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Wide spectral bandwidth electro-absorption modulator using coupled micro-cavity with asymmetric tandem quantum wellByung Hoon Na, Gun Wu Ju, Hee Ju Choi, Yong Chul Cho, Yong Hwa Park, Chang Young Park, and Yong Tak Lee »View Author Affiliations
Byung Hoon Na,1
Gun Wu Ju,1
Hee Ju Choi,2
Yong Chul Cho,4
Yong Hwa Park,4
Chang Young Park,4
and Yong Tak Lee1,2,3,*
1School of Information and Mechatronics, Gwangju Institute of Science and Technology (GIST), 1 Oryong-dong, Buk-gu, Gwangju 500-712, South Korea 2Department of Photonics and Applied Physics, GIST, South Korea 3Department of Nanobio Materials and Electronics, GIST, South Korea 4Micro Systems Lab, Samsung Advanced Institute of Technology, Giheung, Yongin, 446-712, South Korea *Corresponding author: ytlee@gist.ac.kr |
Optics Express, Vol. 20, Issue 17, pp. 19511-19519 (2012)
http://dx.doi.org/10.1364/OE.20.019511
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Abstract
For reliable three dimensional (3D) imaging system, it is necessary for the optical shutter to have a wide spectral bandwidth operation and enhanced modulation depth. We propose an electro-absorption modulator (EAM) based on coupled Fabry-Perot cavities with micro-cavity (CCMC) which uses asymmetric tandem quantum wells (ATQWs) to obtain improved spectral bandwidth and enhanced modulation depth. Several modulator designs are investigated to obtain improved modulation performance such as wider spectral bandwidth and enhanced modulation depth. It was found that among all the studied modulator geometries, CCMC structure with ATQWs provides the widest spectral bandwidth of 9.6nm and high modulation depth in excess of 50% at −24V, which is good agreement with theoretical calculations. These results suggest that EAM has excellent potential as optical shutter for 3D imaging application.
© 2012 OSA
OCIS Codes
(100.6890) Image processing : Three-dimensional image processing
(230.2090) Optical devices : Electro-optical devices
(230.4110) Optical devices : Modulators
(230.4205) Optical devices : Multiple quantum well (MQW) modulators
ToC Category:
Optical Devices
History
Original Manuscript: June 12, 2012
Revised Manuscript: July 20, 2012
Manuscript Accepted: August 6, 2012
Published: August 10, 2012
Citation
Byung Hoon Na, Gun Wu Ju, Hee Ju Choi, Yong Chul Cho, Yong Hwa Park, Chang Young Park, and Yong Tak Lee, "Wide spectral bandwidth electro-absorption modulator using coupled micro-cavity with asymmetric tandem quantum well," Opt. Express 20, 19511-19519 (2012)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-20-17-19511
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References
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- Y. H. Park, Y. C. Cho, J. W. You, C. Y. Park, H. Yoon, S. H. Lee, J. O. Kwon, and S. W. Lee, “Micro optical system based 3D imaging for full HD depth image capturing,” Proc. SPIE8252, 82520X (2012). [CrossRef]
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- T. H. Wood, C. A. Burrus, D. A. B. Miller, D. S. Chemla, T. C. Damen, A. C. Gossard, and W. Wiegmann, “High‐speed optical modulation with GaAs/GaAlAs quantum wells in a p‐i‐n diode structure,” Appl. Phys. Lett.44(1), 16–18 (1984). [CrossRef]
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- J. S. Ahearn, M. H. Weiler, S. B. Adams, T. P. McElwain, A. Stark, L. DePaulis, A. L. Sarafinas, T. Hongsmatip, R. J. Martin, and B. Lane, “Multiple quantum well (MQW) spatial light modulators (SLMs) for optical data processing and beam steering,” Proc. SPIE4457, 43–53 (2001). [CrossRef]
- E. Dorjgotov, A. Bhowmik, and P. Bos, “Design of a wide bandwidth switchable mirror based on a liquid crystal etalon,” J. Appl. Phys.105(10), 104906 (2009). [CrossRef]
- Z. Zhou, Y. Dou, Y. Huang, R. Wu, and X. Ren, “Accurately nonselective and selective etching of GaAs/Al0.8Ga0.2As/AlAs structure for making air-gap cavity,” Proc. SPIE5280, 889–895 (2004).
