OSA's Digital Library

Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 20, Iss. 19 — Sep. 10, 2012
  • pp: 21341–21345

High quality factor and high confinement silicon resonators using etchless process

Austin Griffith, Jaime Cardenas, Carl B. Poitras, and Michal Lipson  »View Author Affiliations

Optics Express, Vol. 20, Issue 19, pp. 21341-21345 (2012)

View Full Text Article

Enhanced HTML    Acrobat PDF (1391 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



We demonstrate high quality factor and high confinement in a silicon ring resonator fabricated by a thermal oxidation process. We fabricated a 50 μm bending radius racetrack resonator, with a 5 μm coupling region. We achieved an intrinsic quality factor of 760,000 for the fundamental TM mode, which corresponds to a propagation loss of 0.9 dB/cm. Both the fundamental TE and TM modes are highly confined in the waveguide, with effective indices of 3.0 for the TE mode and 2.9 for the TM mode.

© 2012 OSA

OCIS Codes
(230.5750) Optical devices : Resonators
(230.7370) Optical devices : Waveguides

ToC Category:
Optical Devices

Original Manuscript: June 28, 2012
Revised Manuscript: August 28, 2012
Manuscript Accepted: August 28, 2012
Published: September 4, 2012

Austin Griffith, Jaime Cardenas, Carl B. Poitras, and Michal Lipson, "High quality factor and high confinement silicon resonators using etchless process," Opt. Express 20, 21341-21345 (2012)

Sort:  Author  |  Year  |  Journal  |  Reset  


  1. R. Soref, “The past, present, and future of silicon photonics,” IEEE J. Sel. Top. Quantum Electron.12, 1678–1687 (2006). [CrossRef]
  2. Y. Okawachi, A. Gaeta, and M. Lipson, “Breakthroughs in nonlinear silicon photonics 2011,” IEEE Photonics J.20114, 601–606 (2012).
  3. U. Fischer, T. Zinke, J.-R. Kropp, F. Arndt, and K. Petermann, “0.1 dB/cm waveguide losses in single-mode SOI rib waveguides,” IEEE Photon. Technol. Lett.8, 647–648 (1996). [CrossRef]
  4. I. Kiyat, A. Aydinli, and N. Dagli, “High-Q silicon-on-insulator optical rib waveguide racetrack resonators,” Opt. Express13, 1900–1905 (2005). [CrossRef] [PubMed]
  5. S. Xiao, M. H. Khan, H. Shen, and M. Qi, “Compact silicon microring resonators with ultra-low propagation loss in the C band,” Opt. Express15, 14467–14475 (2007). [CrossRef] [PubMed]
  6. Y. Vlasov and S. McNab, “Losses in single-mode silicon-on-insulator strip waveguides and bends,” Opt. Express12, 1622–1631 (2004). [CrossRef] [PubMed]
  7. M. Borselli, T. Johnson, and O. Painter, “Beyond the Rayleigh scattering limit in high-Q silicon microdisks: theory and experiment,” Opt. Express13, 1515–1530 (2005). [CrossRef] [PubMed]
  8. G. S. Oehrlein, “Dry etching damage of silicon: a review,” Mater. Sci. Eng. B4, 441–450 (1989). [CrossRef]
  9. F. P. Payne and J. P. R. Lacey, “A theoretical analysis of scattering loss from planar optical waveguides,” Opt. Quantum Electron.26, 977–986 (1994). [CrossRef]
  10. R. Pafchek, R. Tummidi, J. Li, M. A. Webster, E. Chen, and T. L. Koch, “Low-loss silicon-on-insulator shallow-ridge TE and TM waveguides formed using thermal oxidation,” Appl. Opt.48, 958–963 (2009). [CrossRef] [PubMed]
  11. M. P. Nezhad, O. Bondarenko, M. Khajavikhan, A. Simic, and Y. Fainman, “Etch-free low loss silicon waveguides using hydrogen silsesquioxane oxidation masks,” Opt. Express19, 18827–18832 (2011). [CrossRef] [PubMed]
  12. L.-W. Luo, G. S. Wiederhecker, J. Cardenas, C. Poitras, and M. Lipson, “High quality factor etchless silicon photonic ring resonators,” Opt. Express19, 6284–6289 (2011). [CrossRef] [PubMed]
  13. B. Desiatov, I. Goykhman, and U. Levy, “Demonstration of submicron square-like silicon waveguide using optimized LOCOS process,” Opt. Express18, 18592–18597 (2010). [CrossRef] [PubMed]
  14. V. R. Almeida, R. R. Panepucci, and M. Lipson, “Nanotaper for compact mode conversion,” Opt. Lett.28, 1302–1304 (2003). [CrossRef] [PubMed]
  15. P. Rabiei, W. Steier, and L. Dalton, “Polymer micro-ring filters and modulators,” J. Lightwave Technol.20, 1968–1975 (2002). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


Fig. 1 Fig. 2 Fig. 3
Fig. 4

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited