OSA's Digital Library

Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 20, Iss. 16 — Jul. 30, 2012
  • pp: 18440–18448

MZI optical isolator with Si-wire waveguides by surface-activated direct bonding

Yuya Shoji, Masatoshi Ito, Yuya Shirato, and Tetsuya Mizumoto  »View Author Affiliations

Optics Express, Vol. 20, Issue 16, pp. 18440-18448 (2012)

View Full Text Article

Enhanced HTML    Acrobat PDF (1074 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



We fabricate a Mach-Zehnder interferometer-based optical isolator using a silicon-wire waveguide with magneto-optic garnet cladding using direct bonding techniques. Using Si-wire waveguides, the size of the device is greatly reduced from that of our previous device. We investigate surface-activated direct bonding with nitrogen plasma treatment, which shows better bonding results than oxygen plasma treatment. A large magneto-optic phase shift of 0.8π and an optical isolation of 18 dB are obtained at a wavelength of 1322 nm.

© 2012 OSA

OCIS Codes
(160.3820) Materials : Magneto-optical materials
(230.3120) Optical devices : Integrated optics devices
(230.3240) Optical devices : Isolators

ToC Category:
Optical Devices

Original Manuscript: May 3, 2012
Revised Manuscript: July 17, 2012
Manuscript Accepted: July 22, 2012
Published: July 27, 2012

Yuya Shoji, Masatoshi Ito, Yuya Shirato, and Tetsuya Mizumoto, "MZI optical isolator with Si-wire waveguides by surface-activated direct bonding," Opt. Express 20, 18440-18448 (2012)

Sort:  Author  |  Year  |  Journal  |  Reset  


  1. K. Ando, T. Okoshi, and N. Koshizuka, “Waveguide magneto-optical isolator fabricated by laser annealing,” Appl. Phys. Lett.53(1), 4–6 (1988). [CrossRef]
  2. T. Shintaku, “Integrated optical isolator based on efficient nonreciprocal radiation monde conversion,” Appl. Phys. Lett.73(14), 1946–1948 (1998). [CrossRef]
  3. J. Fujita, M. Levy, R. M. Osgood, L. Wilkens, and H. Dötsch, “Waveguide optical isolator based on Mach-Zehnder interferometer,” Appl. Phys. Lett.76(16), 2158–2160 (2000). [CrossRef]
  4. Y. Shoji and T. Mizumoto, “Wideband operation of Mach-Zehnder interferomertic magneto-optical isolator using phase adjustment,” Opt. Express15(20), 13446–13450 (2007). [CrossRef] [PubMed]
  5. H. Shimizu and Y. Nakano, “Fabrication and characterization of an InGaAsP/InP active waveguide optical isolator with 14.7 dB/mm TE mode nonreciprocal attenuation,” J. Lightwave Technol.24(1), 38–43 (2006). [CrossRef]
  6. W. V. Parys, B. Moeyrsoon, D. V. Thourhout, R. Baets, M. Vanwolleghem, B. Dagens, J. Decobert, O. L. Gouezigou, D. Make, R. Vanheertum, and L. Large, “Transverse magnetic mode nonreciprocal propagation in an amplifying AlGaInAs/InP optical waveguide isolator,” Appl. Phys. Lett.88(7), 071115 (2006).
  7. L. Bi, J. Hu, P. Jiang, D. H. Kim, G. F. Dionne, L. C. Kimerling, and C. A. Ross, “On-chip optical isolation in monolithically integrated non-reciprocal optical resonators,” Nat. Photonics5(12), 758–762 (2011). [CrossRef]
  8. S. Ghosh, S. Keyvavinia, W. Van Roy, T. Mizumoto, G. Roelkens, and R. Baets, “Ce:YIG/Silicon-on-Insulator waveguide optical isolator realized by adhesive bonding,” Opt. Express20(2), 1839–1848 (2012). [CrossRef] [PubMed]
  9. M.-C. Tien, T. Mizumoto, P. Pintus, H. Kromer, and J. E. Bowers, “Silicon ring isolators with bonded nonreciprocal magneto-optic garnets,” Opt. Express19(12), 11740–11745 (2011). [CrossRef] [PubMed]
  10. Y. Shoji, T. Mizumoto, H. Yokoi, I.-W. Hsieh, and R. M. Osgood., “Magneto-optical isolator with silicon waveguides fabricated by direct bonding,” Appl. Phys. Lett.92(7), 071117 (2008). [CrossRef]
  11. R. Chen, G. Jiang, Y. Hao, J. Yang, M. Wang, and X. Jiang, “Enhancement of nonreciprocal phase shift by using nanoscale air gap,” Opt. Lett.35(9), 1335–1337 (2010). [CrossRef] [PubMed]
  12. T. Mizumoto and Y. Naito, “Nonreciprocal propagation characteristics of YIG thin film,” IEEE Trans. Microw. Theory Tech.30(6), 922–925 (1982). [CrossRef]
  13. Y. Okamura, H. Inuzuka, T. Kikuchi, and S. Yamamoto, “Nonreciprocal propagation in magnetooptic YIG rib waveguides,” J. Lightwave Technol.4(7), 711–714 (1986). [CrossRef]
  14. R. Takei, K. Yoshida, and T. Mizumoto, “Effects of wafer precleaning and plasma irradiation to wafer surfaces on plasma-assisted surface-activated direct bonding,” Jpn. J. Appl. Phys.49(8), 086204 (2010). [CrossRef]
  15. T. Shintaku and T. Uno, “Preparation of Ce-substituted Yttrium iron garnet films for magneto-optic waveguide devices,” Jpn. J. Appl. Phys.35(Part 1, No. 9A9A), 4689–4691 (1996). [CrossRef]
  16. A. W. Fang, H. Park, O. Cohen, R. Jones, M. J. Paniccia, and J. E. Bowers, “Electrically pumped hybrid AlGaInAs-silicon evanescent laser,” Opt. Express14(20), 9203–9210 (2006). [CrossRef] [PubMed]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited