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Enhanced photoluminescence and electroluminescence of multilayer GeSi islands on Si(001) substrates by phosphorus-dopingZhi Liu, Weixuan Hu, Shaojian Su, Chong Li, Chuanbo Li, Chunlai Xue, Yaming Li, Yuhua Zuo, Buwen Cheng, and Qiming Wang »View Author Affiliations
Zhi Liu,
Weixuan Hu,
Shaojian Su,
Chong Li,
Chuanbo Li,
Chunlai Xue,
Yaming Li,
Yuhua Zuo,
Buwen Cheng,*
and Qiming Wang
State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences,Beijing 100083, China *Corresponding author: cbw@red.semi.ac.cn |
Optics Express, Vol. 20, Issue 20, pp. 22327-22333 (2012)
http://dx.doi.org/10.1364/OE.20.022327
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Abstract
Ge/Si heterojunction light emitting diodes with 20-bilayers undoped or phosphorus in situ doped GeSi islands were fabricated on n+-Si(001) substrates by ultrahigh vacuum chemical vapor deposition (UHV-CVD). Enhanced room temperature photoluminescence (PL) and electroluminescence (EL) around 1.5 μm were observed from the devices with phosphorus-doped GeSi islands. Theoretical calculations indicated that the emission is from the radiative recombination in GeSi islands. The intensity enhancement of PL and EL is attributed to the sufficient supply of electrons in active layer for radiative recombination.
© 2012 OSA
OCIS Codes
(230.3670) Optical devices : Light-emitting diodes
(250.5590) Optoelectronics : Quantum-well, -wire and -dot devices
ToC Category:
Optical Devices
History
Original Manuscript: June 21, 2012
Revised Manuscript: September 5, 2012
Manuscript Accepted: September 6, 2012
Published: September 14, 2012
Citation
Zhi Liu, Weixuan Hu, Shaojian Su, Chong Li, Chuanbo Li, Chunlai Xue, Yaming Li, Yuhua Zuo, Buwen Cheng, and Qiming Wang, "Enhanced photoluminescence and electroluminescence of multilayer GeSi islands on Si(001) substrates by phosphorus-doping," Opt. Express 20, 22327-22333 (2012)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-20-20-22327
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References
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- W. H. Shi, C. B. Li, L. P. Luo, B. W. Cheng, and Q. M. Wang, “Growth of Ge quantum dot mediated by boron on Ge wetting layer,” J. Cryst. Growth 279(3-4), 329–334 (2005). [CrossRef]
- B. Cho, J. Bareno, I. Petrov, and J. E. Greene, “Enhanced Ge/Si(001) island areal density and self-organization due to P predeposition,” J. Appl. Phys. 109(9), 093526–093528 (2011). [CrossRef]
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- M. W. Dashiell, U. Denker, C. Muller, G. Costantini, C. Manzano, K. Kern, and O. G. Schmidt, “Photoluminescence of ultrasmall Ge quantum dots grown by molecular-beam epitaxy at low temperatures,” Appl. Phys. Lett. 80(7), 1279–1281 (2002). [CrossRef]
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- S. Das, K. Das, R. K. Singha, S. Manna, A. Dhar, S. K. Ray, and A. K. Raychaudhuri, “Improved infrared photoluminescence characteristics from circularly ordered self-assembled Ge islands,” Nanoscale Res. Lett. 6(1), 416 (2011). [CrossRef] [PubMed]
- S. Das, K. Das, R. K. Singha, S. Manna, A. Dhar, S. K. Ray, and A. K. Raychaudhuri, “Improved infrared photoluminescence characteristics from circularly ordered self-assembled Ge islands,” Nanoscale Res. Lett. 6(1), 416 (2011). [CrossRef] [PubMed]
- M. W. Dashiell, U. Denker, C. Muller, G. Costantini, C. Manzano, K. Kern, and O. G. Schmidt, “Photoluminescence of ultrasmall Ge quantum dots grown by molecular-beam epitaxy at low temperatures,” Appl. Phys. Lett. 80(7), 1279–1281 (2002). [CrossRef]
- M. El Kurdi, S. David, P. Boucaud, C. Kammerer, X. Li, V. Le Thanh, S. Sauvage, and J. M. Lourtioz, “Strong 1.3–1.5 ?m luminescence from Ge/Si self-assembled islands in highly confining microcavities on silicon on insulator,” J. Appl. Phys. 96(2), 997–1000 (2004). [CrossRef]
- M. W. Dashiell, U. Denker, C. Muller, G. Costantini, C. Manzano, K. Kern, and O. G. Schmidt, “Photoluminescence of ultrasmall Ge quantum dots grown by molecular-beam epitaxy at low temperatures,” Appl. Phys. Lett. 80(7), 1279–1281 (2002). [CrossRef]
- S. Das, K. Das, R. K. Singha, S. Manna, A. Dhar, S. K. Ray, and A. K. Raychaudhuri, “Improved infrared photoluminescence characteristics from circularly ordered self-assembled Ge islands,” Nanoscale Res. Lett. 6(1), 416 (2011). [CrossRef] [PubMed]
- M. Shaleev, A. Novikov, N. Baydakova, A. Yablonskiy, O. Kuznetsov, Y. Drozdov, D. Lobanov, and Z. Krasilnik, “Narrow photoluminescence peak from Ge(Si) islands embedded between tensile-strained Si layers,” Phys. Status Solidi C, 1055–1059 (2011).
