Profile measurement of transparent inclined surface with transmitted differential interference contrast shearing interferometer

doi:10.1364/OE.20.019868

Profile measurement of transparent inclined surface with transmitted differential interference contrast shearing interferometer

Sheng-Kang Yu, Wei-Lun Chen, Ting-Kun Liu, and Shih-Chieh Lin »View Author Affiliations

Optics Express, Vol. 20, Issue 18, pp. 19868-19881 (2012)
http://dx.doi.org/10.1364/OE.20.019868

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Abstract

A quantitative phase shifting differential interference contrast (PS-DIC) shearing interferometer is adopted to measure the profile of transparent specimen with inclined surface. The effects of the incline angle on DIC measurement accuracy were studied. The optical model of the test system was constructed and the measurement of surface with various incline angles ranging from 5° to 60° was simulated. The experiments validate the simulation model and show the feasibility of profile reconstruction of inclined structure. It is interested to find that even with an inclined angle of 15°, unwrapping technique is required to make the measurement more accurate. In addition, the measurement can be further improved by taking into account the effects of the change in shear distance on the optical path difference. This study provides useful information that should be considered for complex geometry measurement with quantitative DIC technique.

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: May 14, 2012
Revised Manuscript: June 14, 2012
Manuscript Accepted: June 14, 2012
Published: August 15, 2012

Citation
Sheng-Kang Yu, Wei-Lun Chen, Ting-Kun Liu, and Shih-Chieh Lin, "Profile measurement of transparent inclined surface with transmitted differential interference contrast shearing interferometer," Opt. Express 20, 19868-19881 (2012)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-20-18-19868

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References

J. Han, S. Choi, J. Lim, B. S. Lee, and S. Kang, “Fabrication of transparent conductive tracks and patterns on flexible substrate using a continuous UV roll imprint lithography,” J. Phys. D Appl. Phys.42(11), 115503 (2009). [CrossRef]
M. Henry, P. M. Harrison, and J. Wendland, “Laser Direct Write of Active Thin-Films on Glass for Industrial Flat Panel Display Manufacture,” in Proceedings of the 4th International Congress on Laser Advanced Materials Processing, I. Miyamoto, ed. (Kyoto Research Park, Kyoto, Japan, 2006).
C. Y. Poon and B. Bhushan, “Comparison of surface roughness measurements by stylus profiler, AFM, and non-contact optical profiler,” Wear190(1), 76–88 (1995). [CrossRef]
X. Jing, X. Ning, Z. Chi, and S. Quan, “Real-time 3D Shape Measurement System based on Single Structure Light Pattern,” in 2010 IEEE International Conference on Robotics and Automation (Anchorage, Alaska, 2010), 121–126.
L. Carli, G. Genta, A. Cantatore, G. Barbato, L. D. Chiffre, and R. Levi, “Uncertainty evaluation for three-dimensional scanning electron microscope reconstructions based on the stereo-pair technique,” Meas. Sci. Technol.22(3), 035103 (2011). [CrossRef]
B. S. Chun, K. Kim, and D. Gweon, “Three-dimensional surface profile measurement using a beam scanning chromatic confocal microscope,” Rev. Sci. Instrum.80(7), 073706 (2009). [CrossRef] [PubMed]
B. Bhushan, J. C. Wyant, and J. Meiling, “A New Three-Dimensional Non-Contact Digital Optical Profiler,” Wear122(3), 301–312 (1988). [CrossRef]
D. L. Lessor, J. S. Hartman, and R. L. Gordon, “Quantitative surface topography determination by Nomarski reflection microscopy. 1. Theory,” J. Opt. Soc. Am.69(2), 357–366 (1979). [CrossRef]
J. S. Hartman, R. L. Gordon, and D. L. Lessor, “Quantitative surface topography determination by Nomarski reflection microscopy. 2: Microscope modification, calibration, and planar sample experiments,” Appl. Opt.19(17), 2998–3009 (1980). [CrossRef] [PubMed]
W. Shimada, T. Sato, and T. Yatagai, “Optical surface micro topography using phase-shifting Nomarski microscope,” Proc. SPIE1332, 525–529 (1991). [CrossRef]
C. J. Cogswell, N. I. Smith, K. G. Larkin, and P. Hariharan, “Quantitative DIC microscopy using a geometric phase shifter,” Proc. SPIE2984, 72–81 (1997). [CrossRef]
S. V. King, A. R. Libertun, C. Preza, and C. J. Cogswell, “Calibration of a phase-shifting DIC microscope for quantitative phase imaging,” Proc. SPIE6443, 64430M, 64430M-12 (2007). [CrossRef]
H. Ishiwata, M. Itoh, and T. Yatagai, “A New Method of Three-dimensional Measurement by Differential Interference Contrast Microscope,” Opt. Commun.260(1), 117–126 (2006). [CrossRef]
S. K. Yu, T. K. Liu, and S. C. Lin, “Height Measurement of Transparent Object by Adopting Differential Interference Contrast Technology,” Appl. Opt.49(14), 2588–2596 (2010). [CrossRef]
M. Shribak, J. LaFountain, D. Biggs, and S. Inouè, “Orientation-independent differential interference contrast (DIC) microscopy and its combination with an orientation-independent polarization system,” J. Biomed. Opt.13(1), 014011 (2008). [CrossRef] [PubMed]
C. Dennis, Ghiglia and Mark D. Pritt, Two-Dimensional Phase Unwrapping - Theory, Algorithms, and Software (John Wiley & Sons, 1998), Chap. 2 and 3.