- U. Arad, E. Redmard, M. Shamay, A. Averboukh, S. Levit, and U. Efron, “Development of a large high performance 2-D array of GaAs/AlGaAs multiple quantum-well modulators,” IEEE Photon. Technol. Lett.15(11), 1531–1533 (2003). [CrossRef]
- W. S. Rabinovich, P. G. Goetz, R. Mahon, L. Swingen, J. Murphy, M. Ferraro, J. H. Ray Burris, C. I. Moore, M. Suite, G. C. Gilbreath, S. Binari, and D. Klotzkin, “45-Mbit/s cat’s-eye modulating retroreflectors,” Opt. Eng.46(10), 104001 (2007). [CrossRef]
- I. J. Fritz, J. F. Klem, and J. R. Wendt, “Reflectance modulator based on tandem Fabry‐Perot resonators,” Appl. Phys. Lett.59(7), 753–755 (1991). [CrossRef]
- W. S. Rabinovich, P. G. Goetz, R. Mahon, L. Swingen, J. Murphy, M. Ferraro, J. H. Ray Burris, C. I. Moore, M. Suite, G. C. Gilbreath, S. Binari, and D. Klotzkin, “45-Mbit/s cat’s-eye modulating retroreflectors,” Opt. Eng.46(10), 104001 (2007). [CrossRef]
- G. C. Gilbreath, W. S. Rabinovich, T. J. Meehan, M. J. Vilcheck, M. Stell, R. Mahon, P. G. Goetz, E. Oh, J. A. Vasquez, K. C. R. L. Lucke, and S. Mozersky, “Progress in development of multiple-quantum-well retromodulators for free-space data links,” Opt. Eng.42(6), 1611–1617 (2003). [CrossRef]
- W. S. Rabinovich, P. G. Goetz, R. Mahon, L. Swingen, J. Murphy, M. Ferraro, J. H. Ray Burris, C. I. Moore, M. Suite, G. C. Gilbreath, S. Binari, and D. Klotzkin, “45-Mbit/s cat’s-eye modulating retroreflectors,” Opt. Eng.46(10), 104001 (2007). [CrossRef]
- T. H. Stievater, W. S. Rabinovich, P. G. Goetz, R. Mahon, and S. C. Binari, “A surface-normal coupled-quantum-well modulator at 1.55 µm,” IEEE Photon. Technol. Lett.16(9), 2036–2038 (2004). [CrossRef]
- G. C. Gilbreath, W. S. Rabinovich, T. J. Meehan, M. J. Vilcheck, M. Stell, R. Mahon, P. G. Goetz, E. Oh, J. A. Vasquez, K. C. R. L. Lucke, and S. Mozersky, “Progress in development of multiple-quantum-well retromodulators for free-space data links,” Opt. Eng.42(6), 1611–1617 (2003). [CrossRef]
- K. W. Goossen, J. E. Cunningham, and W. Y. Jan, “Stacked-diode electroabsorption modulator,” IEEE Photon. Technol. Lett.6(8), 936–938 (1994). [CrossRef]
- T. H. Wood, C. A. Burrus, D. A. B. Miller, D. S. Chemla, T. C. Damen, A. C. Gossard, and W. Wiegmann, “High‐speed optical modulation with GaAs/GaAlAs quantum wells in a p‐i‐n diode structure,” Appl. Phys. Lett.44(1), 16–18 (1984). [CrossRef]
- D. A. B. Miller, D. S. Chemla, T. C. Damen, A. C. Gossard, W. Wiegmann, T. H. Wood, and C. A. Burrus, “Bandedge electro-absorption in quantum well structures: the quantum confined Stark effect,” Phys. Rev. Lett.53(22), 2173–2176 (1984). [CrossRef]
- H. Liu, C. C. Lin, and J. S. Harris, “High-speed, dual-function vertical cavity multiple quantum well modulators and photodetectors for optical interconnects,” Opt. Eng.40(7), 1186–1191 (2001). [CrossRef]
- K. Bacher, B. Pezeshki, S. M. Lord, and J. S. Harris, “Molecular beam epitaxy growth of vertical cavity optical devices with in situ corrections,” Appl. Phys. Lett.61(12), 1387–1389 (1992). [CrossRef]
- Y. Yu, S. Karlsson, C. P. Liu, R. Schatz, U. Westergren, O. Kjebon, C. H. Chuang, S. L. He, L. Thylen, A. B. Krysa, J. S. Roberts, and A. J. Seeds, “Enhanced linear dynamic range of asymmetric Fabry–Perot modulator/detector,” IEEE Photon. Technol. Lett.18(6), 770–772 (2006). [CrossRef]
- N. C. Helman, J. E. Roth, D. P. Bour, H. Altug, and D. A. B. Miller, “Misalignment-tolerant surface-normal low-voltage modulator for optical interconnects,” IEEE J. Sel. Top. Quantum Electron.11(2), 338–342 (2005). [CrossRef]
- J. S. Ahearn, M. H. Weiler, S. B. Adams, T. P. McElwain, A. Stark, L. DePaulis, A. L. Sarafinas, T. Hongsmatip, R. J. Martin, and B. Lane, “Multiple quantum well (MQW) spatial light modulators (SLMs) for optical data processing and beam steering,” Proc. SPIE4457, 43–53 (2001). [CrossRef]
- Z. Zhou, Y. Dou, Y. Huang, R. Wu, and X. Ren, “Accurately nonselective and selective etching of GaAs/Al0.8Ga0.2As/AlAs structure for making air-gap cavity,” Proc. SPIE5280, 889–895 (2004).