- Y. N. Drozdov, Z. F. Krasilnik, K. E. Kudryavtsev, D. N. Lobanov, A. V. Novikov, M. V. Shaleev, D. V. Shengurov, V. B. Shmagin, and A. N. Yablonskiy, “Comparative analysis of photo- and electroluminescence of multilayer structures with Ge(Si)/Si(001) self-assembled islands,” Thin Solid Films 517(1), 398–400 (2008). [CrossRef]
- K. Drozdowicz-Tomsia, E. M. Goldys, L. Fu, and C. Jagadish, “Doping effect on dark currents in In0.5Ga0.5As/GaAs quantum dot infrared photodetectors grown by metal-organic chemical vapor deposition,” Appl. Phys. Lett. 89(11), 113510 (2006). [CrossRef]
- V. A. Volodin, A. I. Yakimov, A. V. Dvurechenskii, M. D. Efremov, A. I. Nikiforov, E. I. Gatskevich, G. D. Ivlev, and G. Y. Mikhalev, “Modification of quantum dots in Ge/Si nanostructures by pulsed laser irradiation,” Semiconductors 40(2), 202–209 (2006). [CrossRef]
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- M. El Kurdi, S. David, P. Boucaud, C. Kammerer, X. Li, V. Le Thanh, S. Sauvage, and J. M. Lourtioz, “Strong 1.3–1.5 ?m luminescence from Ge/Si self-assembled islands in highly confining microcavities on silicon on insulator,” J. Appl. Phys. 96(2), 997–1000 (2004). [CrossRef]
- K. Drozdowicz-Tomsia, E. M. Goldys, L. Fu, and C. Jagadish, “Doping effect on dark currents in In0.5Ga0.5As/GaAs quantum dot infrared photodetectors grown by metal-organic chemical vapor deposition,” Appl. Phys. Lett. 89(11), 113510 (2006). [CrossRef]
- S. Fukatsu, H. Sunamura, Y. Shiraki, and S. Komiyama, “Phononless radiative recombination of indirect excitons in a Si/Ge type-II quantum dot,” Appl. Phys. Lett. 71(2), 258–260 (1997). [CrossRef]
- M. A. Green, J. Zhao, A. Wang, P. J. Reece, and M. Gal, “Efficient silicon light-emitting diodes,” Nature 412(6849), 805–808 (2001). [CrossRef] [PubMed]
- V. A. Volodin, A. I. Yakimov, A. V. Dvurechenskii, M. D. Efremov, A. I. Nikiforov, E. I. Gatskevich, G. D. Ivlev, and G. Y. Mikhalev, “Modification of quantum dots in Ge/Si nanostructures by pulsed laser irradiation,” Semiconductors 40(2), 202–209 (2006). [CrossRef]
- K. Drozdowicz-Tomsia, E. M. Goldys, L. Fu, and C. Jagadish, “Doping effect on dark currents in In0.5Ga0.5As/GaAs quantum dot infrared photodetectors grown by metal-organic chemical vapor deposition,” Appl. Phys. Lett. 89(11), 113510 (2006). [CrossRef]
- M. A. Green, J. Zhao, A. Wang, P. J. Reece, and M. Gal, “Efficient silicon light-emitting diodes,” Nature 412(6849), 805–808 (2001). [CrossRef] [PubMed]
- B. Cho, J. Bareno, I. Petrov, and J. E. Greene, “Enhanced Ge/Si(001) island areal density and self-organization due to P predeposition,” J. Appl. Phys. 109(9), 093526–093528 (2011). [CrossRef]
- M. Medu?a, O. Caha, M. Keplinger, J. Stangl, G. Bauer, G. Mussler, and D. Grützmacher, “Interdiffusion in Ge rich SiGe/Ge multilayers studied by in situ diffraction,” Phys. Status Solidi A 206(8), 1775–1779 (2009). [CrossRef]
- C. H. Lin, C. Y. Yu, P. S. Kuo, C. C. Chang, T. H. Guo, and C. W. Liu, “?-Doped MOS Ge/Si quantum dot/well infrared photodetector,” Thin Solid Films 508(1-2), 389–392 (2006). [CrossRef]
- M. L. W. Thewalt, D. A. Harrison, C. F. Reinhart, J. A. Wolk, and H. Lafontaine, “Type II band alignment in Si1-xGex/Si(001) quantum wells: The ubiquitous type I luminescence results from band bending,” Phys. Rev. Lett. 79(2), 269–272 (1997). [CrossRef]
- J. Stangl, V. Holy, and G. Bauer, “Structural properties of self-organized semiconductor nanostructures,” Rev. Mod. Phys. 76(3), 725–783 (2004). [CrossRef]
- Y. H. Peng, C. H. Hsu, C. H. Kuan, C. W. Liu, P. S. Chen, M. J. Tsai, and Y. W. Suen, “The evolution of electroluminescence in Ge quantum-dot diodes with the fold number,” Appl. Phys. Lett. 85(25), 6107–6109 (2004). [CrossRef]
