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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 20, Iss. 18 — Aug. 27, 2012
  • pp: 19936–19945

Improved signal model for confocal sensors accounting for object depending artifacts

Florian Mauch, Wolfram Lyda, Marc Gronle, and Wolfgang Osten  »View Author Affiliations


Optics Express, Vol. 20, Issue 18, pp. 19936-19945 (2012)
http://dx.doi.org/10.1364/OE.20.019936


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Abstract

The conventional signal model of confocal sensors is well established and has proven to be exceptionally robust especially when measuring rough surfaces. Its physical derivation however is explicitly based on plane surfaces or point like objects, respectively. Here we show experimental results of a confocal point sensor measurement of a surface standard. The results illustrate the rise of severe artifacts when measuring curved surfaces. On this basis, we present a systematic extension of the conventional signal model that is proven to be capable of qualitatively explaining these artifacts.

© 2012 OSA

OCIS Codes
(110.0180) Imaging systems : Microscopy
(120.2830) Instrumentation, measurement, and metrology : Height measurements
(120.4800) Instrumentation, measurement, and metrology : Optical standards and testing
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure

ToC Category:
Microscopy

History
Original Manuscript: June 13, 2012
Revised Manuscript: July 16, 2012
Manuscript Accepted: July 25, 2012
Published: August 15, 2012

Virtual Issues
Vol. 7, Iss. 10 Virtual Journal for Biomedical Optics

Citation
Florian Mauch, Wolfram Lyda, Marc Gronle, and Wolfgang Osten, "Improved signal model for confocal sensors accounting for object depending artifacts," Opt. Express 20, 19936-19945 (2012)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-20-18-19936


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