- K. W. Goossen, J. E. Cunningham, and W. Y. Jan, “Stacked-diode electroabsorption modulator,” IEEE Photon. Technol. Lett.6(8), 936–938 (1994). [CrossRef]
- Y. Yu, S. Karlsson, C. P. Liu, R. Schatz, U. Westergren, O. Kjebon, C. H. Chuang, S. L. He, L. Thylen, A. B. Krysa, J. S. Roberts, and A. J. Seeds, “Enhanced linear dynamic range of asymmetric Fabry–Perot modulator/detector,” IEEE Photon. Technol. Lett.18(6), 770–772 (2006). [CrossRef]
- Y. Yu, S. Karlsson, C. P. Liu, R. Schatz, U. Westergren, O. Kjebon, C. H. Chuang, S. L. He, L. Thylen, A. B. Krysa, J. S. Roberts, and A. J. Seeds, “Enhanced linear dynamic range of asymmetric Fabry–Perot modulator/detector,” IEEE Photon. Technol. Lett.18(6), 770–772 (2006). [CrossRef]
- I. J. Fritz, J. F. Klem, and J. R. Wendt, “Reflectance modulator based on tandem Fabry‐Perot resonators,” Appl. Phys. Lett.59(7), 753–755 (1991). [CrossRef]
- W. S. Rabinovich, P. G. Goetz, R. Mahon, L. Swingen, J. Murphy, M. Ferraro, J. H. Ray Burris, C. I. Moore, M. Suite, G. C. Gilbreath, S. Binari, and D. Klotzkin, “45-Mbit/s cat’s-eye modulating retroreflectors,” Opt. Eng.46(10), 104001 (2007). [CrossRef]
- Y. Yu, S. Karlsson, C. P. Liu, R. Schatz, U. Westergren, O. Kjebon, C. H. Chuang, S. L. He, L. Thylen, A. B. Krysa, J. S. Roberts, and A. J. Seeds, “Enhanced linear dynamic range of asymmetric Fabry–Perot modulator/detector,” IEEE Photon. Technol. Lett.18(6), 770–772 (2006). [CrossRef]
- Y. H. Park, Y. C. Cho, J. W. You, C. Y. Park, H. Yoon, S. H. Lee, J. O. Kwon, and S. W. Lee, “Micro optical system based 3D imaging for full HD depth image capturing,” Proc. SPIE8252, 82520X (2012). [CrossRef]
- J. S. Ahearn, M. H. Weiler, S. B. Adams, T. P. McElwain, A. Stark, L. DePaulis, A. L. Sarafinas, T. Hongsmatip, R. J. Martin, and B. Lane, “Multiple quantum well (MQW) spatial light modulators (SLMs) for optical data processing and beam steering,” Proc. SPIE4457, 43–53 (2001). [CrossRef]
- T. L. Worchesky, K. J. Ritter, R. Martin, and B. Lane, “Large arrays of spatial light modulators hybridized to silicon integrated circuits,” Appl. Opt.35(8), 1180–1186 (1996). [CrossRef] [PubMed]
- Y. H. Park, Y. C. Cho, J. W. You, C. Y. Park, H. Yoon, S. H. Lee, J. O. Kwon, and S. W. Lee, “Micro optical system based 3D imaging for full HD depth image capturing,” Proc. SPIE8252, 82520X (2012). [CrossRef]
- Y. H. Park, Y. C. Cho, J. W. You, C. Y. Park, H. Yoon, S. H. Lee, J. O. Kwon, and S. W. Lee, “Micro optical system based 3D imaging for full HD depth image capturing,” Proc. SPIE8252, 82520X (2012). [CrossRef]
- U. Arad, E. Redmard, M. Shamay, A. Averboukh, S. Levit, and U. Efron, “Development of a large high performance 2-D array of GaAs/AlGaAs multiple quantum-well modulators,” IEEE Photon. Technol. Lett.15(11), 1531–1533 (2003). [CrossRef]
- H. Liu, C. C. Lin, and J. S. Harris, “High-speed, dual-function vertical cavity multiple quantum well modulators and photodetectors for optical interconnects,” Opt. Eng.40(7), 1186–1191 (2001). [CrossRef]
- Y. Yu, S. Karlsson, C. P. Liu, R. Schatz, U. Westergren, O. Kjebon, C. H. Chuang, S. L. He, L. Thylen, A. B. Krysa, J. S. Roberts, and A. J. Seeds, “Enhanced linear dynamic range of asymmetric Fabry–Perot modulator/detector,” IEEE Photon. Technol. Lett.18(6), 770–772 (2006). [CrossRef]
- H. Liu, C. C. Lin, and J. S. Harris, “High-speed, dual-function vertical cavity multiple quantum well modulators and photodetectors for optical interconnects,” Opt. Eng.40(7), 1186–1191 (2001). [CrossRef]
- K. Bacher, B. Pezeshki, S. M. Lord, and J. S. Harris, “Molecular beam epitaxy growth of vertical cavity optical devices with in situ corrections,” Appl. Phys. Lett.61(12), 1387–1389 (1992). [CrossRef]
- G. C. Gilbreath, W. S. Rabinovich, T. J. Meehan, M. J. Vilcheck, M. Stell, R. Mahon, P. G. Goetz, E. Oh, J. A. Vasquez, K. C. R. L. Lucke, and S. Mozersky, “Progress in development of multiple-quantum-well retromodulators for free-space data links,” Opt. Eng.42(6), 1611–1617 (2003). [CrossRef]
- W. S. Rabinovich, P. G. Goetz, R. Mahon, L. Swingen, J. Murphy, M. Ferraro, J. H. Ray Burris, C. I. Moore, M. Suite, G. C. Gilbreath, S. Binari, and D. Klotzkin, “45-Mbit/s cat’s-eye modulating retroreflectors,” Opt. Eng.46(10), 104001 (2007). [CrossRef]
