossRef]
- M. A. Popovic, T. Barwicz, M. S. Dahlem, F. Gan, C. W. Holzwarth, P. T. Rakich, H. I. Smith, E. P. Ippen, and F. X. Kärtner, “Tunable, fourth-order silicon microring-resonator add-drop filters,” in 33rd European Conference and Exhibition of Optical Communication (ECOC), IET Seminar Digests (2007), paper 123. [CrossRef]
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- A. Melloni, A. Canciamilla, C. Ferrari, F. Morichetti, L. O’Faolain, T. F. Krauss, R. De La Rue, A. Samarelli, and M. Sorel, “Tunable delay lines in silicon photonics: coupled resonators and photonic crystals, a comparison,” IEEE Photon. J.2, 181–194 (2010). [CrossRef]
- A. Canciamilla, M. Torregiani, C. Ferrari, F. Morichetti, R. M. De La Rue, A. Samarelli, M. Sorel, and A. Melloni, “Silicon coupled-ring resonator structures for slow light applications: potential, impairments and ultimate limits,” J. Opt.12, 104008 (2010). [CrossRef]
- F. Morichetti, A. Canciamilla, M. Martinelli, A. Samarelli, R. M. De La Rue, M. Sorel, and A. Melloni, “Coherent backscattering in optical microring resonators,” Appl. Phys. Lett.96, 081112 (2010). [CrossRef]
- M. Gnan, S. Thorns, D. S. Macintyre, R. M. De La Rue, and M. Sorel, “Fabrication of low-loss photonic wires in silicon-on-insulator using hydrogen silsesquioxane electron-beam resist,” Electron. Lett.44, 115–116 (2008). [CrossRef]
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- S. Ibrahim, N. K. Fontaine, S. S. Djordjevic, B. Guan, T. Su, S. Cheung, R. P. Scott, A. T. Pomerene, L. L. Seaford, C. M. Hill, S. Danziger, Z. Ding, K. Okamoto, and S. J. B. Yoo, “Demonstration of a fast-reconfigurable silicon CMOS optical lattice filter,” Opt. Express19, 13245–13256 (2011). [CrossRef] [PubMed]
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- F. Morichetti, A. Canciamilla, C. Ferrari, M. Torregiani, A. Melloni, and M. Martinelli, “Roughness induced backscattering in optical silicon waveguides,” Phys. Rev. Lett.104, 033902 (2010). [CrossRef] [PubMed]
- A. Canciamilla, M. Torregiani, C. Ferrari, F. Morichetti, R. M. De La Rue, A. Samarelli, M. Sorel, and A. Melloni, “Silicon coupled-ring resonator structures for slow light applications: potential, impairments and ultimate limits,” J. Opt.12, 104008 (2010). [CrossRef]
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Electron. Lett.
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IEEE J. Quantum Electron.
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Nat. Photonics
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Nature (London)
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Opt. Express
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Opt. Lett.
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- B. Jalali, M. Paniccia, and G. Reed, “Silicon photonics,” IEEE Microw. Mag.7, 58–68 (2006). [CrossRef]
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- A. Zakery and S. R. Elliott, “Optical properties and applications of chalcogenide glasses: a review,” J. Non-Cryst. Solids330, 1–12 (2003). [CrossRef]
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