Demonstration of a curved sidewall grating demultiplexer on silicon

doi:10.1364/OE.20.019882

Demonstration of a curved sidewall grating demultiplexer on silicon

Przemek J. Bock, Pavel Cheben, Jens H. Schmid, Aitor V. Velasco, André Delâge, Siegfried Janz, Dan-Xia Xu, Jean Lapointe, Trevor J. Hall, and María L. Calvo »View Author Affiliations

Optics Express, Vol. 20, Issue 18, pp. 19882-19892 (2012)
http://dx.doi.org/10.1364/OE.20.019882

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Abstract

We experimentally demonstrate a new type of waveguide multiplexer device designed for silicon photonics, with a crosstalk level as low as −35 dB and an operational wavelength range of 300 nm. A compact device footprint of only 100 × 160 µm² offers an excellent potential for integration with other silicon nanophotonic circuits.

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(130.3120) Integrated optics : Integrated optics devices
(050.6624) Diffraction and gratings : Subwavelength structures

ToC Category:
Integrated Optics

History
Original Manuscript: April 27, 2012
Revised Manuscript: July 24, 2012
Manuscript Accepted: July 30, 2012
Published: August 15, 2012

Citation
Przemek J. Bock, Pavel Cheben, Jens H. Schmid, Aitor V. Velasco, André Delâge, Siegfried Janz, Dan-Xia Xu, Jean Lapointe, Trevor J. Hall, and María L. Calvo, "Demonstration of a curved sidewall grating demultiplexer on silicon," Opt. Express 20, 19882-19892 (2012)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-20-18-19882

