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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 20, Iss. 14 — Jul. 2, 2012
  • pp: 16059–16066

Stability of polymer-dielectric bi-layers for athermal silicon photonics

Vivek Raghunathan, Tomoyuki Izuhara, Jurgen Michel, and Lionel Kimerling  »View Author Affiliations


Optics Express, Vol. 20, Issue 14, pp. 16059-16066 (2012)
http://dx.doi.org/10.1364/OE.20.016059


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Abstract

Temperature sensitivity of Si based rings can be nullified by the use of polymer over-cladding. Integration of athermal passive rings in an electronic-photonic architecture requires the possibility of multi-layer depositions with patterned structures. This requires establishing UV, thermal and plasma stability of the polymer during multi-layer stacking. UV stability is enhanced by UV curing to saturation levels. However, thermal stability is limited by the decomposition temperature of the polymer. Further, robust performance in oxidizing atmosphere and plasma exposure requires a SiO2/SiNx based dielectric coatings on the polymer. This communication uses a low temperature (130°C) High Density Plasma Chemical Vapor Deposition (HDPCVD) for dielectric encapsulation of polymer cladded Si rings to make them suitable for device layer deposition. UV induced cross-linking and annealing under vacuum make polymer robust and stable for Electron Cyclotron Resonance (ECR)-PECVD deposition of 500nm SiO2/SiNx. The thermo-optic (TO) properties of the polymer cladded athermal rings do not change after dielectric cap deposition opening up possibilities of device deposition on top of the passive athermal rings. Back-end CMOS compatibility requires polymer materials with high decomposition temperature (> 400°C) that have low TO coefficients. This encourages the use of SiNx core waveguides in the back-end architecture for athermal applications.

© 2012 OSA

OCIS Codes
(130.2790) Integrated optics : Guided waves
(130.3130) Integrated optics : Integrated optics materials
(160.5470) Materials : Polymers
(160.6840) Materials : Thermo-optical materials
(220.4000) Optical design and fabrication : Microstructure fabrication
(230.5750) Optical devices : Resonators
(230.7380) Optical devices : Waveguides, channeled
(310.1860) Thin films : Deposition and fabrication

ToC Category:
Integrated Optics

History
Original Manuscript: May 4, 2012
Revised Manuscript: May 31, 2012
Manuscript Accepted: June 7, 2012
Published: June 29, 2012

Citation
Vivek Raghunathan, Tomoyuki Izuhara, Jurgen Michel, and Lionel Kimerling, "Stability of polymer-dielectric bi-layers for athermal silicon photonics," Opt. Express 20, 16059-16066 (2012)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-20-14-16059


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