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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 20, Iss. 20 — Sep. 24, 2012
  • pp: 22298–22307

Serpentine low loss trapezoidal silica waveguides on silicon

Xiaomin Zhang, Mark Harrison, Audrey Harker, and Andrea M. Armani  »View Author Affiliations

Optics Express, Vol. 20, Issue 20, pp. 22298-22307 (2012)

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We report the fabrication and characterization of straight and serpentine low loss trapezoidal silica waveguides integrated on a silicon substrate. The waveguide channel was defined using a dual photo-lithography and buffered HF etching and isolated from the silicon substrate using an isotropic silicon etchant. The waveguide is air-clad and thus has a core-cladding effective index contrast of approximately 25%. Measured at 658, 980 and 1550nm, the propagation loss was found to be 0.69, 0.59, and 0.41dB/cm respectively, with a critical bending radius less than 375μm. The waveguide’s polarization behavior was investigated both theoretically and experimentally. Additionally, the output power shows a linear response with input power up to 200mW.

© 2012 OSA

OCIS Codes
(130.2790) Integrated optics : Guided waves
(130.3120) Integrated optics : Integrated optics devices

ToC Category:
Integrated Optics

Original Manuscript: July 26, 2012
Revised Manuscript: August 21, 2012
Manuscript Accepted: September 12, 2012
Published: September 14, 2012

Xiaomin Zhang, Mark Harrison, Audrey Harker, and Andrea M. Armani, "Serpentine low loss trapezoidal silica waveguides on silicon," Opt. Express 20, 22298-22307 (2012)

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