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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 20, Iss. 2 — Jan. 16, 2012
  • pp: 1825–1838

An EUV beamsplitter based on conical grazing incidence diffraction

C. Braig, L. Fritzsch, T. Käsebier, E.-B. Kley, C. Laubis, Y. Liu, F. Scholze, and A. Tünnermann  »View Author Affiliations

Optics Express, Vol. 20, Issue 2, pp. 1825-1838 (2012)

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We present an innovative grating design based on conical diffraction which acts as an almost perfect and low-loss beamsplitter for extreme ultraviolet radiation. The scheme is based on a binary profile operated in grazing incidence along the grating bars under total external reflection. It is shown that periods of a few 102 nm may permit an exclusive (±1)st order diffraction with efficiencies up to ∼ 35% in each of them, whereas higher evanescent orders vanish. In contrast, destructive interference eliminates the 0th order. For a sample made of SiO2 on silicon, measured data and simulated results from rigorous coupled wave analysis procedures are given.

© 2012 OSA

OCIS Codes
(050.2770) Diffraction and gratings : Gratings
(340.7480) X-ray optics : X-rays, soft x-rays, extreme ultraviolet (EUV)

ToC Category:
X-ray Optics

Original Manuscript: November 1, 2011
Revised Manuscript: January 1, 2012
Manuscript Accepted: January 2, 2012
Published: January 12, 2012

C. Braig, L. Fritzsch, T. Käsebier, E.-B. Kley, C. Laubis, Y. Liu, F. Scholze, and A. Tünnermann, "An EUV beamsplitter based on conical grazing incidence diffraction," Opt. Express 20, 1825-1838 (2012)

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