- T. H. Stievater, W. S. Rabinovich, P. G. Goetz, R. Mahon, and S. C. Binari, “A surface-normal coupled-quantum-well modulator at 1.55 µm,” IEEE Photon. Technol. Lett.16(9), 2036–2038 (2004). [CrossRef]
- G. C. Gilbreath, W. S. Rabinovich, T. J. Meehan, M. J. Vilcheck, M. Stell, R. Mahon, P. G. Goetz, E. Oh, J. A. Vasquez, K. C. R. L. Lucke, and S. Mozersky, “Progress in development of multiple-quantum-well retromodulators for free-space data links,” Opt. Eng.42(6), 1611–1617 (2003). [CrossRef]
- J. S. Ahearn, M. H. Weiler, S. B. Adams, T. P. McElwain, A. Stark, L. DePaulis, A. L. Sarafinas, T. Hongsmatip, R. J. Martin, and B. Lane, “Multiple quantum well (MQW) spatial light modulators (SLMs) for optical data processing and beam steering,” Proc. SPIE4457, 43–53 (2001). [CrossRef]
- J. S. Ahearn, M. H. Weiler, S. B. Adams, T. P. McElwain, A. Stark, L. DePaulis, A. L. Sarafinas, T. Hongsmatip, R. J. Martin, and B. Lane, “Multiple quantum well (MQW) spatial light modulators (SLMs) for optical data processing and beam steering,” Proc. SPIE4457, 43–53 (2001). [CrossRef]
- G. C. Gilbreath, W. S. Rabinovich, T. J. Meehan, M. J. Vilcheck, M. Stell, R. Mahon, P. G. Goetz, E. Oh, J. A. Vasquez, K. C. R. L. Lucke, and S. Mozersky, “Progress in development of multiple-quantum-well retromodulators for free-space data links,” Opt. Eng.42(6), 1611–1617 (2003). [CrossRef]
- N. C. Helman, J. E. Roth, D. P. Bour, H. Altug, and D. A. B. Miller, “Misalignment-tolerant surface-normal low-voltage modulator for optical interconnects,” IEEE J. Sel. Top. Quantum Electron.11(2), 338–342 (2005). [CrossRef]
- T. H. Wood, C. A. Burrus, D. A. B. Miller, D. S. Chemla, T. C. Damen, A. C. Gossard, and W. Wiegmann, “High‐speed optical modulation with GaAs/GaAlAs quantum wells in a p‐i‐n diode structure,” Appl. Phys. Lett.44(1), 16–18 (1984). [CrossRef]
- D. A. B. Miller, D. S. Chemla, T. C. Damen, A. C. Gossard, W. Wiegmann, T. H. Wood, and C. A. Burrus, “Bandedge electro-absorption in quantum well structures: the quantum confined Stark effect,” Phys. Rev. Lett.53(22), 2173–2176 (1984). [CrossRef]
- H. Mohseni, W. K. Chan, H. An, A. Ulmer, and D. Capewell, “Tunable surface-normal modulator operating near 1550nm with a high-extinction ratio at high temperature,” IEEE Photon. Technol. Lett.18(1), 214–216 (2006). [CrossRef]
- W. S. Rabinovich, P. G. Goetz, R. Mahon, L. Swingen, J. Murphy, M. Ferraro, J. H. Ray Burris, C. I. Moore, M. Suite, G. C. Gilbreath, S. Binari, and D. Klotzkin, “45-Mbit/s cat’s-eye modulating retroreflectors,” Opt. Eng.46(10), 104001 (2007). [CrossRef]
- G. C. Gilbreath, W. S. Rabinovich, T. J. Meehan, M. J. Vilcheck, M. Stell, R. Mahon, P. G. Goetz, E. Oh, J. A. Vasquez, K. C. R. L. Lucke, and S. Mozersky, “Progress in development of multiple-quantum-well retromodulators for free-space data links,” Opt. Eng.42(6), 1611–1617 (2003). [CrossRef]
- W. S. Rabinovich, P. G. Goetz, R. Mahon, L. Swingen, J. Murphy, M. Ferraro, J. H. Ray Burris, C. I. Moore, M. Suite, G. C. Gilbreath, S. Binari, and D. Klotzkin, “45-Mbit/s cat’s-eye modulating retroreflectors,” Opt. Eng.46(10), 104001 (2007). [CrossRef]
- N. Susa and T. Nakahara, “Design of AlGaAs/GaAs quantum well for electro-absorption modulator,” Solid-State Electron.36(9), 1277–1287 (1993). [CrossRef]
- G. C. Gilbreath, W. S. Rabinovich, T. J. Meehan, M. J. Vilcheck, M. Stell, R. Mahon, P. G. Goetz, E. Oh, J. A. Vasquez, K. C. R. L. Lucke, and S. Mozersky, “Progress in development of multiple-quantum-well retromodulators for free-space data links,” Opt. Eng.42(6), 1611–1617 (2003). [CrossRef]
- Y. H. Park, Y. C. Cho, J. W. You, C. Y. Park, H. Yoon, S. H. Lee, J. O. Kwon, and S. W. Lee, “Micro optical system based 3D imaging for full HD depth image capturing,” Proc. SPIE8252, 82520X (2012). [CrossRef]
- Y. H. Park, Y. C. Cho, J. W. You, C. Y. Park, H. Yoon, S. H. Lee, J. O. Kwon, and S. W. Lee, “Micro optical system based 3D imaging for full HD depth image capturing,” Proc. SPIE8252, 82520X (2012). [CrossRef]