- W. H. Chang, A. T. Chou, W. Y. Chen, H. S. Chang, T. M. Hsu, Z. Pei, P. S. Chen, S. W. Lee, L. S. Lai, S. C. Lu, and M. J. Tsai, “Room-temperature electroluminescence at 1.3 and 1.5 mu m from Ge/Si self-assembled quantum dots,” Appl. Phys. Lett. 83(14), 2958–2960 (2003). [CrossRef]
- Z. Liu, B. Cheng, W. Hu, S. Su, C. Li, and Q. Wang, “Enhanced photoluminescence of multilayer Ge quantum dots on Si(001) substrates by increased overgrowth temperature,” Nanoscale Res. Lett. 7(1), 383 (2012). [CrossRef] [PubMed]
- W. Hu, B. Cheng, C. Xue, H. Xue, S. Su, A. Bai, L. Luo, Y. Yu, and Q. Wang, “Electroluminescence from Ge on Si substrate at room temperature,” Appl. Phys. Lett. 95(9), 092102 (2009). [CrossRef]
- V. A. Volodin, A. I. Yakimov, A. V. Dvurechenskii, M. D. Efremov, A. I. Nikiforov, E. I. Gatskevich, G. D. Ivlev, and G. Y. Mikhalev, “Modification of quantum dots in Ge/Si nanostructures by pulsed laser irradiation,” Semiconductors 40(2), 202–209 (2006). [CrossRef]
- K. Drozdowicz-Tomsia, E. M. Goldys, L. Fu, and C. Jagadish, “Doping effect on dark currents in In0.5Ga0.5As/GaAs quantum dot infrared photodetectors grown by metal-organic chemical vapor deposition,” Appl. Phys. Lett. 89(11), 113510 (2006). [CrossRef]
- J. L. Liu, W. G. Wu, A. Balandin, G. L. Jin, and K. L. Wang, “Intersubband absorption in boron-doped multiple Ge quantum dots,” Appl. Phys. Lett. 74(2), 185–187 (1999). [CrossRef]
- M. El Kurdi, S. David, P. Boucaud, C. Kammerer, X. Li, V. Le Thanh, S. Sauvage, and J. M. Lourtioz, “Strong 1.3–1.5 ?m luminescence from Ge/Si self-assembled islands in highly confining microcavities on silicon on insulator,” J. Appl. Phys. 96(2), 997–1000 (2004). [CrossRef]
- M. Medu?a, O. Caha, M. Keplinger, J. Stangl, G. Bauer, G. Mussler, and D. Grützmacher, “Interdiffusion in Ge rich SiGe/Ge multilayers studied by in situ diffraction,” Phys. Status Solidi A 206(8), 1775–1779 (2009). [CrossRef]
- M. W. Dashiell, U. Denker, C. Muller, G. Costantini, C. Manzano, K. Kern, and O. G. Schmidt, “Photoluminescence of ultrasmall Ge quantum dots grown by molecular-beam epitaxy at low temperatures,” Appl. Phys. Lett. 80(7), 1279–1281 (2002). [CrossRef]
- S. Fukatsu, H. Sunamura, Y. Shiraki, and S. Komiyama, “Phononless radiative recombination of indirect excitons in a Si/Ge type-II quantum dot,” Appl. Phys. Lett. 71(2), 258–260 (1997). [CrossRef]
- M. Shaleev, A. Novikov, N. Baydakova, A. Yablonskiy, O. Kuznetsov, Y. Drozdov, D. Lobanov, and Z. Krasilnik, “Narrow photoluminescence peak from Ge(Si) islands embedded between tensile-strained Si layers,” Phys. Status Solidi C, 1055–1059 (2011).
- Y. N. Drozdov, Z. F. Krasilnik, K. E. Kudryavtsev, D. N. Lobanov, A. V. Novikov, M. V. Shaleev, D. V. Shengurov, V. B. Shmagin, and A. N. Yablonskiy, “Comparative analysis of photo- and electroluminescence of multilayer structures with Ge(Si)/Si(001) self-assembled islands,” Thin Solid Films 517(1), 398–400 (2008). [CrossRef]
- Y. H. Peng, C. H. Hsu, C. H. Kuan, C. W. Liu, P. S. Chen, M. J. Tsai, and Y. W. Suen, “The evolution of electroluminescence in Ge quantum-dot diodes with the fold number,” Appl. Phys. Lett. 85(25), 6107–6109 (2004). [CrossRef]
- Y. N. Drozdov, Z. F. Krasilnik, K. E. Kudryavtsev, D. N. Lobanov, A. V. Novikov, M. V. Shaleev, D. V. Shengurov, V. B. Shmagin, and A. N. Yablonskiy, “Comparative analysis of photo- and electroluminescence of multilayer structures with Ge(Si)/Si(001) self-assembled islands,” Thin Solid Films 517(1), 398–400 (2008). [CrossRef]
- C. H. Lin, C. Y. Yu, P. S. Kuo, C. C. Chang, T. H. Guo, and C. W. Liu, “?-Doped MOS Ge/Si quantum dot/well infrared photodetector,” Thin Solid Films 508(1-2), 389–392 (2006). [CrossRef]
- M. Shaleev, A. Novikov, N. Baydakova, A. Yablonskiy, O. Kuznetsov, Y. Drozdov, D. Lobanov, and Z. Krasilnik, “Narrow photoluminescence peak from Ge(Si) islands embedded between tensile-strained Si layers,” Phys. Status Solidi C, 1055–1059 (2011).