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References

C. R. Doerr and K. Okamoto, “Advances in silica planar lightwave circuits,” J. Lightwave Technol.24(12), 4763–4789 (2006). [CrossRef]
P. Cheben, “Wavelength dispersive planar waveguide devices: echelle gratings and arrayed waveguide gratings,” Optical waveguides: from theory to applied technologies, M. L. Calvo and V. Lakshminarayanan, Eds. (CRC Press, 2007), 173–230.
A. Alduino and M. Paniccia, “Interconnects: wiring electronics with light,” Nat. Photonics1(3), 153–155 (2007). [CrossRef]
B. Jalali, “Teaching silicon new tricks,” Nat. Photonics1(4), 193–195 (2007). [CrossRef]
R. Kirchain and L. Kimerling, “A roadmap for nanophotonics,” Nat. Photonics1(6), 303–305 (2007). [CrossRef]
P. Cheben, J. H. Schmid, A. Delâge, A. Densmore, S. Janz, B. Lamontagne, J. Lapointe, E. Post, P. Waldron, and D.-X. Xu, “A high-resolution silicon-on-insulator arrayed waveguide grating microspectrometer with sub-micrometer aperture waveguides,” Opt. Express15(5), 2299–2306 (2007). [CrossRef] [PubMed]
F. Xia, L. Sekaric, and Y. Vlasov, “Ultracompact optical buffers on a silicon chip,” Nat. Photonics1(1), 65–71 (2007). [CrossRef]
J. S. Levy, A. Gondarenko, M. A. Foster, A. C. Turner-Foster, A. L. Gaeta, and M. Lipson, “CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects,” Nat. Photonics4(1), 37–40 (2010). [CrossRef]
H. A. Rowland, “Preliminary notice of results accomplished on the manufacture and theory of gratings for optical purposes,” Phil. Mag. Suppl.13(84), 469–474 (1882). [CrossRef]
R. Nagarajan, M. Kato, J. Pleumeekers, P. Evans, S. Corzine, S. Hurtt, A. Dentai, S. Murthy, M. Missey, R. Muthiah, R. A. Salvatore, C. Joyner, R. Schneider, M. Ziari, F. Kish, and D. Welch, “InP Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron.16(5), 1113–1125 (2010). [CrossRef]
X. Leijtens and M. Smit, “Miniaturization of Passive Devices for Photonic Integration,” Proc. SPIE6020, 60201Q (2005). [CrossRef]
M. R. T. Pearson, A. Bezinger, A. Delâge, J. W. Fraser, S. Janz, P. E. Jessop, and D.-X. Xu, “Arrayed waveguide grating demultiplexers in silicon-on-insulator,” Proc. SPIE3953, 11–18 (2000). [CrossRef]
F. Ohno, K. Sasaki, A. Motegi, and T. Baba, “Reduction in Sidelobe Level in Ultracompact Arrayed Waveguide Grating Demultiplexer Based on Si Wire Waveguide,” Jpn. J. Appl. Phys.45(8A), 6126–6131 (2006). [CrossRef]
P. Dumon, W. Bogaerts, D. Van Thourhout, D. Taillaert, R. Baets, J. Wouters, S. Beckx, and P. Jaenen, “Compact wavelength router based on a Silicon-on-insulator arrayed waveguide grating pigtailed to a fiber array,” Opt. Express14(2), 664–669 (2006). [CrossRef] [PubMed]
X. Liu, I. Hsieh, X. Chen, M. Takekoshi, J. I. Dadap, N. C. Panoiu, R. M. Osgood Jr., W. M. Green, F. Xia, and Y. A. Vlasov, “Design and fabrication of an ultra-compact silicon on insulator demultiplexer based on arrayed waveguide gratings,” CLEO 2008, paper CTuNN1.
S. Pathak, E. Lambert, P. Dumon, D. Thourhout, and W. Bogaerts, “Compact SOI-Based AWG With Flattened Spectral Response Using a MMI,” 8th International Conference in Group IV Photonics 2011, paper WC2.
S. Janz, A. Balakrishnan, S. Charbonneau, P. Cheben, M. Cloutier, A. Delâge, K. Dossou, L. Erickson, M. Gao, P. A. Krug, B. Lamontagne, M. Packirisamy, M. Pearson, and D.-X. Xu, “Planar waveguide echelle gratings in silica-on-silicon,” IEEE Photon. Technol. Lett.16(2), 503–505 (2004). [CrossRef]
S. Bidnyk, D. Feng, A. Balakrishnan, M. Pearson, M. Gao, H. Liang, W. Qian, C.-C. Kung, J. Fong, J. Yin, and M. Asghari, “Silicon-on-insulator-based planar circuit for passive optical network applications,” IEEE Photon. Technol. Lett.18(22), 2392–2394 (2006). [CrossRef]
J. Brouckaert, W. Bogaerts, P. Dumon, D. Thourhout, and R. Baets, “Planar concave grating demultiplexer fabricated on a nanophotonic silicon-on-insulator platform,” J. Lightwave Technol.25(5), 1269–1275 (2007). [CrossRef]
D. Feng, N.-N. Feng, C.-C. Kung, H. Liang, W. Qian, J. Fong, B. J. Luff, and M. Asghari, “Compact single-chip VMUX/DEMUX on the silicon-on-insulator platform,” Opt. Express19(7), 6125–6130 (2011). [CrossRef] [PubMed]
K. Okamoto, “Fundamentals of optical waveguides,” Elsevier Inc., 2006.
R. Soref, “Reconfigurable integrated optoelectronics,” Adv. Optoelectron.2011, 1–15 (2011), doi:. [CrossRef]
F. Xia, M. Rooks, L. Sekaric, and Y. Vlasov, “Ultra-compact high order ring resonator filters using submicron silicon photonic wires for on-chip optical interconnects,” Opt. Express15(19), 11934–11941 (2007). [CrossRef] [PubMed]
N. Han-Yong, R. W. Michael, L. Daqun, W. Xuan, M. Jose, R. P. Roberto, and P. Kachesh, “4 x 4 wavelength reconfigurable photonic switch based on thermally tuned silicon microring resonators,” Opt. Eng.47(4), 0446011–0666018 (2008).
N. Sherwood-Droz, H. Wang, L. Chen, B. G. Lee, A. Biberman, K. Bergman, and M. Lipson, “Optical 4x4 hitless slicon router for optical networks-on-chip (NoC),” Opt. Express16(20), 15915–15922 (2008). [CrossRef] [PubMed]
X. Zheng, I. Shubin, G. Li, T. Pinguet, A. Mekis, J. Yao, H. Thacker, Y. Luo, J. Costa, K. Raj, J. E. Cunningham, and A. V. Krishnamoorthy, “A tunable 1x4 silicon CMOS photonic wavelength multiplexer/demultiplexer for dense optical interconnects,” Opt. Express18(5), 5151–5160 (2010). [CrossRef] [PubMed]
Y. H. Wen, O. Kuzucu, T. Hou, M. Lipson, and A. L. Gaeta, “All-optical switching of a single resonance in silicon ring resonators,” Opt. Lett.36(8), 1413–1415 (2011). [CrossRef] [PubMed]
C. K. Madsen, J. Wagener, T. A. Strasser, D. Muehlner, M. A. Milbrodt, E. J. Laskowski, and J. DeMarco, “Planar waveguide optical spectrum analyzer using a UV-induced grating,” IEEE J. Sel. Top. Quantum Electron.4(6), 925–929 (1998). [CrossRef]
Y. Hao, Y. Wu, J. Yang, X. Jiang, and M. Wang, “Novel dispersive and focusing device configuration based on curved waveguide grating (CWG),” Opt. Express14(19), 8630–8637 (2006). [CrossRef] [PubMed]
P. J. Bock, P. Cheben, A. Delâge, J. H. Schmid, D.-X. Xu, S. Janz, and T. J. Hall, “Demultiplexer with blazed waveguide sidewall grating and sub-wavelength grating structure,” Opt. Express16(22), 17616–17625 (2008). [CrossRef] [PubMed]
C. F. R. Mateus, M. C. Y. Huang, L. Chen, C. J. Chang-Hasnain, and Y. Suzuki, “Broad-band mirror (1.12-1.62 um) using a subwavelength grating,” IEEE Photon. Technol. Lett.16(7), 1676–1678 (2004). [CrossRef]
P. Cheben, D.-X. Xu, S. Janz, and A. Densmore, “Subwavelength waveguide grating for mode conversion and light coupling in integrated optics,” Opt. Express14(11), 4695–4702 (2006). [CrossRef] [PubMed]
P. Cheben, P. J. Bock, J. H. Schmid, J. Lapointe, S. Janz, D.-X. Xu, A. Densmore, A. Delâge, B. Lamontagne, and T. J. Hall, “Refractive index engineering with subwavelength gratings for efficient microphotonic couplers and planar waveguide multiplexers,” Opt. Lett.35(15), 2526–2528 (2010). [CrossRef] [PubMed]
R. Halir, P. Cheben, J. H. Schmid, R. Ma, D. Bedard, S. Janz, D.-X. Xu, A. Densmore, J. Lapointe, and I. Molina-Fernández, “Continuously apodized fiber-to-chip surface grating coupler with refractive index engineered subwavelength structure,” Opt. Lett.35(19), 3243–3245 (2010). [CrossRef] [PubMed]
U. Levy, M. Abashin, K. Ikeda, A. Krishnamoorthy, J. Cunningham, and Y. Fainman, “Inhomogenous Dielectric Metamaterials with Space-Variant Polarizability,” Phys. Rev. Lett.98(24), 243901 (2007). [CrossRef] [PubMed]
J. H. Schmid, P. Cheben, S. Janz, J. Lapointe, E. Post, and D.-X. Xu, “Gradient-index antireflective subwavelength structures for planar waveguide facets,” Opt. Lett.32(13), 1794–1796 (2007). [CrossRef] [PubMed]
F. Horst, W. M. Green, B. J. Offrein, and Y. Vlasov, “Echelle grating WDM (de-)multiplexer in SOI technology, based on a design with two stigmatic points,” Proc. SPIE6996, 69960R, (2008). [CrossRef]