- B. H. Na, G. W. Ju, H. J. Choi, Y. C. Cho, Y. H. Park, and Y. T. Lee, “Large aperture asymmetric Fabry Perot modulator based on asymmetric tandem quantum well for low voltage operation,” Opt. Express20(6), 6003–6009 (2012). [CrossRef] [PubMed]
- K. Bacher, B. Pezeshki, S. M. Lord, and J. S. Harris, “Molecular beam epitaxy growth of vertical cavity optical devices with in situ corrections,” Appl. Phys. Lett.61(12), 1387–1389 (1992). [CrossRef]
- W. S. Rabinovich, P. G. Goetz, R. Mahon, L. Swingen, J. Murphy, M. Ferraro, J. H. Ray Burris, C. I. Moore, M. Suite, G. C. Gilbreath, S. Binari, and D. Klotzkin, “45-Mbit/s cat’s-eye modulating retroreflectors,” Opt. Eng.46(10), 104001 (2007). [CrossRef]
- T. H. Stievater, W. S. Rabinovich, P. G. Goetz, R. Mahon, and S. C. Binari, “A surface-normal coupled-quantum-well modulator at 1.55 µm,” IEEE Photon. Technol. Lett.16(9), 2036–2038 (2004). [CrossRef]
- G. C. Gilbreath, W. S. Rabinovich, T. J. Meehan, M. J. Vilcheck, M. Stell, R. Mahon, P. G. Goetz, E. Oh, J. A. Vasquez, K. C. R. L. Lucke, and S. Mozersky, “Progress in development of multiple-quantum-well retromodulators for free-space data links,” Opt. Eng.42(6), 1611–1617 (2003). [CrossRef]
- W. S. Rabinovich, P. G. Goetz, R. Mahon, L. Swingen, J. Murphy, M. Ferraro, J. H. Ray Burris, C. I. Moore, M. Suite, G. C. Gilbreath, S. Binari, and D. Klotzkin, “45-Mbit/s cat’s-eye modulating retroreflectors,” Opt. Eng.46(10), 104001 (2007). [CrossRef]
- U. Arad, E. Redmard, M. Shamay, A. Averboukh, S. Levit, and U. Efron, “Development of a large high performance 2-D array of GaAs/AlGaAs multiple quantum-well modulators,” IEEE Photon. Technol. Lett.15(11), 1531–1533 (2003). [CrossRef]
- Z. Zhou, Y. Dou, Y. Huang, R. Wu, and X. Ren, “Accurately nonselective and selective etching of GaAs/Al0.8Ga0.2As/AlAs structure for making air-gap cavity,” Proc. SPIE5280, 889–895 (2004).
- Y. Yu, S. Karlsson, C. P. Liu, R. Schatz, U. Westergren, O. Kjebon, C. H. Chuang, S. L. He, L. Thylen, A. B. Krysa, J. S. Roberts, and A. J. Seeds, “Enhanced linear dynamic range of asymmetric Fabry–Perot modulator/detector,” IEEE Photon. Technol. Lett.18(6), 770–772 (2006). [CrossRef]
- N. C. Helman, J. E. Roth, D. P. Bour, H. Altug, and D. A. B. Miller, “Misalignment-tolerant surface-normal low-voltage modulator for optical interconnects,” IEEE J. Sel. Top. Quantum Electron.11(2), 338–342 (2005). [CrossRef]
- A. A. M. Saleh and J. Stone, “Two stage Fabry-Perot filters as de-multiplexers in optical FDMA LAN’s,” J. Lightwave Technol.7(2), 323–330 (1989). [CrossRef]
- J. S. Ahearn, M. H. Weiler, S. B. Adams, T. P. McElwain, A. Stark, L. DePaulis, A. L. Sarafinas, T. Hongsmatip, R. J. Martin, and B. Lane, “Multiple quantum well (MQW) spatial light modulators (SLMs) for optical data processing and beam steering,” Proc. SPIE4457, 43–53 (2001). [CrossRef]
- Y. Yu, S. Karlsson, C. P. Liu, R. Schatz, U. Westergren, O. Kjebon, C. H. Chuang, S. L. He, L. Thylen, A. B. Krysa, J. S. Roberts, and A. J. Seeds, “Enhanced linear dynamic range of asymmetric Fabry–Perot modulator/detector,” IEEE Photon. Technol. Lett.18(6), 770–772 (2006). [CrossRef]
- Y. Yu, S. Karlsson, C. P. Liu, R. Schatz, U. Westergren, O. Kjebon, C. H. Chuang, S. L. He, L. Thylen, A. B. Krysa, J. S. Roberts, and A. J. Seeds, “Enhanced linear dynamic range of asymmetric Fabry–Perot modulator/detector,” IEEE Photon. Technol. Lett.18(6), 770–772 (2006). [CrossRef]
- U. Arad, E. Redmard, M. Shamay, A. Averboukh, S. Levit, and U. Efron, “Development of a large high performance 2-D array of GaAs/AlGaAs multiple quantum-well modulators,” IEEE Photon. Technol. Lett.15(11), 1531–1533 (2003). [CrossRef]
- J. S. Ahearn, M. H. Weiler, S. B. Adams, T. P. McElwain, A. Stark, L. DePaulis, A. L. Sarafinas, T. Hongsmatip, R. J. Martin, and B. Lane, “Multiple quantum well (MQW) spatial light modulators (SLMs) for optical data processing and beam steering,” Proc. SPIE4457, 43–53 (2001). [CrossRef]
- G. C. Gilbreath, W. S. Rabinovich, T. J. Meehan, M. J. Vilcheck, M. Stell, R. Mahon, P. G. Goetz, E. Oh, J. A. Vasquez, K. C. R. L. Lucke, and S. Mozersky, “Progress in development of multiple-quantum-well retromodulators for free-space data links,” Opt. Eng.42(6), 1611–1617 (2003). [CrossRef]
- T. H. Stievater, W. S. Rabinovich, P. G. Goetz, R. Mahon, and S. C. Binari, “A surface-normal coupled-quantum-well modulator at 1.55 µm,” IEEE Photon. Technol. Lett.16(9), 2036–2038 (2004). [CrossRef]
- A. A. M. Saleh and J. Stone, “Two stage Fabry-Perot filters as de-multiplexers in optical FDMA LAN’s,” J. Lightwave Technol.7(2), 323–330 (1989). [CrossRef]
- W. S. Rabinovich, P. G. Goetz, R. Mahon, L. Swingen, J. Murphy, M. Ferraro, J. H. Ray Burris, C. I. Moore, M. Suite, G. C. Gilbreath, S. Binari, and D. Klotzkin, “45-Mbit/s cat’s-eye modulating retroreflectors,” Opt. Eng.46(10), 104001 (2007). [CrossRef]
- N. Susa and T. Nakahara, “Design of AlGaAs/GaAs quantum well for electro-absorption modulator,” Solid-State Electron.36(9), 1277–1287 (1993). [CrossRef]
- W. S. Rabinovich, P. G. Goetz, R. Mahon, L. Swingen, J. Murphy, M. Ferraro, J. H. Ray Burris, C. I. Moore, M. Suite, G. C. Gilbreath, S. Binari, and D. Klotzkin, “45-Mbit/s cat’s-eye modulating retroreflectors,” Opt. Eng.46(10), 104001 (2007). [CrossRef]
- Y. Yu, S. Karlsson, C. P. Liu, R. Schatz, U. Westergren, O. Kjebon, C. H. Chuang, S. L. He, L. Thylen, A. B. Krysa, J. S. Roberts, and A. J. Seeds, “Enhanced linear dynamic range of asymmetric Fabry–Perot modulator/detector,” IEEE Photon. Technol. Lett.18(6), 770–772 (2006). [CrossRef]
- H. Mohseni, W. K. Chan, H. An, A. Ulmer, and D. Capewell, “Tunable surface-normal modulator operating near 1550nm with a high-extinction ratio at high temperature,” IEEE Photon. Technol. Lett.18(1), 214–216 (2006). [CrossRef]
- G. C. Gilbreath, W. S. Rabinovich, T. J. Meehan, M. J. Vilcheck, M. Stell, R. Mahon, P. G. Goetz, E. Oh, J. A. Vasquez, K. C. R. L. Lucke, and S. Mozersky, “Progress in development of multiple-quantum-well retromodulators for free-space data links,” Opt. Eng.42(6), 1611–1617 (2003). [CrossRef]
- G. C. Gilbreath, W. S. Rabinovich, T. J. Meehan, M. J. Vilcheck, M. Stell, R. Mahon, P. G. Goetz, E. Oh, J. A. Vasquez, K. C. R. L. Lucke, and S. Mozersky, “Progress in development of multiple-quantum-well retromodulators for free-space data links,” Opt. Eng.42(6), 1611–1617 (2003). [CrossRef]
- J. S. Ahearn, M. H. Weiler, S. B. Adams, T. P. McElwain, A. Stark, L. DePaulis, A. L. Sarafinas, T. Hongsmatip, R. J. Martin, and B. Lane, “Multiple quantum well (MQW) spatial light modulators (SLMs) for optical data processing and beam steering,” Proc. SPIE4457, 43–53 (2001). [CrossRef]
- I. J. Fritz, J. F. Klem, and J. R. Wendt, “Reflectance modulator based on tandem Fabry‐Perot resonators,” Appl. Phys. Lett.59(7), 753–755 (1991). [CrossRef]
- Y. Yu, S. Karlsson, C. P. Liu, R. Schatz, U. Westergren, O. Kjebon, C. H. Chuang, S. L. He, L. Thylen, A. B. Krysa, J. S. Roberts, and A. J. Seeds, “Enhanced linear dynamic range of asymmetric Fabry–Perot modulator/detector,” IEEE Photon. Technol. Lett.18(6), 770–772 (2006). [CrossRef]
- D. A. B. Miller, D. S. Chemla, T. C. Damen, A. C. Gossard, W. Wiegmann, T. H. Wood, and C. A. Burrus, “Bandedge electro-absorption in quantum well structures: the quantum confined Stark effect,” Phys. Rev. Lett.53(22), 2173–2176 (1984). [CrossRef]
- T. H. Wood, C. A. Burrus, D. A. B. Miller, D. S. Chemla, T. C. Damen, A. C. Gossard, and W. Wiegmann, “High‐speed optical modulation with GaAs/GaAlAs quantum wells in a p‐i‐n diode structure,” Appl. Phys. Lett.44(1), 16–18 (1984). [CrossRef]
- T. H. Wood, C. A. Burrus, D. A. B. Miller, D. S. Chemla, T. C. Damen, A. C. Gossard, and W. Wiegmann, “High‐speed optical modulation with GaAs/GaAlAs quantum wells in a p‐i‐n diode structure,” Appl. Phys. Lett.44(1), 16–18 (1984). [CrossRef]
- D. A. B. Miller, D. S. Chemla, T. C. Damen, A. C. Gossard, W. Wiegmann, T. H. Wood, and C. A. Burrus, “Bandedge electro-absorption in quantum well structures: the quantum confined Stark effect,” Phys. Rev. Lett.53(22), 2173–2176 (1984). [CrossRef]
- Z. Zhou, Y. Dou, Y. Huang, R. Wu, and X. Ren, “Accurately nonselective and selective etching of GaAs/Al0.8Ga0.2As/AlAs structure for making air-gap cavity,” Proc. SPIE5280, 889–895 (2004).