Appl. Opt.

J. Biomed. Opt.

M. Shribak, J. LaFountain, D. Biggs, and S. Inouè, “Orientation-independent differential interference contrast (DIC) microscopy and its combination with an orientation-independent polarization system,” J. Biomed. Opt.13(1), 014011 (2008). [CrossRef] [PubMed]

J. Opt. Soc. Am.

D. L. Lessor, J. S. Hartman, and R. L. Gordon, “Quantitative surface topography determination by Nomarski reflection microscopy. 1. Theory,” J. Opt. Soc. Am.69(2), 357–366 (1979). [CrossRef]

J. Phys. D Appl. Phys.

J. Han, S. Choi, J. Lim, B. S. Lee, and S. Kang, “Fabrication of transparent conductive tracks and patterns on flexible substrate using a continuous UV roll imprint lithography,” J. Phys. D Appl. Phys.42(11), 115503 (2009). [CrossRef]

Meas. Sci. Technol.

L. Carli, G. Genta, A. Cantatore, G. Barbato, L. D. Chiffre, and R. Levi, “Uncertainty evaluation for three-dimensional scanning electron microscope reconstructions based on the stereo-pair technique,” Meas. Sci. Technol.22(3), 035103 (2011). [CrossRef]

Opt. Commun.

H. Ishiwata, M. Itoh, and T. Yatagai, “A New Method of Three-dimensional Measurement by Differential Interference Contrast Microscope,” Opt. Commun.260(1), 117–126 (2006). [CrossRef]

Proc. SPIE

W. Shimada, T. Sato, and T. Yatagai, “Optical surface micro topography using phase-shifting Nomarski microscope,” Proc. SPIE1332, 525–529 (1991). [CrossRef]
C. J. Cogswell, N. I. Smith, K. G. Larkin, and P. Hariharan, “Quantitative DIC microscopy using a geometric phase shifter,” Proc. SPIE2984, 72–81 (1997). [CrossRef]
S. V. King, A. R. Libertun, C. Preza, and C. J. Cogswell, “Calibration of a phase-shifting DIC microscope for quantitative phase imaging,” Proc. SPIE6443, 64430M, 64430M-12 (2007). [CrossRef]

Rev. Sci. Instrum.

B. S. Chun, K. Kim, and D. Gweon, “Three-dimensional surface profile measurement using a beam scanning chromatic confocal microscope,” Rev. Sci. Instrum.80(7), 073706 (2009). [CrossRef] [PubMed]

Wear

B. Bhushan, J. C. Wyant, and J. Meiling, “A New Three-Dimensional Non-Contact Digital Optical Profiler,” Wear122(3), 301–312 (1988). [CrossRef]
C. Y. Poon and B. Bhushan, “Comparison of surface roughness measurements by stylus profiler, AFM, and non-contact optical profiler,” Wear190(1), 76–88 (1995). [CrossRef]

Other

X. Jing, X. Ning, Z. Chi, and S. Quan, “Real-time 3D Shape Measurement System based on Single Structure Light Pattern,” in 2010 IEEE International Conference on Robotics and Automation (Anchorage, Alaska, 2010), 121–126.
M. Henry, P. M. Harrison, and J. Wendland, “Laser Direct Write of Active Thin-Films on Glass for Industrial Flat Panel Display Manufacture,” in Proceedings of the 4th International Congress on Laser Advanced Materials Processing, I. Miyamoto, ed. (Kyoto Research Park, Kyoto, Japan, 2006).
C. Dennis, Ghiglia and Mark D. Pritt, Two-Dimensional Phase Unwrapping - Theory, Algorithms, and Software (John Wiley & Sons, 1998), Chap. 2 and 3.

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