- M. L. W. Thewalt, D. A. Harrison, C. F. Reinhart, J. A. Wolk, and H. Lafontaine, “Type II band alignment in Si1-xGex/Si(001) quantum wells: The ubiquitous type I luminescence results from band bending,” Phys. Rev. Lett. 79(2), 269–272 (1997). [CrossRef]
- W. H. Chang, A. T. Chou, W. Y. Chen, H. S. Chang, T. M. Hsu, Z. Pei, P. S. Chen, S. W. Lee, L. S. Lai, S. C. Lu, and M. J. Tsai, “Room-temperature electroluminescence at 1.3 and 1.5 mu m from Ge/Si self-assembled quantum dots,” Appl. Phys. Lett. 83(14), 2958–2960 (2003). [CrossRef]
- M. El Kurdi, S. David, P. Boucaud, C. Kammerer, X. Li, V. Le Thanh, S. Sauvage, and J. M. Lourtioz, “Strong 1.3–1.5 ?m luminescence from Ge/Si self-assembled islands in highly confining microcavities on silicon on insulator,” J. Appl. Phys. 96(2), 997–1000 (2004). [CrossRef]
- X. C. Liu and D. R. Leadley, “Silicon-germanium interdiffusion in strained Ge/SiGe multiple quantum well structures,” J. Phys. D Appl. Phys. 43(50), 505303 (2010). [CrossRef]
- W. H. Chang, A. T. Chou, W. Y. Chen, H. S. Chang, T. M. Hsu, Z. Pei, P. S. Chen, S. W. Lee, L. S. Lai, S. C. Lu, and M. J. Tsai, “Room-temperature electroluminescence at 1.3 and 1.5 mu m from Ge/Si self-assembled quantum dots,” Appl. Phys. Lett. 83(14), 2958–2960 (2003). [CrossRef]
- Z. Liu, B. Cheng, W. Hu, S. Su, C. Li, and Q. Wang, “Enhanced photoluminescence of multilayer Ge quantum dots on Si(001) substrates by increased overgrowth temperature,” Nanoscale Res. Lett. 7(1), 383 (2012). [CrossRef] [PubMed]
- W. H. Shi, C. B. Li, L. P. Luo, B. W. Cheng, and Q. M. Wang, “Growth of Ge quantum dot mediated by boron on Ge wetting layer,” J. Cryst. Growth 279(3-4), 329–334 (2005). [CrossRef]
- M. El Kurdi, S. David, P. Boucaud, C. Kammerer, X. Li, V. Le Thanh, S. Sauvage, and J. M. Lourtioz, “Strong 1.3–1.5 ?m luminescence from Ge/Si self-assembled islands in highly confining microcavities on silicon on insulator,” J. Appl. Phys. 96(2), 997–1000 (2004). [CrossRef]
- C. H. Lin, C. Y. Yu, P. S. Kuo, C. C. Chang, T. H. Guo, and C. W. Liu, “?-Doped MOS Ge/Si quantum dot/well infrared photodetector,” Thin Solid Films 508(1-2), 389–392 (2006). [CrossRef]
- C. H. Lin, C. Y. Yu, P. S. Kuo, C. C. Chang, T. H. Guo, and C. W. Liu, “?-Doped MOS Ge/Si quantum dot/well infrared photodetector,” Thin Solid Films 508(1-2), 389–392 (2006). [CrossRef]
- Y. H. Peng, C. H. Hsu, C. H. Kuan, C. W. Liu, P. S. Chen, M. J. Tsai, and Y. W. Suen, “The evolution of electroluminescence in Ge quantum-dot diodes with the fold number,” Appl. Phys. Lett. 85(25), 6107–6109 (2004). [CrossRef]
- J. L. Liu, W. G. Wu, A. Balandin, G. L. Jin, and K. L. Wang, “Intersubband absorption in boron-doped multiple Ge quantum dots,” Appl. Phys. Lett. 74(2), 185–187 (1999). [CrossRef]
- X. C. Liu and D. R. Leadley, “Silicon-germanium interdiffusion in strained Ge/SiGe multiple quantum well structures,” J. Phys. D Appl. Phys. 43(50), 505303 (2010). [CrossRef]
- Z. Liu, B. Cheng, W. Hu, S. Su, C. Li, and Q. Wang, “Enhanced photoluminescence of multilayer Ge quantum dots on Si(001) substrates by increased overgrowth temperature,” Nanoscale Res. Lett. 7(1), 383 (2012). [CrossRef] [PubMed]
- M. Shaleev, A. Novikov, N. Baydakova, A. Yablonskiy, O. Kuznetsov, Y. Drozdov, D. Lobanov, and Z. Krasilnik, “Narrow photoluminescence peak from Ge(Si) islands embedded between tensile-strained Si layers,” Phys. Status Solidi C, 1055–1059 (2011).