- Y. H. Park, Y. C. Cho, J. W. You, C. Y. Park, H. Yoon, S. H. Lee, J. O. Kwon, and S. W. Lee, “Micro optical system based 3D imaging for full HD depth image capturing,” Proc. SPIE8252, 82520X (2012). [CrossRef]
- Y. H. Park, Y. C. Cho, J. W. You, C. Y. Park, H. Yoon, S. H. Lee, J. O. Kwon, and S. W. Lee, “Micro optical system based 3D imaging for full HD depth image capturing,” Proc. SPIE8252, 82520X (2012). [CrossRef]
- Y. Yu, S. Karlsson, C. P. Liu, R. Schatz, U. Westergren, O. Kjebon, C. H. Chuang, S. L. He, L. Thylen, A. B. Krysa, J. S. Roberts, and A. J. Seeds, “Enhanced linear dynamic range of asymmetric Fabry–Perot modulator/detector,” IEEE Photon. Technol. Lett.18(6), 770–772 (2006). [CrossRef]
- Z. Zhou, Y. Dou, Y. Huang, R. Wu, and X. Ren, “Accurately nonselective and selective etching of GaAs/Al0.8Ga0.2As/AlAs structure for making air-gap cavity,” Proc. SPIE5280, 889–895 (2004).
Appl. Opt.
- T. L. Worchesky, K. J. Ritter, R. Martin, and B. Lane, “Large arrays of spatial light modulators hybridized to silicon integrated circuits,” Appl. Opt.35(8), 1180–1186 (1996). [CrossRef] [PubMed]
- S. Junique, Q. Wang, S. Almqvist, J. Guo, H. Martijn, B. Noharet, and J. Y. Andersson, “GaAs-based multiple-quantum-well spatial light modulators fabricated by a wafer-scale process,” Appl. Opt.44(9), 1635–1641 (2005). [CrossRef] [PubMed]
- E. A. Dorjgotov, A. K. Bhowmik, and P. J. Bos, “Switchable polarization-independent liquid-crystal Fabry-Perot filter,” Appl. Opt.48(1), 74–79 (2009). [CrossRef] [PubMed]
Appl. Phys. Lett.
- I. J. Fritz, J. F. Klem, and J. R. Wendt, “Reflectance modulator based on tandem Fabry‐Perot resonators,” Appl. Phys. Lett.59(7), 753–755 (1991). [CrossRef]
- T. H. Wood, C. A. Burrus, D. A. B. Miller, D. S. Chemla, T. C. Damen, A. C. Gossard, and W. Wiegmann, “High‐speed optical modulation with GaAs/GaAlAs quantum wells in a p‐i‐n diode structure,” Appl. Phys. Lett.44(1), 16–18 (1984). [CrossRef]
- K. Bacher, B. Pezeshki, S. M. Lord, and J. S. Harris, “Molecular beam epitaxy growth of vertical cavity optical devices with in situ corrections,” Appl. Phys. Lett.61(12), 1387–1389 (1992). [CrossRef]
IEEE J. Sel. Top. Quantum Electron.
- N. C. Helman, J. E. Roth, D. P. Bour, H. Altug, and D. A. B. Miller, “Misalignment-tolerant surface-normal low-voltage modulator for optical interconnects,” IEEE J. Sel. Top. Quantum Electron.11(2), 338–342 (2005). [CrossRef]
IEEE Photon. Technol. Lett.
- T. H. Stievater, W. S. Rabinovich, P. G. Goetz, R. Mahon, and S. C. Binari, “A surface-normal coupled-quantum-well modulator at 1.55 µm,” IEEE Photon. Technol. Lett.16(9), 2036–2038 (2004). [CrossRef]
- K. W. Goossen, J. E. Cunningham, and W. Y. Jan, “Stacked-diode electroabsorption modulator,” IEEE Photon. Technol. Lett.6(8), 936–938 (1994). [CrossRef]
- H. Mohseni, W. K. Chan, H. An, A. Ulmer, and D. Capewell, “Tunable surface-normal modulator operating near 1550nm with a high-extinction ratio at high temperature,” IEEE Photon. Technol. Lett.18(1), 214–216 (2006). [CrossRef]
- U. Arad, E. Redmard, M. Shamay, A. Averboukh, S. Levit, and U. Efron, “Development of a large high performance 2-D array of GaAs/AlGaAs multiple quantum-well modulators,” IEEE Photon. Technol. Lett.15(11), 1531–1533 (2003). [CrossRef]
- Y. Yu, S. Karlsson, C. P. Liu, R. Schatz, U. Westergren, O. Kjebon, C. H. Chuang, S. L. He, L. Thylen, A. B. Krysa, J. S. Roberts, and A. J. Seeds, “Enhanced linear dynamic range of asymmetric Fabry–Perot modulator/detector,” IEEE Photon. Technol. Lett.18(6), 770–772 (2006). [CrossRef]
J. Appl. Phys.
- E. Dorjgotov, A. Bhowmik, and P. Bos, “Design of a wide bandwidth switchable mirror based on a liquid crystal etalon,” J. Appl. Phys.105(10), 104906 (2009). [CrossRef]
J. Lightwave Technol.
- A. A. M. Saleh and J. Stone, “Two stage Fabry-Perot filters as de-multiplexers in optical FDMA LAN’s,” J. Lightwave Technol.7(2), 323–330 (1989). [CrossRef]
Opt. Eng.