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[1] C. R. Doerr and K. Okamoto, “Advances in silica planar lightwave circuits,” J. Lightwave Technol.24(12), 4763–4789 (2006). [CrossRef]

[2] P. Cheben, “Wavelength dispersive planar waveguide devices: echelle gratings and arrayed waveguide gratings,” Optical waveguides: from theory to applied technologies, M. L. Calvo and V. Lakshminarayanan, Eds. (CRC Press, 2007), 173–230.

[3] A. Alduino and M. Paniccia, “Interconnects: wiring electronics with light,” Nat. Photonics1(3), 153–155 (2007). [CrossRef]

[4] B. Jalali, “Teaching silicon new tricks,” Nat. Photonics1(4), 193–195 (2007). [CrossRef]

[5] R. Kirchain and L. Kimerling, “A roadmap for nanophotonics,” Nat. Photonics1(6), 303–305 (2007). [CrossRef]

[6] P. Cheben, J. H. Schmid, A. Delâge, A. Densmore, S. Janz, B. Lamontagne, J. Lapointe, E. Post, P. Waldron, and D.-X. Xu, “A high-resolution silicon-on-insulator arrayed waveguide grating microspectrometer with sub-micrometer aperture waveguides,” Opt. Express15(5), 2299–2306 (2007). [CrossRef] [PubMed]

[7] F. Xia, L. Sekaric, and Y. Vlasov, “Ultracompact optical buffers on a silicon chip,” Nat. Photonics1(1), 65–71 (2007). [CrossRef]

[8] J. S. Levy, A. Gondarenko, M. A. Foster, A. C. Turner-Foster, A. L. Gaeta, and M. Lipson, “CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects,” Nat. Photonics4(1), 37–40 (2010). [CrossRef]

