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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 20, Iss. 21 — Oct. 8, 2012
  • pp: 23821–23831

Submicrometer-wide amorphous and polycrystalline anatase TiO2 waveguides for microphotonic devices

Jonathan D. B. Bradley, Christopher C. Evans, Jennifer T. Choy, Orad Reshef, Parag B. Deotare, François Parsy, Katherine C. Phillips, Marko Lončar, and Eric Mazur  »View Author Affiliations

Optics Express, Vol. 20, Issue 21, pp. 23821-23831 (2012)

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We demonstrate amorphous and polycrystalline anatase TiO2 thin films and submicrometer-wide waveguides with promising optical properties for microphotonic devices. We deposit both amorphous and polycrystalline anatase TiO2 using reactive sputtering and define waveguides using electron-beam lithography and reactive ion etching. For the amorphous TiO2, we obtain propagation losses of 0.12 ± 0.02 dB/mm at 633 nm and 0.04 ± 0.01 dB/mm at 1550 nm in thin films and 2.6 ± 0.5 dB/mm at 633 nm and 0.4 ± 0.2 dB/mm at 1550 nm in waveguides. Using single-mode amorphous TiO2 waveguides, we characterize microphotonic features including microbends and optical couplers. We show transmission of 780-nm light through microbends having radii down to 2 μm and variable signal splitting in microphotonic couplers with coupling lengths of 10 μm.

© 2012 OSA

OCIS Codes
(130.3120) Integrated optics : Integrated optics devices
(130.3130) Integrated optics : Integrated optics materials
(130.4310) Integrated optics : Nonlinear
(230.7370) Optical devices : Waveguides
(310.1860) Thin films : Deposition and fabrication
(310.6860) Thin films : Thin films, optical properties

ToC Category:
Integrated Optics

Original Manuscript: July 31, 2012
Revised Manuscript: September 21, 2012
Manuscript Accepted: September 22, 2012
Published: October 2, 2012

Jonathan D. B. Bradley, Christopher C. Evans, Jennifer T. Choy, Orad Reshef, Parag B. Deotare, François Parsy, Katherine C. Phillips, Marko Lončar, and Eric Mazur, "Submicrometer-wide amorphous and polycrystalline anatase TiO2 waveguides for microphotonic devices," Opt. Express 20, 23821-23831 (2012)

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