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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 20, Iss. 21 — Oct. 8, 2012
  • pp: 24018–24029

Triple-wavelength, narrowband Mg/SiC multilayers with corrosion barriers and high peak reflectance in the 25-80 nm wavelength region

Mónica Fernández-Perea, Regina Soufli, Jeff C. Robinson, Luis Rodríguez De Marcos, Jose A. Méndez, Juan I. Larruquert, and Eric M. Gullikson  »View Author Affiliations


Optics Express, Vol. 20, Issue 21, pp. 24018-24029 (2012)
http://dx.doi.org/10.1364/OE.20.024018


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Abstract

We have developed new, Mg/SiC multilayer coatings with corrosion barriers which can be used to efficiently and simultaneously reflect extreme ultraviolet (EUV) radiation in single or multiple narrow bands centered at wavelengths in the spectral region from 25 to 80 nm. Corrosion mitigation was attempted through the use of Al-Mg or Al thin layers. Three different multilayer design concepts were developed and deposited by magnetron sputtering and the reflectance was measured at near-normal incidence in a broad spectral range. Standard Mg/SiC multilayers were also deposited and measured for comparison. They were shown to efficiently reflect radiation at a wavelength of 76.9 nm with a peak reflectance of 40.6% at near-normal incidence, the highest experimental reflectance reported at this wavelength for a narrowband coating. The demonstration of multilayer coatings with corrosion resistance and multiple-wavelength EUV performance is of great interest in the development of mirrors for space-borne solar physics telescopes and other applications requiring long-lasting coatings with narrowband response in multiple emission lines across the EUV range.

© 2012 OSA

OCIS Codes
(230.4040) Optical devices : Mirrors
(260.7200) Physical optics : Ultraviolet, extreme
(310.1860) Thin films : Deposition and fabrication
(350.6090) Other areas of optics : Space optics
(310.4165) Thin films : Multilayer design

ToC Category:
Thin Films

History
Original Manuscript: August 16, 2012
Revised Manuscript: September 27, 2012
Manuscript Accepted: September 27, 2012
Published: October 5, 2012

Citation
Mónica Fernández-Perea, Regina Soufli, Jeff C. Robinson, Luis Rodríguez De Marcos, Jose A. Méndez, Juan I. Larruquert, and Eric M. Gullikson, "Triple-wavelength, narrowband Mg/SiC multilayers with corrosion barriers and high peak reflectance in the 25-80 nm wavelength region," Opt. Express 20, 24018-24029 (2012)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-20-21-24018


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