- H. Liu, C. C. Lin, and J. S. Harris, “High-speed, dual-function vertical cavity multiple quantum well modulators and photodetectors for optical interconnects,” Opt. Eng.40(7), 1186–1191 (2001). [CrossRef]
- G. C. Gilbreath, W. S. Rabinovich, T. J. Meehan, M. J. Vilcheck, M. Stell, R. Mahon, P. G. Goetz, E. Oh, J. A. Vasquez, K. C. R. L. Lucke, and S. Mozersky, “Progress in development of multiple-quantum-well retromodulators for free-space data links,” Opt. Eng.42(6), 1611–1617 (2003). [CrossRef]
- W. S. Rabinovich, P. G. Goetz, R. Mahon, L. Swingen, J. Murphy, M. Ferraro, J. H. Ray Burris, C. I. Moore, M. Suite, G. C. Gilbreath, S. Binari, and D. Klotzkin, “45-Mbit/s cat’s-eye modulating retroreflectors,” Opt. Eng.46(10), 104001 (2007). [CrossRef]
Opt. Express
- B. H. Na, G. W. Ju, H. J. Choi, Y. C. Cho, Y. H. Park, and Y. T. Lee, “Large aperture asymmetric Fabry Perot modulator based on asymmetric tandem quantum well for low voltage operation,” Opt. Express20(6), 6003–6009 (2012). [CrossRef] [PubMed]
- S. A. Alboon and R. G. Lindquist, “Flat top liquid crystal tunable filter using coupled Fabry-Perot cavities,” Opt. Express16(1), 231–236 (2008). [CrossRef] [PubMed]
- P. Chaisakul, D. Marris-Morini, M. S. Rouifed, G. Isella, D. Chrastina, J. Frigerio, X. Le Roux, S. Edmond, J. R. Coudevylle, and L. Vivien, “23 GHz Ge/SiGe multiple quantum well electroabsorption modulator,” Opt. Express20(3), 3219–3224 (2012). [CrossRef] [PubMed]
Phys. Rev. Lett.
- D. A. B. Miller, D. S. Chemla, T. C. Damen, A. C. Gossard, W. Wiegmann, T. H. Wood, and C. A. Burrus, “Bandedge electro-absorption in quantum well structures: the quantum confined Stark effect,” Phys. Rev. Lett.53(22), 2173–2176 (1984). [CrossRef]
Proc. SPIE
- Y. H. Park, Y. C. Cho, J. W. You, C. Y. Park, H. Yoon, S. H. Lee, J. O. Kwon, and S. W. Lee, “Micro optical system based 3D imaging for full HD depth image capturing,” Proc. SPIE8252, 82520X (2012). [CrossRef]
- J. S. Ahearn, M. H. Weiler, S. B. Adams, T. P. McElwain, A. Stark, L. DePaulis, A. L. Sarafinas, T. Hongsmatip, R. J. Martin, and B. Lane, “Multiple quantum well (MQW) spatial light modulators (SLMs) for optical data processing and beam steering,” Proc. SPIE4457, 43–53 (2001). [CrossRef]
- Z. Zhou, Y. Dou, Y. Huang, R. Wu, and X. Ren, “Accurately nonselective and selective etching of GaAs/Al0.8Ga0.2As/AlAs structure for making air-gap cavity,” Proc. SPIE5280, 889–895 (2004).
Solid-State Electron.
- N. Susa and T. Nakahara, “Design of AlGaAs/GaAs quantum well for electro-absorption modulator,” Solid-State Electron.36(9), 1277–1287 (1993). [CrossRef]
Other
- F. L. Pedrotti and L. S. Pedrotti, Introduction to Optics (Pearson Prentice Hall, New Jersey, 2007), Chap. 22.
2012, Na, Opt. Express
- Y. H. Park, Y. C. Cho, J. W. You, C. Y. Park, H. Yoon, S. H. Lee, J. O. Kwon, and S. W. Lee, “Micro optical system based 3D imaging for full HD depth image capturing,” Proc. SPIE8252, 82520X (2012). [CrossRef]
- E. Dorjgotov, A. Bhowmik, and P. Bos, “Design of a wide bandwidth switchable mirror based on a liquid crystal etalon,” J. Appl. Phys.105(10), 104906 (2009). [CrossRef]
- W. S. Rabinovich, P. G. Goetz, R. Mahon, L. Swingen, J. Murphy, M. Ferraro, J. H. Ray Burris, C. I. Moore, M. Suite, G. C. Gilbreath, S. Binari, and D. Klotzkin, “45-Mbit/s cat’s-eye modulating retroreflectors,” Opt. Eng.46(10), 104001 (2007). [CrossRef]
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