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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 20, Iss. 21 — Oct. 8, 2012
  • pp: 23088–23099

Concurrent polarization retrieval in multi-heterodyne scanning near-field optical microscopy: validation on silicon form-birefringent grating

L. Yu, T. Sfez, V. Paeder, P. Stenberg, W. Nakagawa, M. Kuittinen, and H. P. Herzig  »View Author Affiliations


Optics Express, Vol. 20, Issue 21, pp. 23088-23099 (2012)
http://dx.doi.org/10.1364/OE.20.023088


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Abstract

We demonstrate a concurrent polarization-retrieval algorithm based on a multi-heterodyne scanning near-field optical microscopy (MH-SNOM) measurement system. This method relies on calibration of the polarization properties of the MH-SNOM using an isotropic region of the sample in the vicinity of the nanostructures of interest. We experimentally show the effectiveness of the method on a silicon form-birefringent grating (FBG) with significant polarization diversity. Three spatial dimensional near-field measurements are in agreement with theoretical predictions obtained with rigorous coupled-wave analysis (RCWA). Pseudo-far-field measurements are performed to obtain the effective refractive index of the FBG, emphasizing the validity of the proposed method. This reconstruction algorithm makes the MH-SNOM a powerful tool to analyze concurrently the polarization-dependent near-field optical response of nanostructures with sub wavelength resolution as long as a calibration area is available in close proximity.

© 2012 OSA

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(110.5405) Imaging systems : Polarimetric imaging

ToC Category:
Microscopy

History
Original Manuscript: July 27, 2012
Revised Manuscript: September 17, 2012
Manuscript Accepted: September 18, 2012
Published: September 24, 2012

Citation
L. Yu, T. Sfez, V. Paeder, P. Stenberg, W. Nakagawa, M. Kuittinen, and H. P. Herzig, "Concurrent polarization retrieval in multi-heterodyne scanning near-field optical microscopy: validation on silicon form-birefringent grating," Opt. Express 20, 23088-23099 (2012)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-20-21-23088


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