[9] H. A. Rowland, “Preliminary notice of results accomplished on the manufacture and theory of gratings for optical purposes,” Phil. Mag. Suppl.13(84), 469–474 (1882). [CrossRef]

[10] R. Nagarajan, M. Kato, J. Pleumeekers, P. Evans, S. Corzine, S. Hurtt, A. Dentai, S. Murthy, M. Missey, R. Muthiah, R. A. Salvatore, C. Joyner, R. Schneider, M. Ziari, F. Kish, and D. Welch, “InP Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron.16(5), 1113–1125 (2010). [CrossRef]

[11] X. Leijtens and M. Smit, “Miniaturization of Passive Devices for Photonic Integration,” Proc. SPIE6020, 60201Q (2005). [CrossRef]

[12] M. R. T. Pearson, A. Bezinger, A. Delâge, J. W. Fraser, S. Janz, P. E. Jessop, and D.-X. Xu, “Arrayed waveguide grating demultiplexers in silicon-on-insulator,” Proc. SPIE3953, 11–18 (2000). [CrossRef]

[13] F. Ohno, K. Sasaki, A. Motegi, and T. Baba, “Reduction in Sidelobe Level in Ultracompact Arrayed Waveguide Grating Demultiplexer Based on Si Wire Waveguide,” Jpn. J. Appl. Phys.45(8A), 6126–6131 (2006). [CrossRef]

[14] P. Dumon, W. Bogaerts, D. Van Thourhout, D. Taillaert, R. Baets, J. Wouters, S. Beckx, and P. Jaenen, “Compact wavelength router based on a Silicon-on-insulator arrayed waveguide grating pigtailed to a fiber array,” Opt. Express14(2), 664–669 (2006). [CrossRef] [PubMed]

[15] X. Liu, I. Hsieh, X. Chen, M. Takekoshi, J. I. Dadap, N. C. Panoiu, R. M. Osgood Jr., W. M. Green, F. Xia, and Y. A. Vlasov, “Design and fabrication of an ultra-compact silicon on insulator demultiplexer based on arrayed waveguide gratings,” CLEO 2008, paper CTuNN1.

[16] S. Pathak, E. Lambert, P. Dumon, D. Thourhout, and W. Bogaerts, “Compact SOI-Based AWG With Flattened Spectral Response Using a MMI,” 8th International Conference in Group IV Photonics 2011, paper WC2.

[17] S. Janz, A. Balakrishnan, S. Charbonneau, P. Cheben, M. Cloutier, A. Delâge, K. Dossou, L. Erickson, M. Gao, P. A. Krug, B. Lamontagne, M. Packirisamy, M. Pearson, and D.-X. Xu, “Planar waveguide echelle gratings in silica-on-silicon,” IEEE Photon. Technol. Lett.16(2), 503–505 (2004). [CrossRef]

[18] S. Bidnyk, D. Feng, A. Balakrishnan, M. Pearson, M. Gao, H. Liang, W. Qian, C.-C. Kung, J. Fong, J. Yin, and M. Asghari, “Silicon-on-insulator-based planar circuit for passive optical network applications,” IEEE Photon. Technol. Lett.18(22), 2392–2394 (2006). [CrossRef]

[19] J. Brouckaert, W. Bogaerts, P. Dumon, D. Thourhout, and R. Baets, “Planar concave grating demultiplexer fabricated on a nanophotonic silicon-on-insulator platform,” J. Lightwave Technol.25(5), 1269–1275 (2007). [CrossRef]

[20] D. Feng, N.-N. Feng, C.-C. Kung, H. Liang, W. Qian, J. Fong, B. J. Luff, and M. Asghari, “Compact single-chip VMUX/DEMUX on the silicon-on-insulator platform,” Opt. Express19(7), 6125–6130 (2011). [CrossRef] [PubMed]

[21] K. Okamoto, “Fundamentals of optical waveguides,” Elsevier Inc., 2006.

[22] R. Soref, “Reconfigurable integrated optoelectronics,” Adv. Optoelectron.2011, 1–15 (2011), doi:. [CrossRef]

[23] F. Xia, M. Rooks, L. Sekaric, and Y. Vlasov, “Ultra-compact high order ring resonator filters using submicron silicon photonic wires for on-chip optical interconnects,” Opt. Express15(19), 11934–11941 (2007). [CrossRef] [PubMed]

[24] N. Han-Yong, R. W. Michael, L. Daqun, W. Xuan, M. Jose, R. P. Roberto, and P. Kachesh, “4 x 4 wavelength reconfigurable photonic switch based on thermally tuned silicon microring resonators,” Opt. Eng.47(4), 0446011–0666018 (2008).

