OSA's Digital Library

Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 20, Iss. 20 — Sep. 24, 2012
  • pp: 22735–22742

Self-aligned silicon fins in metallic slits as a platform for planar wavelength-selective nanoscale resonant photodetectors

Krishna C. Balram and David A. B. Miller  »View Author Affiliations


Optics Express, Vol. 20, Issue 20, pp. 22735-22742 (2012)
http://dx.doi.org/10.1364/OE.20.022735


View Full Text Article

Enhanced HTML    Acrobat PDF (2130 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

We propose and demonstrate a novel nanoscale resonant metal-semiconductor-metal (MSM) photodetector structure based on silicon fins self-aligned to metallic slits. This geometry allows the center wavelength of the photodetector’s spectral response to be controlled by the silicon fin width, allowing multiple detectors, each sensitive to a different wavelength, to be fabricated in a single-step process. In addition, the detectors are highly efficient with simulations showing ~67% of the light (λ = 800 nm) incident on the silicon fin being absorbed in a region of thickness ~170 nm whereas the absorption length at the same wavelength is ~10 µm. This approach is promising for the development of multispectral imaging sensors and low-capacitance photodetectors for short-range optical interconnects.

© 2012 OSA

OCIS Codes
(200.4650) Optics in computing : Optical interconnects
(230.5160) Optical devices : Photodetectors
(300.0300) Spectroscopy : Spectroscopy
(110.4234) Imaging systems : Multispectral and hyperspectral imaging
(350.4238) Other areas of optics : Nanophotonics and photonic crystals
(250.5403) Optoelectronics : Plasmonics
(070.5753) Fourier optics and signal processing : Resonators

ToC Category:
Detectors

History
Original Manuscript: July 19, 2012
Revised Manuscript: September 10, 2012
Manuscript Accepted: September 13, 2012
Published: September 19, 2012

Citation
Krishna C. Balram and David A. B. Miller, "Self-aligned silicon fins in metallic slits as a platform for planar wavelength-selective nanoscale resonant photodetectors," Opt. Express 20, 22735-22742 (2012)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-20-20-22735


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. G. Themelis, J. S. Yoo, and V. Ntziachristos, “Multispectral imaging using multiple-bandpass filters,” Opt. Lett.33(9), 1023–1025 (2008). [CrossRef] [PubMed]
  2. A. F. H. Goetz, G. Vane, J. E. Solomon, and B. N. Rock, “Imaging spectrometry for earth remote sensing,” Science228(4704), 1147–1153 (1985). [CrossRef] [PubMed]
  3. R. M. Levenson and J. R. Mansfield, “Multispectral imaging in biology and medicine: slices of life,” Cytometry A69A(8), 748–758 (2006). [CrossRef] [PubMed]
  4. G. Minas, R. F. Wolffenbuttel, and J. H. Correia, “A lab-on-a-chip for spectrophotometric analysis of biological fluids,” Lab Chip5(11), 1303–1309 (2005). [CrossRef] [PubMed]
  5. T. Ishi, J. Fujikata, K. Makita, T. Baba, and K. Ohashi, “Si nano-photodiode with a surface plasmon antenna,” Jpn. J. Appl. Phys.44(12), L364–L366 (2005). [CrossRef]
  6. L. Tang, S. E. Kocabas, S. Latif, A. K. Okyay, D.-S. Ly-Gagnon, K. C. Saraswat, and D. A. B. Miller, “Nanometre-scale germanium photodetector enhanced by a near-infrared dipole antenna,” Nat. Photonics2(4), 226–229 (2008). [CrossRef]
  7. D.-S. Ly-Gagnon, K. C. Balram, J. S. White, P. Wahl, M. L. Brongersma, and D. A. B. Miller, “Routing and photodetection in subwavelength plasmonic slot waveguides,” Nanophotonics1, 9–16 (2012).
  8. T. Tanemura, K. C. Balram, D.-S. Ly-Gagnon, P. Wahl, J. S. White, M. L. Brongersma, and D. A. B. Miller, “Multiple-wavelength focusing of surface plasmons with a nonperiodic nanoslit coupler,” Nano Lett.11(7), 2693–2698 (2011). [CrossRef] [PubMed]
  9. E. Laux, C. Genet, T. Skauli, and T. W. Ebbesen, “Plasmonic photon sorters for spectral and polarimetric imaging,” Nat. Photonics2(3), 161–164 (2008). [CrossRef]
  10. S. Y. Chou and M. Y. Liu, “Nanoscale tera-hertz metal-semiconductor-metal photodetectors,” IEEE JQE28(10), 2358–2368 (1992). [CrossRef]
  11. P. Neutens, P. Van Dorpe, I. De Vlaminck, L. Lagae, and G. Borghs, “Electrical detection of confined gap plasmons in metal–insulator–metal waveguides,” Nat. Photonics3(5), 283–286 (2009). [CrossRef]
  12. R. J. Walters, R. V. A. van Loon, I. Brunets, J. Schmitz, and A. Polman, “A silicon-based electrical source of surface plasmon polaritons,” Nat. Mater.9(1), 21–25 (2010). [CrossRef] [PubMed]
  13. D. Hisamoto, W.-C. Lee, J. Kedzierski, H. Takeuchi, K. Asano, C. Kuo, E. Anderson, T.-J. King, J. Bokor, and C. Hu, “FinFET-a self-aligned double-gate MOSFET scalable to 20 nm,” IEEE TED47(12), 2320–2325 (2000). [CrossRef]
  14. D. A. B. Miller, “Device requirements for optical interconnects to silicon chips,” Proc. IEEE97(7), 1166–1185 (2009). [CrossRef]
  15. J. H. Correia, G. de Graaf, S. H. Kong, M. Bartek, and R. F. Wolffenbuttel, “Single-chip CMOS optical microspectrometer,” Sens. and Act. A82(1-3), 191–197 (2000). [CrossRef]
  16. S. S. Wang and R. Magnusson, “Theory and applications of guided-mode resonance filters,” Appl. Opt.32(14), 2606–2613 (1993). [CrossRef] [PubMed]
  17. S. Johnson, S. Fan, P. Villeneuve, J. Joannopoulos, and L. Kolodziejski, “Guided modes in photonic crystal slabs,” Phys. Rev. B60(8), 5751–5758 (1999). [CrossRef]
  18. L. Cao, J. S. White, J.-S. Park, J. A. Schuller, B. M. Clemens, and M. L. Brongersma, “Engineering light absorption in semiconductor nanowire devices,” Nat. Mater.8(8), 643–647 (2009). [CrossRef] [PubMed]
  19. J. S. White, G. Veronis, Z. Yu, E. S. Barnard, A. Chandran, S. Fan, and M. L. Brongersma, “Extraordinary optical absorption through subwavelength slits,” Opt. Lett.34(5), 686–688 (2009). [CrossRef] [PubMed]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited