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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 20, Iss. 21 — Oct. 8, 2012
  • pp: 23790–23797

Theoretical design of shadowing masks for uniform coatings on spherical substrates in planetary rotation systems

Cunding Liu, Mingdong Kong, Chun Guo, Weidong Gao, and Bincheng Li  »View Author Affiliations

Optics Express, Vol. 20, Issue 21, pp. 23790-23797 (2012)

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A straightforward theoretical routine is proposed to design shadowing masks which are used for preparing uniform coatings on flat as well as strongly curved spherical substrates with large diameters in planetary rotation system. By approximating a spherical substrate in planetary rotation to a corresponding flat substrate in simple rotation around the revolution axis, the initial shape of a shadowing mask is determined. The desired uniformity for the spherical substrate is further realized through expanding appropriately the arc length of the initial shadowing mask. Utilizing the shadowing masks designed with the theoretical routine, film uniformities better than 97% are experimentally achieved for large-diameter spherical substrates with ratios of clear aperture to radius of curvature range from approximately −1.0 to 1.3.

© 2012 OSA

OCIS Codes
(310.0310) Thin films : Thin films
(310.1860) Thin films : Deposition and fabrication
(310.6805) Thin films : Theory and design

ToC Category:
Thin Films

Original Manuscript: July 16, 2012
Revised Manuscript: September 16, 2012
Manuscript Accepted: September 21, 2012
Published: October 2, 2012

Cunding Liu, Mingdong Kong, Chun Guo, Weidong Gao, and Bincheng Li, "Theoretical design of shadowing masks for uniform coatings on spherical substrates in planetary rotation systems," Opt. Express 20, 23790-23797 (2012)

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