[25] N. Sherwood-Droz, H. Wang, L. Chen, B. G. Lee, A. Biberman, K. Bergman, and M. Lipson, “Optical 4x4 hitless slicon router for optical networks-on-chip (NoC),” Opt. Express16(20), 15915–15922 (2008). [CrossRef] [PubMed]

[26] X. Zheng, I. Shubin, G. Li, T. Pinguet, A. Mekis, J. Yao, H. Thacker, Y. Luo, J. Costa, K. Raj, J. E. Cunningham, and A. V. Krishnamoorthy, “A tunable 1x4 silicon CMOS photonic wavelength multiplexer/demultiplexer for dense optical interconnects,” Opt. Express18(5), 5151–5160 (2010). [CrossRef] [PubMed]

[27] Y. H. Wen, O. Kuzucu, T. Hou, M. Lipson, and A. L. Gaeta, “All-optical switching of a single resonance in silicon ring resonators,” Opt. Lett.36(8), 1413–1415 (2011). [CrossRef] [PubMed]

[28] C. K. Madsen, J. Wagener, T. A. Strasser, D. Muehlner, M. A. Milbrodt, E. J. Laskowski, and J. DeMarco, “Planar waveguide optical spectrum analyzer using a UV-induced grating,” IEEE J. Sel. Top. Quantum Electron.4(6), 925–929 (1998). [CrossRef]

[29] Y. Hao, Y. Wu, J. Yang, X. Jiang, and M. Wang, “Novel dispersive and focusing device configuration based on curved waveguide grating (CWG),” Opt. Express14(19), 8630–8637 (2006). [CrossRef] [PubMed]

[30] P. J. Bock, P. Cheben, A. Delâge, J. H. Schmid, D.-X. Xu, S. Janz, and T. J. Hall, “Demultiplexer with blazed waveguide sidewall grating and sub-wavelength grating structure,” Opt. Express16(22), 17616–17625 (2008). [CrossRef] [PubMed]

[31] C. F. R. Mateus, M. C. Y. Huang, L. Chen, C. J. Chang-Hasnain, and Y. Suzuki, “Broad-band mirror (1.12-1.62 um) using a subwavelength grating,” IEEE Photon. Technol. Lett.16(7), 1676–1678 (2004). [CrossRef]

[32] P. Cheben, D.-X. Xu, S. Janz, and A. Densmore, “Subwavelength waveguide grating for mode conversion and light coupling in integrated optics,” Opt. Express14(11), 4695–4702 (2006). [CrossRef] [PubMed]

[33] P. Cheben, P. J. Bock, J. H. Schmid, J. Lapointe, S. Janz, D.-X. Xu, A. Densmore, A. Delâge, B. Lamontagne, and T. J. Hall, “Refractive index engineering with subwavelength gratings for efficient microphotonic couplers and planar waveguide multiplexers,” Opt. Lett.35(15), 2526–2528 (2010). [CrossRef] [PubMed]

[34] R. Halir, P. Cheben, J. H. Schmid, R. Ma, D. Bedard, S. Janz, D.-X. Xu, A. Densmore, J. Lapointe, and I. Molina-Fernández, “Continuously apodized fiber-to-chip surface grating coupler with refractive index engineered subwavelength structure,” Opt. Lett.35(19), 3243–3245 (2010). [CrossRef] [PubMed]

[35] U. Levy, M. Abashin, K. Ikeda, A. Krishnamoorthy, J. Cunningham, and Y. Fainman, “Inhomogenous Dielectric Metamaterials with Space-Variant Polarizability,” Phys. Rev. Lett.98(24), 243901 (2007). [CrossRef] [PubMed]

[36] J. H. Schmid, P. Cheben, S. Janz, J. Lapointe, E. Post, and D.-X. Xu, “Gradient-index antireflective subwavelength structures for planar waveguide facets,” Opt. Lett.32(13), 1794–1796 (2007). [CrossRef] [PubMed]

[37] F. Horst, W. M. Green, B. J. Offrein, and Y. Vlasov, “Echelle grating WDM (de-)multiplexer in SOI technology, based on a design with two stigmatic points,” Proc. SPIE6996, 69960R, (2008). [CrossRef]

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Demonstration of a curved sidewall grating demultiplexer on silicon