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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 20, Iss. 21 — Oct. 8, 2012
  • pp: 23275–23280

Two-quadrant area structure function analysis for optical surface characterization

Liangyu He, Chris J. Evans, and Angela Davies  »View Author Affiliations

Optics Express, Vol. 20, Issue 21, pp. 23275-23280 (2012)

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This paper describes the use of the area structure function (SF) for the specification and characterization of optical surfaces. A two-quadrant area SF is introduced because the one-quadrant area SF does not completely describe surfaces with certain asymmetries. Area SF calculations of simulation data and of a diamond turned surface are shown and compared to area power spectral density (PSD) and area autocorrelation function (ACF) representations. The direct relationship between SF, PSD, and ACF for a stationary surface does not apply to non-stationary surfaces typical of optics with figure errors.

© 2012 OSA

OCIS Codes
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: June 26, 2012
Revised Manuscript: September 4, 2012
Manuscript Accepted: September 19, 2012
Published: September 25, 2012

Liangyu He, Chris J. Evans, and Angela Davies, "Two-quadrant area structure function analysis for optical surface characterization," Opt. Express 20, 23275-23280 (2012)

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