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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 20, Iss. 21 — Oct. 8, 2012
  • pp: 23790–23797

Optics InfoBase > Optics Express > Volume 20 > Issue 21 > Page 23790

Theoretical design of shadowing masks for uniform coatings on spherical substrates in planetary rotation systems

Cunding Liu, Mingdong Kong, Chun Guo, Weidong Gao, and Bincheng Li  »View Author Affiliations


Optics Express, Vol. 20, Issue 21, pp. 23790-23797 (2012)
http://dx.doi.org/10.1364/OE.20.023790


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Abstract

A straightforward theoretical routine is proposed to design shadowing masks which are used for preparing uniform coatings on flat as well as strongly curved spherical substrates with large diameters in planetary rotation system. By approximating a spherical substrate in planetary rotation to a corresponding flat substrate in simple rotation around the revolution axis, the initial shape of a shadowing mask is determined. The desired uniformity for the spherical substrate is further realized through expanding appropriately the arc length of the initial shadowing mask. Utilizing the shadowing masks designed with the theoretical routine, film uniformities better than 97% are experimentally achieved for large-diameter spherical substrates with ratios of clear aperture to radius of curvature range from approximately −1.0 to 1.3.

© 2012 OSA

OCIS Codes
(310.0310) Thin films : Thin films
(310.1860) Thin films : Deposition and fabrication
(310.6805) Thin films : Theory and design

ToC Category:
Thin Films

History
Original Manuscript: July 16, 2012
Revised Manuscript: September 16, 2012
Manuscript Accepted: September 21, 2012
Published: October 2, 2012

Citation
Cunding Liu, Mingdong Kong, Chun Guo, Weidong Gao, and Bincheng Li, "Theoretical design of shadowing masks for uniform coatings on spherical substrates in planetary rotation systems," Opt. Express 20, 23790-23797 (2012)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-20-21-23790


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References

  1. H. A. Macleod, Thin-film Optical Filters (Academic Press, New York, 2001).
  2. J. A. Dobrowolski and W. Weinstein, “Optical aspherizing by vacuum evaporation,” Nature175(4458), 646–647 (1955). [CrossRef]
  3. M. Gross, S. Dligatch, and A. Chtanov, “Optimization of coating uniformity in an ion beam sputtering system using a modified planetary rotation method,” Appl. Opt.50(9), C316–C320 (2011). [CrossRef] [PubMed]
  4. J. M. Bennett and E. J. Ashley, “Investigation of film thickness uniformity on substrates located close to the source axis,” Appl. Opt.12(4), 758–763 (1973). [CrossRef] [PubMed]
  5. J. Arkwright, I. Underhill, N. Pereira, and M. Gross, “Deterministic control of thin film thickness in physical vapor deposition systems using a multi-aperture mask,” Opt. Express13(7), 2731–2741 (2005). [CrossRef] [PubMed]
  6. B. Sassolas, R. Flaminio, J. Franc, C. Michel, J.-L. Montorio, N. Morgado, and L. Pinard, “Masking technique for coating thickness control on large and strongly curved aspherical optics,” Appl. Opt.48(19), 3760–3765 (2009). [CrossRef] [PubMed]
  7. B. Sassolas, Q. Benoît, R. Flaminio, D. Forest, J. Franc, M. Galimberti, A. Lacoudre, C. Michel, J. L. Montorio, N. Morgado, and L. Pinard, “Thickness uniformity improvement for the twin mirrors used in advanced gravitational wave detectors,” Proc. SPIE8168, 81681Q, 81681Q-8 (2011). [CrossRef]
  8. L. Abel-Tibérini, F. Lemarquis, and M. Lequime, “Masking mechanisms applied to thin-film coatings for the manufacturing of linear variable filters for two-dimensional array detectors,” Appl. Opt.47(30), 5706–5714 (2008). [CrossRef] [PubMed]
  9. F. Villa, A. Martínez, and L. E. Regalado, “Correction masks for thickness uniformity in large-area thin films,” Appl. Opt.39(10), 1602–1610 (2000). [CrossRef] [PubMed]
  10. C. C. Jaing, “Designs of masks in thickness uniformity,” Proc. SPIE7655, 76551Q, 76551Q-8 (2010). [CrossRef]
  11. J. B. Oliver and D. Talbot, “Optimization of deposition uniformity for large-aperture National Ignition Facility substrates in a planetary rotation system,” Appl. Opt.45(13), 3097–3105 (2006). [CrossRef] [PubMed]
  12. H. H. Bauer, M. Heller, and N. Kaiser, “Optical coatings for UV photolithography systems,” Proc. SPIE2776, 353–365 (1996). [CrossRef]
  13. P. Kelkar, B. Tirri, R. Wilklow, and D. Peterson, “Deposition and characterization of challenging DUV coatings,” Proc. SPIE7606, 706708, 706708-8 (2008). [CrossRef]
  14. L. Holland and W. Steckelmacher, “The distribution of thin films condensed on surfaces by the vacuum evaporation method,” Vacuum2(4), 346–364 (1952). [CrossRef]
  15. F. Villa and O. Pompa, “Emission pattern of real vapor sources in high vacuum: an overview,” Appl. Opt.38(4), 695–703 (1999). [CrossRef] [PubMed]

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