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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 20, Iss. 18 — Aug. 27, 2012
  • pp: 20551–20557

Sub-wavelength GaN-based membrane high contrast grating reflectors

Tzeng Tsong Wu, Yu Cheng Syu, Shu Hsien Wu, Wei Ting Chen, Tien Chang Lu, Shing Chung Wang, Hai Pang Chiang, and Din Ping Tsai  »View Author Affiliations


Optics Express, Vol. 20, Issue 18, pp. 20551-20557 (2012)
http://dx.doi.org/10.1364/OE.20.020551


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Abstract

The GaN-based membrane high contrast grating (HCG) reflectors have been fabricated and investigated. The structural parameters including grating periods, grating height, filling factors and air-gap height were calculated to realize high reflectivity spectra with broad bandwidth by the rigorous coupled-wave analysis and finite-difference time-domain method. Based on the optimized simulation results, the GaN-based membrane HCGs were fabricated by e-beam lithography and focused-ion beam process. The fabricated GaN-based membrane HCG reflectors revealed high reflectivity at 460 nm band with large stopband width of 60 nm in the TE polarization measured by using the micro-reflectivity spectrometer. The experimental results also showed a good agreement with simulated ones. We believe this study will be helpful for development of the GaN-based novel light emitting devices in the blue or UV region.

© 2012 OSA

OCIS Codes
(050.0050) Diffraction and gratings : Diffraction and gratings
(220.4241) Optical design and fabrication : Nanostructure fabrication
(050.6624) Diffraction and gratings : Subwavelength structures

ToC Category:
Diffraction and Gratings

History
Original Manuscript: July 5, 2012
Revised Manuscript: August 17, 2012
Manuscript Accepted: August 17, 2012
Published: August 22, 2012

Citation
Tzeng Tsong Wu, Yu Cheng Syu, Shu Hsien Wu, Wei Ting Chen, Tien Chang Lu, Shing Chung Wang, Hai Pang Chiang, and Din Ping Tsai, "Sub-wavelength GaN-based membrane high contrast grating reflectors," Opt. Express 20, 20551-20557 (2012)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-20-18-20551


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