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Novel approach to optical profiler with gradient focal point methods |
Optics Express, Vol. 20, Issue 21, pp. 23061-23073 (2012)
http://dx.doi.org/10.1364/OE.20.023061
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Abstract
Novel gradient focal point (GFP) methods by use of the gradient curvature cylindrical lens, the gradient thickness cylindrical lens and a tilted imaging sensor are proposed for the optical profiler. With the employed simple idea that the different divergence angle of an input beam to the lens generates the different focal position, the height information of one point can be obtained just in a single-shot by GFP approaches. The feasibility of the proposed system is demonstrated to be an alternative to optical profilers.
© 2012 OSA
OCIS Codes
(080.3620) Geometric optics : Lens system design
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(180.6900) Microscopy : Three-dimensional microscopy
ToC Category:
Instrumentation, Measurement, and Metrology
History
Original Manuscript: July 20, 2012
Revised Manuscript: August 28, 2012
Manuscript Accepted: September 13, 2012
Published: September 24, 2012
Citation
Henzeh Leeghim, MyoungKi Ahn, and Kwangsoo Kim, "Novel approach to optical profiler with gradient focal point methods," Opt. Express 20, 23061-23073 (2012)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-20-21-23061
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References
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