Serpentine low loss trapezoidal silica waveguides on silicon

doi:10.1364/OE.20.022298

Serpentine low loss trapezoidal silica waveguides on silicon

Xiaomin Zhang, Mark Harrison, Audrey Harker, and Andrea M. Armani »View Author Affiliations

Optics Express, Vol. 20, Issue 20, pp. 22298-22307 (2012)
http://dx.doi.org/10.1364/OE.20.022298

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Abstract

We report the fabrication and characterization of straight and serpentine low loss trapezoidal silica waveguides integrated on a silicon substrate. The waveguide channel was defined using a dual photo-lithography and buffered HF etching and isolated from the silicon substrate using an isotropic silicon etchant. The waveguide is air-clad and thus has a core-cladding effective index contrast of approximately 25%. Measured at 658, 980 and 1550nm, the propagation loss was found to be 0.69, 0.59, and 0.41dB/cm respectively, with a critical bending radius less than 375μm. The waveguide’s polarization behavior was investigated both theoretically and experimentally. Additionally, the output power shows a linear response with input power up to 200mW.

OCIS Codes
(130.2790) Integrated optics : Guided waves
(130.3120) Integrated optics : Integrated optics devices

ToC Category:
Integrated Optics

History
Original Manuscript: July 26, 2012
Revised Manuscript: August 21, 2012
Manuscript Accepted: September 12, 2012
Published: September 14, 2012

Citation
Xiaomin Zhang, Mark Harrison, Audrey Harker, and Andrea M. Armani, "Serpentine low loss trapezoidal silica waveguides on silicon," Opt. Express 20, 22298-22307 (2012)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-20-20-22298

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References

C. Kopp, S. Bernabe, B. B. Bakir, J. Fedeli, R. Orobtchouk, F. Schrank, H. Porte, L. Zimmermann, and T. Tekin, “Silicon photonic circuits: On-CMOS integration, fiber optical coupling, and packaging,” IEEE J. Sel. Top. Quantum Electron.17, 498–509 (2011).
A. Himeno, K. Kato, and T. Miya, “Silica-based planar lightwave circuits,” IEEE J. Sel. Top. Quantum Electron.4, 913–924 (1998).
Y. Vlasov and S. McNab, “Losses in single-mode silicon-on-insulator strip waveguides and bends,” Opt. Express12, 1622–1631 (2004).
J. F. Bauters, M. J. R. Heck, D. John, D. Dai, M.-C. Tien, J. S. Barton, A. Leinse, R. G. Heideman, D. J. Blumenthal, and J. E. Bowers, “Ultra-low-loss high-aspect-ratio Si3N4 waveguides,” Opt. Express19, 3163–3174 (2011).
T. C. Sum, A. A. Bettiol, J. A. van Kan, F. Watt, E. Y. B. Pun, and K. K. Tung, “Proton beam writing of low-loss polymer optical waveguides,” Appl. Phys. Lett.83, 1707–1709 (2003).
T. Miya, “Silica-based planar lightwave circuits: passive and thermally active devices,” IEEE J. Sel. Top. Quantum Electron.6, 38–45 (2000).
G. L. Bona, R. Germann, and B. J. Offrein, “SiON high-refractive-index waveguide and planar lightwave circuits,” IBM J. Res. Develop.47, 239–249 (2003).
X. Zhang and A. M. Armani, “Suspended bridge-like silica 2x2 beam splitter on silicon,” Opt. Lett.36, 3012–3014 (2011).
A. J. Maker and A. M. Armani, “Low loss silica on silicon waveguides,” Opt. Lett.36, 3729–3731 (2011).
J. F. Bauters, M. J. R. Heck, D. D. John, J. S. Barton, C. M. Bruinink, A. Leinse, R. G. Heideman, D. J. Blumenthal, and J. E. Bowers, “Planar waveguides with less than 0.1 dB/m propagation loss fabricated with wafer bonding,” Opt. Express19, 24090–24101 (2011).
T. C. Hansuek Lee, J. Li, O. Painter, and K. J. Vahala, “Ultra-low-loss optical delay line on a silicon chip,” Nat. Commun.3, 1 (2012).
F. Ladouceur and E. Labeye, “A new general approach to optical waveguide path design,” J. Lightwave Technol.13, 481–492 (1995).
E. A. J. Marcatili, “Bends in optical dielectric guides,” Bell Syst. Tech. J.48, 2103–2132 (1969).
I. H. Malitson, “Interspecimen comparison of the refractive index of fused silica,” J. Opt. Soc. Am.55, 1205–1208 (1965).
D. Derickson, Fiber Optic Test and Measurement (Prentice Hall, 1997).
P. K. Tien, “Light waves in thin films and integrated optics,” Appl. Opt.10, 2395–2413 (1971).
A. Boskovic, S. V. Chernikov, J. R. Taylor, L. Gruner-Nielsen, and O. A. Levring, “Direct continuous-wave measurement of n2 in various types of telecommunication fiber at 1.55 mm,” Opt. Lett.21, 1966–1968 (1996).
K. Schmitt, B. Schirmer, C. Hoffmann, A. Brandenburg, and P. Meyrueis, “Interferometric biosensor based on planar optical waveguide sensor chips for label-free detection of surface bound bioreactions,” Biosens. Bioelectron.22, 2591–2597 (2007).
H. K. Hunt and A. M. Armani, “Label-free biological and chemical sensors,” Nanoscale2, 1544–1559 (2010).
A. L. Washburn and R. C. Bailey, “Photonics-on-a-chip: integrated waveguides as enabling detection elements for lab-on-a-chip biosensing applications,” Analyst (Lond.)136, 227–236 (2011).

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[1] C. Kopp, S. Bernabe, B. B. Bakir, J. Fedeli, R. Orobtchouk, F. Schrank, H. Porte, L. Zimmermann, and T. Tekin, “Silicon photonic circuits: On-CMOS integration, fiber optical coupling, and packaging,” IEEE J. Sel. Top. Quantum Electron.17, 498–509 (2011).

[2] A. Himeno, K. Kato, and T. Miya, “Silica-based planar lightwave circuits,” IEEE J. Sel. Top. Quantum Electron.4, 913–924 (1998).

[3] Y. Vlasov and S. McNab, “Losses in single-mode silicon-on-insulator strip waveguides and bends,” Opt. Express12, 1622–1631 (2004).

[4] J. F. Bauters, M. J. R. Heck, D. John, D. Dai, M.-C. Tien, J. S. Barton, A. Leinse, R. G. Heideman, D. J. Blumenthal, and J. E. Bowers, “Ultra-low-loss high-aspect-ratio Si3N4 waveguides,” Opt. Express19, 3163–3174 (2011).

[5] T. C. Sum, A. A. Bettiol, J. A. van Kan, F. Watt, E. Y. B. Pun, and K. K. Tung, “Proton beam writing of low-loss polymer optical waveguides,” Appl. Phys. Lett.83, 1707–1709 (2003).

[6] T. Miya, “Silica-based planar lightwave circuits: passive and thermally active devices,” IEEE J. Sel. Top. Quantum Electron.6, 38–45 (2000).

[7] G. L. Bona, R. Germann, and B. J. Offrein, “SiON high-refractive-index waveguide and planar lightwave circuits,” IBM J. Res. Develop.47, 239–249 (2003).

[8] X. Zhang and A. M. Armani, “Suspended bridge-like silica 2x2 beam splitter on silicon,” Opt. Lett.36, 3012–3014 (2011).

[9] A. J. Maker and A. M. Armani, “Low loss silica on silicon waveguides,” Opt. Lett.36, 3729–3731 (2011).

[10] J. F. Bauters, M. J. R. Heck, D. D. John, J. S. Barton, C. M. Bruinink, A. Leinse, R. G. Heideman, D. J. Blumenthal, and J. E. Bowers, “Planar waveguides with less than 0.1 dB/m propagation loss fabricated with wafer bonding,” Opt. Express19, 24090–24101 (2011).

[11] T. C. Hansuek Lee, J. Li, O. Painter, and K. J. Vahala, “Ultra-low-loss optical delay line on a silicon chip,” Nat. Commun.3, 1 (2012).

[12] F. Ladouceur and E. Labeye, “A new general approach to optical waveguide path design,” J. Lightwave Technol.13, 481–492 (1995).

[13] E. A. J. Marcatili, “Bends in optical dielectric guides,” Bell Syst. Tech. J.48, 2103–2132 (1969).

[14] I. H. Malitson, “Interspecimen comparison of the refractive index of fused silica,” J. Opt. Soc. Am.55, 1205–1208 (1965).

[15] D. Derickson, Fiber Optic Test and Measurement (Prentice Hall, 1997).

[16] P. K. Tien, “Light waves in thin films and integrated optics,” Appl. Opt.10, 2395–2413 (1971).

[17] A. Boskovic, S. V. Chernikov, J. R. Taylor, L. Gruner-Nielsen, and O. A. Levring, “Direct continuous-wave measurement of n2 in various types of telecommunication fiber at 1.55 mm,” Opt. Lett.21, 1966–1968 (1996).

[18] K. Schmitt, B. Schirmer, C. Hoffmann, A. Brandenburg, and P. Meyrueis, “Interferometric biosensor based on planar optical waveguide sensor chips for label-free detection of surface bound bioreactions,” Biosens. Bioelectron.22, 2591–2597 (2007).

[19] H. K. Hunt and A. M. Armani, “Label-free biological and chemical sensors,” Nanoscale2, 1544–1559 (2010).

[20] A. L. Washburn and R. C. Bailey, “Photonics-on-a-chip: integrated waveguides as enabling detection elements for lab-on-a-chip biosensing applications,” Analyst (Lond.)136, 227–236 (2011).

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Serpentine low loss trapezoidal silica waveguides on silicon