- Y. N. Drozdov, Z. F. Krasilnik, K. E. Kudryavtsev, D. N. Lobanov, A. V. Novikov, M. V. Shaleev, D. V. Shengurov, V. B. Shmagin, and A. N. Yablonskiy, “Comparative analysis of photo- and electroluminescence of multilayer structures with Ge(Si)/Si(001) self-assembled islands,” Thin Solid Films 517(1), 398–400 (2008). [CrossRef]
- M. El Kurdi, S. David, P. Boucaud, C. Kammerer, X. Li, V. Le Thanh, S. Sauvage, and J. M. Lourtioz, “Strong 1.3–1.5 ?m luminescence from Ge/Si self-assembled islands in highly confining microcavities on silicon on insulator,” J. Appl. Phys. 96(2), 997–1000 (2004). [CrossRef]
- W. H. Chang, A. T. Chou, W. Y. Chen, H. S. Chang, T. M. Hsu, Z. Pei, P. S. Chen, S. W. Lee, L. S. Lai, S. C. Lu, and M. J. Tsai, “Room-temperature electroluminescence at 1.3 and 1.5 mu m from Ge/Si self-assembled quantum dots,” Appl. Phys. Lett. 83(14), 2958–2960 (2003). [CrossRef]
- W. Hu, B. Cheng, C. Xue, H. Xue, S. Su, A. Bai, L. Luo, Y. Yu, and Q. Wang, “Electroluminescence from Ge on Si substrate at room temperature,” Appl. Phys. Lett. 95(9), 092102 (2009). [CrossRef]
- W. H. Shi, C. B. Li, L. P. Luo, B. W. Cheng, and Q. M. Wang, “Growth of Ge quantum dot mediated by boron on Ge wetting layer,” J. Cryst. Growth 279(3-4), 329–334 (2005). [CrossRef]
- S. Das, K. Das, R. K. Singha, S. Manna, A. Dhar, S. K. Ray, and A. K. Raychaudhuri, “Improved infrared photoluminescence characteristics from circularly ordered self-assembled Ge islands,” Nanoscale Res. Lett. 6(1), 416 (2011). [CrossRef] [PubMed]
- M. W. Dashiell, U. Denker, C. Muller, G. Costantini, C. Manzano, K. Kern, and O. G. Schmidt, “Photoluminescence of ultrasmall Ge quantum dots grown by molecular-beam epitaxy at low temperatures,” Appl. Phys. Lett. 80(7), 1279–1281 (2002). [CrossRef]
- M. Medu?a, O. Caha, M. Keplinger, J. Stangl, G. Bauer, G. Mussler, and D. Grützmacher, “Interdiffusion in Ge rich SiGe/Ge multilayers studied by in situ diffraction,” Phys. Status Solidi A 206(8), 1775–1779 (2009). [CrossRef]
- V. A. Volodin, A. I. Yakimov, A. V. Dvurechenskii, M. D. Efremov, A. I. Nikiforov, E. I. Gatskevich, G. D. Ivlev, and G. Y. Mikhalev, “Modification of quantum dots in Ge/Si nanostructures by pulsed laser irradiation,” Semiconductors 40(2), 202–209 (2006). [CrossRef]
- P. M. Mooney, F. H. Dacol, J. C. Tsang, and J. O. Chu, “Raman scattering analysis of relaxed GexSi1?x alloy layers,” Appl. Phys. Lett. 62(17), 2069–2071 (1993). [CrossRef]
- M. W. Dashiell, U. Denker, C. Muller, G. Costantini, C. Manzano, K. Kern, and O. G. Schmidt, “Photoluminescence of ultrasmall Ge quantum dots grown by molecular-beam epitaxy at low temperatures,” Appl. Phys. Lett. 80(7), 1279–1281 (2002). [CrossRef]
- M. Medu?a, O. Caha, M. Keplinger, J. Stangl, G. Bauer, G. Mussler, and D. Grützmacher, “Interdiffusion in Ge rich SiGe/Ge multilayers studied by in situ diffraction,” Phys. Status Solidi A 206(8), 1775–1779 (2009). [CrossRef]
- V. A. Volodin, A. I. Yakimov, A. V. Dvurechenskii, M. D. Efremov, A. I. Nikiforov, E. I. Gatskevich, G. D. Ivlev, and G. Y. Mikhalev, “Modification of quantum dots in Ge/Si nanostructures by pulsed laser irradiation,” Semiconductors 40(2), 202–209 (2006). [CrossRef]
- M. Shaleev, A. Novikov, N. Baydakova, A. Yablonskiy, O. Kuznetsov, Y. Drozdov, D. Lobanov, and Z. Krasilnik, “Narrow photoluminescence peak from Ge(Si) islands embedded between tensile-strained Si layers,” Phys. Status Solidi C, 1055–1059 (2011).
- Y. N. Drozdov, Z. F. Krasilnik, K. E. Kudryavtsev, D. N. Lobanov, A. V. Novikov, M. V. Shaleev, D. V. Shengurov, V. B. Shmagin, and A. N. Yablonskiy, “Comparative analysis of photo- and electroluminescence of multilayer structures with Ge(Si)/Si(001) self-assembled islands,” Thin Solid Films 517(1), 398–400 (2008). [CrossRef]
- W. H. Chang, A. T. Chou, W. Y. Chen, H. S. Chang, T. M. Hsu, Z. Pei, P. S. Chen, S. W. Lee, L. S. Lai, S. C. Lu, and M. J. Tsai, “Room-temperature electroluminescence at 1.3 and 1.5 mu m from Ge/Si self-assembled quantum dots,” Appl. Phys. Lett. 83(14), 2958–2960 (2003). [CrossRef]
- Y. H. Peng, C. H. Hsu, C. H. Kuan, C. W. Liu, P. S. Chen, M. J. Tsai, and Y. W. Suen, “The evolution of electroluminescence in Ge quantum-dot diodes with the fold number,” Appl. Phys. Lett. 85(25), 6107–6109 (2004). [CrossRef]
- B. Cho, J. Bareno, I. Petrov, and J. E. Greene, “Enhanced Ge/Si(001) island areal density and self-organization due to P predeposition,” J. Appl. Phys. 109(9), 093526–093528 (2011). [CrossRef]
- S. Das, K. Das, R. K. Singha, S. Manna, A. Dhar, S. K. Ray, and A. K. Raychaudhuri, “Improved infrared photoluminescence characteristics from circularly ordered self-assembled Ge islands,” Nanoscale Res. Lett. 6(1), 416 (2011). [CrossRef] [PubMed]
- S. Das, K. Das, R. K. Singha, S. Manna, A. Dhar, S. K. Ray, and A. K. Raychaudhuri, “Improved infrared photoluminescence characteristics from circularly ordered self-assembled Ge islands,” Nanoscale Res. Lett. 6(1), 416 (2011). [CrossRef] [PubMed]
- M. A. Green, J. Zhao, A. Wang, P. J. Reece, and M. Gal, “Efficient silicon light-emitting diodes,” Nature 412(6849), 805–808 (2001). [CrossRef] [PubMed]
- M. L. W. Thewalt, D. A. Harrison, C. F. Reinhart, J. A. Wolk, and H. Lafontaine, “Type II band alignment in Si1-xGex/Si(001) quantum wells: The ubiquitous type I luminescence results from band bending,” Phys. Rev. Lett. 79(2), 269–272 (1997). [CrossRef]
- M. El Kurdi, S. David, P. Boucaud, C. Kammerer, X. Li, V. Le Thanh, S. Sauvage, and J. M. Lourtioz, “Strong 1.3–1.5 ?m luminescence from Ge/Si self-assembled islands in highly confining microcavities on silicon on insulator,” J. Appl. Phys. 96(2), 997–1000 (2004). [CrossRef]
- M. W. Dashiell, U. Denker, C. Muller, G. Costantini, C. Manzano, K. Kern, and O. G. Schmidt, “Photoluminescence of ultrasmall Ge quantum dots grown by molecular-beam epitaxy at low temperatures,” Appl. Phys. Lett. 80(7), 1279–1281 (2002). [CrossRef]
- M. Shaleev, A. Novikov, N. Baydakova, A. Yablonskiy, O. Kuznetsov, Y. Drozdov, D. Lobanov, and Z. Krasilnik, “Narrow photoluminescence peak from Ge(Si) islands embedded between tensile-strained Si layers,” Phys. Status Solidi C, 1055–1059 (2011).
- Y. N. Drozdov, Z. F. Krasilnik, K. E. Kudryavtsev, D. N. Lobanov, A. V. Novikov, M. V. Shaleev, D. V. Shengurov, V. B. Shmagin, and A. N. Yablonskiy, “Comparative analysis of photo- and electroluminescence of multilayer structures with Ge(Si)/Si(001) self-assembled islands,” Thin Solid Films 517(1), 398–400 (2008). [CrossRef]
- Y. N. Drozdov, Z. F. Krasilnik, K. E. Kudryavtsev, D. N. Lobanov, A. V. Novikov, M. V. Shaleev, D. V. Shengurov, V. B. Shmagin, and A. N. Yablonskiy, “Comparative analysis of photo- and electroluminescence of multilayer structures with Ge(Si)/Si(001) self-assembled islands,” Thin Solid Films 517(1), 398–400 (2008). [CrossRef]
- W. H. Shi, C. B. Li, L. P. Luo, B. W. Cheng, and Q. M. Wang, “Growth of Ge quantum dot mediated by boron on Ge wetting layer,” J. Cryst. Growth 279(3-4), 329–334 (2005). [CrossRef]
- J. Xia, Y. Takeda, N. Usami, T. Maruizumi, and Y. Shiraki, “Room-temperature electroluminescence from Si microdisks with Ge quantum dots,” Opt. Express 18(13), 13945–13950 (2010). [CrossRef] [PubMed]
- S. Fukatsu, H. Sunamura, Y. Shiraki, and S. Komiyama, “Phononless radiative recombination of indirect excitons in a Si/Ge type-II quantum dot,” Appl. Phys. Lett. 71(2), 258–260 (1997). [CrossRef]
- Y. N. Drozdov, Z. F. Krasilnik, K. E. Kudryavtsev, D. N. Lobanov, A. V. Novikov, M. V. Shaleev, D. V. Shengurov, V. B. Shmagin, and A. N. Yablonskiy, “Comparative analysis of photo- and electroluminescence of multilayer structures with Ge(Si)/Si(001) self-assembled islands,” Thin Solid Films 517(1), 398–400 (2008). [CrossRef]
- S. Das, K. Das, R. K. Singha, S. Manna, A. Dhar, S. K. Ray, and A. K. Raychaudhuri, “Improved infrared photoluminescence characteristics from circularly ordered self-assembled Ge islands,” Nanoscale Res. Lett. 6(1), 416 (2011). [CrossRef] [PubMed]
- M. Medu?a, O. Caha, M. Keplinger, J. Stangl, G. Bauer, G. Mussler, and D. Grützmacher, “Interdiffusion in Ge rich SiGe/Ge multilayers studied by in situ diffraction,” Phys. Status Solidi A 206(8), 1775–1779 (2009). [CrossRef]
- J. Stangl, V. Holy, and G. Bauer, “Structural properties of self-organized semiconductor nanostructures,” Rev. Mod. Phys. 76(3), 725–783 (2004). [CrossRef]
- Z. Liu, B. Cheng, W. Hu, S. Su, C. Li, and Q. Wang, “Enhanced photoluminescence of multilayer Ge quantum dots on Si(001) substrates by increased overgrowth temperature,” Nanoscale Res. Lett. 7(1), 383 (2012). [CrossRef] [PubMed]
- W. Hu, B. Cheng, C. Xue, H. Xue, S. Su, A. Bai, L. Luo, Y. Yu, and Q. Wang, “Electroluminescence from Ge on Si substrate at room temperature,” Appl. Phys. Lett. 95(9), 092102 (2009). [CrossRef]
- Y. H. Peng, C. H. Hsu, C. H. Kuan, C. W. Liu, P. S. Chen, M. J. Tsai, and Y. W. Suen, “The evolution of electroluminescence in Ge quantum-dot diodes with the fold number,” Appl. Phys. Lett. 85(25), 6107–6109 (2004). [CrossRef]
- S. Fukatsu, H. Sunamura, Y. Shiraki, and S. Komiyama, “Phononless radiative recombination of indirect excitons in a Si/Ge type-II quantum dot,” Appl. Phys. Lett. 71(2), 258–260 (1997). [CrossRef]
- M. L. W. Thewalt, D. A. Harrison, C. F. Reinhart, J. A. Wolk, and H. Lafontaine, “Type II band alignment in Si1-xGex/Si(001) quantum wells: The ubiquitous type I luminescence results from band bending,” Phys. Rev. Lett. 79(2), 269–272 (1997). [CrossRef]
- Y. H. Peng, C. H. Hsu, C. H. Kuan, C. W. Liu, P. S. Chen, M. J. Tsai, and Y. W. Suen, “The evolution of electroluminescence in Ge quantum-dot diodes with the fold number,” Appl. Phys. Lett. 85(25), 6107–6109 (2004). [CrossRef]
- W. H. Chang, A. T. Chou, W. Y. Chen, H. S. Chang, T. M. Hsu, Z. Pei, P. S. Chen, S. W. Lee, L. S. Lai, S. C. Lu, and M. J. Tsai, “Room-temperature electroluminescence at 1.3 and 1.5 mu m from Ge/Si self-assembled quantum dots,” Appl. Phys. Lett. 83(14), 2958–2960 (2003). [CrossRef]
- P. M. Mooney, F. H. Dacol, J. C. Tsang, and J. O. Chu, “Raman scattering analysis of relaxed GexSi1?x alloy layers,” Appl. Phys. Lett. 62(17), 2069–2071 (1993). [CrossRef]
- K. J. Vahala and C. E. Zah, “Effect of doping on the optical gain and the spontaneous noise enhancement factor in quantum well amplifiers and lasers studied by simple analytical expressions,” Appl. Phys. Lett. 52(23), 1945–1947 (1988). [CrossRef]
- V. A. Volodin, A. I. Yakimov, A. V. Dvurechenskii, M. D. Efremov, A. I. Nikiforov, E. I. Gatskevich, G. D. Ivlev, and G. Y. Mikhalev, “Modification of quantum dots in Ge/Si nanostructures by pulsed laser irradiation,” Semiconductors 40(2), 202–209 (2006). [CrossRef]
- M. A. Green, J. Zhao, A. Wang, P. J. Reece, and M. Gal, “Efficient silicon light-emitting diodes,” Nature 412(6849), 805–808 (2001). [CrossRef] [PubMed]
- J. L. Liu, W. G. Wu, A. Balandin, G. L. Jin, and K. L. Wang, “Intersubband absorption in boron-doped multiple Ge quantum dots,” Appl. Phys. Lett. 74(2), 185–187 (1999). [CrossRef]
- Z. Liu, B. Cheng, W. Hu, S. Su, C. Li, and Q. Wang, “Enhanced photoluminescence of multilayer Ge quantum dots on Si(001) substrates by increased overgrowth temperature,” Nanoscale Res. Lett. 7(1), 383 (2012). [CrossRef] [PubMed]
- W. Hu, B. Cheng, C. Xue, H. Xue, S. Su, A. Bai, L. Luo, Y. Yu, and Q. Wang, “Electroluminescence from Ge on Si substrate at room temperature,” Appl. Phys. Lett. 95(9), 092102 (2009). [CrossRef]
- W. H. Shi, C. B. Li, L. P. Luo, B. W. Cheng, and Q. M. Wang, “Growth of Ge quantum dot mediated by boron on Ge wetting layer,” J. Cryst. Growth 279(3-4), 329–334 (2005). [CrossRef]
- M. L. W. Thewalt, D. A. Harrison, C. F. Reinhart, J. A. Wolk, and H. Lafontaine, “Type II band alignment in Si1-xGex/Si(001) quantum wells: The ubiquitous type I luminescence results from band bending,” Phys. Rev. Lett. 79(2), 269–272 (1997). [CrossRef]
- J. L. Liu, W. G. Wu, A. Balandin, G. L. Jin, and K. L. Wang, “Intersubband absorption in boron-doped multiple Ge quantum dots,” Appl. Phys. Lett. 74(2), 185–187 (1999). [CrossRef]
- W. Hu, B. Cheng, C. Xue, H. Xue, S. Su, A. Bai, L. Luo, Y. Yu, and Q. Wang, “Electroluminescence from Ge on Si substrate at room temperature,” Appl. Phys. Lett. 95(9), 092102 (2009). [CrossRef]
- W. Hu, B. Cheng, C. Xue, H. Xue, S. Su, A. Bai, L. Luo, Y. Yu, and Q. Wang, “Electroluminescence from Ge on Si substrate at room temperature,” Appl. Phys. Lett. 95(9), 092102 (2009). [CrossRef]
- M. Shaleev, A. Novikov, N. Baydakova, A. Yablonskiy, O. Kuznetsov, Y. Drozdov, D. Lobanov, and Z. Krasilnik, “Narrow photoluminescence peak from Ge(Si) islands embedded between tensile-strained Si layers,” Phys. Status Solidi C, 1055–1059 (2011).
- Y. N. Drozdov, Z. F. Krasilnik, K. E. Kudryavtsev, D. N. Lobanov, A. V. Novikov, M. V. Shaleev, D. V. Shengurov, V. B. Shmagin, and A. N. Yablonskiy, “Comparative analysis of photo- and electroluminescence of multilayer structures with Ge(Si)/Si(001) self-assembled islands,” Thin Solid Films 517(1), 398–400 (2008). [CrossRef]
- V. A. Volodin, A. I. Yakimov, A. V. Dvurechenskii, M. D. Efremov, A. I. Nikiforov, E. I. Gatskevich, G. D. Ivlev, and G. Y. Mikhalev, “Modification of quantum dots in Ge/Si nanostructures by pulsed laser irradiation,” Semiconductors 40(2), 202–209 (2006). [CrossRef]
- C. H. Lin, C. Y. Yu, P. S. Kuo, C. C. Chang, T. H. Guo, and C. W. Liu, “?-Doped MOS Ge/Si quantum dot/well infrared photodetector,” Thin Solid Films 508(1-2), 389–392 (2006). [CrossRef]
- W. Hu, B. Cheng, C. Xue, H. Xue, S. Su, A. Bai, L. Luo, Y. Yu, and Q. Wang, “Electroluminescence from Ge on Si substrate at room temperature,” Appl. Phys. Lett. 95(9), 092102 (2009). [CrossRef]
- K. J. Vahala and C. E. Zah, “Effect of doping on the optical gain and the spontaneous noise enhancement factor in quantum well amplifiers and lasers studied by simple analytical expressions,” Appl. Phys. Lett. 52(23), 1945–1947 (1988). [CrossRef]
- M. A. Green, J. Zhao, A. Wang, P. J. Reece, and M. Gal, “Efficient silicon light-emitting diodes,” Nature 412(6849), 805–808 (2001). [CrossRef] [PubMed]
Appl. Phys. Lett.
- W. Hu, B. Cheng, C. Xue, H. Xue, S. Su, A. Bai, L. Luo, Y. Yu, and Q. Wang, “Electroluminescence from Ge on Si substrate at room temperature,” Appl. Phys. Lett. 95(9), 092102 (2009). [CrossRef]
- J. L. Liu, W. G. Wu, A. Balandin, G. L. Jin, and K. L. Wang, “Intersubband absorption in boron-doped multiple Ge quantum dots,” Appl. Phys. Lett. 74(2), 185–187 (1999). [CrossRef]
- W. H. Chang, A. T. Chou, W. Y. Chen, H. S. Chang, T. M. Hsu, Z. Pei, P. S. Chen, S. W. Lee, L. S. Lai, S. C. Lu, and M. J. Tsai, “Room-temperature electroluminescence at 1.3 and 1.5 mu m from Ge/Si self-assembled quantum dots,” Appl. Phys. Lett. 83(14), 2958–2960 (2003). [CrossRef]
- S. Fukatsu, H. Sunamura, Y. Shiraki, and S. Komiyama, “Phononless radiative recombination of indirect excitons in a Si/Ge type-II quantum dot,” Appl. Phys. Lett. 71(2), 258–260 (1997). [CrossRef]
- K. J. Vahala and C. E. Zah, “Effect of doping on the optical gain and the spontaneous noise enhancement factor in quantum well amplifiers and lasers studied by simple analytical expressions,” Appl. Phys. Lett. 52(23), 1945–1947 (1988). [CrossRef]
- Y. H. Peng, C. H. Hsu, C. H. Kuan, C. W. Liu, P. S. Chen, M. J. Tsai, and Y. W. Suen, “The evolution of electroluminescence in Ge quantum-dot diodes with the fold number,” Appl. Phys. Lett. 85(25), 6107–6109 (2004). [CrossRef]
- M. W. Dashiell, U. Denker, C. Muller, G. Costantini, C. Manzano, K. Kern, and O. G. Schmidt, “Photoluminescence of ultrasmall Ge quantum dots grown by molecular-beam epitaxy at low temperatures,” Appl. Phys. Lett. 80(7), 1279–1281 (2002). [CrossRef]
- P. M. Mooney, F. H. Dacol, J. C. Tsang, and J. O. Chu, “Raman scattering analysis of relaxed GexSi1?x alloy layers,” Appl. Phys. Lett. 62(17), 2069–2071 (1993). [CrossRef]
- K. Drozdowicz-Tomsia, E. M. Goldys, L. Fu, and C. Jagadish, “Doping effect on dark currents in In0.5Ga0.5As/GaAs quantum dot infrared photodetectors grown by metal-organic chemical vapor deposition,” Appl. Phys. Lett. 89(11), 113510 (2006). [CrossRef]
J. Appl. Phys.
- B. Cho, J. Bareno, I. Petrov, and J. E. Greene, “Enhanced Ge/Si(001) island areal density and self-organization due to P predeposition,” J. Appl. Phys. 109(9), 093526–093528 (2011). [CrossRef]
- M. El Kurdi, S. David, P. Boucaud, C. Kammerer, X. Li, V. Le Thanh, S. Sauvage, and J. M. Lourtioz, “Strong 1.3–1.5 ?m luminescence from Ge/Si self-assembled islands in highly confining microcavities on silicon on insulator,” J. Appl. Phys. 96(2), 997–1000 (2004). [CrossRef]
J. Cryst. Growth
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Nature
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Phys. Status Solidi A
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