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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 20, Iss. 19 — Sep. 10, 2012
  • pp: 21450–21456

Surface and thickness measurement of a transparent film using wavelength scanning interferometry

Feng Gao, Hussam Muhamedsalih, and Xiangqian Jiang  »View Author Affiliations

Optics Express, Vol. 20, Issue 19, pp. 21450-21456 (2012)

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A wavelength scanning interferometer for measuring the surface and thickness of a transparent film has been studied. A halogen light source combined with an acousto-optic tuneable filter is used to generate a sequence of filtered light in a Linnik interferometer, which leads to a sequence of interferograms captured by a CCD camera. When a transparent thin film is measured, the reflection signals from both the top and bottom surfaces of the film will interfere with the reference signal. At the same time, the multiple reflection signals between the two film surfaces will also interfere with each other. Effective separation of the interference signals from each other is the key to achieving a successful measurement. By performing a frequency-domain analysis, these interference signals can be separated. An optimized Fourier transform method is used in the analysis. Measurements of the top and bottom surface finishes of the film, as well as the film thickness map, have been achieved. The film needs to be more than 3 µm in optical path length, and must transparent with no absorption of light. The film’s refractive index needs to be known as a function of wavelength. In this paper, the theoretical analysis and simulation study of wavelength scanning interferometry for transparent film measurement is discussed. Experiments on thin film layers of Parylene N coated on a glass slide surface are studied and analyzed. Comparison study results with other contact and non-contact methods are also presented.

© 2012 OSA

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(240.0310) Optics at surfaces : Thin films
(240.7040) Optics at surfaces : Tunneling

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: July 18, 2012
Revised Manuscript: August 28, 2012
Manuscript Accepted: August 29, 2012
Published: September 4, 2012

Feng Gao, Hussam Muhamedsalih, and Xiangqian Jiang, "Surface and thickness measurement of a transparent film using wavelength scanning interferometry," Opt. Express 20, 21450-21456 (2012)

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  1. P. de Groot and X. de Lega, “Transparent film profiling and analysis by interference microscopy,” Proc. SPIE7064, 794936 (2008). [CrossRef]
  2. D. Mansfield, “Extraction of film interface surfaces from scanning white light interferometry,” Proc. SPIE7101, 797978 (2008). [CrossRef]
  3. S. W. Kim and G. H. Kim, “Thickness-profile measurement of transparent thin-film layers by white-light scanning interferometry,” Appl. Opt.38(28), 5968–5973 (1999). [CrossRef] [PubMed]
  4. X. Jiang, K. Wang, F. Gao, and H. Muhamedsalih, “Fast surface measurement using wavelength scanning interferometry with compensation of environmental noise,” Appl. Opt.49(15), 2903–2909 (2010). [CrossRef] [PubMed]
  5. H. Mahamedsalih, X. Jiang, and F. Gao, “Comparison of fast Fourier transform and convolution in wavelength scanning interferometry,” Proc. SPIE8082, 899357 (2011).
  6. H. Akiyama, O. Sasaki, and T. Suzuki, “Sinusoidal wavelength-scanning interferometer using an acousto-optic tunable filter for measurement of thickness and surface profile of a thin film,” Opt. Express13(25), 10066–10074 (2005). [CrossRef] [PubMed]
  7. O. Sasaki, S. Hirakubo, S. Choi, and T. Suzuki, “Utilization of frequency information in a linear wavenumber-scanning interferometer for profile measurement of a thin film,” Appl. Opt.51(13), 2429–2435 (2012). [CrossRef] [PubMed]
  8. D. Kim, S. Kim, H. J. Kong, and Y. Lee, “Measurement of the thickness profile of a transparent thin film deposited upon a pattern structure with an acousto-optic tunablefilter,” Opt. Lett.27(21), 1893–1895 (2002). [CrossRef] [PubMed]
  9. Y. S. Ghim, A. Suratkar, and A. Davies, “Reflectometry-based wavelength scanning interferometry for thickness measurements of very thin wafers,” Opt. Express18(7), 6522–6529 (2010). [CrossRef] [PubMed]
  10. SCS Parylene properties, http://www.scscoatings.com/parylene_knowledge/specifications.aspx

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